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TEM investigation of nano-structured carbon films

: Reibold, M.; Meyer, C.F.; Schultrich, B.; Schultrich, H.

Frank, L.:
Proceedings of the 12th European Congress on Electron Microscopy. Vol.2: Physical sciences
Brno: Czechoslovak Society for Electron Microscopy, 2000
ISBN: 80-238-5503-4
ISBN: 80-238-5500-X
European Congress on Electron Microscopy (EUREM) <12, 2000, Brno>
Fraunhofer IWS ()
Struktur; Keramik; Kohlenstoff; Multischicht; Nanomaterialien; Grenzfläche; Laser-Arc; Kohlenstoff-Schichten; Nanotechnologie

TEM investigations reveal the large structural differences of carbon films prepared by modified deposition conditions. Laser induced vacuum deposition (Laser-Arc) enables the deposition of superhard, amorphous films with dominating diamond bonds. By suitable addition of noble gas during the plasma deposition nano-structured carbon films are produced. They consist of densely packed stacks of curved graphene lamellae resembling nano-onions or nano-tubes. TEM-investigation of top view and cross sectional images shows quite different structures. These results led to the concept of nano-tube-like inclusions. This structural model is supported by simulations based on the multi-slice method.