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Semiconductor equipment assessment - an enabler for production ready equipment

AEM - Advanced Equipment and Materials
: Pfeffer, M.; Pfitzner, L.; Bauer, A.


Institute of Electrical and Electronics Engineers -IEEE-; Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.; IEEE Electron Devices Society; IEEE Components, Packaging, and Manufacturing Technology Society:
26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015. Proceedings : 3-6 May 2015, Saratoga Springs, NY
Piscataway, NJ: IEEE, 2015
ISBN: 978-1-4799-9930-9
ISBN: 978-1-4799-9931-6
Advanced Semiconductor Manufacturing Conference (ASMC) <26, 2015, Saratoga Springs/NY>
Fraunhofer IISB ()

A detailed presentation of history, recent and current projects in the area of Semiconductor Equipment Assessment in Europe were presented. The topics and objectives of the ongoing equipment assessments within the SEA4KET framework were described. The importance on a horizontal and vertical collaboration in a global perspective was elaborated.