Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Qualification of media supply components

: Warnecke, H.-J.; Dorner, J.

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.:
Ultra Clean Technology. STEP Europe Conference
London; Mountain View, 1990
Step Europe Conference <1990, Brüssel>
Conference Paper
Fraunhofer IPA ()
gas; gas-Partikelzähler; measurement; particle measurement; Prüfung; Teilchen

This paper shows the necessity of standardized measuring and test methods for the qualification of media supply components and the procedure for their development. The simple and practicable method is presented based on the example of a guideline proposal for particle measurements at ultrapure gas valves.