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A MEMS test stage for in situ testing of interfaces between carbon nanotubes and metals

: Hartmann, S.; Hermann, S.; Bonitz, J.; Heggen, M.; Schulz, S.E.; Gessner, T.; Wunderle, B.

Geßner, T. ; MESAGO Messe Frankfurt GmbH, Stuttgart:
Smart Systems Integration 2016. Proceedings : International Conference and Exhibition on Integration Issues of Miniaturized Systems; Munich, Germany, 9-10 March 2016, USB-Stick
Auerbach: Verlag Wissenschaftliche Scripten, 2016
ISBN: 978-3-95735-040-4
ISBN: 3-95735-040-9
Smart Systems Integration Conference (SSI) <2016, Munich>
International Conference and Exhibition on Integration Issues of Miniaturized Systems <10, 2016, Munich>
Fraunhofer ENAS ()

In this paper, we present results of a combined computational and experimental investigation on the mechanical behaviour of interfaces between carbon nanotubes (CNTs) and metals. For the mechanical tests, the chosen loading condition is a pull-out test. Results of maximum stresses calculated from molecular dynamics simulations and obtained from in situ scanning electron microscope experiments were found to be in very good agreement. However, we outline the requirement for an in situ experiment with atomic resolution to elucidate the mechanics of CNT-metal interfaces in more detail. To this purpose, we designed, fabricated and characterised an in situ silicon-based MEMS test stage with a thermal actuator for pull-out tests inside a transmission electron microscope. The presented results are of significant interest for the design of novel mechanical sensors utilizing the intrinsic piezoresistive effect of CNTs or other future devices incorporating CNT-metal interfaces.