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Polishing glass - From basic investigations to industrial applications

: Waechter, D.; Zunke, R.; Schneider, U.; Dambon, O.; Klocke, F.


Herffurth, T. ; Optical Society of America -OSA-, Washington/D.C.:
Optical Fabrication and Testing, OF&T 2010. CD-ROM : OSA Topical Meeting, Optical Fabrication and Testing (OF&T), 13.-17.6.2010, The Snow King Resort, Jackson Hole, Wyoming, USA
Washington, DC: OSA, 2010 (OSA Technical digest series)
ISBN: 978-1-55752-893-3
Paper OThB1
Topical Meeting "Optical Fabrication and Testing" (OF&T) <2010, Jackson Hole/Wyo.>
Conference Paper
Fraunhofer IPT ()

A fundamental understanding of the mechanisms and influences in polishing enables the systematic and efficient development of stable polishing processes. The Fraunhofer IPT investigates the basic interactions in chemical-mechanical polishing of glass for more than ten years. This paper shows first results from a recent project on the effects of polishing pads on the material removal rate when polishing different types of glass. Moreover, a process monitoring system is presented as an example for the application of gained knowledge to current issues in full- and sub-aperture polishing.