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Light scattering of thin dielectric films

: Duparre, A.

Hummel, R.E.; Guenther, K.H.:
Handbook of optical properties. Vol. 1: Thin films for optical coatings
Boca Raton: CRC Press, 1995
ISBN: 0-8493-2484-X
Book Article
Fraunhofer IOF ()
dünne Schicht; Lichtstreuung; light scattering; microstructure; Mikrostruktur; Oberflächenrauheit; optical coating; optische Schicht; surface roughness; thin films

This paper focuses on scattering phenomena resulting from isotropic microroughness as well as from correlated volume inhomogenities in dielectric thin films. Even if volume effects, as a rule, contribute much less to the scattering losses of optical coatings than microroughness does, benefits can be derived from examining volume scattering dur to the inherent information about film morphology.