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In-situ broadband monitoring of optical coatings

: Kaiser, N.; Wilbrandt, S.; Stenzel, O.

Puetz, J. ; Leibniz-Institut für Neue Materialien gGmbH -INM-, Saarbrücken:
Advanced coatings on glass & plastics for large-area or high-volume products : Proceedings of the 5th International Conference on Coatings on Glass, ICCG 5, July 4 - 8, 2004, Congress Hall, Saarbruecken, Germany
Saarbrücken: INM, 2004
International Conference on Coatings on Glass (ICCG) <5, 2004, Saarbrücken>
Conference Paper
Fraunhofer IOF ()
online broadband monitoring; gradient index film; optical coating; Cluster

An in-situ broadband monitoring system was developed and integrated into a Leybold Syrus pro 1100 deposition system equipped with an OMS4000 process spectrophotometer. The broadband monitor is integrated into the optical path of the OMS4000 system and allows recording broadband transmission spectra at the witness glass instantaneously with the OMS4000 reflection measurement or vice versa. First results on the deposition of metal island layers and gradient refractive index layers are presented.