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IR-based temperature measurement in rotational grinding of sapphire wafers

: Klocke, Fritz; Kuljanic, Elso; Dambon, Olaf; Sortino, M.; Herben, Maurice; Totis, G.

Kuljanic, Elso:
AMST '11, Advanced Manufacturing Systems and Technology : Ninth International Conference on Advanced Manufacturing Systems and Technology. Proceedings. June 16 - 17, 2011, Mali Losinj, Croatia
Rijeka: Faculity of Engineering, 2011
ISBN: 978-953-6326-64-8
International Conference on Advanced Manufacturing Systems and Technology (AMST) <9, 2011, Mali Losinj>
Conference Paper
Fraunhofer IPT ()
Fertigungstechnik; Grinding; Messtechnik; Prozessüberwachung; Temperature measurement; Sapphire

Single crystalline sapphire wafers are used as a substrate for semiconductor applications like gallium nitride-based white LEDs. In the optimization of the manufacturing chain, rotational grinding can play a mayor role by substituting the conventional lapping process and reducing cost intensive efforts in downstream polishing steps. Due the material properties and in particular the hardness of sapphire, however, grinding process development is difficult. For this reason, the measurement of in-process variables like contact zone temperatures is of significant interest. In this paper, a concept and experimental setup for IR-based temperature measurement that utilizes the optical properties of sapphire is presented. The system behavior of the realized test setup is examined in calibrat ion tests. The results of successfully performed grinding tests are presented to prove the feasibility of the measurement concept.