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A novel electrostatic micro-actuator class and its application potential for optical MEMS

: Schenk, Harald; Conrad, Holger; Gaudet, Matthieu; Uhlig, Sebastian; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Schimmanz, Klaus

Volltext urn:nbn:de:0011-n-4173814 (1.5 MByte PDF)
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Erstellt am: 22.10.2016

Institute of Electrical and Electronics Engineers -IEEE-; IEEE Photonics Society:
International Conference on Optical MEMS and Nanophotonics, OMN 2016. Proceedings : 31 July ‐ 04 August 2016, Singapore
Piscataway, NJ: IEEE, 2016
ISBN: 978-1-5090-1034-9 (USB)
ISBN: 978-1-5090-1036-3 (Print)
ISBN: 978-1-5090-1035-6 (Online)
Art. Tu3.11, 2 S.
International Conference on Optical MEMS and Nanophotonics (OMN) <21, 2016, Singapore>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IPMS ()

Electrostatic actuation is highly efficient at micro and nanoscale. However, due to pull-in instability large deflection requires large electrode separation and thus large driving voltages. We report on a novel electrostatic actuator class, which allows deflections in the μm-range based on electrode separations of a few 100 nm, only. Specifically designed and fabricated actuators allow for a large variety of motion patterns including out-of-plane and in-plane motion as well as membrane deformation. A CMOS compatible and RoHs compliant fabrication process enable straight-forward integration. The potential for actuator based Optical MEMS devices is discussed.