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Enhancement of rotordynamic performance of high-speed micro- rotors for power MEMS applications by precision deep reactive ion etching

 
: Miki, N.; Teo, C.J.; Ho, L.C.; Zhang, X.

:

Sensors and Actuators. A 104 (2003), No.3, pp.263-267
ISSN: 0924-4247
English
Journal Article
Fraunhofer IPT ()

: http://publica.fraunhofer.de/documents/N-37395.html