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Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films

: Kurz, Nicolas; Parsapour, Fazel; Pashchenko, Vladimir; Kirste, Lutz; Lebedev, Vadim; Pascal, Nicolay; Muralt, Paul; Ambacher, Oliver


Institute of Electrical and Electronics Engineers -IEEE-:
IEEE International Ultrasonics Symposium, IUS 2018 : 22-25 October 2018, Kobe, Japan
Piscataway, NJ: IEEE, 2018
ISBN: 978-1-5386-3425-7
ISBN: 978-1-5386-3426-4
5 S.
International Ultrasonics Symposium (IUS) <2018, Kobe>
Fraunhofer IAF ()
piezoelectric material parameter; bar resonator; disk resonator; AlScN thin film

In this work, bar-and disk-shaped resonators were fabricated using Al0.84Sc0.16N thin film. Sensitivity analysis of the resonators' resonance frequencies with respect to the piezoelectric material parameters revealed that resonance analysis can be used for material parameter extraction. An optimization algorithm is employed to determine the piezoelectric material parameters sE11, sE12 , and d31 of Al0.84Sc0.16N from the length-and radial-extensional mode. Using the piezoelectric constitutive equations and combining the results obtained in this work with the results obtained in a previous work, the stress-charge form of elastic and piezoelectric parameters could be derived.