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Composition and structure of plasma deposited a-C - H,F films

Zusammensetzung und Struktur der a-C - H,F Filme aus Plasmaausscheidung
: Fink, J.; Nücker, N.; Sah, R.E.; Baumann, H.; Bethge, K.; Koidl, P.

E-MRS Spring Meeting 1987. Proceedings. Vol.XVII
Paris: Les Editions de Physique, 1987
pp.475-480 : Abb.,Lit.
European Materials Research Society (Spring Meeting) <1987, Strasbourg>
Conference Paper
Fraunhofer IAF ()
Kohlenstoffilm; Plasmaabscheidung

Amorphous carbon films (a-C:H,F) were prepared from fluorinated benzenes. The films were investigated by optical spectroscopy, by depth profiling with nuclear reactions and by electron energy-loss spectroscopy. Changes in the density and in the microstructure compared to a-C:H films may be explained by the different size of the H and F atoms.