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A new approach for 3D Integration based on printed multilayers and through polymer vias

: Roscher, F.; Saeidi, N.; Enderlein, T.; Selbmann, F.; Wiemer, M.; Gessner, T.

Geßner, T. ; MESAGO Messe Frankfurt GmbH, Stuttgart:
Smart Systems Integration 2016. Proceedings : International Conference and Exhibition on Integration Issues of Miniaturized Systems; Munich, Germany, 9-10 March 2016, USB-Stick
Auerbach: Verlag Wissenschaftliche Scripten, 2016
ISBN: 978-3-95735-040-4
ISBN: 3-95735-040-9
International Conference and Exhibition on Integration Issues of Miniaturized Systems <10, 2016, Munich>
Smart Systems Integration Conference (SSI) <2016, Munich>
Fraunhofer ENAS ()

Vertical and horizontal integration of components, different in shape, size, material, process and function, is a further step to miniaturize "smart" systems and combine their functionalities in one package. Many approaches have been taken toward this goal, offering solutions to replace the conventional wire-bonding integration method. These approaches include through silicon via (TSV), silicon interposer, redistribution layers (RDL) and component stacking on wafer level. When working with non-planar substrates (as opposed to the substrates used for semiconductor devices), these methods may not all be readily applicable. We introduce a new method for interconnection between multilayers of functional structures, formed on substrates with some level of 3D form factor. In the proposed method a polymer (Parylene) thin film is used as an insulation layer between the conductive multilayers and the interconnect vias are opened by a fine-tuned laser ablation process.