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Micromachined mid-infrared emitter for fast transient temperature operation for optical gas sensing systems

: Hildenbrand, J.; Kürzinger, A.; Peter, C.; Moretton, E.; Wöllenstein, J.; Naumann, F.; Ebert, M.; Korvink, J.

Postprint urn:nbn:de:0011-n-941843 (1.6 MByte PDF)
MD5 Fingerprint: 2e6b199c7a8b9538eb2612ef81be2366
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Created on: 27.7.2010

Institute of Electrical and Electronics Engineers -IEEE-:
IEEE Sensors 2008, the Seventh IEEE Conference on Sensors : October 26-29, 2008, Lecce (Italy)
New York, NY: IEEE, 2008
ISBN: 1-4244-2581-5
ISBN: 978-1-4244-2580-8
Conference on Sensors <7, 2008, Lecce/Italien>
Conference Paper, Electronic Publication
Fraunhofer IPM ()
Fraunhofer IWM ( Fraunhofer IWM-H) ()
electric heating; etching; gas sensor; optical sensor; silicon-on-insulator

A novel micromachined thermal emitter for fast transient temperature operation is presented. Most commercial available thermal emitters are not able to operate in a pulsed mode. The spider type hotplate concept promises an excellent mechanical stability together with high thermal decoupling. The thermal emitter is fabricated using silicon on insulator (SOI) technology and KOH-etching. The emitter is heated with a Pt-meander structure and the device is mounted in a TO-5 housing. Different suspensions structures as well as hotplate sizes were realized and mechanical and thermal characterizations were performed. Beside the possibility of pulsed operation, a high thermal emission at wavelengths >5 mum are achieved. Investigations on possible coatings for emissivity enhancement are the focus of the current work.