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Deposition of parylene C and characterization of its hermeticity for the encapsulation of MEMS and medical devices

: Selbmann, F.; Baum, M.; Wiemer, M.; Gessner, T.


Institute of Electrical and Electronics Engineers -IEEE-:
IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 : Matsushima Bay and Sendai MEMS City, Japan, 17-20 April, 2016
Piscataway, NJ: IEEE, 2016
ISBN: 978-1-5090-1948-9 (Print)
ISBN: 978-1-5090-1947-2
ISBN: 978-1-5090-1946-5
International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) <11, 2016, Matsushima Bay, Sendai>
Fraunhofer ENAS ()

Following the recent trend of miniaturization of MEMS and the approach to improve the comfort of medical implants for patients by reducing their size the polymer Parylene is a promising candidate for encapsulation issues. Parylene combines a number of excellent properties like biocompatibility/biostability, chemical inertness, transparency and low water permeability. Within the presented work the deposition characteristics and properties like conformity, permeability of water vapor, etc. are examined.