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Development and characterization of a high precision vibratory MEMS gyroscope system with low-noise integrated readout and control electronics

: Koehler, D.; Hiller, K.; Forke, R.; Konietzka, S.; Pohle, A.; Billep, D.; Heinz, S.; Lange, A.


AMA Fachverband für Sensorik e.V., Wunstorf:
AMA Conferences 2013. Proceedings. With SENSOR, OPTO, IRS 2. CD-ROM : Nürnberg Exhibition Centre, Germany, 14. - 16.5.2013
Wunstorf: AMA Service, 2013
ISBN: 978-3-9813484-3-9
International Conference on Sensors and Measurement Technology (SENSOR) <16, 2013, Nuremberg>
Fraunhofer ENAS ()

In this work a MEMS vibratory gyroscope fabricated with a high aspect ratio technology (25:1) and high quality factor (Q> 90,000) in combination with an ASIC for low noise integrated readout (0.4 μV/ rtHz), control and compensation electronics will be introduced. The development of the sensor system focuses on a very symmetric design of the mechanical element as well as of the electronics excitation and detection to be able to detect capacitance changes of few aF. The angular rate sensitivity is 0.7 mV/ (°/s) at the first analog stage. Measurement results of the start-up behavior drive amplitude and frequency stability as well as angular rates will be shown.