Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019AlScN: A III-V semiconductor based ferroelectric
Fichtner, S.; Wolff, N.; Lofink, F.; Kienle, L.; Wagner, B.
Journal Article
2019Exploring the Causes of Power-Converter Failure in Wind Turbines based on Comprehensive Field-Data and Damage Analysis
Fischer, Katharina; Pelka, Karoline; Puls, Sebastian; Poech, Max-Hermann; Mertens, Axel; Bartschat, Arne; Tegtmeier, Bernd; Broer, Christian; Wenske, Jan
Journal Article
2018Analyseeinrichtung
Janes, Joachim
Patent
2018Analysis of the mechanical vibration and acoustic behavior of a piezoelectric MEMS microspeaker
Männchen, A.; Beer, D.; Niekiel, F.; Nowak, J.; Stoppel, F.; Wagner, B.
Conference Paper
2018Antennenvorrichtung
Ebberg, Alfred; Hofmann, Ulrich; Schernus, Winfried; Senger, Frank
Patent
2018Bilderzeugungseinrichtung
Giese, Thorsten; Janes, Joachim
Patent
2018Coupling between vortices and antivortices in a cross-tie wall studied by time-resolved SEMPA
Kloodt-Twesten, F.; Kuhrau, S.; Staeck, P.; Cavicchia, D.R.; Lofink, F.; Oepen, H.P.; Frömter, R.
Journal Article
2018Energy harvesting and conversion - applications of piezoelectric transformer and transducer MEMS
Radecker, Matthias; Kunzmann, Jan; Quenzer, Hans-Joachim; Gu-Stoppel, Shan-Shan; Yang, Yujia
Presentation
2018Fraunhofer-Institut für Siliziumtechnologie. Achievements and Results. Annual Report 2017
 
Annual Report
2018Investigations of copper wire bonding capability on plasma based additive copper metallizations
Hensel, A.; Kohlmann von Platen, K.; Franke, J.
Conference Paper
2018Magnetic films for electromagnetic actuation in MEMS switches
Oliveira Hansen, R. de; Matefi-Tempfli, M.; Safonovs, R.; Adam, J.; Chemnitz, S.; Reimer, T.; Wagner, B.; Benecke, W.; Matefi-Tempfli, S.
Journal Article
2018Micro-cantilevers for optical sensing of biogenic amines
Wang, Y.; Costa, C.A.B.; Sobolewska, E.K.; Fiutowski, J.; Brehm, R.; Albers, J.; Nebling, E.; Lofink, F.; Wagner, B.; Benecke, W.; Rubahn, H.-G.; Oliveira Hansen, R. de
Journal Article
2018Mundstück mit einem Kanal
Blohm, Lars; Knieling, Thomas; Nebling, Eric
Patent
2018New integrated full-range MEMS speaker for in-ear applications
Stoppel, Fabian; Männchen, Andreas; Niekiel, Florian; Beer, Daniel; Giese, Thorsten; Wagner, Bernhard
Conference Paper
2018Novel Type of MEMS Loudspeaker Featuring Membrane-Less Two-Way Sound Generation
Stoppel, F.; Niekiel, F.; Giese, T.; Gu-Stoppel, S.; Männchen, A.; Nowak, J.; Beer, D.; Wagner, B.
Conference Paper
2018Omnidirektionale Beleuchtungsvorrichtung und Verfahren zum Abtasten eines Raumwinkelbereichs
Janes, Joachim
Patent
2018Pixelated phosphors for high-resolution and high-contrast white light sources
Steudel, F.; Lisec, T.; Nolte, P.W.; Hofmann, U.; Wantoch, T. von; Lofink, F.; Schweizer, S.
Journal Article
2018Pizoelektrischer Stapelaktuator und Verfahren zur Herstellung desselben
Bandorf, Ralf; Kaden, Dirk; Ortner, Kai; Quenzer, Hans-Joachim
Patent
2018Projektionsvorrichtung und Verfahren zum Abtasten eines Raumwinkelbereichs mit einem Laserstrahl
Janes, Joachim
Patent
2018Silicon lens arrays for wafer level packaging of IR-sensors
Kulkarni, A.; Malaurie, P.; Stenchly, V.; Quenzer, H.J.; Laske, N.; Dudde, R.
Conference Paper
2018Technology and electrical characterization of MemFlash cells for neuromorphic applications
Winterfeld, H.; Ziegler, M.; Hanssen, H.; Friedrich, D.; Benecke, W.; Kohlstedt, H.
Journal Article
2018Ultra-thin TiO2 films by atomic layer deposition and surface functionalization with Au nanodots for sensing applications
Lupan, O.; Postica, V.; Ababii, N.; Reimer, T.; Shree, S.; Hoppe, M.; Polonskyi, O.; Sontea, V.; Chemnitz, S.; Faupel, F.; Adelung, R.
Journal Article
2018Wärmeisoliertes Mikrosystem
Lisec, Thomas; Quenzer, Hans-Joachim
Patent
2017Additive copper metallization of semiconductors for enabling a copper wire bonding process
Hensel, A.; Mueller, M.; Franke, J.; Kohlmann von Platen, K.
Conference Paper
2017Domain Walls in Bent Nanowires
Lofink, F.; Philippi-Kobs, A.; Azad, M.R.R.; Hankemeier, S.; Hoffmann, G.; Frömter, R.; Oepen, H.P.
Journal Article
2017Fault detection for heating systems using tensor decompositions of multi-linear models
Sewe, E.; Pangalos, G.; Lichtenberg, G.
Conference Paper
2017Fraunhofer-Institut für Siliziumtechnologie. Achievements and Results. Annual Report 2016
 
Annual Report
2017Herstellung neuartiger Mikrostrukturen für MEMS-Anwendungen durch Pulververfestigung mittels ALD
Chemnitz, S.; Reimer, T.; Lisec, T.
Conference Paper
2017High temperature investigation on a nickel-tin transient liquid-phase wafer bonding up to 600 °C
Budhiman, N.; Jensen, B.; Chemnitz, S.; Wagner, B.
Journal Article
2017Identifying and overcoming the interface originating c-axis instability in highly Sc enhanced AlN for piezoelectric micro-electromechanical systems
Fichtner, S.; Wolff, N.; Krishnamurthy, G.; Petraru, A.; Bohse, S.; Lofink, F.; Chemnitz, S.; Kohlstedt, H.; Kienle, L.; Wagner, B.
Journal Article
2017Magnetically driven energy-harvester with monolithically integrated high-energy-density magnets
Lofink, F.; Tolstrup, V.; Lisec, T.; Reimer, T.; Piorra, A.; Meyners, D.; Quandt, E.; Wagner, B.
Conference Paper
2017MEMS switch with prolonged lifetime under hot switching conditions based on gold as contact material
Lisec, T.; Stoppel, F.; Kaden, D.; Heinrich, F.; Neumann, A.; Wagner, B.
Conference Paper
2017Metallographische Untersuchung von Brandschäden in der Elektronik
Reiter, K.; Puls, S.
Journal Article
2017Mikromechanisches Bauteil und Verfahren zur Herstellung eines piezoelektrischen mikromechanischen Bauteils
Senger, Frank; Hofmann, Ulrich; Kaden, Dirk
Patent
2017Miniaturization of power converters by piezoelectric transformers - chances and challenges
Radecker, Matthias; Quenzer, Hans-Joachim; Gu-Stoppel, Shan-Shan; Reich, Torsten; Buhl, René; Yang, Yujia
Presentation
2017Modular packaging concept for MEMS and MOEMS
Stenchly, V.; Reinert, W.; Quenzer, H.-J.
Conference Paper
2017MoniShirt - large area printed piezoelectric sensors for body motion tracking
Varman, Ram Kumar Raja Mahendra; Knieling, Thomas; Grunemann, Timo; Domann, Gerhard
Conference Paper
2017Nanodiamond resonators fabricated on 8'' Si substrates using adhesive wafer bonding
Lebedev, Vadim; Lisec, Thomas; Yoshikawa, Taro; Reusch, Markus; Iankov, Dimitre; Giese, Christian; Zukauskaite, Agne; Cimalla, Volker; Ambacher, Oliver
Journal Article
2017A Novel Fabrication Technique for MEMS Based on Agglomeration of Powder by ALD
Lisec, T.; Reimer, T.; Knez, M.; Chemnitz, S.; Schulz-Walsemann, A.V.; Kulkarni, A.
Journal Article
2017Novel membrane-less two-way MEMS loudspeaker based on piezoelectric dual-concentric actuators
Stoppel, F.; Eisermann, C.; Gu-Stoppel, S.; Kaden, D.; Giese, T.; Wagner, B.
Conference Paper
2017A novel technology for MEMS based on the agglomeration of powder by atomic layer deposition
Lisec, T.; Chemnitz, S.; Lofink, F.; Reimer, T.; Kulkarni, A.; Piechotta, G.; Wagner, B.
Conference Paper
2017Online IGBT temperature measurement method using a greybox model
Pangalos, G.; Paesler, M.; Kapels, H.
Conference Paper
2017Piezoelectrically Driven and Sensed Micromirrors with Extremely Large Scan Angles and Precise Closed-Loop Control
Gu-Stoppel, S.; Giese, T.; Quenzer, H.-J.; Hofmann, U.; Benecke, W.
Journal Article, Conference Paper
2017Piezoelectrically driven and sensed micromirrors with large scan angles and precise closed-loop control
Gu-Stoppel, S.; Giese, T.; Quenzer, H.-J.; Hofmann, U.; Benecke, W.
Conference Paper
2017PZT-actuated and -sensed resonant micromirrors with large scan angles applying mechanical leverage amplification for biaxial scanning
Gu-Stoppel, S.; Giese, T.; Quenzer, H.-J.; Hofmann, U.; Benecke, W.
Journal Article
2017Silicon based electrical biosensor technology for mobile diagnostics
Blohm, L.; Albers, J.; Piechotta, G.; Nebling, E.
Conference Paper
2017Verfahren zur Herstellung optischer Komponenten unter Verwendung von Funktionselementen
Quenzer, Hans Joachim; Stenchly, Vanessa
Patent
2017Vorrichtung zur Erzeugung einer Wechselspannung, Schaltungsanordnung zur Erzeugung einer Ausgangswechselspannung, Verfahren zur Erzeugung einer Ausgangswechselspannung für eine Energiesenke, Wechselrichter zur Erzeugung einer Wechselspannung aus einer Gleichspannung, Energiespeicher-Vorrichtung zur Bereitstellung einer Wechselspannung unter Verwendung eines Gleichspannungsenergiespeichers, dreiphasige Wechselrichtervorrichtung, dreiphasige Wechselrichterschaltung, und Konzept zur Erzeugung einer Gleichspannung
Kapels, Holger; YU, Zhe
Patent
2016Applications of chemical mechanical planarization (CMP) to More than Moore devices
Zwicker, G.
Book Article
2016Einfluss des Lotpastendrucks auf die Zuverlässigkeit der Lötstellen kritischer keramischer SMD-Komponenten auf FR4-Leiterplatten. Schweissen und Schneiden
Gu-Stoppel, S.
Dissertation
2016Extreme high efficiency non-inverting buck-boost converter for energy storage systems
Yu, Z.; Kapels, H.; Hoffmann, K.F.
Conference Paper
2016Fraunhofer-Institut für Siliziumtechnologie. Achievements and Results. Annual Report 2015
 
Annual Report
2016Hermetic packaging concept for laser diodes on wafer level
Stenchly, V.; Reinert, W.; Quenzer, H.-J.
Conference Paper
2016Investigations on the C-rate and temperature dependence of manganese dissolution/deposition in LiMn2O4/Li4Ti5O12 lithium ion batteries
Börner, M.; Klamor, S.; Hoffmann, B.; Schroeder, M.; Nowak, S.; Würsing, A.; Winter, M.; Schappacher, F.M.
Journal Article
2016Low power and highly precise closed-loop driving circuits for piezoelectric micromirrors with embedded capacitive position sensors
Rombach, S.; Marx, M.; Gu-Stoppel, S.; Manoli, Y.
Conference Paper
2016Mikromechanische piezoelektrische Aktuatoren zur Realisierung hoher Kräfte und Auslenkungen
Stoppel, Fabian; Wagner, Bernhard
Patent
2016Modeling of biaxial gimbal-less MEMS scanning mirrors
Wantoch, T. von; Gu-Stoppel, S.; Senger, F.; Mallas, C.; Hofmann, U.; Meurer, T.; Benecke, W.
Conference Paper
2016Multimode delta-E effect magnetic field sensors with adapted electrodes
Zabel, S.; Reermann, J.; Fichtner, S.; Kirchhof, C.; Quandt, E.; Wagner, B.; Schmidt, G.; Faupel, F.
Journal Article
2016A novel control concept for high-efficiency power conversion with the bidirectional non-inverting buck-boost converter
Yu, Z.; Kapels, H.; Hoffmann, K.F.
Conference Paper
2016Photocatalytic applications of doped zinc oxide porous films grown by magnetron sputtering
Ghimpu, L.; Reimer, T.; Smazna, D.; Hoppe, M.; Benecke, W.; Bejenari, A.; Cojocaru, A.; Lupan, O.; Adelung, R.; Tiginyanu, I.
Conference Paper
2016Piezoelektrischer Positionssensor für piezoelektrisch angetriebene resonante Mikrospiegel
Quenzer, Hans Joachim; Gu-Stoppel, Shanshan; Janes, Joachim; Heinrich, Felix
Patent
2016Sensing properties of ultra-thin TiO2 nanostructured films based sensors
Postica, V.; Reimer, T.; Lazari, E.; Ababii, N.; Shishiyanu, S.; Railean, S.; Kaidas, V.; Kaps, S.; Lupan, O.; Benecke, W.; Adelung, R.
Conference Paper
2016TAIKO wafer ball attach
Schröder, S.; Schröder, M.; Reinert, W.; Priewasser, K.H.
Conference Paper
2016Temperature-stable NdFeB micromagnets with high-energy density compatible with CMOS back end of line technology
Reimer, T.; Lofink, F.; Lisec, T.; Thede, C.; Chemnitz, S.; Wagner, B.
Journal Article
2016Transmission electron microscopy study for investigating high-temperature reliability of Ti10W90-based and Ta-based diffusion barriers up to 600°C
Budhiman, N.; Schürmann, U.; Jensen, B.; Chemnitz, S.; Kienle, L.; Wagner, B.
Journal Article
2016Verfahren zum Herstellen einer Vorrichtung mit einer dreidimensionalen magnetischen Struktur
Lisec, Thomas; Quenzer, Hans Joachim; Reimer, Tim
Patent