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In-situ broadband monitoring of heterogeneous optical coatings

: Wilbrandt, S.; Kaiser, N.; Stenzel, O.


Thin solid films 502 (2006), No.1-2, pp.153-157
ISSN: 0040-6090
International Conference on Coatings on Glass (ICCG) <5, 2004, Saarbrücken>
Journal Article, Conference Paper
Fraunhofer IOF ()
gradient index film; online broadband monitoring; surface plasmon; optical coating

An in-situ broadband monitoring system was developed and integrated into a Leybold Syrus Pro 1100 deposition system equipped with an OMS4000 process spectrophotometer. The broadband monitor allows alternative recording of broadband spectra at the witness glass (transmission or reflection) or at the rotating substrate (transmission). First results on the deposition of metal island layers and gradient refractive index layers are presented. For reverse engineering of the refractive index profile a hybrid algorithm using recorded deposition rates is proposed.