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Freeform and Laser Optical Coatings by Inline Magnetron Sputtering

: Glöß, Daniel; Hartung, Ullrich; Drescher, Andy; Frach, Peter; Bartzsch, Hagen


Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings : Part of Optical Interference Coatings Conference : 2-7 June 2019, Santa Ana Pueblo, New Mexico, United States
Washington, DC: OSA, 2019
ISBN: 978-1-943580-58-3
Paper WB.2
Conference" Optical Interference Coatings" (OIC) <2019, Santa Ana Pueblo/NM>
Conference Paper
Fraunhofer FEP ()
Magnetron Sputtering

The upscaling of highly productive inline magnetron sputtering for precision optics and application examples like 1D and 2D lateral thickness gradients as well as laser mirrors will be presented.