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Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region

: Duparre, A.; Jakobs, S.; Kaiser, N.


Shladov, I. ; Association of Engineers and Architects in Israel:
10th Meeting on Optical Engineering in Israel 1997. Part 1
Bellingham, Wash.: SPIE, 1997 (SPIE Proceedings Series 3110)
ISBN: 0-8194-2532-X
Meeting on Optical Engineering in Israel <10, 1997, Jerusalem>
Conference Paper
Fraunhofer IOF ()
atomic force microscopy; dünne Schicht; Lichtstreuung; light scattering; Oberflächendefekt; optical coating; optische Schicht; Rasterkraftmikroskopie; Rauheit; roughness; surface defect; thin films

Effects of defect propagation from the substrate throughout thin film single layer and multilayer coatings are investigated on fluoride and oxide films evaporated onto different types of substrates. Atomic force microscopy, light scattering methods, and transmission electron microscopy are used to study the surface morphology of the coated and uncoated substrates. With fluoride films, propagation of rough substrate structures is observed for both single layer films and multilayers. Oxide coatings replicate the microtopography even of well polished surfaces and throughout thick multilayer stacks.