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Microoptoelectromechanical systems-based external cavity quantum cascade lasers for real-time spectroscopy

: Butschek, Lorenz; Hugger, Stefan; Jarvis, Jan-Philip; Härtelt, Marko; Merten, André; Schwarzenberg, Markus; Grahmann, Jan; Stothard, David; Warden, Matthew; Carson, Christoph; Macarthur, John; Fuchs, Frank; Ostendorf, Ralf; Wagner, Joachim

Volltext urn:nbn:de:0011-n-4705839 (5.5 MByte PDF)
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Erstellt am: 15.3.2018

Optical engineering 57 (2018), Nr.1, Art. 011010, 11 S.
ISSN: 0091-3286
ISSN: 0036-1860
ISSN: 1560-2303
European Commission EC
H2020; 645535; CHEQUERS
Compact High pErformance QUantum cascadE laseR Sensors
European Commission EC
FP7; 688265; MIRPHAB
MidInfraRed PHotonics devices fABrication for chemical sensing and spectroscopic applications
European Commission EC
Mid InfraRed Innovative lasers For Improved SENSor of hazardous substances
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IAF ()
Fraunhofer IPMS ()
quantum-cascade laser; microoptoelectromechanical system; external cavity laser; mid-IR spectroscopy; real-time spectroscopy

We report on mid-IR spectroscopic measurements performed with rapidly tunable external cavity quantum cascade lasers (EC-QCLs). Fast wavelength tuning in the external cavity is realized by a microoptoelectromechanical systems (MOEMS) grating oscillating at a resonance frequency of about 1 kHz with a deflection amplitude of up to 10 deg. The entire spectral range of the broadband QCL can therefore be covered in just 500  μs, paving the way for real-time spectroscopy in the mid-IR region. In addition to its use in spectroscopic measurements conducted in backscattering and transmission geometry, the MOEMS-based laser source is characterized regarding pulse intensity noise, wavelength reproducibility, and spectral resolution.