Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Advances of MOEMS-based external cavity QCLs
Härtelt, Marko; Hugger, Stefan; Butschek, Lorenz; Schilling, Christian; Merten, André; Schwarzenberg, Markus; Dreyhaupt, André; Grahmann, Jan; Rattunde, Marcel; Ostendorf, Ralf
Conference Paper
2019The annealing effect on memory state stability and interlayer coupling in perpendicular magnetic tunnel junctions with ultrathin MgO barrier
Lv, Hua; Fidalgo, João; Leitão, Diana C.; Silva, Ana V.; Kämpfe, Thomas; Riedel, Stefan; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Freitas, Paolo P.; Cardoso, Susana
Journal Article
2019Assessment of conduction mechanisms through MgO ultrathin barriers in CoFeB/MgO/CoFeB perpendicular magnetic tunnel junctions
Lv, Hua; Fidalgo, João; Silva, Ana V.; Leitão, Diana C.; Kämpfe, Thomas; Riedel, Stefan; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Freitas, Paolo P.; Cardoso, Susana
Journal Article
2019Ein Beitrag zum Entwurf vibrationsbelasteter Microscanner
Kiethe, Oliver
: Janschek, Klaus; Schroedter, Richard (Betreuer); Todt, Ulrich (Betreuer)
Thesis
2019Characterisation of ferroelectric thin films with scanning probe microscope methods
Norouzi Kalkani, Mahsa
: Kämpfe, Thomas (Betreuer); Ecke, Ramona (Betreuer); Schulz, Stefan E. (Gutachter)
Master Thesis
2019CMUT with mechanically coupled plate actuators for low frequencies
Krenkel, Marcel; Stolz, Michael; Koch, Sandro G.; Kupnik, Mario
Journal Article
2019Co-MOCVD processed seed layer for through silicon via copper metallization
Esmaeili, S.; Lilienthal, K.; Nagy, N.; Gerlich, L.; Krause, R.; Uhlig, B.
Journal Article
2019Defects in oxidized p-type Si wafers observed by surface photovoltage spectroscopy
Kolkovsky, Vladimir
Journal Article
2019Development of Rutile Titanium Oxide Thin Films as Battery Material Component Using Atomic Layer Deposition
Kia, A.M.; Bönhardt, S.; Zybell, S.; Kühnel, K.; Haufe, N.; Weinreich, W.
Journal Article
2019Electrical and structural properties of direct current magnetron sputtered amorphous TiAl thin films
Kolkovsky, V.; Schmidt, Jan-Uwe; Döring, S.
Journal Article
2019Electrocaloric temperature change in ferroelectric Si-doped hafnium oxide (HfO2) thin films
Mart, C.; Kämpfe, T.; Pätzold, B.; Rudolph, M.; Czernohorsky, M.; Müller, J.; Weinreich, W.
Presentation
2019Entwurf eines analogen Hochgeschwindigkeits-Frontends für die optische drahtlose Kommunikation
Spundflasche, Martin
: Gärtner, Uwe (Prüfer); Noack, Alexander (Gutachter); Kirrbach, René (Gutachter)
Bachelor Thesis
2019Epitaxial n++-InGaAs ultra-shallow junctions for highly scaled n-MOS devices
Tejedor, P.; Drescher, M.; Vázquez, L.; Wilde, L.
Journal Article
2019Ferroelectric and pyroelectric properties of polycrystalline La-doped HfO2 thin films
Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke
Journal Article
2019Formation of highly conformal spinel lithium titanate thin films based on a novel three-step atomic layer deposition process
Bönhardt, S.; Kühnel, K.; Kia, A.M.; Weinreich, W.
Journal Article
2019Fraunhofer Institute for Photonic Microsystems. Annual Report 2018
 
Annual Report
2019Glow discharge optical emission spectrometry for quantitative depth profiling of CIGS thin-films
Kodalle, T.; Greiner, D.; Brackmann, V.; Prietzel, K.; Scheu, A.; Bertram, T.; Reyes-Figueroa, P.; Unold, T.; Abou-Ras, D.; Schlatmann, R.; Kaufmann, C.A.; Hoffmann, V.
Journal Article
2019High-density energy storage in Si-doped hafnium oxide thin films on area-enhanced substrates
Kühnel, Kati; Czernohorsky, M.; Riedel, Steffen; Mart, Clemens; Weinreich, Wenke
Journal Article
2019Hybrid assembled MEMS scanner array with large aperture for fast scanning LIDAR systems
Sandner, T.; Grasshoff, T.; Wildenhain, M.; Schwarzenberg, M.
Journal Article
2019Investigation of Pt-Salt-Doped-Standalone-Multiwall Carbon Nanotubes for On-Chip Interconnect Applications
Liang, J.; Chen, R.; Ramos, R.; Lee, J.; Okuno, H.; Kalita, D.; Georgiev, V.; Berrada, S.; Sadi, T.; Uhlig, B.; Lilienthal, K.; Dhavamani, A.; Könemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Asenov, A.; Dijon, J.; Todri-Sanial, A.
Journal Article
2019Kern für Echtzeit
Deicke, Frank; Beck, Monika
Electronic Publication
2019Konzeptentwicklung eines optischen Messplatzes zur präzisen und hochdynamischen Bestimmung des zweidimensionalen Kippwinkels von 2D-Mikrospiegeln als Referenzmesssystem einer Echtzeitregelung
Stolba, Friedrich
: Czarske, Jürgen (Gutachter); Büttner, Lars (Gutachter); Sandner, Thilo (Gutachter)
Thesis
2019Platinum-Copper Defects in Silicon
Kolkovsky, V.; Kolkovsky, V.; Weber, J.
Journal Article
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Conference Paper
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Poster
2019Pyroelectric Energy Conversion in Doped Hafnium Oxide (HfO2) Thin Films on Area-Enhanced Substrates
Hanrahan, B.; Mart, C.; Kämpfe, T.; Czernohorsky, M.; Weinreich, W.; Smith, A.
Journal Article
2019Quasi-statischer MOEMS-Gitterscanner zum spektralen Durchstimmen eines MIR-Quantenkaskadenlasers
Merten, André; Schroedter, Richard; Dreyhaupt, André; Graßhoff, Thomas; Schwarzenberg, Markus; Hugger, Stefan; Schilling, Christian; Grahmann, Jan; Ostendorf, Ralf
Journal Article
2019Reduced metal contamination from crucible and coating using a silicon nitride based diffusion barrier for the growth of cast quasi-single crystalline silicon ingots
Wolny, F.; Krause, A.; Müller, M.; Fischer, G.; Neuhaus, H.
Journal Article
2019Separation of Individual Thermal Double-Donor Levels by Laplace Deep-Level Transient Spectroscopy
Gwozdz, K.; Kolkovsky, V.; Weber, J.
Journal Article
2019Structure and Thermoelectric Properties of CoSi-Based Film Composites
Kuznetsova, V.S.; Novikov, S.V.; Nichenametla, C.K.; Calvo, J.; Wagner-Reetz, M.
Journal Article, Conference Paper
2019Studentische Beschäftigungsverhältnisse als Quelle des Active Sourcings? Eine Analyse am Beispiel des Fraunhofer-Instituts für Photonische Mikrosysteme IPMS
Wendenburg, Anja
: Haubold, Anne-Katrin (Gutachter); Richter, Thorsten S. (Gutachter)
Bachelor Thesis
2019Study of sub-volume activation in CoFeB/MgO memory devices near spin reorientation transition
Fidalgo, João; Lv, Hua; Silva, Ana V.; Leitão, Diana C.; Kämpfe, Thomas; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Cardoso, Susana
Poster
2019Theory and Experiment of Antiferroelectric (AFE) Si-Doped Hafnium Oxide (HSO) Enhanced Floating-Gate Memory
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Zimmermann, K.; Biedermann, K.; Eng, L.M.; Seidel, K.; Müller, J.
Journal Article
201810 Gbit/s bidirectional transceiver with monolithic optic for rotary connector replacements
Faulwaßer, M.; Kirrbach, R.; Schneider, T.; Noack, A.
Conference Paper
201814nm Ferroelectric FinFET technology with steep subthreshold slope for ultra low power applications
Krivokapic, Z.; Rana, U.; Galatage, R.; Razavieh, A.; Aziz, A.; Liu, J.; Shi, J.; Kim, H.J.; Sporer, R.; Serrao, C.; Busquet, A.; Polakowski, P.; Müller, J.; Kleemeier, W.; Jacob, A.; Brown, D.; Knorr, A.; Carter, R.; Banna, S.
Conference Paper
20183D Analysis of Thin Layers by ToF-SIMS
Mohammadian Kia, Alireza; Esmaeili, Sajjad; Mart, Clemens; Utriainen, Mikko; Haufe, Nora; Puurunen, Riikka L.; Weinreich, Wenke
Poster
2018Advances in MOEMS technologies for high quality imaging systems
Schenk, H.; Wagner, M.; Grahmann, J.; Merten, A.
Conference Paper
2018Aktoren auf Basis elektroaktiver Polymer/Nanopartikel Komposite und deren Anwendung in einer Mikrolinse mit variablem Fokus
Pawlik, Boscij
: Lakner, Hubert (Betreuer); Grabmaier, Anton (Betreuer)
Dissertation
2018Aspects of high aspect ratio silicon etching - capacitor application
Rudolph, Matthias; Pätzold, Björn; Czernohorsky, Malte
Presentation
2018Automatic tracking of Li-Fi links for wireless industrial ethernet
Kirrbach, René; Faulwaßer, Michael; Schneider, Tobias; Ostermann, Robert; Noack, Alexander
Conference Paper
2018Automatic Tracking of Li-Fi Links for Wireless Industrial Ethernet
Kirrbach, René
Presentation
2018Barrier breakdown mechanism in nano-scale perpendicular magnetic tunnel junctions with ultrathin MgO barrier
Lv, Hua; Leitao, Diana C.; Hou, Zhiwei; Freitas, Paulo P.; Cardoso, Susana; Kämpfe, Thomas; Müller, Johannes; Langer, Juergen; Wrona, Jerzy
Journal Article
2018Bringing NIR spectrometers into mobile phones
Reinig, P.; Grüger, H.; Knobbe, J.; Pügner, T.; Meyer, S.
Conference Paper
2018Carbon-hydrogen-related complexes in Si
Kolkovsky, V.; Stübner, Ronald; Gwozdz, K.; Weber, Jörg
Journal Article
2018Challenges and Progress on Carbon Nanotube Integration for BEOL Interconnects
Uhlig, B.; Dhavamani, A.; Nagy, N.; Lilienthal, K.; Liske, R.; Ramos, R.; Dijon, J.; Okuno, H.; Kalita, D.; Lee, J.; Georgiev, V.; Asenov, A.; Amoroso, S.; Wang, L.; Koenemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Liang, J.; Pandey, R.R.; Chen, R.; Todri-Sanial, A.
Conference Paper
2018Charakterisierung und Bewertung von CuPc-basierten OFET's im Hinblick auf eine Anwendung als NO2-Sensor
Reichelt, Christoph
: Zipser, Stephan (Betreuer); Graf, Alexander (Betreuer)
Bachelor Thesis
2018Clamped-clamped in-plane electrostatic bending actuators in silicon-based microfluidic devices
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Schenk, Harald
Presentation
2018CMOS compatible pyroelectric applications enabled by doped HfO2 films on deep-trench structures
Mart, Clemens; Weinreich, Wenke; Czernohorsky, Malte; Riedel, Stefan; Zybell, Sabine; Kühnel, Kati
Conference Paper
2018CMOS design of Digital to Analog converters for active matrix Spatial Light Modulator applications
Paramesh, Vidwath
: Presberger, Thomas (Betr.); Horstmann, John Thomas (Betr.)
Master Thesis
2018CMOS-kompatibler MEMS-Lautsprecher für Im-Ohr-Anwendungen
Conrad, Holger; Ehrig, Lutz; Kaiser, Bert; Schenk, Hermann; Schuffenhauer, David; Stolz, Michael; Gaudet, Matthieu; Schenk, Harald
Conference Paper
2018CMUT with mechanically coupled plate actuators
Krenkel, Marcel; Kircher, Marco; Kupnik, Mario; Koch, Sandro
Conference Paper
2018Cobalt integration solutions - integration (R&D accelerator)
Gerlich, Lukas; Wislicenus, Markus; Koch, Johannes; Dhavamani, Abitha; Esmaeili, Sajjad; Uhlig, Benjamin
Presentation
2018Copper electroplating with polyethylene Glycol. Pt.II. Experimental analysis and determination of model parameters
Yang, Hongliu; Krause, Robert; Scheunert, Christin; Liske, Romy; Uhlig, Benjamin; Preusse, Axel; Dianat, Arezoo; Bobeth, Manfred; Cuniberti, Gianaurelio
Journal Article
2018Design of on-chip RFID transponder antennas
Heinig, Andreas
Conference Paper
2018Design of On-Chip RFID Transponder Antennas
Heinig, Andreas
Presentation
2018Development of titanium oxide conformal thin film by atomic layer deposition
Mohammadian Kia, Alireza
Poster
2018Drahtlose Datenübertragung für kurze und lange Strecken. Alternative Li-Fi
Noack, Alexander
Journal Article
2018Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald
Journal Article
2018Enhancement of vertical integration density by engineered BSOI wafers
Kaden, C.; Langa, S.; Ludewig, T.; Schönberger, A.; Herrmann, A.; Göbel, A.; Kolkovsky, V.; Jeroch, W.; Pufe, W.
Journal Article
2018Entwicklung eines Beleuchtungsmoduls für stroboskopische, phasenschiebende Interferometrie
Medeiros Ventura, Luiz Guilherme de
: Heitmann, Johannes (Gutachter); Skupsch, Christoph (Gutachter); Wolschke, Steffen (Betreuer)
Master Thesis
2018Entwicklung eines Transmitters mit Hochleistungsleuchtdiode für die optische drahtlose Datenübertragung
Lei, Lei
: Ostermann, Robert (Betreuer); Fischer, Wolf-Joachim (Gutachter)
Thesis
2018A FeFET based super-low-power ultra-fast embedded NVM technology for 22nm FDSOI and beyond
Dünkel, S.; Trentzsch, M.; Richter, R.; Moll, P.; Fuchs, C.; Gehring, O.; Majer, M.; Wittek, S.; Müller, B.; Melde, T.; Mulaosmanovic, H.; Slesazeck, S.; Müller, S.; Ocker, J.; Noack, M.; Löhr, D.-A.; Polakowski, P.; Müller, J.; Mikolajick, T.; Höntschel, J.; Rice, B.; Pellerin, J.; Beyer, S.
Conference Paper
2018Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design
Schroedter, Richard; Roth, Matthias; Janschek, Klaus; Sandner, Thilo
Journal Article
2018Fraunhofer Institute for Photonic Microsystems. Annual Report 2017
 
Annual Report
2018Frequency domain analysis of pyroelectric response in silicon-doped hafnium oxide (HfO2) thin films
Mart, Clemens; Czernohorsky, Malte; Zybell, Sabine; Kämpfe, Thomas; Weinreich, Wenke
Journal Article
2018Functional integration - structure-integrated wireless sensor technology targeting smart mechanical engineering applications
Rülke, Steffen; Beyer, Volkhard; Zorn, Wolfgang; Meinig, Marco; Wecker, Julia; Reuter, Danny; Deicke, Frank; Clausner, André; Werner, Thomas
Conference Paper
2018The gateone-project: A digital innovation hub accelerating innovation through ecosystem design and product trajectory
Hamelin, R.; Andrieux, G.; Chartier, I.; Roustom, B.; Healy, T.; Ali, Z.; Legrand, B.; Mayora, K.; Scholles, M.; Guerre, R.
Conference Paper
2018Grundlegende Untersuchungen zur Phasenmodulation von Licht im Subnanometer-Bereich mittels diffraktiver Mikrospiegelarrays
Sicker, Cornelius
: Schenk, Harald; Reif, Jürgen
Dissertation
2018High Endurance Ferroelectric Hafnium Oxide-Based FeFET Memory Without Retention Penalty
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Calvo, J.; Zimmermann, K.; Müller, J.
Journal Article
2018High-Speed, Cellular Li-Fi HotSpot for Real-Time Applications
Kirrbach, René; Faulwaßer, Michael; Ostermann, Robert; Jakob, Benjamin; Noack, Alexander
Presentation
2018Hydrogen-related defects in Al2O3 layers grown on n-type Si by the atomic layer deposition technique
Kolkovsky, Vladimir; Stübner, Ronald
Journal Article
2018Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition technique
Kolkovsky, Vladimir; Scholz, Sebastian; Kolkovsky, Valery; Schmidt, Jan-Uwe; Heller, Rene
Journal Article
2018Kanalkodierungen in der optisch-drahtlosen Übertragung
Audi, Maher
: Faulwaßer, Michael (Betreuer); Noack, Alexander (Betreuer); Tutsch, Dietmar (Gutachter); Möller, Reinhard (Gutachter)
Master Thesis
2018Knickbares Substrat mit Bauelement
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino
Patent
2018Konzeption und Herstellung von Systemdemonstratoren für miniaturisierte Im-Ohr-Lautsprecher mit drahtlosen Kommunikationsschnittstellen
Horky, Steve
: Kaiser, Bert (Betreuer); Bauer, Reinhard (Betreuer)
Thesis
2018Konzipierung und Umsetzung eines Automotive Ethernet-MAC IP-Cores
Zhu, Hailong
: Hildebrandt, Ralf (Betreuer); Fischer, Wolf-Joachim (Gutachter)
Thesis
2018Layer thickness scaling and wake-up effect of pyroelectric response in Si-doped HfO2
Mart, Clemens; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke
Journal Article
2018Li-Fi für Kurzstrecken. Drahtlose Industriekommunikation
Noack, Alexander
Journal Article
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Journal Article
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Presentation
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Presentation
2018Lithium Detection and Tracking for Solid State Battery Test Stacks
Mohammadian Kia, Alireza; Haufe, Nora; Zybell, Sabine; Bönhardt, Sascha; Kühnel, Kati; Speulmanns, Jan K.; Weinreich, Wenke
Poster
2018LPCVD in-situ doped silicon for thermoelectric applications
Calvo, Jesús; Drescher, Maximilian; Kühnel, Kati; Sauer, Bodo; Müller, Michael; Schmidt, Christian; Boui, Fatima; Völklein, Friedemann; Wagner-Reetz, Maik
Journal Article, Conference Paper
2018Mechanically coupled capacitive ultrasonic transducer
Krenkel, Marcel; Lange, Nicolas; Koch, Sandro; Kircher, Marco
Conference Paper
2018MEMS basierte Ultraschallwandler für die Anwendung in flüssigen und gasförmigen Umgebungen und Möglichkeiten der CMOS Integration
Lange, Nicolas; Grafe, Mario; Koch, Sandro; Kaden, Christiane; Schulze, Matthias
Presentation
2018MEMS integration on foundry-fabricated CMOS backplanes
Hohle, Christoph; Schulze, Matthias
Book Article
2018MEMS-Tunable VCSELs-Driven Terahertz Emitters Based on Conventional and Nanoelectrode Photomixers
Haidar, M.T.
Dissertation
2018Microoptoelectromechanical systems-based external cavity quantum cascade lasers for real-time spectroscopy
Butschek, Lorenz; Hugger, Stefan; Jarvis, Jan-Philip; Härtelt, Marko; Merten, André; Schwarzenberg, Markus; Grahmann, Jan; Stothard, David; Warden, Matthew; Carson, Christoph; Macarthur, John; Fuchs, Frank; Ostendorf, Ralf; Wagner, Joachim
Journal Article
2018Mikromechanische Bauelemente mit mechanischen Aktuatoren
Conrad, Holger; Gaudet, Matthieu; Schenk, Harald; Uhlig, Sebastian
Patent
2018MMS, MMS-Array, MEMS-Aktuator und Verfahren zum Bereitstellen eines MMS
Dürr, Peter; Friedrichs, Martin; Gehner, Andreas; Kunze, Detlef
Patent
2018Modellbasierter Systementwurf zur Steuerung und Regelung quasi-statischer Mikroscannerspiegel mit elektrostatischem Kammantrieb
Schroedter, Richard
: Hofmann, Wilfried; Janschek, Klaus
Dissertation
2018Modulating complex beams in amplitude and phase using fast tilt-micromirror arrays and phase masks
Roth, M.; Heber, J.; Janschek, K.
Journal Article
2018Monolithic integration for photonic applications: MEMS on CMOS and functional BSOI
Kaden, Christiane; Schulze, Matthias
Presentation
2018New way to realize miniaturized complex optical systems in high volume
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino; Reinig, Peter; Meyer, Sebastian
Conference Paper
2018Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology
Gehner, A.; Dürr, P.; Kunze, D.; Rudloff, D.; Elgner, A.; Heber, J.; Francés, S.; Skupsch, C.; Torlee, H.; Eckert, M.; Friedrichs, M.; Schmidt, J.; Pufe, W.; Döring, S.; Hohle, C.; Schulze, M.; Wagner, M.
Conference Paper
2018A novel electrostatic actuator, the Nano-E-Drive, and its integration in a micropump design
Gaudet, Matthieu
Presentation
2018Optische Anordnung für ein Spektralanalysesystem, Verfahren zu dessen Herstellung und Spektralanalysesystem
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino
Patent
2018Optische Anordnung zur Erzeugung von Lichtfeldverteilungen und Verfahren zum Betrieb einer optischen Anordnung
Heber, Jörg; Janschek, Klaus; Roth, Matthias
Patent
2018Passive RFID sensors - battery-free, wireless pressure measurements
Weder, Andreas; Koch, Sandro; Grätz, Hagen; Kircher, Marco
Presentation
2018Passive sensor transponders - wireless, battery-free sensing with RFID technology
Weder, Andreas
Presentation
2018A physics-based investigation of Pt-salt doped carbon nanotubes for local interconnects
Liang, J.; Ramos, R.; Dijon, J.; Okuno, H.; Kalita, D.; Renaud, D.; Lee, J.; Georgiev, V.P.; Berrada, S.; Sadi, T.; Asenov, A.; Uhlig, B.; Lilienthal, K.; Dhavamani, A.; Könemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Teo, K.; Pandey, R.R.; Todri-Sanial, A.
Conference Paper
2018Plagiatschutz mittels RFID
Holland, Hans-Jürgen
Presentation
2018Progress on carbon nanotube BEOL interconnects
Uhlig, B.; Liang, J.; Lee, J.; Ramos, R.; Dhavamani, A.; Nagy, N.; Dijon, J.; Okuno, H.; Kalita, D.; Georgiev, V.; Asenov, A.; Amoroso, S.; Wang, L.; Millar, C.; Konemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Pandey, R.R.; Chen, R.; Todri-Sanial, A.
Conference Paper
2018Rapid Synthesis of Sub‐10 nm Hexagonal NaYF4‐Based Upconverting Nanoparticles using Therminol® 66
Hesse, J.; Klier, D.T.; Sgarzi, M.; Nsubuga, A.; Bauer, C.; Grenzer, J.; Hübner, R.; Wislicenus, M.; Joshi, T.; Kumke, M.U.; Stephan, H.
Journal Article
2018Reliable high-density energy storage in Si-doped HfO2 thin films on 3D-structures
Kühnel, Kati; Riedel, Stefan; Mart, Clemens; Weinreich, Wenke
Presentation
2018Repetitive nonlinear control for linear scanning micro mirrors
Schroedter, R.; Schwarzenberg, M.; Grahmann, J.; Sandner, T.; Janschek, K.
Conference Paper
2018A review of acoustic impedance matching methods to validate additive manufactured metamaterial for capacitive micromachined ultrasonic transducers
Schweiger, Severin; Koch, Sandro
Conference Paper
2018Silicon doped hafnium oxide (HSO) and hafnium zirconium oxide (HZO) based FeFET
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Thrun, X.; Hanisch, N.; Steinke, P.; Calvo, J.; Müller, J.
Journal Article
2018Smart and efficient optimization of NED actuators
Schuffenhauer, David; Gaudet, Matthieu; Conrad, Holger
Conference Paper
2018Subnanometer calibration of diffractive micromirror arrays
Sicker, C.; Heber, J.; Berndt, D.
Abstract
2018Subnanometer calibration of diffractive micromirror arrays
Sicker, Cornelius; Heber, Jörg; Berndt, Dirk
Presentation
2018System zur Analyse von elektromagnetischer Strahlung und Bauelement zur Herstellung desselben
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino
Patent
2018Towards a compact, portable, handheld device for contactless real-time standoff detection of hazardous substances
Carson, Christopher; Macarthur, John; Warden, Mattew; Stothard, David; Butschek, Lorenz; Hugger, Stefan; Jarvis, Jan-Philip; Härtelt, Marko; Ostendorf, Ralf; Merten, André; Schwarzenberg, Markus; Grahmann, Jan; Ratajczyk, Marcin
Conference Paper
2018Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers
Sandner, Thilo; Gaumont, Eric; Grasshoff, Thomas; Auböck, Gerald; Kenda, Andreas; Gisler, Thomas; Langa, Sergiu; Herrmann, Andreas; Grahmann, Jan
Conference Paper
2018Tuning parameters and their impact on ferroelectric hafnium oxide
Polakowski, Patrick; Büttner, Teresa; Ali, Tarek Nadi Ismail; Riedel, Stefan; Kämpfe, Thomas; Seidel, Konrad; Müller, Johannes; Pätzold, Björn
Presentation
2018Ultrathin Lithium Ion Diffusion Barrier for On-Chip 3D All-Solid-State Batteries
Speulmanns, Jan; Zybell, Sabine; Mohammadian Kia, Alireza; Bönhardt, Sascha; Weinreich, Wenke; Liske, Romy
Poster
2018Understanding Electromigration in Cu-CNT Composite Interconnects
Lee, J.; Berrada, S.; Adamu-Lema, F.; Nagy, N.; Georgiev, V.P.; Sadi, T.; Liang, J.; Ramos, R.; Carrillo-Nunez, H.; Kalita, D.; Lilienthal, K.; Wislicenus, M.; Pandey, R.; Chen, B.; Teo, K.B.K.; Goncalves, G.; Okuno, H.; Uhlig, B.; Todri-Sanial, A.; Dijon, J.; Asenov, A.
Journal Article
2018Vertically aligned carbon nanotube films as absorption layers for IR applications
Kini, Mandar; Bonitz, Jens; Müller, Michael; Schulz, Stefan E.; Hermann, Sascha
Conference Paper
2018Vertically integrated modeling of light-induced defects
Laine, H.S.; Vahlman, H.; Haarahiltunen, A.; Jensen, M.A.; Modanese, C.; Wagner, M.; Wolny, F.; Buonassisi, T.; Savin, H.
Conference Paper
2018Vollduplex-Transceiver für die optische drahtlose Hochgeschwindigkeitskommunikation
Faulwaßer, Michael
: Fischer, Wolf-Joachim; Jamshidi, Kambiz; Henker, Matthias
Dissertation
2018Wake-up effect of pyroelectric response in doped HfO2
Mart, Clemens; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke
Abstract
2017Acoustic simulation and characterization of capacitive micromachined ultrasonic transducers
Klemm, Markus
: Gerlach, Gerald (Gutachter); Kupnik, Mario
Dissertation
2017Adsorptionsuntersuchungen in einem Mehrkomponenten-Additiv-System bei der elektrochemischen Kupferabscheidung im Bereich Halbleitermetallisierung
Scheunert, Christin
: Krause, Robert (Betreuer); Kalies, Grit (Betreuer)
Bachelor Thesis
2017ASIC zur Ansteuerung und Signalerfassung eines CMUT
Pietzsch, Marcus; Weder, Andreas; Heinig, Andreas; Amelung, Jörg; Koch, Sandro; Kircher, Marco
Conference Paper
2017Atomic Layer Deposition (ALD) and characterization of Ti- and Co-based films for Lithium-Ion Batteries (LIB)
Hoßbach, C.; Neumann, V.; Reddy, K.D.S.; Bönhardt, S.; Stoeck, A.; Fischer, D.; Reif, J.; Shukla, S.; Zybell, S.; Albert, M.; Giebeler, L.; Bartha, J.W.
Poster
2017Atomic layer deposition of functional films for all-solid-state lithium-ion microbatteries
Zybell, Sabine
Presentation
2017Atomic layer deposition of lithium titanate on planar and 3D-structured 200 mm silicon substrates
Bönhardt, Sascha
Presentation
2017Ein Beitrag zur Simulation und Realisierung repetitiver Regelungsalgorithmen für elektrostatische quasi-statische Mikrospiegel
Che, Xingqi
: Schroedter, Richard (Betreuer); Janschek, Klaus (Betreuer)
Thesis
2017BEoL post CMP cleaning challenges for 22 nm FD-SOI and beyond
Koch, Johannes; Rehschuh, Stephan; Gerlich, Lukas; Dhavamani, Abitha; Steinke, Philipp; Krause, Robert; Naue, Johannes; Bott, Sascha; Vasilev, Boris; Breuer, Dirk; Seidel, Robert; Preusse, Axel; Bartha, Johann Wolfgang; Uhlig, Benjamin
Conference Paper
2017Capacitance maximization of ultra-thin Si-capacitors by atomic layer deposition of anti-ferroelectric HfO2 in high aspect ratio structures
Riedel, Stefan; Weinreich, Wenke; Mart, Clemens; Müller, Johannes
Presentation
2017Carbon-hydrogen related defects in SiGe observed after dc H plasma treatment
Stübner, Ronald; Kolkovsky, Vladimir; Weber, Jörg; Abrosimov, Nikolay V.
Journal Article
2017Carbon-related defects in microelectronics
Kolkovsky, V.; Stübner, R.; Weber, J.
Journal Article
2017Charakterisierung der Zuverlässigkeit in der High-k Metal Gate Technologie
Drescher, Maximilian; Erben, Elke; Grass, Carsten; Trentzsch, Martin; Lazarevic, Florian; Leitsmann, Roman; Plaenitz, Philipp; Mchedlidze, Teimuraz; Seidel, Konrad; Liske, Romy; Bartha, Johann Wolfgang
Conference Paper
2017CMOS-design of a cascadable front-end ASIC for capacitive micromachined ultrasonic transducer (CMUT) arrays
Weder, Andreas; Koch, Sandro; Pietzsch, Marcus; Heinig, Andreas; Kircher, Marco; Lange, Nicolas; Amelung, Jörg
Conference Paper
2017CMOS-design of a cascadable front-end ASIC for capacitive micromachined ultrasonic transducer (CMUT) arrays
Weder, Andreas; Koch, Sandro; Pietzsch, Marcus; Heinig, Andreas; Kircher, Marco; Lange, Nicolas; Amelung, Jörg
Presentation
2017CMOS-design of a cascadable front-end ASIC for CMUT arrays
Koch, Sandro G.; Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas; Kircher, Marco; Grafe, Mario; Lange, Nicolas; Amelung, Jörg
Presentation
2017CMOS-kompatible elektrostatische Biegeaktoren
Conrad, Holger; Gaudet, Matthieu; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Schenk, Harald
Conference Paper
2017Concept for a new approach to realize complex optical systems in high volume
Grüger, H.; Knobbe, J.; Pügner, T.; Leuckefeld, M.; Reinig, P.; Meyer, S.
Conference Paper
2017Concept for the fast modulation of light in amplitude and phase using analog tilt-mirror arrays
Roth, M.; Heber, J.; Janschek, K.
Conference Paper
2017Concept for the fast modulation of light in amplitude and phase using analog tilt-mirror arrays
Roth, Matthias; Heber, Jörg; Janschek, Klaus
Presentation
2017A contribution to the expansion of the applicability of electrostatic forces in micro transducers
Schenk, H.; Conrad, H.; Gaudet, M.; Uhlig, S.; Kaiser, B.; Langa, S.; Stolz, M.; Schimmanz, K.
Conference Paper
2017Customized BSOI wafers integration of additional interconnects into the handle wafer
Kaden, Christiane; Langa, Sergiu
Presentation
2017Customized micro mirror array for highly parallel industrial laser direct processing on the micro- and nanoscale
Schmidt, Jan-Uwe; Dürr, Peter; Wagner, Michael
Conference Paper
2017Development of CMOS-compatible materials for thermoelectric and sensor applications in semiconductor industry
Wagner-Reetz, M.; Calvo, J.; Nichenametla, C.K.; Kühnel, K.; Göhler, T.; Schulz, S.; Burkov, A.; Uhlig, B.
Presentation
2017Development of MEMS-based capacitive ultrasonic transducers - technology, applications and perspectives for ultrasonic sensing
Kircher, Marco
Presentation
2017Development of metal oxide processes for highly conformal thin layers by plasma enhanced atomic layer deposition
Kia, Alireza Mohammadian
: Hiller, Karla (Betreuer); Weinreich, Wenke (Betreuer)
Master Thesis
2017Development of transition metal silicides as thinfilm materials for thermoelectric applications
Nichenametla, Charan Krishna
: Wagner-Reetz, Maik; Schulz, Stefan E.
Master Thesis
2017Druckvorrichtung zum Drucken einer dreidimensionalen Struktur
Unamuno-Eguren, Anartz; Klemm, Markus
Patent
2017Electrically tunable micro-lens with a strain-enhanced polymer nanocomposite actuator
Costache, Florenta; Pawlik, Boscij; Rieck, Andreas
Conference Paper
2017Electrochemical characterization of lithium containing thin films
Dorai Swamy Reddy, Keerthi
: Zybell, Sabine (Betreuer); Neumann, Volker (Betreuer); Bartha, Johann Wolfgang (Gutachter); Albert, Matthias (Gutachter)
Master Thesis
2017Electrostactically in-plane driven silicon micropump for modular configuration
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald
Conference Paper
2017Electrostatic bending actuators with a liquid filled nanometer scale gap
Gaudet, Matthieu; Uhlig, Sebastian; Stolz, Michael; Arscott, Steve; Conrad, Holger; Langa, Sergiu; Kaiser, Bert; Schenk, Harald
Conference Paper
2017Elektrooptisch induzierte Wellenleiter in paranematischen Flüssigkeitskristallen
Blasl, Martin
: Schenk, Harald (Gutachter); Seibold, Götz (Gutachter); Schröder, Thomas (Gutachter); Küppers, Franko (Gutachter)
Dissertation
2017Enhanced reliability and capacitance stability of ZrO2-based decoupling capacitors by interface doping with Al2O3
Mart, C.; Zybell, S.; Riedel, S.; Czernohorsky, M.; Seidel, K.; Weinreich, W.
Journal Article
2017Entwicklung und Simulation einer Kollimator- und Fokusoptik für die optische drahtlose Datenübertragung
Kirrbach, René
: Noack, Alexander (Betreuer); Fischer, Wolf-Joachim (Gutachter); Marschner, Uwe (Gutachter)
Thesis
2017Entwicklung von Mechanismen für die unbeaufsichtigte Windows-10-Installation im Fraunhofer IPMS unter Berücksichtigung spezifischer Datenschutzrichtlinien
Keller, Denni
: Richter, Felix (Betreuer); Baumgartl, Robert (Betreuer)
Thesis
2017Entwurf und Analyse einer Forward-Error-Correction (FEC) für optische Übertragungssysteme mit Intensitätsmodulation, limitierenden Verstärkern und begrenzten Decoder-Ressourcen
Müller, Franz
: Henker, M. (Betreuer); Faulwaßer, M. (Betreuer)
Master Thesis
2017Erarbeitung eines Lösungsvorschlages zur Erstellung einer TestBench mittels der "Universal Vertification Methodology" (UVM)
Miersch, Matthias
: Hildebrandt, Ralf (Betreuer); Fischer, Wolf-Joachim (Gutachter); Marschner, Uwe (Gutachter)
Thesis
2017Erarbeitung von Lösungsvorschlägen für integrierte Temperatursensoren in RFID-Transponder
Li, Bo
: Landwehr, Matthias; Fischer, Wolf-Joachim
Thesis
2017Erarbeitung von Lösungsvorschlägen zur Optimierung einer vorhandenen UHF-RFID-Frontend-Schaltung
Gottfried, Tobias
: Landwehr, Matthias; Klix, Wilfried
Thesis
2017Erhöhte Sicherheit durch RFID-Sensorik für Predictive Maintenance Anwendungen
Weder, A.
Journal Article
2017Erhöhung der Zuverlässigkeit von High-k Dielektrika für integrierte hochkapazitive Kondensatoren
Mart, Clemens
: Weber, Jörg (Gutachter); Lakner, Hubert (Gutachter); Weinreich, Wenke (Betreuer)
Master Thesis
2017Evaluation of an electrochemical corrosion technique for the determination of static etch rates of post CMP cleaning chemicals
Krause, Robert; Koch, Johannes; Rehschuh, Stephan; Naue, Johannes; Bott, Sascha; Uhlig, Benjamin; Vasilev, Boris
Presentation
2017The fabrication of copper-carbon nanotube composites for global interconnects
Nagy, Nicole; Lilienthal, Katharina; Uhlig, Benjamin
Poster
2017Ferroelectric HfO2 thin film testing and whole wafer mapping with non-contact corona-Kelvin metrology
Marinskiy, D.; Polakowski, P.; Edelman, P.; Wilson, M.; Lagowski, J.; Metzger, J.; Binder, R.; Müller, J.
Journal Article
2017Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2016
 
Annual Report
2017From machine data to forecast model: How data-driven new maintenance concepts are created for the production
Reichelt, Dirk
Presentation
2017Gewitter im Chip - Resistive Speicher für low-power Anwendungen
Seidel, Konrad; Riedel, Stefan; Kalishettyhalli Ma, Mamathamba; Polakowski, Patrick; Müller, Johannes
Conference Paper
2017Herstellung und Charakterisierung von LiPON als Feststoffelektrolyt für integrierbare Lithium-Ionen-Batterien auf Siliziumbasis
Krämer, Vincent
: Zybell, Sabine (Betr.); Ingebrandt, Sven (Betr.); Saumer, Monika (Betr.)
Master Thesis
2017Herstellung und Messung von elektrischen Teststrukturen zur Untersuchung von Elektromigration in Kupfer-CNT-Kompositen
Makus, Steffen
: Lilienthal, Katharina (Betreuer)
Master Thesis
2017High-K metal gate stacks with ultra-thin interfacial layers formed by low temperature microwave-based plasma oxidation
Czernohorsky, M.; Seidel, K.; Kühnel, K.; Niess, J.; Sacher, N.; Kegel, W.; Lerch, W.
Journal Article
2017How to analyze food and future requirements for NIR spectroscopy
Reinig, Peter; Grüger, Heinrich; Hintschich, Susanne; Knobbe, Jens; Pügner, Tino
Conference Paper
2017How to integrate MEMS on foundry-fabricated CMOS backplanes
Schulze, Matthias; Hohle, Christoph; Friedrichs, Martin
Conference Paper
2017Interface traps in 28 nm node field effect transistors detected by capacitance transient spectroscopy
Mchedlidze, T.; Drescher, M.; Erben, E.; Weber, J.
Journal Article
2017Josephson effects at iron pnictide superconductors: Approaching phase-sensitive experiments
Schmidt, S.; Döring, S.; Hasan, N.; Schmidl, F.; Tympel, V.; Kurth, F.; Iida, K.; Ikuta, H.; Wolf, T.; Seidel, P.
Journal Article
2017Kapazitive mikromechanische Ultraschallsysteme (CMUT) für die zerstörungsfreie Materialcharakterisierung und -überwachung
Koch, Sandro G.; Kircher, Marco; Grafe, Mario
Presentation
2017Kapazitive mikromechanische Ultraschallsysteme (CMUT) für die zerstörungsfreie Prüfung und Überwachung
Koch, Sandro G.; Lange, Nicolas; Kircher, Marco; Krenkel, Marcel; Grafe, Mario; Rudloff, Dirk; Amelung, Jörg
Conference Paper
2017Kapazitive mikromechanische Ultraschallwandler für die zerstörungsfreie Prüfung und Überwachung
Koch, Sandro G.; Lange, Nicolas; Kircher, Marco; Krenkel, Marcel; Grafe, Mario; Rudloff, Dirk; Amelung, Jörg
Poster
2017Lebensmittellabor im Handy. Dem Food Scanner einen Schritt näher
Grüger, Heinrich
Report
2017Li-Fi - Optical Wireless Communication
Deicke, Frank
Journal Article
2017Li-Fi roadshow trail. For the smart systems hub
Noack, Alexander
Presentation
2017MEMS-based ultrasonic sensor systems for applications in fluid environment
Grafe, Mario
Presentation
2017MiBot-Einsatz in der Gruppe MESYS
Schimmanz, Klaus
Presentation
2017Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner with on-chip piezo-resistive sensor feedback
Schroedter, Richard; Schwarzenberg, Markus; Dreyhaupt, André; Barth, Robert; Sandner, Thilo; Janschek, Klaus
Conference Paper
2017Mikrochip mit einer RFID-Transponder-Schaltung und einer ON-Chip-Schlitzantenne
Heiß, Michael
Patent
2017Miniature photonic system for next generation food quality authentication
Hintschich, Susanne; Reinig, Peter
Poster
2017Miniaturisierte Laserlichtquelle für Infrarotspektroskopie
Merten, A.; Dreyhaupt, A.; Hugger, S.; Butschek, L.; Grahmann, J.; Schwarzenberg, M.; Ostendorf, R.; Jarvis, J.; Härtelt, M.
Conference Paper
2017Miniaturized NIR spectrometers - state of the art & recent developments
Reinig, Peter; Knobbe, Jens; Pügner, Tino; Hintschich, Susanne; Meyer, Sebastian; Grüger, Heinrich
Presentation
2017Miniaturized sensor for the detection of environmental pollutants
Graf, Alexander; Stübner, Ronald; Kunath, Christian; Meyer, Sebastian; Schenk, Harald
Conference Paper
2017Miniaturized sensor for the detection of environmental pollutants
Graf, Alexander; Stübner, Ronald; Kunath, Christian; Meyer, Sebastian; Schenk, Harald
Poster
2017Modeling the effects of lanthanum, nitrogen, and fluorine treatments of Si-SiON-HfO2-TiN gate stacks in 28 nm high-k-metal gate technology
Leitsmann, R.; Lazarevic, F.; Drescher, M.; Erben, E.
Journal Article
2017Modellierung und Simulation des Chemisch-mechanischen Planarisierens unter besonderer Berücksichtigung langreichweitiger Wechselwirkungen auf der Chipskala
Bott, Sascha
: Gerlach, G.; Bartha, J.W.; Heitmann, J.
Dissertation
2017Morphology-driven control of metabolite selectivity using nanostructure-initiator mass spectrometry
Gao, Jian; Louie, Katherine B.; Steinke, Philipp; Bowen, Benjamin P.; Raad, Markus de; Zuckermann, Ronald N.; Siuzdak, Gary; Northen, Trent R.
Journal Article
2017Nano-powerplant for on-chip autonomous systems
Weinreich, Wenke
Presentation
2017Nitrogen Engineering in the Ultrathin SiO2 Interface Layer of High- k CMOS Devices: A First-Principles Investigation of Fluorine, Oxygen, and Boron Defect Migration
Lazarevic, F.; Leitsmann, R.; Drescher, M.; Erben, E.; Plänitz, P.; Schreiber, M.
Journal Article
2017A novel electrostatic actuator technology for integrated RF MEMS and optical switches
Shashank; Conrad, Holger; Gaudet, Matthieu; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Poster
2017Novel ferroelectric FET based synapse for neuromorphic systems
Mulaosmanovic, H.; Ocker, J.; Müller, S.; Noack, M.; Müller, J.; Polakowski, P.; Mikolajick, T.; Slesazeck, S.
Conference Paper
2017Novel TSV metallization and simplified ECD processes for ultra-large scale integration (ULSI) technology
Esmaeili Dehkalani, M. Sajjad
: Lilienthal, Katharina (Betreuer); Adelung, Rainer (Betreuer)
Master Thesis
2017Numerische Optimierung von Mikroaktoren
Schuffenhauer, David
: Gaudet, Matthieu (Betreuer); Schenk, Harald (Betreuer)
Master Thesis
2017PEALD and pulsed CVD of Cobalt thin films using the precursor cyclopentadienylcobalt dicarbonyl
Hossbach, Christoph; Shukla, Shashank; Fischer, Dustin; Reif, Johanna; Bönhardt, Sascha; Geidel, Marion; Albert, Matthias; Bartha, Johann W.
Poster
2017A photonic smart system for food quality and safety sensing: First integration and measurement results
Bertani, Francesca Romana; Bourgos, Paraskevas; Businaro, Luca; Gambacorta, Lucia; Gerardino, Annamaria; Hintschich, Susanne; Koutalieris, Georgios; Logothesis, Marios; Martinelli, Eugenio; Nychas, George John; Solfrizzo, Michele; Tosic, Milenko; Wunder, Gerhard
Poster
2017Properties of ALD ferroelectric Si-doped HfO2 characterized with noncontact Corona-Kelvin metrology
Polakowski, Patrick; Müller, Johannes; Marinskiy, Dmitriy; Findlay, Andrew; Edelman, Piotr; Wilson, Marshall; Lagowski, Jacek; Metzger, Joachim; Binder, Robert
Presentation
2017PVD and ALD process development of advanced oxide-based RRAM-stacks
Kalishetthyhalli Mahadevaiah, Mamathamba
: Müller, Johannes (Gutachter); Lakner, Hubert (Gutachter); Fischer, Wolf-Joachim (Gutachter)
Master Thesis
2017Real-time spectroscopy enabled by external cavity QCLs with MOEMS diffraction gratings
Butschek, Lorenz; Hugger, Stefan; Jarvis, Jan-Philip; Härtelt, Marko; Merten, André; Grahmann, Jan; Boskovic, Dusan; Fuchs, Frank; Ostendorf, Ralf; Schilling, Christian; Rattunde, Marcel; Wagner, Joachim
Conference Paper
2017Regelung nicht-resonanter Mikrospiegel mit elektrostatischem Kammantrieb
Schroedter, Richard; Janschek, Klaus
Presentation
2017Reliability improvements of TiN/Al2O3/TiN for linear high voltage metal-insulator-metal capacitors using an optimized thermal treatment
Lefevre, A.; Ferreira, D.; Veillerot, M.; Barnes, J.-P.; Parat, G.; Czernohorsky, M.; Lallemand, F.
Journal Article
2017Repetitive flachheitsbasierte Folgeregelung von quasi-statischen Mikroscannern
Schroedter, Richard; Che, Xingqi; Roth, Matthias; Sandner, Thilo; Janschek, Klaus
Conference Paper
2017Repetitive flachheitsbasierte Folgeregelung von quasi-statischen Mikroscannern
Schroedter, Richard; Che, Xingqi; Roth, Matthias; Sandner, Thilo; Janschek, Klaus
Poster
2017RFID meets OPC-UA - transparent and secure integration of sensor nodes into industrial and cloud environments
Weder, Andreas; Grätz, Hagen; Voß, Kim; Deicke, Frank; Reichelt, Dirk
Conference Paper
2017RFID-Sensoren für das Internet der Dinge
Deicke, Frank
Journal Article
2017Seed-layer resistance and its impact on the electrochemical copper deposition
Wislicenus, Marcus; Gerlich, Lukas; Koch, Johannes; Uhlig, Benjamin
Presentation
2017Sicherheitsmerkmal, Verfahren zum Herstellen eines Sicherheitsmerkmals und Verfahren zum Authentifizieren eines Benutzers unter Verwendung eines Sicherheitsmerkmals
Reinig, Peter; Knobbe, Jens; Hohle, Christoph
Patent
2017Silicon-doped hafnium oxide anti-ferroelectric thin films for energy storage
Ali, F.; Liu, X.; Zhou, D.; Yang, X.; Xu, J.; Schenk, T.; Müller, J.; Schroeder, U.; Cao, F.; Dong, X.
Journal Article
2017Smart hip prosthesis - an overview
Deicke, Frank
Presentation
2017Spatially aware connectivity for wearables using Li-Fi technology
Noack, Alexander
Presentation
2017A survey of carbon nanotube interconnects for energy efficient integrated circuits
Todri-Sanial, A.; Ramos, R.; Okuno, H.; Dijon, J.; Dhavamani, A.; Wislicenus, M.; Lilienthal, K.; Uhlig, B.; Sadi, T.; Georgiev, V.; Asenov, A.; Amoroso, S.; Pender, A.; Brown, A.; Millar, C.; Motzfeld, F.; Gotsmann, B.; Liang, J.; Goncalves, G.; Rupesinghe, N.; Teo, K.
Journal Article
2017Switching kinetics in nanoscale hafnium oxide based ferroelectric field-effect transistors
Mulaosmanovic, Halid; Ocker, Johannes; Müller, Stefan; Schroeder, Uwe; Müller, Johannes; Polakowski, Patrick; Flachowsky, Stefan; Bentum, Ralf van; Mikolajick, Thomas; Slesazeck, Stefan
Journal Article
2017Technological aspects of a new micro‑electro‑mechanical actuation principle: Nano‑e‑drive
Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Gaudet, Matthieu; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Journal Article
2017Tragbare Vorrichtung zur Übermittlung von personenbezogenen Daten an ein Verarbeitungssystem und das Verarbeitungssystem zum Ausgeben eines Steuersignals in Abhängigkeit der personenbezogenen Daten
Amelung, Jörg; Grüger, Heinrich
Patent
2017Trench filling with a-Si using a PE-CVD process and back etch sequence
Elsäßer, Linus; Naumann, A.
Conference Paper
2017A user-friendly guide to the optimum ultraviolet photolithographic exposure and greyscale dose of SU-8 photoresist on common MEMS, microsystems, and microelectronics coatings and materials
Gaudet, Matthieu; Arscott, Steve
Journal Article
2017Valence EELS below the limit of inelastic delocalization using conical dark field EFTEM or Bessel beams
Stöger-Pollach, M.; Schachinger, T.; Biedermann, K.; Beyer, V.
Journal Article
2017Vorrichtung und Verfahren zur Erzeugung eines optischen Musters aus Bildpunkten in einer Bildebene
Dürr, Peter; Mai, Alexander
Patent
2017Wireless industrial real-time networks with Li-Fi
Faulwaßer, Michael; Noack, Alexander; Ostermann, Robert; Schneider, Tobias; Zschorn, Christopher
Conference Paper
2016A 28nm HKMG super low power embedded NVM technology based on ferroelectric FETs
Trentzsch, M.; Flachowsky, S.; Richter, R.; Paul, J.; Reimer, B.; Utess, D.; Jansen, S.; Mulaosmanovic, H.; Müller, S.; Slesazeck, S.; Ocker, J.; Noack, M.; Müller, J.; Polakowski, P.; Schreiter, J.; Beyer, S.; Mikolajick, T.; Rice, B.
Conference Paper
2016Adaptives Prothesensystem - Entwicklung eines Prothesensystems zur Optimierung und adaptiven Anpassung der ossären Verankerung von Gelenkendoprothesen
Rotsch, Christian; Grätz, Hagen; Kluess, Daniel; Gille, Katarina; Heinig, Andreas; Schulze, Christian; Bader, Rainer; Hunger, Sandra; Töppel, Thomas; Drossel, Welf-Guntram
Conference Paper
2016Antenna design for a 24 GHz RFID tag with an on-chip-antenna
Heiss, Michael; Lischer, Sascha
Poster
2016Atomic layer deposition system for fast precursor screening
Shukla, Shashank; Hossbach, Christoph; Sundqvist, Jonas; Bönhardt, Sascha; Feddersen-Clausen, Oliver; Sharma, Varun; Albert, Matthias; Bartha, Johann W.
Poster
2016Aufbau und Inbetriebnahme eines Messplatzes für die Charakterisierung von gegeneinander rotierenden optisch-drahtlosen Transceiver-Modulen
Kunz, Julian Elias
: Noack, Alexander (Betr.); Ostermann, Robert (Betr.); Fischer, Wolf-Joachim (Betr.)
Thesis
2016Back-end-of-line integration technology of capacitive micromachined ultrasonic transducers (CMUT)
Amelung, Jörg; Klemm, Markus; Elsäßer, Linus; Kircher, Marco; Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas; Müller, Michael; Grüger, Heinrich
Conference Paper
2016Back-End-of-Line integration technology of capacitive micromachined ultrasonic transducers (CMUT)
Koch, Sandro; Amelung, Jörg; Elsäßer, Linus; Kircher, Marco; Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas; Müller, Michael
Presentation
2016Capacitance transient spectroscopy measurements on high-k metal gate field effect transistors fabricated using 28nm technology node
Mchedlidze, T.; Drescher, M.; Erben, E.; Weber, J.
Conference Paper
2016Carbon-hydrogen complexes in n- and p-type SiGe-alloys studied by Laplace deep level transient spectroscopy
Stübner, Ronald; Kolkovsky, Vladimir; Weber, Jörg; Abrosimov, N.V.
Journal Article, Conference Paper
2016Catalytic ALD of SiO2 as spacer for an E-Beam direct write self-aligned double patterning process on 300 mm wafers
Kühnel, Kati; Riedel, Stefan; Weinreich, Wenke; Thrun, Xaver; Czernohorsky, Malte; Pätzold, Björn; Rudolph, Matthias
Presentation
2016Characterization of low temperature plasma generated oxides on germanium based substrates
Poduval, Geedhika Kallidil
: Czernohorsky, Malte (Betreuer); Lakner, Hubert (Gutachter); Fischer, Wolf-Joachim (Gutachter)
Master Thesis
2016Charge-trapping phenomena in HfO2-based FeFET-type nonvolatile memories
Yurchuk, Ekaterina; Müller, Johannes; Müller, Stefan; Paul, Jan; Pesic, Milan; Benthum, Ralf van; Schroeder, Uwe; Mikolajick, Thomas
Journal Article
2016Correlation between the macroscopic ferroelectric material properties of Si:HfO2 and the statistics of 28nm FeFET memory arrays
Mueller, S.; Slesazeck, S.; Henker, S.; Flachowsky, S.; Polakowski, P.; Paul, J.; Smith, E.; Müller, J.; Mikolajick, T.
Journal Article, Conference Paper
2016CVD-CoXN for advanced semiconductor metallization
Dhavamani, Abitha; Wislicenus, Marcus; Gerlich, Lukas; Uhlig, Benjamin
Presentation
2016Development and electrical characterization of a metal-ferroelectric-insulator semiconductor FET test structure
Ali, Tarek
: Müller, Johannes (Betreuer); Lakner, Hubert (Betreuer); Heyns, Marc
Master Thesis
2016Enhanced dielectric properties of thin Ta2O5 films grown on 65 nm SiO2/Si
Kolkovsky, V.; Kurth, E.; Kunath, C.
Journal Article, Conference Paper
2016Evaluation of water based intelligent fluids for resist stripping in single wafer cleaning tools
Rudolph, Matthias; Esche, Silvio; Hohle, Christoph; Schumann, Dirk; Steinke, Philipp; Thrun, Xaver; Sonntag, Justus von
Conference Paper
2016Experimentalaufbau zur Messung vertikaler Oberflächen von mikromechanischen Aktoren am DHM
Lemcke, Klaus Benjamin
Bachelor Thesis
2016Experimentelle Untersuchungen an lateralen elektrostatischen Nanoaktoren
Stolz, Michael
: Schenk, Harald (Betr.); Seibold, Götz (Betr.)
Master Thesis
2016Eye safety analysis for non-uniform retinal scanning laser trajectories
Schelinski, Uwe; Dallmann, Hans-Georg; Grüger, Heinrich; Knobbe, Jens; Pügner, Tino; Reinig, Peter; Woittennek, Franziska
Conference Paper
2016Fabrication and characterization of a novel electrostatic actuator
Gaudet, Matthieu
Presentation
2016FAST LIGHT: Möglichkeiten der Li-Fi Kommunikation aus technischer Sicht
Noack, Alexander
Presentation
2016Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2015
 
Annual Report
2016Geometric and chemical components of the giant piezoresistance in silicon nanowires
McClarty, M.M.; Jegenyes, N.; Gaudet, M.; Toccafondi, C.; Ossikovski, R.; Vaurette, F.; Arscott, S.; Rowe, A.C.H.
Journal Article
2016Hardware-Software-System zum ambulanten EKG-Monitoring unter Routinebedingungen
Noack, Alexander
Dissertation
2016HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias
Poster
2016HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias
Journal Article, Conference Paper
2016High endurance strategies for hafnium oxide based ferroelectric field effect transistor
Müller, J.; Polakowski, P.; Müller, S.; Mulaosmanovic, H.; Ocker, J.; Mikolajick, T.; Slesazeck, S.; Flachowsky, S.; Trentzsch, T.
Conference Paper
2016Hyperspectral image analysis for standoff trace detection using IR laser spectroscopy
Jarvis, J.P.; Fuchs, F.; Hugger, S.; Ostendorf, R.; Butschek, L.; Yang, Q.; Dreyhaupt, A.; Grahmann, J.; Wagner, J.
Conference Paper
2016Identification of carbon-hydrogen complexes in n- and p-type silicon
Stübner, Ronald; Kolkovsky, Vladimir; Scheffler, Leopold; Weber, Jörg
Journal Article, Conference Paper
2016Impact of field cycling on HfO2 based non-volatile memory devices
Schroeder, U.; Pesic, M.; Schenk, T.; Mulaosmanovic, H.; Slesazeck, S.; Ocker, J.; Richter, C.; Yurchuk, E.; Khullar, K.; Müller, J.; Polakowski, P.; Grimley, E.D.; LeBeau, J.M.; Flachowsky, S.; Jansen, S.; Kolodinski, S.; Bentum, R. van; Kersch, A.; Künneth, C.; Mikolajick, T.
Conference Paper
2016Implementation und Konfiguration eines Linux-Systems auf ein Xilinx Zynq-SoC-System
Lehl, Dmitrij
: Grafe, Mario (Betreuer); Schönherr, J. (Betreuer)
Thesis
2016In situ bow change of Al-alloy MEMS micromirrors during 248-nm laser irradiation
Mai, Alexander; Bunce, Christopher; Hübner, René; Pahner, Daniel; Dauderstädt, Ulrike
Journal Article
2016The influence of adsorption kinetics on copper superfilling for dual damascene
Liske, Romy; Krause, Robert; Uhlig, Benjamin; Gerlich, Lukas; Bott, Sascha; Wislicenus, Marcus; Preusse, Axel
Journal Article
2016Influence of annealing in H atmosphere on the electrical properties of Al2O3 layers grown on p-type Si by the atomic layer deposition technique
Kolkovsky, V.; Stübner, R.; Langa, S.; Wende, U.; Kaiser, B.; Conrad, H.; Schenk, H.
Journal Article
2016Influence of the applied charge on the electro-chemical degradation in green phosphorescent organic light emitting diodes
de Moraes, I.R.; Scholz, S.; Leo, K.
Journal Article
2016Innovative Energieoptimierung. Forschungsprojekt soll Energiemanagement revolutionieren
Hörschelmann, L.; Reichelt, D.
Journal Article
2016Integration von Maschinendaten in eine Big-Data-Lösung am Beispiel von Halbleiter-Frontendtools
Schmidt, Martin
: Reichelt, Dirk (Betreuer); Gehrhardt, Ingolf (Betreuer)
Master Thesis
2016Der intelligente Mobilitätsassistent - Unterstützung der autonomen Mobilität älterer Menschen
Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas
Presentation
2016Investigation of the influence of the sample topography on the measurement uncertainty of a scanning white light interferometer
Adapa, Bharath Reddy
: Skupsch, Christoph (Betr.); Lemmer, Uli (Betr.)
Master Thesis
2016IoT Future: Visible Light Communication/Light Fidelity
Noack, Alexander
Presentation
2016La-doped ZrO2 based Back End of Line (BEoL) decoupling capacitors
Weinreich, Wenke; Seidel, Konrad; Polakowski, Patrick; Drescher, Maximilian; Gummenscheimer, A.; Nolan, M.G.; Cheng, L.; Triyoso, D.H.
Poster
2016La-doped ZrO2 based BEoL decoupling capacitors
Weinreich, W.; Seidel, K.; Polakowski, P.; Drescher, M.; Gummenscheimer, A.; Nolan, M.G.; Cheng, L.; Triyoso, D.H.
Conference Paper
2016Laser-induced periodic surface structures of thin, complex multi-component films
Reif, J.; Varlamova, O.; Ratzke, M.; Uhlig, S.
Journal Article
2016Li-Fi communication for industrial real-time data links
Faulwaßer, Michael
Presentation
2016Li-Fi interconnects for embedded designs in industry 4.0
Faulwaßer, Michael; Deicke, Frank; Ostermann, Robert; Schneider, Tobias
Conference Paper
2016Licht - eine Alternative zu Funk?
Deicke, Frank; Faulwaßer, Michael
Journal Article
2016Lichtausbreitung in einstellbaren Mikroringresonatoren
Martin, Anja
: Costache, Florenta (Betr.); Hartmann, Peter (Betr.)
Master Thesis
2016Liquid crystal waveguide switch for fast fiber optic sensor monitoring
Blasl, M.; Costache, F.
Conference Paper
2016Lithographische Techniken für die hochauflösende Zell-Mikroskopie: Strahlformung in der Biologie mit strukturierten UV-Schichten
Heber, Jörg; Rückerl, F.; Berndt, Dirk; Schmidt, Jan; Bellow, S.; Tivenez, J.-Y.; Knobbe, Jens; Shorte, S.L.; Wagner, Michael
Presentation
2016Low-temperature microwave-based plasma oxidation of Ge and oxidation of silicon followed by plasma nitridation
Lerch, W.; Schick, T.; Sacher, N.; Kegel, W.; Niess, J.; Czernohorsky, M.; Riedel, S.
Conference Paper
2016LPCVD in-situ doped silicon for thermoelectric applications
Calvo, J.; Müller, M.; Sauer, B.; Drescher, M.; Schmidt, C.; Völklein, F.; Wagner-Reetz, M.
Presentation
2016MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies
Grahmann, Jan; Dreyhaupt, André; Drabe, Christian; Schroedter, Richard; Kamenz, Jörg; Sandner, Thilo
Conference Paper
2016MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben
Schenk, Harald; Conrad, Holger; Gaudet, Matthieu; Schimmanz, Klaus; Langa, Sergiu
Patent
2016Micro scanning mirrors and enabling technology for applied optics
Sandner, Thilo
Conference Paper
2016Migration from CAN to CAN FD - how to boost network performance
Hildebrandt, Ralf; Deicke, Frank
Conference Paper
2016Mikromechanische Vorrichtung mit einem aktiv biegbaren Element
Gaudet, Matthieu; Schimmanz, Klaus; Stolz, Michael; Langa, Sergiu; Kaiser, Bert
Patent
2016Miniaturized NIR scanning grating spectrometer for use in mobile phones
Knobbe, Jens; Pügner, Tino; Grüger, Heinrich
Conference Paper
2016Mobilitätsassistent "MOVEAS" - Unterstützung der Mobilität älterer Menschen
Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas
Presentation
2016MOEMS based scanning grating facilitates miniaturization and tuning speed enhancement of an EC-QCL towards a µEC-QCL for real time spectroscopic sensing
Grahmann, Jan
Conference Paper
2016Near-infrared grating spectrometer for mobile phone applications
Pügner, T.; Knobbe, J.; Grüger, H.
Journal Article
2016Novel applications of photonic micro sensor systems: Real-world examples from plastics recycling to burglary monitoring
Reinig, Peter
Presentation
2016A novel electrostatic actuator class
Conrad, Holger; Kaiser, Bert; Gaudet, Matthieu; Langa, Sergiu; Stolz, Michael; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Journal Article, Conference Paper
2016A novel electrostatic micro-actuator class and its application potential for optical MEMS
Schenk, Harald; Conrad, Holger; Gaudet, Matthieu; Uhlig, Sebastian; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Schimmanz, Klaus
Conference Paper
2016Patterning and Imaging with Electrons: Assessing Multi-Beam SEM for e-Beam Structured CMOS Samples
Garbowski, Tomasz; Panteleit, Friedhelm; Dellemann, Gregor; Gutsch, Manuela; Hohle, Christoph; Reich, Elke; Rudolph, Matthias; Steidel, Katja; Thrun, Xaver; Zeidler, Dirk
Conference Paper
2016Plano-convex variable focal length micro-lens with a polymer nanocomposite actuator
Pawlik, Boscij; Rieck, Andreas; Costache, Florenta
Journal Article, Conference Paper
2016Predictive Maintenance mittels Big Data
Reichelt, Dirk
Presentation
2016Prozessanalyse der Tetramethylammoniumhydroxid-Ätzung von Silizium zur Qualitätsverbesserung optischer Gitter
Benter, Sandra
: Schnabel, Hans-Dieter (Betr.); Kaden, Christiane (Betr.)
Bachelor Thesis
2016Raman tensor elements of β-Ga2O3
Kranert, C.; Sturm, C.; Schmidt-Grund, R.; Grundmann, M.
Journal Article
2016Reaktives Ionenätzen zur Mehrfachstrukturierung und Elektrodentrennung für Kondensatoranwendungen in der Halbleiterindustrie
Pätzold, Björn
: Hohle, Christoph; Rudolph, Matthias; Rennekamp, Reinhold
Master Thesis
2016Real-time closed-loop control for micro mirrors with quasistatic comb drives
Schroedter, Richard; Sandner, Thilo; Janschek, Klaus; Roth, Matthias; Hruschka, Clemens
Conference Paper
2016Recent advances and applications of external Cavity-QCLs towards hyperspectral imaging for standoff detection and real-time spectroscopic sensing of chemicals
Ostendorf, R.; Butschek, L.; Hugger, S.; Fuchs, F.; Yang, Q.; Jarvis, J.; Schilling, C.; Rattunde, M.; Merten, A.; Grahmann, J.; Boskovic, D.; Tybussek, T.; Rieblinger, K.; Wagner, J.
Journal Article
2016Requirements and challenges for MEMS on CMOS
Schulze, Matthias
Presentation
2016RF simulation of the transmission path of a RFID backscatter transponder between reader and transponder antenna with ANSYS HFSS
Zhai, Wenqian
: Fischer, Wolf-Joachim (Betreuer); Heiß, Michael (Betreuer)
Master Thesis
2016RFID meets OPC UA - wie man mittels Standardisierung Integrations-Aufwand verringert
Reichelt, Dirk
Presentation
2016RFID-Sensor Transponder - "smarte" Integration mittels OPC-UA
Weder, Andreas; Reichelt, Dirk
Presentation
2016RFID-Transponder mit einer integrierten Antennenanordnung
Heiß, Michael
Patent
2016RTLS based services by APP based indoor localization and navigation
Scheibner, Christian; Voß, Kim
Presentation
2016Scanning optical MEMS with very high frequencies
Drabe, Christian; Graßhoff, Thomas; Todt, Ulrich; Flemming, André; Sandner, Thilo; Grahmann, Jan
Presentation
2016Schallwandlerarray mit gekoppelten Wandlern
Klemm, Markus; Elsäßer, Linus; Unamuno-Eguren, Anartz; Kupnik, Mario; Unger, Alexander
Patent
2016Simulation und Charakterisierung eines neuartigen mikromechanischen elektrostatischen Aktors
Kaiser, Bert
: Schenk, Harald (Betreuer); Bestehorn, Michael (Betreuer); Kupnik, Mario (Betreuer)
Dissertation
2016Size reduction of RFID tags by using an on-chip antenna
Heiß, Michael; Lischer, Sascha
Conference Paper
2016Smart walls with wireless humidity measurement
Heiß, Michael; Hildebrandt, Ralf; Scheibner, Christian
Conference Paper
2016Spatially resolved scatter measurement of diffractive micromirror arrays
Sicker, Cornelius; Heber, Jörg; Berndt, Dirk
Journal Article
2016Spatio-angular illumination control using diffractive micromirror arrays
Heber, Jörg; Rückerl, Florian; Berndt, Dirk; Schmidt, Jan; Bellow, Sebastien; Tinevez, Jean-Yves; Knobbe, Jens; Shorte, Spencer; Wagner, Michael
Conference Paper
2016Status of ferroelectric HfO2 based 1T FeFET memories
Mikolajick, T.; Schroeder, U.; Slesazeck, S.; Müller, S.; Schenk, T.; Müller, J.
Presentation
2016System design of programmable 4f phase modulation techniques for rapid intensity shaping - a conceptual comparison
Roth, Matthias; Heber, Jörg; Janschek, Klaus
Conference Paper
2016A thermally robust and thickness independent ferroelectric phase in laminated hafnium zirconium oxide
Riedel, S.; Polakowski, P.; Müller, J.
Journal Article
2016Track & trace scenarios to increase shop floor flexibility and productivity
Reichelt, Dirk
Presentation