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Atmospheric pressure dry texturing enabling 20% conversion efficiency on multicrystalline silicon PERC solar cells

: Kafle, B.; Ridoy, A.I.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Duncker, K.; Petter, K.; Hofmann, M.; Rentsch, J.


Ballif, C. ; American Institute of Physics -AIP-, New York:
SiliconPV 2018, 8th International Conference on Crystalline Silicon Photovoltaics : 19-21 March 2018, Lausanne, Switzerland
Woodbury, N.Y.: AIP, 2018 (AIP Conference Proceedings 1999)
ISBN: 978-0-7354-1715-1
International Conference on Crystalline Silicon Photovoltaics (SiliconPV) <8, 2018, Lausanne>
Conference Paper
Fraunhofer ISE ()

In this paper, we report significant progress in development and integration of a plasma-less atmospheric pressure dry texturing (ADE) process, performed on multicrystalline silicon (mc-Si) wafers, into high efficiency PERC solar cell architectures using industrially applied process steps. The mechanism of forming sub-micron features on monocrystalline and multicrystalline silicon wafers with commercial grade fluorine gas (F2) is briefly presented. Low weighted surface reflection (Rw,min < 10%) is achieved for mc-Si substrates regardless of the wafer sawing method. Mc-Si PERC solar cells with average conversion efficiencies of 20% are fabricated in the industrial pilot line of Hanwha Q-Cells in Thalheim. A detailed characterization of ADE-textured solar cells suggest that an enhancement in conversion efficiency of up to +0.8% absolute is possible in comparison to the reference-textured solar cells by narrowing the distribution of reflectivity in the textured wafer surface.