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A Novel Indirect Quasi-Static Actuation Concept for 2D MEMS Micromirrors

: Kaupmann, P.; Pinter, S.; Franz, J.; Streiter, R.; Otto, T.


Journal of Microelectromechanical Systems 28 (2019), Nr.2, S.226-234
ISSN: 1057-7157
ISSN: 1941-0158
Fraunhofer ENAS ()

We present a 2D MEMS raster scanning micromirror based on a novel actuation concept for the (quasi-)static axis. This is based on the distortion of the angular momentum generated by the primary resonant axis using a secondary oscillation. After introducing a model of the device dynamics using a rigid body approximation, several simulation studies are carried out to investigate the nonlinear dynamics of such a device. In the next step, a fully operational MEMS design is shown, that is actuated by piezoelectric as well as electromagnetic drive schemes. After manufacturing, we performed a series of experiments to obtain the characteristics of the resonant as well as the quasistatic axis, proving the viability of the proposed actuation concept.