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Thinned CMOS pressure sensors for tactile sensing in prosthetics

: Häfner, Joachim

Deutsche Gesellschaft für Biomedizinische Technik -DGBMT-; Univ. Freiburg/Brsg., Institut für Mikrosystemtechnik -IMTEK-:
BMT 2012, Biomedizinische Technik. Proceedings 46. DGBMT Jahrestagung : Jena, September 16 - 19, 2012
Berlin: De Gruyter, 2012 (Biomedizinische Technik 57, 2012, Supplement 1)
Deutsche Gesellschaft für Biomedizinische Technik (DGBMT Jahrestagung) <46, 2012, Jena>
Fraunhofer IMS ()
intelligente Implantate; implantierbarer Drucksensor; Blutdruckmessung; implantable biomedical devices; hypertension; biomedical monitoring; blood-pressure measurement

Prostheses that provide feedback to the patient are under active research because such feedback is indispensable for precise handling of objects. We propose the use of thinned CMOS pressure sensors as a sensing element for such prostheses because the integration of active electronics at the sensor node allows for multimodal, intelligent sensor systems with low wiring effort. Thinned silicon is bendable and can be applied to the curved surface of a prosthesis.