Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Intrinsic stress generation and relaxation of plasma- enhanced chemical-vapor-deposited oxide during deposition and subsequent thermal cycling

 
: Chen, K.S.; Zhang, X.; Lin, S.Y.

:

Thin solid films 434 (2003), No.1-2, pp.190-202
ISSN: 0040-6090
English
Journal Article
Fraunhofer IPT ()

: http://publica.fraunhofer.de/documents/N-37279.html