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Towards 3-D THz volume inspection for process control

: Friederich, F.; Baccouche, B.; Keil, A.; Kahl, M.; Bolivar, P.H.; Löffler, T.; Jonuscheit, J.


Institute of Electrical and Electronics Engineers -IEEE-:
39th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2014. Proceedings. Vol.1 : September 14-19, 2014, The University of Arizona, Tucson, AZ
Piscataway, NJ: IEEE, 2014
ISBN: 978-1-4799-3877-3
ISBN: 978-1-4799-3878-0
International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) <39, 2014, Tucson/Ariz.>
Conference Paper
Fraunhofer IPM ()
data acquisition; image reconstruction; inspection; process control; production engineering computing

We report on the development of a stepped frequency continuous wave THz imaging system for process control in industrial environments. The system is based on a sparse line array consisting of 12 emitters and 12 heterodyne receivers operating in a frequency range between 75 GHz and 110 GHz. The applied multiple-input and multiple-output technique allows the reconstruction of THz images with 144 virtual pixels per line, while a band-conveyer below the line array provides the required feed motion of the sample for 3-D data acquisition.