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Ta2O5/ Al2O3/ SiO2 - antireflective coating for non-planar optical surfaces by atomic layer deposition

: Pfeiffer, K.; Schulz, U.; Tünnermann, A.; Szeghalmi, A.


Freymann, G. von ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X : San Francisco, California, United States, 29 January-1 February 2017
Bellingham, WA: SPIE, 2017 (SPIE Proceedings Series 10115)
ISBN: 978-1-5106-0671-5
ISBN: 978-1-5106-0672-2
Paper 1011513
Conference "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics" <10, 2017, San Francisco/Calif.>
Conference Paper
Fraunhofer IOF ()

Antireflective coatings are essential to improve transmittance of optical elements. Most research and development of AR coatings has been reported on a wide variety of plane optical surfaces; however, antireflection is also necessary on nonplanar optical surfaces. Physical vapor deposition (PVD), a common method for optical coatings, often results in thickness gradients on strongly curved surfaces, leading to a failure of the desired optical function. In this work, optical thin films of tantalum pentoxide, aluminum oxide and silicon dioxide were prepared by atomic layer deposition (ALD), which is based on self-limiting surface reactions. The results demonstrate that ALD optical layers can be deposited on both vertical and horizontal substrate surfaces with uniform thicknesses and the same optical properties. A Ta 2 O 5 /Al 2 O 3 / SiO 2 multilayer AR coating (400-700 nm) was successfully applied to a curved aspheric glass lens with a diameter of 50 mm and a center thickness of 25 mm.