Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems

: Bonitz, J.; Böttger, S.; Herrmann, S.; Schulz, S.E.; Gessner, T.; Hartmann, S.; Wunderle, B.


Institute of Electrical and Electronics Engineers -IEEE-:
IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 : Matsushima Bay and Sendai MEMS City, Japan, 17-20 April, 2016
Piscataway, NJ: IEEE, 2016
ISBN: 978-1-5090-1948-9 (Print)
ISBN: 978-1-5090-1947-2
ISBN: 978-1-5090-1946-5
International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) <11, 2016, Matsushima Bay, Sendai>
Fraunhofer ENAS ()

In this paper we present a holistic wafer-level manufacturing process for nanoscopic sensor devices based on individualized single-wall carbon nanotubes (SWCNTs) integrated in MEMS. The fabrication technology is demonstrated in detail. Moreover, a first application in form of a MEMS test stage for SWCNT strain and reliability experiments is shown.