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Fabrication of nanoscale lithium niobate waveguides for second-harmonic generation

: Geiss, R.; Saravi, S.; Sergeyev, A.; Diziain, S.; Setzpfandt, F.; Schrempel, Frank; Grange, R.; Kley, Ernst-Bernhardt; Tünnermann, Andreas; Pertsch, Thomas


Optics Letters 40 (2015), No.12, pp.2715-2718
ISSN: 0146-9592
Journal Article
Fraunhofer IOF ()

Nanoscale waveguides are basic building blocks of integrated optical devices. Especially, waveguides made from nonlinear optical materials, such as lithium niobate, allow access to a broad range of applications using second-order nonlinear frequency conversion processes. Based on a lithium niobate on insulator substrate, millimeter-long nanoscale waveguides were fabricated with widths as small as 200 nm. The fabrication was done by means of potassium hydroxide-assisted ion-beam-enhanced etching. The waveguides were optically characterized in the near infrared wavelength range showing phase-matched second-harmonic generation.