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Improved MOEMS based ultra rapid Fourier transform infrared spectrometer

: Tortschanoff, A.; Kenda, A.; Kraft, M.; Sandner, T.; Schenk, H.; Scherf, W.


Druy, M.A. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Next-generation spectroscopic technologies II : 13 April 2009, Orlando, Florida, United States; Part of SPIE Defense, Security, and Sensing Symposium
Bellingham, WA: SPIE, 2009 (Proceedings of SPIE 7319)
ISBN: 978-0-8194-7585-5
Paper 73190I
Next-Generation Spectroscopic Technologies Conference <2, 2009, Orlando/Fla.>
Fraunhofer IPMS ()

We present an improved FTIR spectrometer using a novel MOEMS actuator and discuss in detail the properties of the MOEMS component and the resulting FT-IR sensor device. Spectral resolution and the spectral range allow making use of the inherent multi-analyte detection capabilities giving the spectroscopy platform an advantage over singlewavelength IR sensors. With its further miniaturization potential due to its MOEMS core, this compact, energy efficient and robust spectrometer can thus act as transducer for portable and ultra-lightweight spectroscopic IR sensors, e.g. all purpose hazardous vapor sensors, sensors for spaceborne and Micro-UAV based IR analysis, and many more.