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Diamond components with integrated abrasion sensor for tribological applications

: Pernice, W.; Obloh, H.; Müller-Sebert, W.; Wild, C.; Koidl, P.; Urban, G.


Robertson, J.:
Proceedings of Diamond 2006, the 17th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide : Estoril, Portugal, September 3 - 8, 2006
Amsterdam: Elsevier, 2007 (Diamond and related materials 16.2007, Nr.4/7)
European Conference on Diamond, Diamondlike Materials, Carbon Nanotubes, Nitrides and Silicon Carbide (Diamond) <17, 2006, Estoril>
Conference Paper, Journal Article
Fraunhofer IAF ()
boron doping; Bor-Dotierung; CVD-Diamond; CVD-Diamant; thread guiding; sensor; Sensor; verschleißfestes Bauelement; Tribologie

Tribological components made from CVD diamond are commonly used for protection against abrasion in rough environments. Such components can be used e.g. in textile industry as thread guiding devices provided that surface roughness and resultant friction are low. In this work we report on the fabrication of CVD diamond components of non-planar shape. These devices were fabricated in a negative replication approach on mechanically structured substrates. Using this technique cylindrically shaped diamond devices with smooth surfaces were produced by using the nucleation side of the diamond layers as the exposed surface, thus making subsequent polishing steps unnecessary. Applying an improved two-step nucleation method further reduced surface roughness. Sensing elements in the form of resistors made from boron-doped CVD diamond were integrated into the device surface. Device performance was characterized with respect to the temperature dependence of the resistors and the suitability as abrasion sensor.