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High-power-plasma PECVD of SiNx and Al2O3 for industrial solar cell manufacturing

: Hofmann, M.; Kohn, N.; Schwarz, F.; Nölker, S.; Kastl, S.; Beckmann, R.; Ferré, R.; Pernau, T.; Trogus, D.; Kühnhold, S.; Saint-Cast, P.; Rentsch, J.

Fulltext urn:nbn:de:0011-n-2669307 (201 KByte PDF)
MD5 Fingerprint: 666a96c11eba72797413840573f36bfa
Created on: 29.11.2013

Mine, A. ; European Commission:
28th European Photovoltaic Solar Energy Conference and Exhibition, EU PVSEC 2013. Proceedings. DVD-ROM : 30 September to 04 October 2013, Paris, France
München: WIP-Renewable Energies, 2013
ISBN: 3-936338-33-7
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <28, 2013, Paris>
Conference Paper, Electronic Publication
Fraunhofer ISE ()
PV Produktionstechnologie und Qualitätssicherung; Silicium-Photovoltaik; Oberflächen: Konditionierung; Passivierung; Lichteinfang; Pilotherstellung von industrienahen Solarzellen; Coating; Based Deposition; Deposition Rate; Interfaces; Passivation

Excellent surface passivation is a key feature of high-efficiency c-Si solar cell concepts. Manz AG in collaboration with Fraunhofer ISE has developed a high-power-plasma (HPP) vertical plasma-enhanced chemical vapour deposition (PECVD) system that allows the preparation of excellently passivating hydrogenated amorphous silicon nitride (SiNx) and aluminium oxide (Al2O3) films at high deposition rates, leading to a throughput of about 1200 wafers per hour for one deposited film at a small footprint of the tool. Double layer SiNx front surface anti-reflection coatings (ARC) were outperforming the reference processes at Fraunhofer ISE. Al2O3 layers reached the same level of passivation compared to the reference PECVD process. Control of carbon and oxygen atoms and the oxidizing gas during the deposition helps to maintain a stable and robust process.