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Highly efficient broadband blazed grating in resonance domain

: Oliva, Maria; Michaelis, Dirk; Fuchs, Frank; Tünnermann, Andreas; Zeitner, Uwe Detlef


Applied Physics Letters 102 (2013), No.20, Art. 203114, 4 pp.
ISSN: 0003-6951 (Print)
ISSN: 1077-3118
ISSN: 1931-9401 (online)
Journal Article
Fraunhofer IOF ()
atomic layer deposition; diffraction gratings; light transmission; optical design techniques; optical fabrication; silicon compounds

A resonance domain blazed grating, composed of an effective medium structure and a subsequent mode conversion layer, is designed, fabricated, and characterized. Due to the demanding high aspect ratio geometries, a technological approach for multilevel structures, assisted by atomic layer deposition technology, has been developed. The measured efficiency of about 90% exhibits the largest value yet reported for a multi-level fused silica transmission grating in the resonance domain, operating at non Littrow mounting, close to normal incidence.