Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021240-GHz Reflectometer-Based Dielectric Sensor with Integrated Transducers in a 130-nm SiGe BiCMOS Technology
Wang, D.; Eissa, M.H.; Schmalz, K.; Kämpfe, T.; Kissinger, D.
Journal Article
2021A 61-GHz Rectifier Using Internal Voltage Cancellation and Body-Biasing Techniques in 22-nm FDSOI
Harutyunyan, A.; Landwehr, M.
Journal Article
2021A 61-GHz RFID frontend with SiGe transceiver MMIC and SIW coupling network
Funke, Dominic A.; Hansen, Steffen; Bredendiek, Christian; Grenter, Thorben; Bögel, Gerd vom; Harutyunyan, Armen; Fiedler, Raik; Heinig, Andreas; Pohl, Nils
Conference Paper
2021Aging in Ferroelectric Si-Doped Hafnium Oxide Thin Films
Mart, C.; Kohlenbach, N.-D.; Kühnel, K.; Eßlinger, S.; Czernohorsky, M.; Ali, T.; Weinreich, W.; Eng, L.M.
Journal Article
2021All-silicon ultrasonic recognition of the environment
Kaiser, Bert
Presentation
2021Analog Spatial Light Modulators Based on Micromirror Arrays
Dauderstädt, U.; Dürr, P.; Gehner, A.; Wagner, M.; Schenk, H.
Journal Article
2021Balanced electrostatic all-silicon MEMS speakers
Schenk, H.A.G.; Ehrig, L.; Wall, F.; Kaiser, B.; Stolz, M.; Langa, S.; Schuffenhauer, D.; Monsalve Guaracao, J.M.; Melnikov, A.; Conrad, H.
Conference Paper
2021Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators
Hohle, C.; Döring, S.; Friedrichs, M.; Gehner, A.; Rudloff, D.; Schulze, M.; Stübner, R.; Trenkler, D.
Conference Paper
2021Comparison of Analog and Noise Performance between Buried Channel versus Surface Devices in HKMG I/O Devices
Pirro, L.; Jayakumar, A.; Zimmerhackl, O.; Lipp, D.; Illgen, R.; Muehlhoff, A.; Pfuetzner, R.; Zaka, A.; Otto, M.; Hoentschel, J.; Raffel, Y.; Seidel, K.; Olivo, R.
Conference Paper
2021Coulomb-actuated microbeams revisited: Experimental and numerical modal decomposition of the saddle-node bifurcation
Melnikov, A.; Schenk, H.A.G.; Monsalve, J.M.; Wall, F.; Stolz, M.; Mrosk, A.; Langa, S.; Kaiser, B.
Journal Article
2021Doping concentration dependent piezoelectric behavior of Si:HfO2 thin-films
Kirbach, S.; Lederer, M.; Eßlinger, S.; Mart, C.; Czernohorsky, M.; Weinreich, W.; Wallmersperger, T.
Journal Article
2021Drahtloser Datenbus
Schneider, Tobias; Kirrbach, René; Faulwaßer, Michael; Noack, Alexander
Patent
2021Empirical Large-Signal Modeling of mm-Wave FDSOI CMOS Based on Angelov Model
Le, Q.H.; Huynh, D.K.; Lehmann, S.; Zhao, Z.; Kämpfe, T.; Rudolph, M.
Journal Article
2021Enhanced pyroelectric response at morphotropic and field-induced phase transitions in ferroelectric hafnium oxide thin films
Mart, C.; Kämpfe, T.; Kühnel, K.; Czernohorsky, M.; Kolodinski, S.; Wiatr, M.; Weinreich, W.; Eng, L.M.
Journal Article
2021Ferroelectric Field Effect Transistors as a Synapse for Neuromorphic Application
Lederer, M.; Kämpfe, T.; Ali, T.; Müller, F.; Olivo, R.; Hoffmann, R.; Laleni, N.; Seidel, K.
Journal Article
2021Ferroelektrischer Dünnschichttransistor und Verfahren zum Herstellen eines ferroelektrischen Dünnschichttransistors
Ali, Tarek Nadi Ismail; Polakowski, Patrick; Seidel, Konrad
Patent
2021A Fully Integrated Ferroelectric Thin-Film-Transistor - Influence of Device Scaling on Threshold Voltage Compensation in Displays
Lehninger, D.; Ellinger, M.; Ali, T.; Li, S.; Mertens, K.; Lederer, M.; Olivio, R.; Kampfe, T.; Hanisch, N.; Biedermann, K.; Rudolph, M.; Brackmann, V.; Sanctis, C.; Jank, M.; Seidel, K.
Journal Article
2021Impact of the Nonlinear Dielectric Hysteresis Properties of a Charge Trap Layer in a Novel Hybrid High-Speed and Low-Power Ferroelectric or Antiferroelectric HSO/HZO Boosted Charge Trap Memory
Ali, T.; Mertens, K.; Olivo, R.; Rudolph, M.; Oehler, S.; Kuhnel, K.; Lehninger, D.; Muller, F.; Hoffmann, R.; Schramm, P.; Biedermann, K.; Metzger, J.; Binder, R.; Czernohorsky, M.; Kampfe, T.; Muller, J.; Seidel, K.; Houdt, J. Van; Eng, L.M.
Journal Article
2021Impact of the SiO2 interface layer on the crystallographic texture of ferroelectric hafnium oxide
Lederer, M.; Reck, A.; Mertens, K.; Olivo, R.; Bagul, P.; Kia, A.; Volkmann, B.; Kämpfe, T.; Seidel, K.; Eng, L.M.
Journal Article
2021Kinetics of the Light and Elevated Temperature Induced Degradation and Regeneration of Quasi-Monocrystalline Silicon Solar Cells
Wehmeier, N.; Fischer, G.; Herlufsen, S.; Wolny, F.; Wagner, M.; Bothe, K.; Müller, M.
Journal Article
2021MEMS component with in-plane movable element and method for operating same
Kaiser, Bert
Patent
2021MEMS component, assembly comprising the MEMS component and method for operating the MEMS component
Kaiser, Bert; Monsalve Guaracao, Jorge Mario; Conrad, Holger
Patent
2021MEMS-Aktuator und MEMS-Aktuator-Array mit einer Mehrzahl von MEMS-Aktuatoren
Dürr, Peter
Patent
2021MEMS-Aktuator-Element und MEMS-Aktuator-Array mit einer Mehrzahl von MEMS-Aktuator-Elementen
Dürr, Peter; Neudert, Andreas; Felsberg, Linda
Patent
2021Method for controlling a driver circuit, driver circuit, system comprising a driver circuit and method for manufacturing an integrated circuit
Fiedler, Raik; Pietzsch, Marcus
Patent
2021Multi‐Level Switching and Reversible Current Driven Domain‐Wall Motion in Single CoFeB/MgO/CoFeB‐Based Perpendicular Magnetic Tunnel Junctions
Lv, H.; Fidalgo, J.; Silva, A.V.; Leitao, D.C.; Kämpfe, T.; Langer, J.; Wrona, J.; Ocker, B.; Freitas, P.P.; Cardoso, S.
Journal Article
2021On the Origin of Wake-Up and Antiferroelectric-Like Behavior in Ferroelectric Hafnium Oxide
Lederer, M.; Olivo, R.; Lehninger, D.; Abdulazhanov, S.; Kämpfe, T.; Kirbach, S.; Mart, C.; Seidel, K.; Eng, L.M.
Journal Article
2021Optical microsystems for advanced imaging in biomedicine
Scholles, Michael
Abstract
2021Prozesskette zur Faltmontage für miniaturisierte komplexe Optiksysteme
Grüger, H.; Sdrenka, S.; Stein, K.; Sabiha, M.; Schulz, M.; Ziegmann, G.
Presentation
2021Sensor mit einer Festkörper-Schichtstruktur und Verfahren zur Herstellung eines Sensors
Kurth, Eberhard; Kunath, Christian
Patent
2021SmartSpectrometer - Embedded Optical Spectroscopy for Applications in Agriculture and Industry
Krause, Julius; Grüger, Heinrich; Gebauer, Lucie; Zheng, Xiaorong; Knobbe, Jens; Pügner, Tino; Kicherer, Anna; Gruna, Robin; Längle, Thomas; Beyerer, Jürgen
Journal Article
2021Thermo Optical Phase Shifter with Low Thermal Crosstalk for SOI Strip Waveguide
Sabouri, S.; Mendoza Velasco, L.A.; Catuneanu, M.; Namdari, M.; Jamshidi, K.
Journal Article
2021Validation of Computational Procedures for the Progressive Collapse Analysis of Reinforced Concrete Structures
Dmitriev, A.; Lalin, V.; Melnikov, A.
Conference Paper
2021WS2 and MoS2 counter electrode materials for dye‐sensitized solar cells
Rashidi, S.; Rashidi, S.; Heydari, R.K.; Esmaeili, S.; Tran, N.; Thangi, D.; Wei, W.
Journal Article
2020240-GHz reflectometer with integrated transducer for dielectric spectroscopy in a 130-nm SiGe BiCMOS technology
Wang, D.; Eissa, M.H.; Schmalz, K.; Kämpfe, T.; Kissinger, D.
Conference Paper
2020480-GHz Sensor With Subharmonic Mixer and Integrated Transducer in a 130-nm SiGe BiCMOS Technology
Wang, D.; Eissa, M.H.; Schmalz, K.; Kampfe, T.; Kissinger, D.
Journal Article
20205 mm Range 61 GHz System on Chip EPC Gen2 RFID tag in 22nm FD-SOI Technology
Harutyunyan, A.; Heinig, A.; Fiedler, R.; Landwehr, M.; Hildebrandt, R.; Holland, H.-J.
Conference Paper
2020Acoustic bending converter system and acoustic device
Kaiser, Bert
Patent
2020Analysis of Hot-Carrier Degradation in 22nm FDSOI Transistors Using RF Small-Signal Characteristics
Huynh, D.K.; Le, Q.H.; Duhan, P.; Wang, D.; Kampfe, T.; Rudolph, M.
Conference Paper
2020Analysis of the composition of tantalum nitride in CMOS metallization trenches using parallel angle‐resolved XPS
Wehring, B.; Gerlich, L.; Kia, A.M.; Wislicenus, M.; Uhlig, B.
Journal Article
2020Analysis of the Reliability of Ferroelectric Field Effect Transistors in Combination with Crossbar Circuits for Neuromorphic Computing
Hoffmann, Tudor
: Kämpfe, Thomas (Betreuer); Messaris, Ioannis (Betreuer)
Thesis
2020Antiferroelectric Si:HfO2 for High Energy Storage using 3D MIM Capacitors
Viegas, A.; Mart, C.; Czernohorsky, M.
Conference Paper
2020Automatisierte Berechnung und Visualisierung von Komorbiditätsindizes für den Tumorboard-Entscheid
Wald, T.; Birnbaum, Klemens; Wiegand, S.; Dietz, A.; Zebralla, V.; Wichmann, G.
Journal Article
2020Automatisierte Berechnung und Visualisierung von Komorbiditätsindizes für den Tumorboard-Entscheid
Wald, T.; Birnbaum, K.; Wiegand, S.; Dietz, A.; Zebralla, V.; Wichmann, G.
Journal Article
2020Back-End-of-Line Compatible Low-Temperature Furnace Anneal for Ferroelectric Hafnium Zirconium Oxide Formation
Lehninger, D.; Olivo, R.; Ali, T.; Lederer, M.; Kämpfe, T.; Mart, C.; Biedermann, K.; Kühnel, K.; Roy, L.; Kalkani, M.; Seidel, K.
Journal Article
2020Bauelement und Verfahren zum Herstellen eines Bauelements
Kirbach, Sven; Weinreich, Wenke; Mart, Clemens; Zybell, Sabine; Haufe, Nora
Patent
2020Bending transducer as an actuator, bending transducer as a sensor, bending transducer system
Schenk, Hermann; Kaiser, Bert; Ehrig, Lutz
Patent
2020BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms
Wehring, Bettina; Hoffmann, R.; Gerlich, Lukas; Czernohorsky, Malte; Uhlig, B.; Seidel, R.; Barchewitz, T.; Schlaphof, F.; Meinshausen, L.; Leyens, C.
Conference Paper
2020Chapter 49 - Micro mirrors
Schenk, Harald; Schulze, Matthias
Book Article
2020Charge Pumping and Flicker Noise-based Defect Characterization in Ferroelectric FETs
Raffel, Y.; Lederer, M.; Olivo, R.; Müller, F.; Hoffmann, R.; Ali, T.; Kämpfe, T.; Seidel, K.; Heitmann, J.
Conference Paper
2020Development and Characterization of Transition Metal Silicides for Metallization Application
Hamtaei, Sarallah
: Sorgenfrei, Tina; Fiederle, Michael
Master Thesis
2020Development of Rutile Titanium Oxide Thin Films as Battery Material Component Using Atomic Layer Deposition
Kia, A.M.; Bönhardt, S.; Zybell, S.; Kühnel, K.; Haufe, N.; Weinreich, W.
Journal Article
2020Doping Effects in CMOS‐compatible CoSi Thin Films for Thermoelectric and Sensor Applications
Nichenametla, Charan Krishna; Calvo, Jesús; Riedel, Stefan; Gerlich, Lukas; Hindenberg, Meike; Novikov, Sergej; Alexander Burkov; Kozelj, Primoz; Cardoso-Gil, Raul; Wagner-Reetz, Maik
Journal Article
2020Effect of Substrate Implant Tuning on the Performance of MFIS Silicon Doped Hafnium Oxide (HSO) FeFET Memory
Ali, T.; Kühnel, K.; Mertens, K.; Czernohorsky, M.; Rudolph, M.; Duhan, P.; Lehninger, D.; Hoffmann, R.; Steinke, P.; Müller, J.; Houdt, J. van; Seidel, K.; Eng, L.M.
Conference Paper
2020Efficient FeFET crossbar accelerator for binary neural networks
Soliman, T.; Olivo, R.; Kirchner, T.; Parra, C. de la; Lederer, M.; Kämpfe, T.; Guntoro, A.; Wehn, N.
Conference Paper
2020The electrocaloric effect in doped hafnium oxide: Comparison of direct and indirect measurements
Mart, C.; Kämpfe, T.; Czernohorsky, M.; Eßlinger, S.; Kolodinski, S.; Wiatr, M.; Weinreich, W.; Eng, L.M.
Journal Article
2020Energy harvesting in the back-end of line with CMOS compatible ferroelectric hafnium oxide
Mart, C.; Abdulazhanov, S.; Czernohorsky, M.; Kämpfe, T.; Lehninger, D.; Falidas, K.; Eßlinger, S.; Kühnel, K.; Oehler, S.; Rudolph, M.; Wiatr, M.; Kolodinski, S.; Seidel, R.; Weinreich, W.; Eng, L.M.
Conference Paper
2020Entwicklung eines analogen 100MBIT / s-Transceiver-Frontends für die LI-FI-Kommunikation mit harten Echtzeitanforderungen
Jakob, Benjamin
: Kirrbach, René (Betreuer); Fischer, Wolf-Joachim (Betreuer)
Thesis
2020Entwicklung eines Aufbaus für die teilautomatisierte Montage von Mikrospektrometern
Kruse, Jens
: Seelig, D. (Betreuer); Knobbe, J. (Betreuer)
Thesis
2020Entwicklung eines integrierten, digitalen Empfängers für echtzeitfähige, leitungsungebundene, optische Übertragungen
Steinbach, Hagen
: Fitz, R. (Betreuer); Ebberg, A. (Betreuer); Faulwaßer, M. (Betreuer)
Master Thesis
2020Entwurf, Konstruktion und Vorbereitung des Aufbaus eines hochminiaturisierten Gitterspektrometers für den Nahinfrarotbereich
Starcke, Antonia Jasmin
: Beyerlein, Mathias; Grüger, Heinrich
Bachelor Thesis
2020FeFET: A versatile CMOS compatible device with game-changing potential
Beyer, S.; Dünkel, S.; Trentzsch, M.; Müller, J.; Hellmich, A.; Utess, D.; Paul, J.; Kleimaier, D.; Pellerin, J.; Müller, S.; Ocker, J.; Benoist, A.; Zhou, H.; Mennenga, M.; Schuster, M.; Tassan, F.; Noack, M.; Pourkeramati, A.; Müller, F.; Lederer, M.; Ali, T.; Hoffmann, R.; Kämpfe, T.; Seidel, K.; Mulaosmanovic, H.; Breyer, E.T.; Mikolajick, T.; Slesazeck, S.
Conference Paper
2020First time of nanoscopic electrostatic drives pushing for ultrasonic transmission for gesture recognition
Monsalve Guaracao, J.M.; Kircher, M.; Wall, F.; Krenkel, M.; Kaiser, B.; Langa, S.; Schenk, H.
Conference Paper
2020Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2019
 
Annual Report
2020Furnace annealed HfO2-Films for the Integration of Ferroelectric Functionalities into the BEoL
Lehninger, D.; Ali, T.; Olivo, R.; Lederer, M.; Kämpfe, T.; Mertens, K.; Seidel, K.
Conference Paper
2020Gekrümmte Lichtleiterstruktur, Verfahren zum Herstellen derselben und optisches Überwachungssystem
Schneider, Tobias; Kirrbach, René
Patent
2020Gleichrichter für Millimeter-Wellen-Wechselspannungssignale
Harutyunyan, Armen
Patent
2020Heavy Ion Irradiation Effects on Structural and Ferroelectric Properties of HfO2 Films
Kämpfe, T.; Vogel, T.; Olivo, R.; Lederer, M.; Kaiser, N.; Petzold, S.; Ali, T.; Lehninger, D.; Trautmann, C.; Alff, L.; Seidel, K.
Conference Paper
2020HfO2-based ferroelectric FETs: Performance of single devices and mini-arrays
Mulaosmanovic, H.; Müller, F.; Breyer, E.T.; Dünkel, S.; Trentzsch, M.; Beyer, S.; Mikolajick, T.; Slesazeck, S.
Conference Paper
2020Impact of Channel Implant Variation on RTN and Flicker Noise
Raffel, Y.; Seidel, K.; Pirro, L.; Lehmann, S.; Hoffmann, R.; Olivo, R.; Kämpfe, T.; Heitmann, J.
Conference Paper
2020Impact of Ferroelectric Wakeup on Reliability of Laminate based Si-doped Hafnium Oxide (HSO) FeFET Memory Cells
Ali, T.; Kühnel, K.; Czernohorsky, M.; Rudolph, M.; Pätzold, B.; Olivo, R.; Lehninger, D.; Mertens, K.; Müller, F.; Lederer, M.; Hoffmann, R.; Mart, C.; Kalkani, M.N.; Steinke, P.; Kämpfe, T.; Müller, J.; Houdt, J. van; Seidel, K.; Eng, L.M.
Conference Paper
2020Implementierung und Erprobung einer portablen Sensorplattform auf Basis von RISC-V
Enseleit, Stephan
: Fengler Wolfgang (Betreuer); Weder, Andreas (Betreuer)
Bachelor Thesis
2020Innovative Concept of Tunable ECDLs Based on MEMS in the NIR and MIR Spectral Regime
Hoppe, M.; Rohling, H.; Schmidtmann, S.; Tatenguem, H.; Grahmann, J.; Milde, T.; Schanze, T.; Sacher, J.R.
Conference Paper
2020Integration of Hafnium Oxide on Epitaxial SiGe for p-type Ferroelectric FET Application
Lederer, M.; Müller, F.; Kühnel, K.; Olivo, R.; Mertens, K.; Trentzsch, M.; Dünkel, S.; Müller, J.; Beyer, S.; Seidel, K.; Kämpfe, T.; Eng, L.M.
Journal Article
2020Interplay Between Switching and Retention in HfO2-Based Ferroelectric FETs
Mulaosmanovic, H.; Müller, F.; Lederer, M.; Ali, T.; Hoffmann, R.; Seidel, K.; Zhou, H.; Ocker, J.; Mueller, S.; Dunkel, S.; Kleimaier, D.; Muller, J.; Trentzsch, M.; Beyer, S.; Breyer, E.T.; Mikolajick, T.; Slesazeck, S.
Journal Article
2020Kundenakquise öffentlicher Forschungseinrichtungen in Deutschland. Eine explorative Fallstudie zum Einfluss von Kommunikationskanälen bei der Vermarktung von F&E Dienstleistungen
Grebe, Steffen
: Schefczyk, Michael (Betreuer); Ernst, Cornelia (Betreuer); Titze, Stephan (Betreuer)
Thesis
2020Mechanische gekoppelte mikroelektromechanische Ultraschallwandler
Krenkel, Marcel
: Richter, A. (Betreuer); Gerlach, G. (Betreuer)
Dissertation
2020Mikromechanische Struktur, mikromechanisches System und Verfahren zum Bereitstellen einer mikromechanischen Struktur
Drabe, Christian; Dreyhaupt, André
Patent
2020Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation
Melnikov, Anton; Schenk, Hermann; Wall, Franziska; Spitz, B.; Ehrig, L.; Langa, S.; Stolz, M.; Kaiser, B.; Conrad, H.; Schenk, H.
Conference Paper
2020Modeling and validation of CMUTs with mechanically coupled plate actuators
Krenkel, M.; Lange, N.; Koch, S.G.; Kupnik, M.
Conference Paper
2020Modellierung eines Li-Fi Transceivers zur optischen Freiraumdatenübertragung
Rödel, Jan
: Kirrbach, Rene (Betreuer); Engelbrecht, Rainer (Betreuer)
Bachelor Thesis
2020Modelling of three dimensional deep trench capacitors and identification of parasitic elements
Agarwal, Rishabh
: Czernohorsky, Malte (Betreuer); Lakner, Hubert (Betreuer); Bartha, J.W. (Betreuer)
Master Thesis
2020Monolitic Hybrid Transmitter-Receiver Lens for Rotary On-Axis Communications
Kirrbach, R.; Faulwaßer, M.; Schneider, T.; Meißner, P.; Noack, A.; Deicke, F.
Journal Article
2020Noise reduction using structures based on coupled Helmholtz resonators
Krasikova, M.; Baloshin, Y.; Slobozhanyuk, A.; Melnikov, A.; Powell, D.; Petrov, M.; Bogdanov, A.
Conference Paper
2020Novel CMOS-integrated 512x320 tip-tilt micro mirror array and related technology platform
Gehner, Andreas; Döring, S.; Rudloff, D.; Kunze, D.; Dürr, P.; Francés, S.; Hänsel, L.; Torlee, H.; Elgner, A.; Eckert, M.; Friedrichs, M.; Heber, J.; Schmidt, J.; Pufe, W.; Hohle, C.; Schulze, M.; Wagner, M.
Conference Paper
2020A Novel Dual Ferroelectric Layer Based MFMFIS FeFET with Optimal Stack Tuning Toward Low Power and High-Speed NVM for Neuromorphic Applications
Ali, T.; Seidel, K.; Kühnel, K.; Rudolph, M.; Czernohorsky, M.; Mertens, K.; Hoffmann, R.; Zimmermann, K.; Mühle, U.; Müller, J.; Houdt, J. van; Eng, L.M.
Conference Paper
2020A novel hybrid high-speed and low power antiferroelectric HSO boosted charge trap memory for high-density storage
Ali, T.; Mertens, K.; Olivo, R.; Rudolph, M.; Oehler, S.; Kühnel, K.; Lehninger, D.; Müller, F.; Lederer, M.; Hoffmann, R.; Schramm, P.; Biedermann, K.; Kia, A.M.; Metzger, J.; Binder, R.; Czernohorsky, M.; Kämpfe, T.; Müller, J.; Seidel, K.; Houdt, J.V. van; Eng, L.M.
Conference Paper
2020Obtaining Patient-Reported Outcomes Electronically with "OncoFunction" in Head and Neck Cancer Patients During Aftercare
Zebralla, Veit; Müller, Juliane; Wald, Theresa; Boehm, Andreas; Wichmann, Gunnar; Berger, Thomas; Birnbaum, Klemens; Heuermann, Katherina; Oeltze-Jafra, Steffen; Neumuth, Thomas; Singer, Susanne; Büttner, Matthias; Dietz, Andreas; Wiegand, Susanne
Journal Article
2020Passiv arbeitender Transponder mit sensitiver Funktionalität
Holland, Hans-Jürgen
Patent
2020Phase formation of a biocompatible Ti-based alloy under kinetic constraints studied via in-situ high-energy X-ray diffraction
Kosiba, K.; Rothkirch, A.; Han, J.; Deng, L.; Escher, B.; Wang, G.; Kühn, U.; Bednarcik, J.
Journal Article
2020Piezoelectric Response of Polycrystalline Silicon-Doped Hafnium Oxide Thin Films Determined by Rapid Temperature Cycles
Mart, Clemens; Kämpfe, Thomas; Hoffmann, Raik; Eßlinger, Sophia; Kirbach, Sven; Kühnel, Kati; Czernohorsky, Malte; Eng, Lukas M.; Weinreich, Wenke
Journal Article
2020Pyroelectric CMOS Compatible Sensor Element Based on Hafnium Oxide Thin Films
Mart, C.; Viegas, A.; Eßlinger, S.; Czernohorsky, M.; Weinreich, W.; Mutschall, D.; Kaiser, A.; Neumann, N.; Großmann, T.; Hiller, K.; Eng, L.M.
Conference Paper
2020Quantifying non-centrosymmetric orthorhombic phase fraction in 10 nm ferroelectric Hf0.5Zr0.5O2 films
Mukundan, V.; Consiglio, S.; Triyoso, D.H.; Tapily, K.; Schujman, S.; Mart, C.; Kämpfe, T.; Weinreich, W.; Jordan-Sweet, J.; Clark, R.D.; Leusink, G.J.; Diebold, A.C.
Journal Article
2020Reconfigurable Acoustic Metagrating for High-Efficiency Anomalous Reflection
Chiang, Y.K.; Oberst, S.; Melnikov, A.; Quan, L.; Marburg, S.; Alù, A.; Powell, D.A.
Journal Article
2020Rührer zur drahtlosen und/oder batterielosen Messung von Prozessparametern
Weder, Andreas; Heinig, Andreas
Patent
2020A scalable design of multi-bit ferroelectric content addressable memory for data-centric computing
Li, C.; Müller, F.; Ali, T.; Olivo, R.; Imani, M.; Deng, S.; Zhuo, C.; Kämpfe, T.; Yin, X.; Ni, K.
Conference Paper
2020Schöne neue Welt?
Ruffert, Christine
Book Article
2020Sem image denoising and contour image estimation using deep learning
Chaudhary, N.; Savari, S.A.; Brackmann, V.; Friedrich, M.
Conference Paper
2020Silicon-based microfluid control and switching valves using lateral electrostatic bending actuators
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Ruffert, Christine; Conrad, Holger; Schenk, Harald
Report
2020SoC compatible 1T1C FeRAM memory array based on ferroelectric Hf0.5Zr0.5O2
Okuno, J.; Kunihiro, T.; Konishi, K.; Maemura, H.; Shute, Y.; Sugaya, F.; Materano, M.; Ali, T.; Kuehnel, K.; Seidel, K.; Schroeder, U.; Mikolajick, T.; Tsukamoto, M.; Umebayashi, T.
Conference Paper
2020Spannungskontrollierbarer Kondensator mit ferroelektrischer Schicht und Verfahren zum Herstellen des spannungskontrollierbaren Kondensators mit ferroelektrischer Schicht
Kämpfe, Thomas; Polakowski, Patrick; Seidel, Konrad
Patent
2020Spannungskontrollierbarer Kondensator und Verfahren zum Herstellen eines spannungskontrollierbaren Kondensators
Kämpfe, Thomas; Polakowski, Patrick; Seidel, Konrad
Patent
2020Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction
Lederer, M.; Kämpfe, T.; Vogel, N.; Utess, D.; Volkmann, B.; Ali, T.; Olivo, R.; Müller, J.; Beyer, S.; Trentzsch, M.; Seidel, K.; Eng, L.M.
Journal Article
2020A Study on the Temperature-Dependent Operation of Fluorite-Structure-Based Ferroelectric HfO2 Memory FeFET: Pyroelectricity and Reliability
Ali, T.; Kühnel, K.; Czernohorsky, M.; Mart, C.; Rudolph, M.; Pätzold, B.; Lehninger, D.; Olivo, R.; Lederer, M.; Müller, F.; Hoffmann, R.; Metzger, J.; Binder, R.; Steinke, P.; Kämpfe, T.; Müller, J.; Seidel, K.; Eng, L.M.
Journal Article
2020A Study on the Temperature-Dependent Operation of Fluorite-Structure-Based Ferroelectric HfO2 Memory FeFET: A Temperature-Modulated Operation
Ali, T.; Kühnel, K.; Czernohorsky, M.; Mart, C.; Rudolph, M.; Pätzold, B.; Lederer, M.; Olivo, R.; Lehninger, D.; Müller, F.; Hoffmann, R.; Metzger, J.; Binder, R.; Steinke, P.; Kämpfe, T.; Müller, J.; Seidel, K.; Eng, L.M.
Journal Article
2020Surface Dependent Performance of Ultrathin TiN Films as an Electrically Conducting Li Diffusion Barrier for Li-Ion Based Devices
Speulmanns, Jan; Kia, Alireza M.; Kühnel, Kati; Bönhardt, Sascha; Weinreich, Wenke
Journal Article
2020System integration of hybrid large aperture micro scanner array for fast scanning LiDAR sensors
Sandner, Thilo; Graßhoff, Thomas; Owe, Wolf-Dietrich; Herrmann, A.; Wildenhain, M.; Schwarzenberg, M.
Conference Paper
2020Tunable non-volatile memory by conductive ferroelectric domain walls in lithium niobate thin films
Kämpfe, T.; Wang, B.; Haußmann, A.; Chen, L.-Q.; Eng, L.M.
Journal Article
2020Tuning Domain Wall Conductance in Lithium Niobate Thin-Films
Kämpfe, T.; Wang, B.; Haußmann, A.; Chen, L.-Q.; Eng, L.M.
Conference Paper
2020Ultra-low power flexible precision FeFET based analog in-memory computing
Soliman, T.; Müller, F.; Kirchner, T.; Hoffmann, T.; Ganem, H.; Karimov, E.; Ali, T.; Lederer, M.; Sudarshan, C.; Kämpfe, T.; Guntoro, A.; Wehn, N.
Conference Paper
2020Ultra-Low PoweR TechnologIes and MEmory architectures for IoT
Seidel, Konrad; Eichler, Uwe
Report
2020Untersuchung des Verhaltens von MEMS-Lautsprechern auf mechanischen Schockbelastung
Kulas, Michalina
: Schenk, Harald (Betreuer); Kahmen, Gerhard (Betreuer)
Bachelor Thesis
2020Verfahren zur Authentifizierung eines Nutzers und Authentifizierungssystem
Noack, Alexander
Patent
2020Verpackung mit Transponder und Kryptomodul
Holland, Hans-Jürgen
Patent
2020Vibration analysis of micro mirrors for LIDAR using on-chip piezo-resistive sensor
Grahmann, Jan; Schroedter, R.; Kiethe, Oliver; Todt, Ulrich
Conference Paper
2020Vorrichtung und Netzwerk zur drahtlosen, optischen Kommunikation
Kirrbach, René; Schneider, Tobias; Noack, Alexander; Faulwaßer, Michael; Deicke, Frank
Patent
2020W-Band Noise Characterization with Back-Gate Effects for Advanced 22nm FDSOI mm-Wave MOSFETs
Le, Q.H.; Huynh, D.K.; Wang, D.; Zhao, Z.; Lehmann, S.; Kämpfe, T.; Rudolph, M.
Conference Paper
2020Wafer-level vacuum-packaged translatory MEMS actuator with large stroke for NIR-FT spectrometers
Sandner, Thilo; Gaumont, Eric; Graßhoff, Thomas; Rieck, Andreas; Seifert, T.; Auböck, Gerald; Grahmann, Jan
Journal Article
2020Whether Ge-Rich ZrO2 and Ge-Rich HfO2 Materials Have Similar Reaction on Annealing Treatment?
Khomenkova, L.; Lehninger, D.; Agocs, E.; Petrik, P.; Portier, X.; Korsunska, N.; Melnichuk, O.; Gourbilleau, F.; Heitmann, J.
Conference Paper
2020Wide and fast mode-hop free MEMS tunable ECDL concept and realization in the NIR and MIR spectral regime
Hoppe, M.; Rohling, H.; Schmidtmann, S.; Honsberg, M.; Tatenguem, H.; Grahmann, J.; Milde, T.; Schanze, T.; Sacher, J.R.
Conference Paper