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Yet another tuning fork gyroscope

: Forke, R.; Hiller, K.; Hahn, S.; Konietzka, S.; Motl, T.; Köhler, D.; Heinz, S.; Billep, D.; Gessner, T.


Institute of Electrical and Electronics Engineers -IEEE-:
2nd IEEE International Symposium on Inertial Sensors and Systems, ISISS 2015. Proceedings : March 23-26, 2015, Hapuna Beach Prince Hotel, Hawaii, USA
Piscataway, NJ: IEEE, 2015
ISBN: 978-1-4799-5914-3
ISBN: 978-1-4799-5915-0
International Symposium on Inertial Sensors and Systems (ISISS) <2, 2015, Hapuna Beach/Hawaii>
Fraunhofer ENAS ()

This paper reports on the development of a micromechanical vibrating mass tuning fork gyroscope with coupled drive and sense modes. The mechanical structure has been designed to have a first anti-phase drive mode and a second anti-phase sense mode. The frequencies of all other modal modes are higher. The micromechanical structure is fabricated with a cavity SOI technology called BDRIE [1]. The analog ASIC for very low noise readout (< 50 nV/rtHz) is placed on the MEMS and is connected symmetrically with wire bonds. MEMS and ASIC have been co-designed to best fit physically and electrically to each other.