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Reliability of MEMS devices in shock and vibration overload situations

: Kurth, S.; Shaporin, A.; Hiller, K.; Kaufmann, C.; Gessner, T.


Hartzell, A.L. (Hrsg.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Reliability, packaging, testing, and characterization of MEMS/MOEMS VII : 21 - 22 January, 2008, San Jose, California, USA
Bellingham, WA: SPIE, 2008 (Proceedings of SPIE 6884)
ISBN: 978-0-8194-7059-1
ID 688409
Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS <7, 2008, San Jose/Calif.>
Photonics West <2008, San Jose/Calif.>
MOEMS-MEMS Micro-Nano Fabrication Symposium <2008, San Jose/Calif.>
Fraunhofer ENAS ()
Fraunhofer IZM ()

This contribution describes the investigation of the reasons for overload failure and overload reaction based on linear vibration theory by decomposition of the complex reaction into resonant mode reactions and on observation of the reaction. An impulse specific peak deflection (ISPD) is derived as a general characteristic property of a certain shock. It is applicable to predict the mechanical deflection of a certain resonant mode of an arbitrary resonant frequency due to a shock. This is further analyzed and proofed by scanning Laser Doppler interferometer (SLDI) measurement on the example of a Fabry Perot interferometer based tunable infrared filter. The results from ISPD prediction are compared to SLDI measurements and to finite element analysis results.