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Closed loop MBE and CBE facility control with new software system

 
: Hertel, B.

Engineering Foundation -EF-, New York:
EF Conference on Monitoring and Control Techniques for Intelligent Epitaxy 1995. Conference program
New York, 1995
Conference on Monitoring and Control Techniques for Intelligent Epitaxy <1995, Banff>
English
Conference Paper
Fraunhofer IIS A ( IIS) ()
MBE-facility; process control; real time control system

Abstract
The new MBE/CBE control software works on IBM compatible PCs to its open, object oriented concept, the system is able to communicate with all kinds of control devices, irrespective of type or producer. Together with real time, in situ measurement devices, process parameters like actual growthrate or temperature are used for closed feedback loop control. E. g. results from RHEED measurements may be used to avoid transients. A C-like language is used to program even difficult processes. These automated processes are facility independent. Because of the interpreter/compiler concept, real time modification of a running program is possible.

: http://publica.fraunhofer.de/documents/PX-7883.html