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The Factory Integration Roadmap in Semiconductor manufacturing

: Moyne, J.; Schellenberger, M.; Pfitzner, L.


Bez, R. ; Institute of Electrical and Electronics Engineers -IEEE-; IEEE Electron Devices Society:
44th European Solid State Device Research Conference, ESSDERC 2014. Proceedings : Venice, Italy, 22 - 26 September 2014
Piscataway, NJ: IEEE, 2014
ISBN: 978-1-4799-4375-3
ISBN: 978-1-4799-4378-4
ISBN: 978-1-4799-4376-0
European Solid State Device Research Conference (ESSDERC) <44, 2014, Venice>
Fraunhofer IISB ()

The International Technology Roadmap for Semiconductors (ITRS) is probably the single most important document governing the direction of the semiconductor manufacturing industry. The Factory Integration (FI) chapter seeks to define a roadmap for semiconductor factories and enterprise systems. This roadmap has gone through a significant revision over the past 2 years with a focus on commonality, integration, and data driven. New sub-chapters have been created for prediction, big data, and control systems architectures. Challenges and potential solutions have been identified for each of these sub-chapters, some of which are common across industries, and others of which are unique to the semiconductor manufacturing industry.