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Ion channeling in textured polycrystalline diamond films.

Ionenchanneling in texturierten, polykristallinen Diamantschichten


Journal of applied physics 74 (1993), No.3, pp.2134-2136 : Abb.,Lit.
ISSN: 0021-8979
ISSN: 1089-7550
Journal Article
Fraunhofer IAF ()
Diamantschicht; diamond film; ion channeling; Ionenchanneling

Channeling of Hhighplus and H highplus/sub2 ions of energies between 1.0 and 2.0 MeV in (100)-textured polycristalline diamond films grown by microwave plasma-assisted chemical-vapor deposition has been observed with Rutherford backscattering. The width of the orientational distribution of the diamond crystallites as deduced from the measured projectile velocity dependence of the observed channeling angular scans amounted to about 1 degree.