Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Advances of MOEMS-based external cavity QCLs
Härtelt, Marko; Hugger, Stefan; Butschek, Lorenz; Schilling, Christian; Merten, André; Schwarzenberg, Markus; Dreyhaupt, André; Grahmann, Jan; Rattunde, Marcel; Ostendorf, Ralf
Conference Paper
2019The annealing effect on memory state stability and interlayer coupling in perpendicular magnetic tunnel junctions with ultrathin MgO barrier
Lv, Hua; Fidalgo, João; Leitão, Diana C.; Silva, Ana V.; Kämpfe, Thomas; Riedel, Stefan; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Freitas, Paolo P.; Cardoso, Susana
Journal Article
2019Assessment of conduction mechanisms through MgO ultrathin barriers in CoFeB/MgO/CoFeB perpendicular magnetic tunnel junctions
Lv, Hua; Fidalgo, João; Silva, Ana V.; Leitão, Diana C.; Kämpfe, Thomas; Riedel, Stefan; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Freitas, Paolo P.; Cardoso, Susana
Journal Article
2019Ein Beitrag zum Entwurf vibrationsbelasteter Microscanner
Kiethe, Oliver
: Janschek, Klaus; Schroedter, Richard (Betreuer); Todt, Ulrich (Betreuer)
Thesis
2019Characterisation of ferroelectric thin films with scanning probe microscope methods
Norouzi Kalkani, Mahsa
: Kämpfe, Thomas (Betreuer); Ecke, Ramona (Betreuer); Schulz, Stefan E. (Gutachter)
Master Thesis
2019CMUT with mechanically coupled plate actuators for low frequencies
Krenkel, Marcel; Stolz, Michael; Koch, Sandro G.; Kupnik, Mario
Journal Article
2019Defects in oxidized p-type Si wafers observed by surface photovoltage spectroscopy
Kolkovsky, Vladimir
Journal Article
2019Electrical and structural properties of direct current magnetron sputtered amorphous TiAl thin films
Kolkovsky, V.; Schmidt, Jan-Uwe; Döring, S.
Journal Article
2019Electrocaloric temperature change in ferroelectric Si-doped hafnium oxide (HfO2) thin films
Mart, C.; Kämpfe, T.; Pätzold, B.; Rudolph, M.; Czernohorsky, M.; Müller, J.; Weinreich, W.
Presentation
2019Entwurf eines analogen Hochgeschwindigkeits-Frontends für die optische drahtlose Kommunikation
Spundflasche, Martin
: Gärtner, Uwe (Prüfer); Noack, Alexander (Gutachter); Kirrbach, René (Gutachter)
Bachelor Thesis
2019Ferroelectric and pyroelectric properties of polycrystalline La-doped HfO2 thin films
Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke
Journal Article
2019High-density energy storage in Si-doped hafnium oxide thin films on area-enhanced substrates
Kühnel, Kati; Czernohorsky, M.; Riedel, Steffen; Mart, Clemens; Weinreich, Wenke
Journal Article
2019Hybrid assembled MEMS scanner array with large aperture for fast scanning LIDAR systems
Sandner, T.; Grasshoff, T.; Wildenhain, M.; Schwarzenberg, M.
Journal Article
2019Kern für Echtzeit
Deicke, Frank; Beck, Monika
Electronic Publication
2019Konzeptentwicklung eines optischen Messplatzes zur präzisen und hochdynamischen Bestimmung des zweidimensionalen Kippwinkels von 2D-Mikrospiegeln als Referenzmesssystem einer Echtzeitregelung
Stolba, Friedrich
: Czarske, Jürgen (Gutachter); Büttner, Lars (Gutachter); Sandner, Thilo (Gutachter)
Thesis
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Conference Paper
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Poster
2019Quasi-statischer MOEMS-Gitterscanner zum spektralen Durchstimmen eines MIR-Quantenkaskadenlasers
Merten, André; Schroedter, Richard; Dreyhaupt, André; Graßhoff, Thomas; Schwarzenberg, Markus; Hugger, Stefan; Schilling, Christian; Grahmann, Jan; Ostendorf, Ralf
Journal Article
2019Reduced metal contamination from crucible and coating using a silicon nitride based diffusion barrier for the growth of cast quasi-single crystalline silicon ingots
Wolny, F.; Krause, A.; Müller, M.; Fischer, G.; Neuhaus, H.
Journal Article
2019Studentische Beschäftigungsverhältnisse als Quelle des Active Sourcings? Eine Analyse am Beispiel des Fraunhofer-Instituts für Photonische Mikrosysteme IPMS
Wendenburg, Anja
: Haubold, Anne-Katrin (Gutachter); Richter, Thorsten S. (Gutachter)
Bachelor Thesis
2019Study of sub-volume activation in CoFeB/MgO memory devices near spin reorientation transition
Fidalgo, João; Lv, Hua; Silva, Ana V.; Leitão, Diana C.; Kämpfe, Thomas; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Cardoso, Susana
Poster
201810 Gbit/s bidirectional transceiver with monolithic optic for rotary connector replacements
Faulwaßer, M.; Kirrbach, R.; Schneider, T.; Noack, A.
Conference Paper
201814nm Ferroelectric FinFET technology with steep subthreshold slope for ultra low power applications
Krivokapic, Z.; Rana, U.; Galatage, R.; Razavieh, A.; Aziz, A.; Liu, J.; Shi, J.; Kim, H.J.; Sporer, R.; Serrao, C.; Busquet, A.; Polakowski, P.; Müller, J.; Kleemeier, W.; Jacob, A.; Brown, D.; Knorr, A.; Carter, R.; Banna, S.
Conference Paper
20183D Analysis of Thin Layers by ToF-SIMS
Mohammadian Kia, Alireza; Esmaeili, Sajjad; Mart, Clemens; Utriainen, Mikko; Haufe, Nora; Puurunen, Riikka L.; Weinreich, Wenke
Poster
2018Advances in MOEMS technologies for high quality imaging systems
Schenk, H.; Wagner, M.; Grahmann, J.; Merten, A.
Conference Paper
2018Aktoren auf Basis elektroaktiver Polymer/Nanopartikel Komposite und deren Anwendung in einer Mikrolinse mit variablem Fokus
Pawlik, Boscij
: Lakner, Hubert (Betreuer); Grabmaier, Anton (Betreuer)
Dissertation
2018Aspects of high aspect ratio silicon etching - capacitor application
Rudolph, Matthias; Pätzold, Björn; Czernohorsky, Malte
Presentation
2018Automatic tracking of Li-Fi links for wireless industrial ethernet
Kirrbach, René; Faulwaßer, Michael; Schneider, Tobias; Ostermann, Robert; Noack, Alexander
Conference Paper
2018Automatic Tracking of Li-Fi Links for Wireless Industrial Ethernet
Kirrbach, René
Presentation
2018Barrier breakdown mechanism in nano-scale perpendicular magnetic tunnel junctions with ultrathin MgO barrier
Lv, Hua; Leitao, Diana C.; Hou, Zhiwei; Freitas, Paulo P.; Cardoso, Susana; Kämpfe, Thomas; Müller, Johannes; Langer, Juergen; Wrona, Jerzy
Journal Article
2018Bringing NIR spectrometers into mobile phones
Reinig, P.; Grüger, H.; Knobbe, J.; Pügner, T.; Meyer, S.
Conference Paper
2018Carbon-hydrogen-related complexes in Si
Kolkovsky, V.; Stübner, Ronald; Gwozdz, K.; Weber, Jörg
Journal Article
2018Challenges and Progress on Carbon Nanotube Integration for BEOL Interconnects
Uhlig, B.; Dhavamani, A.; Nagy, N.; Lilienthal, K.; Liske, R.; Ramos, R.; Dijon, J.; Okuno, H.; Kalita, D.; Lee, J.; Georgiev, V.; Asenov, A.; Amoroso, S.; Wang, L.; Koenemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Liang, J.; Pandey, R.R.; Chen, R.; Todri-Sanial, A.
Conference Paper
2018Charakterisierung und Bewertung von CuPc-basierten OFET's im Hinblick auf eine Anwendung als NO2-Sensor
Reichelt, Christoph
: Zipser, Stephan (Betreuer); Graf, Alexander (Betreuer)
Bachelor Thesis
2018Clamped-clamped in-plane electrostatic bending actuators in silicon-based microfluidic devices
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Schenk, Harald
Presentation
2018CMOS compatible pyroelectric applications enabled by doped HfO2 films on deep-trench structures
Mart, Clemens; Weinreich, Wenke; Czernohorsky, Malte; Riedel, Stefan; Zybell, Sabine; Kühnel, Kati
Conference Paper
2018CMOS design of Digital to Analog converters for active matrix Spatial Light Modulator applications
Paramesh, Vidwath
: Presberger, Thomas (Betr.); Horstmann, John Thomas (Betr.)
Master Thesis
2018CMOS-kompatibler MEMS-Lautsprecher für Im-Ohr-Anwendungen
Conrad, Holger; Ehrig, Lutz; Kaiser, Bert; Schenk, Hermann; Schuffenhauer, David; Stolz, Michael; Gaudet, Matthieu; Schenk, Harald
Conference Paper
2018CMUT with mechanically coupled plate actuators
Krenkel, Marcel; Kircher, Marco; Kupnik, Mario; Koch, Sandro
Conference Paper
2018Cobalt integration solutions - integration (R&D accelerator)
Gerlich, Lukas; Wislicenus, Markus; Koch, Johannes; Dhavamani, Abitha; Esmaeili, Sajjad; Uhlig, Benjamin
Presentation
2018Copper electroplating with polyethylene Glycol. Pt.II. Experimental analysis and determination of model parameters
Yang, Hongliu; Krause, Robert; Scheunert, Christin; Liske, Romy; Uhlig, Benjamin; Preusse, Axel; Dianat, Arezoo; Bobeth, Manfred; Cuniberti, Gianaurelio
Journal Article
2018Design of on-chip RFID transponder antennas
Heinig, Andreas
Conference Paper
2018Design of On-Chip RFID Transponder Antennas
Heinig, Andreas
Presentation
2018Development of titanium oxide conformal thin film by atomic layer deposition
Mohammadian Kia, Alireza
Poster
2018Drahtlose Datenübertragung für kurze und lange Strecken. Alternative Li-Fi
Noack, Alexander
Journal Article
2018Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald
Journal Article
2018Enhancement of vertical integration density by engineered BSOI wafers
Kaden, C.; Langa, S.; Ludewig, T.; Schönberger, A.; Herrmann, A.; Göbel, A.; Kolkovsky, V.; Jeroch, W.; Pufe, W.
Journal Article
2018Entwicklung eines Beleuchtungsmoduls für stroboskopische, phasenschiebende Interferometrie
Medeiros Ventura, Luiz Guilherme de
: Heitmann, Johannes (Gutachter); Skupsch, Christoph (Gutachter); Wolschke, Steffen (Betreuer)
Master Thesis
2018Entwicklung eines Transmitters mit Hochleistungsleuchtdiode für die optische drahtlose Datenübertragung
Lei, Lei
: Ostermann, Robert (Betreuer); Fischer, Wolf-Joachim (Gutachter)
Thesis
2018A FeFET based super-low-power ultra-fast embedded NVM technology for 22nm FDSOI and beyond
Dünkel, S.; Trentzsch, M.; Richter, R.; Moll, P.; Fuchs, C.; Gehring, O.; Majer, M.; Wittek, S.; Müller, B.; Melde, T.; Mulaosmanovic, H.; Slesazeck, S.; Müller, S.; Ocker, J.; Noack, M.; Löhr, D.-A.; Polakowski, P.; Müller, J.; Mikolajick, T.; Höntschel, J.; Rice, B.; Pellerin, J.; Beyer, S.
Conference Paper
2018Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design
Schroedter, Richard; Roth, Matthias; Janschek, Klaus; Sandner, Thilo
Journal Article
2018Fraunhofer Institute for Photonic Microsystems. Annual Report 2017
 
Annual Report
2018Frequency domain analysis of pyroelectric response in silicon-doped hafnium oxide (HfO2) thin films
Mart, Clemens; Czernohorsky, Malte; Zybell, Sabine; Kämpfe, Thomas; Weinreich, Wenke
Journal Article
2018Functional integration - structure-integrated wireless sensor technology targeting smart mechanical engineering applications
Rülke, Steffen; Beyer, Volkhard; Zorn, Wolfgang; Meinig, Marco; Wecker, Julia; Reuter, Danny; Deicke, Frank; Clausner, André; Werner, Thomas
Conference Paper
2018The gateone-project: A digital innovation hub accelerating innovation through ecosystem design and product trajectory
Hamelin, R.; Andrieux, G.; Chartier, I.; Roustom, B.; Healy, T.; Ali, Z.; Legrand, B.; Mayora, K.; Scholles, M.; Guerre, R.
Conference Paper
2018Grundlegende Untersuchungen zur Phasenmodulation von Licht im Subnanometer-Bereich mittels diffraktiver Mikrospiegelarrays
Sicker, Cornelius
: Schenk, Harald; Reif, Jürgen
Dissertation
2018High Endurance Ferroelectric Hafnium Oxide-Based FeFET Memory Without Retention Penalty
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Calvo, J.; Zimmermann, K.; Müller, J.
Journal Article
2018High-Speed, Cellular Li-Fi HotSpot for Real-Time Applications
Kirrbach, René; Faulwaßer, Michael; Ostermann, Robert; Jakob, Benjamin; Noack, Alexander
Presentation
2018Hydrogen-related defects in Al2O3 layers grown on n-type Si by the atomic layer deposition technique
Kolkovsky, Vladimir; Stübner, Ronald
Journal Article
2018Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition technique
Kolkovsky, Vladimir; Scholz, Sebastian; Kolkovsky, Valery; Schmidt, Jan-Uwe; Heller, Rene
Journal Article
2018Kanalkodierungen in der optisch-drahtlosen Übertragung
Audi, Maher
: Faulwaßer, Michael (Betreuer); Noack, Alexander (Betreuer); Tutsch, Dietmar (Gutachter); Möller, Reinhard (Gutachter)
Master Thesis
2018Knickbares Substrat mit Bauelement
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino
Patent
2018Konzeption und Herstellung von Systemdemonstratoren für miniaturisierte Im-Ohr-Lautsprecher mit drahtlosen Kommunikationsschnittstellen
Horky, Steve
: Kaiser, Bert (Betreuer); Bauer, Reinhard (Betreuer)
Thesis
2018Konzipierung und Umsetzung eines Automotive Ethernet-MAC IP-Cores
Zhu, Hailong
: Hildebrandt, Ralf (Betreuer); Fischer, Wolf-Joachim (Gutachter)
Thesis
2018Layer thickness scaling and wake-up effect of pyroelectric response in Si-doped HfO2
Mart, Clemens; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke
Journal Article
2018Li-Fi für Kurzstrecken. Drahtlose Industriekommunikation
Noack, Alexander
Journal Article
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Journal Article
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Presentation
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Presentation
2018Lithium Detection and Tracking for Solid State Battery Test Stacks
Mohammadian Kia, Alireza; Haufe, Nora; Zybell, Sabine; Bönhardt, Sascha; Kühnel, Kati; Speulmanns, Jan K.; Weinreich, Wenke
Poster
2018LPCVD in-situ doped silicon for thermoelectric applications
Calvo, Jesús; Drescher, Maximilian; Kühnel, Kati; Sauer, Bodo; Müller, Michael; Schmidt, Christian; Boui, Fatima; Völklein, Friedemann; Wagner-Reetz, Maik
Journal Article, Conference Paper
2018Mechanically coupled capacitive ultrasonic transducer
Krenkel, Marcel; Lange, Nicolas; Koch, Sandro; Kircher, Marco
Conference Paper
2018MEMS basierte Ultraschallwandler für die Anwendung in flüssigen und gasförmigen Umgebungen und Möglichkeiten der CMOS Integration
Lange, Nicolas; Grafe, Mario; Koch, Sandro; Kaden, Christiane; Schulze, Matthias
Presentation
2018MEMS integration on foundry-fabricated CMOS backplanes
Hohle, Christoph; Schulze, Matthias
Book Article
2018MEMS-Tunable VCSELs-Driven Terahertz Emitters Based on Conventional and Nanoelectrode Photomixers
Haidar, M.T.
Dissertation
2018Microoptoelectromechanical systems-based external cavity quantum cascade lasers for real-time spectroscopy
Butschek, Lorenz; Hugger, Stefan; Jarvis, Jan-Philip; Härtelt, Marko; Merten, André; Schwarzenberg, Markus; Grahmann, Jan; Stothard, David; Warden, Matthew; Carson, Christoph; Macarthur, John; Fuchs, Frank; Ostendorf, Ralf; Wagner, Joachim
Journal Article
2018Mikromechanische Bauelemente mit mechanischen Aktuatoren
Conrad, Holger; Gaudet, Matthieu; Schenk, Harald; Uhlig, Sebastian
Patent
2018MMS, MMS-Array, MEMS-Aktuator und Verfahren zum Bereitstellen eines MMS
Dürr, Peter; Friedrichs, Martin; Gehner, Andreas; Kunze, Detlef
Patent
2018Modellbasierter Systementwurf zur Steuerung und Regelung quasi-statischer Mikroscannerspiegel mit elektrostatischem Kammantrieb
Schroedter, Richard
: Hofmann, Wilfried; Janschek, Klaus
Dissertation
2018Modulating complex beams in amplitude and phase using fast tilt-micromirror arrays and phase masks
Roth, M.; Heber, J.; Janschek, K.
Journal Article
2018Monolithic integration for photonic applications: MEMS on CMOS and functional BSOI
Kaden, Christiane; Schulze, Matthias
Presentation
2018New way to realize miniaturized complex optical systems in high volume
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino; Reinig, Peter; Meyer, Sebastian
Conference Paper
2018Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology
Gehner, A.; Dürr, P.; Kunze, D.; Rudloff, D.; Elgner, A.; Heber, J.; Francés, S.; Skupsch, C.; Torlee, H.; Eckert, M.; Friedrichs, M.; Schmidt, J.; Pufe, W.; Döring, S.; Hohle, C.; Schulze, M.; Wagner, M.
Conference Paper
2018A novel electrostatic actuator, the Nano-E-Drive, and its integration in a micropump design
Gaudet, Matthieu
Presentation
2018Optische Anordnung für ein Spektralanalysesystem, Verfahren zu dessen Herstellung und Spektralanalysesystem
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino
Patent
2018Optische Anordnung zur Erzeugung von Lichtfeldverteilungen und Verfahren zum Betrieb einer optischen Anordnung
Heber, Jörg; Janschek, Klaus; Roth, Matthias
Patent
2018Passive RFID sensors - battery-free, wireless pressure measurements
Weder, Andreas; Koch, Sandro; Grätz, Hagen; Kircher, Marco
Presentation
2018Passive sensor transponders - wireless, battery-free sensing with RFID technology
Weder, Andreas
Presentation
2018A physics-based investigation of Pt-salt doped carbon nanotubes for local interconnects
Liang, J.; Ramos, R.; Dijon, J.; Okuno, H.; Kalita, D.; Renaud, D.; Lee, J.; Georgiev, V.P.; Berrada, S.; Sadi, T.; Asenov, A.; Uhlig, B.; Lilienthal, K.; Dhavamani, A.; Könemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Teo, K.; Pandey, R.R.; Todri-Sanial, A.
Conference Paper
2018Plagiatschutz mittels RFID
Holland, Hans-Jürgen
Presentation
2018Progress on carbon nanotube BEOL interconnects
Uhlig, B.; Liang, J.; Lee, J.; Ramos, R.; Dhavamani, A.; Nagy, N.; Dijon, J.; Okuno, H.; Kalita, D.; Georgiev, V.; Asenov, A.; Amoroso, S.; Wang, L.; Millar, C.; Konemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Pandey, R.R.; Chen, R.; Todri-Sanial, A.
Conference Paper
2018Rapid Synthesis of Sub‐10 nm Hexagonal NaYF4‐Based Upconverting Nanoparticles using Therminol® 66
Hesse, J.; Klier, D.T.; Sgarzi, M.; Nsubuga, A.; Bauer, C.; Grenzer, J.; Hübner, R.; Wislicenus, M.; Joshi, T.; Kumke, M.U.; Stephan, H.
Journal Article
2018Reliable high-density energy storage in Si-doped HfO2 thin films on 3D-structures
Kühnel, Kati; Riedel, Stefan; Mart, Clemens; Weinreich, Wenke
Presentation
2018Repetitive nonlinear control for linear scanning micro mirrors
Schroedter, R.; Schwarzenberg, M.; Grahmann, J.; Sandner, T.; Janschek, K.
Conference Paper
2018A review of acoustic impedance matching methods to validate additive manufactured metamaterial for capacitive micromachined ultrasonic transducers
Schweiger, Severin; Koch, Sandro
Conference Paper
2018Silicon doped hafnium oxide (HSO) and hafnium zirconium oxide (HZO) based FeFET
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Thrun, X.; Hanisch, N.; Steinke, P.; Calvo, J.; Müller, J.
Journal Article
2018Smart and efficient optimization of NED actuators
Schuffenhauer, David; Gaudet, Matthieu; Conrad, Holger
Conference Paper
2018Subnanometer calibration of diffractive micromirror arrays
Sicker, C.; Heber, J.; Berndt, D.
Abstract
2018Subnanometer calibration of diffractive micromirror arrays
Sicker, Cornelius; Heber, Jörg; Berndt, Dirk
Presentation
2018System zur Analyse von elektromagnetischer Strahlung und Bauelement zur Herstellung desselben
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino
Patent
2018Towards a compact, portable, handheld device for contactless real-time standoff detection of hazardous substances
Carson, Christopher; Macarthur, John; Warden, Mattew; Stothard, David; Butschek, Lorenz; Hugger, Stefan; Jarvis, Jan-Philip; Härtelt, Marko; Ostendorf, Ralf; Merten, André; Schwarzenberg, Markus; Grahmann, Jan; Ratajczyk, Marcin
Conference Paper
2018Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers
Sandner, Thilo; Gaumont, Eric; Grasshoff, Thomas; Auböck, Gerald; Kenda, Andreas; Gisler, Thomas; Langa, Sergiu; Herrmann, Andreas; Grahmann, Jan
Conference Paper
2018Tuning parameters and their impact on ferroelectric hafnium oxide
Polakowski, Patrick; Büttner, Teresa; Ali, Tarek Nadi Ismail; Riedel, Stefan; Kämpfe, Thomas; Seidel, Konrad; Müller, Johannes; Pätzold, Björn
Presentation
2018Ultrathin Lithium Ion Diffusion Barrier for On-Chip 3D All-Solid-State Batteries
Speulmanns, Jan; Zybell, Sabine; Mohammadian Kia, Alireza; Bönhardt, Sascha; Weinreich, Wenke; Liske, Romy
Poster
2018Understanding Electromigration in Cu-CNT Composite Interconnects
Lee, J.; Berrada, S.; Adamu-Lema, F.; Nagy, N.; Georgiev, V.P.; Sadi, T.; Liang, J.; Ramos, R.; Carrillo-Nunez, H.; Kalita, D.; Lilienthal, K.; Wislicenus, M.; Pandey, R.; Chen, B.; Teo, K.B.K.; Goncalves, G.; Okuno, H.; Uhlig, B.; Todri-Sanial, A.; Dijon, J.; Asenov, A.
Journal Article
2018Vertically aligned carbon nanotube films as absorption layers for IR applications
Kini, Mandar; Bonitz, Jens; Müller, Michael; Schulz, Stefan E.; Hermann, Sascha
Conference Paper
2018Vertically integrated modeling of light-induced defects
Laine, H.S.; Vahlman, H.; Haarahiltunen, A.; Jensen, M.A.; Modanese, C.; Wagner, M.; Wolny, F.; Buonassisi, T.; Savin, H.
Conference Paper
2018Vollduplex-Transceiver für die optische drahtlose Hochgeschwindigkeitskommunikation
Faulwaßer, Michael
: Fischer, Wolf-Joachim; Jamshidi, Kambiz; Henker, Matthias
Dissertation
2018Wake-up effect of pyroelectric response in doped HfO2
Mart, Clemens; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke
Abstract
2017Acoustic simulation and characterization of capacitive micromachined ultrasonic transducers
Klemm, Markus
: Gerlach, Gerald (Gutachter); Kupnik, Mario
Dissertation
2017Adsorptionsuntersuchungen in einem Mehrkomponenten-Additiv-System bei der elektrochemischen Kupferabscheidung im Bereich Halbleitermetallisierung
Scheunert, Christin
: Krause, Robert (Betreuer); Kalies, Grit (Betreuer)
Bachelor Thesis
2017ASIC zur Ansteuerung und Signalerfassung eines CMUT
Pietzsch, Marcus; Weder, Andreas; Heinig, Andreas; Amelung, Jörg; Koch, Sandro; Kircher, Marco
Conference Paper
2017Atomic Layer Deposition (ALD) and characterization of Ti- and Co-based films for Lithium-Ion Batteries (LIB)
Hoßbach, C.; Neumann, V.; Reddy, K.D.S.; Bönhardt, S.; Stoeck, A.; Fischer, D.; Reif, J.; Shukla, S.; Zybell, S.; Albert, M.; Giebeler, L.; Bartha, J.W.
Poster
2017Atomic layer deposition of functional films for all-solid-state lithium-ion microbatteries
Zybell, Sabine
Presentation
2017Atomic layer deposition of lithium titanate on planar and 3D-structured 200 mm silicon substrates
Bönhardt, Sascha
Presentation
2017Ein Beitrag zur Simulation und Realisierung repetitiver Regelungsalgorithmen für elektrostatische quasi-statische Mikrospiegel
Che, Xingqi
: Schroedter, Richard (Betreuer); Janschek, Klaus (Betreuer)
Thesis
2017BEoL post CMP cleaning challenges for 22 nm FD-SOI and beyond
Koch, Johannes; Rehschuh, Stephan; Gerlich, Lukas; Dhavamani, Abitha; Steinke, Philipp; Krause, Robert; Naue, Johannes; Bott, Sascha; Vasilev, Boris; Breuer, Dirk; Seidel, Robert; Preusse, Axel; Bartha, Johann Wolfgang; Uhlig, Benjamin
Conference Paper
2017Capacitance maximization of ultra-thin Si-capacitors by atomic layer deposition of anti-ferroelectric HfO2 in high aspect ratio structures
Riedel, Stefan; Weinreich, Wenke; Mart, Clemens; Müller, Johannes
Presentation
2017Carbon-hydrogen related defects in SiGe observed after dc H plasma treatment
Stübner, Ronald; Kolkovsky, Vladimir; Weber, Jörg; Abrosimov, Nikolay V.
Journal Article
2017Carbon-related defects in microelectronics
Kolkovsky, V.; Stübner, R.; Weber, J.
Journal Article
2017Charakterisierung der Zuverlässigkeit in der High-k Metal Gate Technologie
Drescher, Maximilian; Erben, Elke; Grass, Carsten; Trentzsch, Martin; Lazarevic, Florian; Leitsmann, Roman; Plaenitz, Philipp; Mchedlidze, Teimuraz; Seidel, Konrad; Liske, Romy; Bartha, Johann Wolfgang
Conference Paper
2017CMOS-design of a cascadable front-end ASIC for capacitive micromachined ultrasonic transducer (CMUT) arrays
Weder, Andreas; Koch, Sandro; Pietzsch, Marcus; Heinig, Andreas; Kircher, Marco; Lange, Nicolas; Amelung, Jörg
Conference Paper
2017CMOS-design of a cascadable front-end ASIC for capacitive micromachined ultrasonic transducer (CMUT) arrays
Weder, Andreas; Koch, Sandro; Pietzsch, Marcus; Heinig, Andreas; Kircher, Marco; Lange, Nicolas; Amelung, Jörg
Presentation
2017CMOS-design of a cascadable front-end ASIC for CMUT arrays
Koch, Sandro G.; Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas; Kircher, Marco; Grafe, Mario; Lange, Nicolas; Amelung, Jörg
Presentation
2017CMOS-kompatible elektrostatische Biegeaktoren
Conrad, Holger; Gaudet, Matthieu; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Schenk, Harald
Conference Paper
2017Concept for a new approach to realize complex optical systems in high volume
Grüger, H.; Knobbe, J.; Pügner, T.; Leuckefeld, M.; Reinig, P.; Meyer, S.
Conference Paper
2017Concept for the fast modulation of light in amplitude and phase using analog tilt-mirror arrays
Roth, M.; Heber, J.; Janschek, K.
Conference Paper
2017Concept for the fast modulation of light in amplitude and phase using analog tilt-mirror arrays
Roth, Matthias; Heber, Jörg; Janschek, Klaus
Presentation
2017A contribution to the expansion of the applicability of electrostatic forces in micro transducers
Schenk, H.; Conrad, H.; Gaudet, M.; Uhlig, S.; Kaiser, B.; Langa, S.; Stolz, M.; Schimmanz, K.
Conference Paper
2017Customized BSOI wafers integration of additional interconnects into the handle wafer
Kaden, Christiane; Langa, Sergiu
Presentation
2017Customized micro mirror array for highly parallel industrial laser direct processing on the micro- and nanoscale
Schmidt, Jan-Uwe; Dürr, Peter; Wagner, Michael
Conference Paper
2017Development of CMOS-compatible materials for thermoelectric and sensor applications in semiconductor industry
Wagner-Reetz, M.; Calvo, J.; Nichenametla, C.K.; Kühnel, K.; Göhler, T.; Schulz, S.; Burkov, A.; Uhlig, B.
Presentation
2017Development of MEMS-based capacitive ultrasonic transducers - technology, applications and perspectives for ultrasonic sensing
Kircher, Marco
Presentation
2017Development of metal oxide processes for highly conformal thin layers by plasma enhanced atomic layer deposition
Kia, Alireza Mohammadian
: Hiller, Karla (Betreuer); Weinreich, Wenke (Betreuer)
Master Thesis
2017Development of transition metal silicides as thinfilm materials for thermoelectric applications
Nichenametla, Charan Krishna
: Wagner-Reetz, Maik; Schulz, Stefan E.
Master Thesis
2017Druckvorrichtung zum Drucken einer dreidimensionalen Struktur
Unamuno-Eguren, Anartz; Klemm, Markus
Patent
2017Electrically tunable micro-lens with a strain-enhanced polymer nanocomposite actuator
Costache, Florenta; Pawlik, Boscij; Rieck, Andreas
Conference Paper
2017Electrochemical characterization of lithium containing thin films
Dorai Swamy Reddy, Keerthi
: Zybell, Sabine (Betreuer); Neumann, Volker (Betreuer); Bartha, Johann Wolfgang (Gutachter); Albert, Matthias (Gutachter)
Master Thesis
2017Electrostactically in-plane driven silicon micropump for modular configuration
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald
Conference Paper
2017Electrostatic bending actuators with a liquid filled nanometer scale gap
Gaudet, Matthieu; Uhlig, Sebastian; Stolz, Michael; Arscott, Steve; Conrad, Holger; Langa, Sergiu; Kaiser, Bert; Schenk, Harald
Conference Paper
2017Elektrooptisch induzierte Wellenleiter in paranematischen Flüssigkeitskristallen
Blasl, Martin
: Schenk, Harald (Gutachter); Seibold, Götz (Gutachter); Schröder, Thomas (Gutachter); Küppers, Franko (Gutachter)
Dissertation
2017Enhanced reliability and capacitance stability of ZrO2-based decoupling capacitors by interface doping with Al2O3
Mart, C.; Zybell, S.; Riedel, S.; Czernohorsky, M.; Seidel, K.; Weinreich, W.
Journal Article
2017Entwicklung und Simulation einer Kollimator- und Fokusoptik für die optische drahtlose Datenübertragung
Kirrbach, René
: Noack, Alexander (Betreuer); Fischer, Wolf-Joachim (Gutachter); Marschner, Uwe (Gutachter)
Thesis
2017Entwicklung von Mechanismen für die unbeaufsichtigte Windows-10-Installation im Fraunhofer IPMS unter Berücksichtigung spezifischer Datenschutzrichtlinien
Keller, Denni
: Richter, Felix (Betreuer); Baumgartl, Robert (Betreuer)
Thesis
2017Entwurf und Analyse einer Forward-Error-Correction (FEC) für optische Übertragungssysteme mit Intensitätsmodulation, limitierenden Verstärkern und begrenzten Decoder-Ressourcen
Müller, Franz
: Henker, M. (Betreuer); Faulwaßer, M. (Betreuer)
Master Thesis
2017Erarbeitung eines Lösungsvorschlages zur Erstellung einer TestBench mittels der "Universal Vertification Methodology" (UVM)
Miersch, Matthias
: Hildebrandt, Ralf (Betreuer); Fischer, Wolf-Joachim (Gutachter); Marschner, Uwe (Gutachter)
Thesis
2017Erarbeitung von Lösungsvorschlägen für integrierte Temperatursensoren in RFID-Transponder
Li, Bo
: Landwehr, Matthias; Fischer, Wolf-Joachim
Thesis
2017Erarbeitung von Lösungsvorschlägen zur Optimierung einer vorhandenen UHF-RFID-Frontend-Schaltung
Gottfried, Tobias
: Landwehr, Matthias; Klix, Wilfried
Thesis
2017Erhöhte Sicherheit durch RFID-Sensorik für Predictive Maintenance Anwendungen
Weder, A.
Journal Article
2017Erhöhung der Zuverlässigkeit von High-k Dielektrika für integrierte hochkapazitive Kondensatoren
Mart, Clemens
: Weber, Jörg (Gutachter); Lakner, Hubert (Gutachter); Weinreich, Wenke (Betreuer)
Master Thesis
2017Evaluation of an electrochemical corrosion technique for the determination of static etch rates of post CMP cleaning chemicals
Krause, Robert; Koch, Johannes; Rehschuh, Stephan; Naue, Johannes; Bott, Sascha; Uhlig, Benjamin; Vasilev, Boris
Presentation
2017The fabrication of copper-carbon nanotube composites for global interconnects
Nagy, Nicole; Lilienthal, Katharina; Uhlig, Benjamin
Poster
2017Ferroelectric HfO2 thin film testing and whole wafer mapping with non-contact corona-Kelvin metrology
Marinskiy, D.; Polakowski, P.; Edelman, P.; Wilson, M.; Lagowski, J.; Metzger, J.; Binder, R.; Müller, J.
Journal Article
2017Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2016
 
Annual Report
2017From machine data to forecast model: How data-driven new maintenance concepts are created for the production
Reichelt, Dirk
Presentation
2017Gewitter im Chip - Resistive Speicher für low-power Anwendungen
Seidel, Konrad; Riedel, Stefan; Kalishettyhalli Ma, Mamathamba; Polakowski, Patrick; Müller, Johannes
Conference Paper
2017Herstellung und Charakterisierung von LiPON als Feststoffelektrolyt für integrierbare Lithium-Ionen-Batterien auf Siliziumbasis
Krämer, Vincent
: Zybell, Sabine (Betr.); Ingebrandt, Sven (Betr.); Saumer, Monika (Betr.)
Master Thesis
2017Herstellung und Messung von elektrischen Teststrukturen zur Untersuchung von Elektromigration in Kupfer-CNT-Kompositen
Makus, Steffen
: Lilienthal, Katharina (Betreuer)
Master Thesis
2017High-K metal gate stacks with ultra-thin interfacial layers formed by low temperature microwave-based plasma oxidation
Czernohorsky, M.; Seidel, K.; Kühnel, K.; Niess, J.; Sacher, N.; Kegel, W.; Lerch, W.
Journal Article
2017How to analyze food and future requirements for NIR spectroscopy
Reinig, Peter; Grüger, Heinrich; Hintschich, Susanne; Knobbe, Jens; Pügner, Tino
Conference Paper
2017How to integrate MEMS on foundry-fabricated CMOS backplanes
Schulze, Matthias; Hohle, Christoph; Friedrichs, Martin
Conference Paper
2017Interface traps in 28 nm node field effect transistors detected by capacitance transient spectroscopy
Mchedlidze, T.; Drescher, M.; Erben, E.; Weber, J.
Journal Article
2017Josephson effects at iron pnictide superconductors: Approaching phase-sensitive experiments
Schmidt, S.; Döring, S.; Hasan, N.; Schmidl, F.; Tympel, V.; Kurth, F.; Iida, K.; Ikuta, H.; Wolf, T.; Seidel, P.
Journal Article
2017Kapazitive mikromechanische Ultraschallsysteme (CMUT) für die zerstörungsfreie Materialcharakterisierung und -überwachung
Koch, Sandro G.; Kircher, Marco; Grafe, Mario
Presentation
2017Kapazitive mikromechanische Ultraschallsysteme (CMUT) für die zerstörungsfreie Prüfung und Überwachung
Koch, Sandro G.; Lange, Nicolas; Kircher, Marco; Krenkel, Marcel; Grafe, Mario; Rudloff, Dirk; Amelung, Jörg
Conference Paper
2017Kapazitive mikromechanische Ultraschallwandler für die zerstörungsfreie Prüfung und Überwachung
Koch, Sandro G.; Lange, Nicolas; Kircher, Marco; Krenkel, Marcel; Grafe, Mario; Rudloff, Dirk; Amelung, Jörg
Poster
2017Lebensmittellabor im Handy. Dem Food Scanner einen Schritt näher
Grüger, Heinrich
Report
2017Li-Fi - Optical Wireless Communication
Deicke, Frank
Journal Article
2017Li-Fi roadshow trail. For the smart systems hub
Noack, Alexander
Presentation
2017MEMS-based ultrasonic sensor systems for applications in fluid environment
Grafe, Mario
Presentation
2017MiBot-Einsatz in der Gruppe MESYS
Schimmanz, Klaus
Presentation
2017Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner with on-chip piezo-resistive sensor feedback
Schroedter, Richard; Schwarzenberg, Markus; Dreyhaupt, André; Barth, Robert; Sandner, Thilo; Janschek, Klaus
Conference Paper
2017Mikrochip mit einer RFID-Transponder-Schaltung und einer ON-Chip-Schlitzantenne
Heiß, Michael
Patent
2017Miniature photonic system for next generation food quality authentication
Hintschich, Susanne; Reinig, Peter
Poster
2017Miniaturisierte Laserlichtquelle für Infrarotspektroskopie
Merten, A.; Dreyhaupt, A.; Hugger, S.; Butschek, L.; Grahmann, J.; Schwarzenberg, M.; Ostendorf, R.; Jarvis, J.; Härtelt, M.
Conference Paper
2017Miniaturized NIR spectrometers - state of the art & recent developments
Reinig, Peter; Knobbe, Jens; Pügner, Tino; Hintschich, Susanne; Meyer, Sebastian; Grüger, Heinrich
Presentation
2017Miniaturized sensor for the detection of environmental pollutants
Graf, Alexander; Stübner, Ronald; Kunath, Christian; Meyer, Sebastian; Schenk, Harald
Conference Paper
2017Miniaturized sensor for the detection of environmental pollutants
Graf, Alexander; Stübner, Ronald; Kunath, Christian; Meyer, Sebastian; Schenk, Harald
Poster
2017Modeling the effects of lanthanum, nitrogen, and fluorine treatments of Si-SiON-HfO2-TiN gate stacks in 28 nm high-k-metal gate technology
Leitsmann, R.; Lazarevic, F.; Drescher, M.; Erben, E.
Journal Article
2017Modellierung und Simulation des Chemisch-mechanischen Planarisierens unter besonderer Berücksichtigung langreichweitiger Wechselwirkungen auf der Chipskala
Bott, Sascha
: Gerlach, G.; Bartha, J.W.; Heitmann, J.
Dissertation
2017Morphology-driven control of metabolite selectivity using nanostructure-initiator mass spectrometry
Gao, Jian; Louie, Katherine B.; Steinke, Philipp; Bowen, Benjamin P.; Raad, Markus de; Zuckermann, Ronald N.; Siuzdak, Gary; Northen, Trent R.
Journal Article
2017Nano-powerplant for on-chip autonomous systems
Weinreich, Wenke
Presentation
2017Nitrogen Engineering in the Ultrathin SiO2 Interface Layer of High- k CMOS Devices: A First-Principles Investigation of Fluorine, Oxygen, and Boron Defect Migration
Lazarevic, F.; Leitsmann, R.; Drescher, M.; Erben, E.; Plänitz, P.; Schreiber, M.
Journal Article
2017A novel electrostatic actuator technology for integrated RF MEMS and optical switches
Shashank; Conrad, Holger; Gaudet, Matthieu; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Poster
2017Novel ferroelectric FET based synapse for neuromorphic systems
Mulaosmanovic, H.; Ocker, J.; Müller, S.; Noack, M.; Müller, J.; Polakowski, P.; Mikolajick, T.; Slesazeck, S.
Conference Paper
2017Novel TSV metallization and simplified ECD processes for ultra-large scale integration (ULSI) technology
Esmaeili Dehkalani, M. Sajjad
: Lilienthal, Katharina (Betreuer); Adelung, Rainer (Betreuer)
Master Thesis
2017Numerische Optimierung von Mikroaktoren
Schuffenhauer, David
: Gaudet, Matthieu (Betreuer); Schenk, Harald (Betreuer)
Master Thesis
2017PEALD and pulsed CVD of Cobalt thin films using the precursor cyclopentadienylcobalt dicarbonyl
Hossbach, Christoph; Shukla, Shashank; Fischer, Dustin; Reif, Johanna; Bönhardt, Sascha; Geidel, Marion; Albert, Matthias; Bartha, Johann W.
Poster
2017A photonic smart system for food quality and safety sensing: First integration and measurement results
Bertani, Francesca Romana; Bourgos, Paraskevas; Businaro, Luca; Gambacorta, Lucia; Gerardino, Annamaria; Hintschich, Susanne; Koutalieris, Georgios; Logothesis, Marios; Martinelli, Eugenio; Nychas, George John; Solfrizzo, Michele; Tosic, Milenko; Wunder, Gerhard
Poster
2017Properties of ALD ferroelectric Si-doped HfO2 characterized with noncontact Corona-Kelvin metrology
Polakowski, Patrick; Müller, Johannes; Marinskiy, Dmitriy; Findlay, Andrew; Edelman, Piotr; Wilson, Marshall; Lagowski, Jacek; Metzger, Joachim; Binder, Robert
Presentation
2017PVD and ALD process development of advanced oxide-based RRAM-stacks
Kalishetthyhalli Mahadevaiah, Mamathamba
: Müller, Johannes (Gutachter); Lakner, Hubert (Gutachter); Fischer, Wolf-Joachim (Gutachter)
Master Thesis
2017Real-time spectroscopy enabled by external cavity QCLs with MOEMS diffraction gratings
Butschek, Lorenz; Hugger, Stefan; Jarvis, Jan-Philip; Härtelt, Marko; Merten, André; Grahmann, Jan; Boskovic, Dusan; Fuchs, Frank; Ostendorf, Ralf; Schilling, Christian; Rattunde, Marcel; Wagner, Joachim
Conference Paper
2017Regelung nicht-resonanter Mikrospiegel mit elektrostatischem Kammantrieb
Schroedter, Richard; Janschek, Klaus
Presentation
2017Reliability improvements of TiN/Al2O3/TiN for linear high voltage metal-insulator-metal capacitors using an optimized thermal treatment
Lefevre, A.; Ferreira, D.; Veillerot, M.; Barnes, J.-P.; Parat, G.; Czernohorsky, M.; Lallemand, F.
Journal Article
2017Repetitive flachheitsbasierte Folgeregelung von quasi-statischen Mikroscannern
Schroedter, Richard; Che, Xingqi; Roth, Matthias; Sandner, Thilo; Janschek, Klaus
Conference Paper
2017Repetitive flachheitsbasierte Folgeregelung von quasi-statischen Mikroscannern
Schroedter, Richard; Che, Xingqi; Roth, Matthias; Sandner, Thilo; Janschek, Klaus
Poster
2017RFID meets OPC-UA - transparent and secure integration of sensor nodes into industrial and cloud environments
Weder, Andreas; Grätz, Hagen; Voß, Kim; Deicke, Frank; Reichelt, Dirk
Conference Paper
2017RFID-Sensoren für das Internet der Dinge
Deicke, Frank
Journal Article
2017Seed-layer resistance and its impact on the electrochemical copper deposition
Wislicenus, Marcus; Gerlich, Lukas; Koch, Johannes; Uhlig, Benjamin
Presentation
2017Sicherheitsmerkmal, Verfahren zum Herstellen eines Sicherheitsmerkmals und Verfahren zum Authentifizieren eines Benutzers unter Verwendung eines Sicherheitsmerkmals
Reinig, Peter; Knobbe, Jens; Hohle, Christoph
Patent
2017Silicon-doped hafnium oxide anti-ferroelectric thin films for energy storage
Ali, F.; Liu, X.; Zhou, D.; Yang, X.; Xu, J.; Schenk, T.; Müller, J.; Schroeder, U.; Cao, F.; Dong, X.
Journal Article
2017Smart hip prosthesis - an overview
Deicke, Frank
Presentation
2017Spatially aware connectivity for wearables using Li-Fi technology
Noack, Alexander
Presentation
2017A survey of carbon nanotube interconnects for energy efficient integrated circuits
Todri-Sanial, A.; Ramos, R.; Okuno, H.; Dijon, J.; Dhavamani, A.; Wislicenus, M.; Lilienthal, K.; Uhlig, B.; Sadi, T.; Georgiev, V.; Asenov, A.; Amoroso, S.; Pender, A.; Brown, A.; Millar, C.; Motzfeld, F.; Gotsmann, B.; Liang, J.; Goncalves, G.; Rupesinghe, N.; Teo, K.
Journal Article
2017Switching kinetics in nanoscale hafnium oxide based ferroelectric field-effect transistors
Mulaosmanovic, Halid; Ocker, Johannes; Müller, Stefan; Schroeder, Uwe; Müller, Johannes; Polakowski, Patrick; Flachowsky, Stefan; Bentum, Ralf van; Mikolajick, Thomas; Slesazeck, Stefan
Journal Article
2017Technological aspects of a new micro‑electro‑mechanical actuation principle: Nano‑e‑drive
Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Gaudet, Matthieu; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Journal Article
2017Tragbare Vorrichtung zur Übermittlung von personenbezogenen Daten an ein Verarbeitungssystem und das Verarbeitungssystem zum Ausgeben eines Steuersignals in Abhängigkeit der personenbezogenen Daten
Amelung, Jörg; Grüger, Heinrich
Patent
2017Trench filling with a-Si using a PE-CVD process and back etch sequence
Elsäßer, Linus; Naumann, A.
Conference Paper
2017A user-friendly guide to the optimum ultraviolet photolithographic exposure and greyscale dose of SU-8 photoresist on common MEMS, microsystems, and microelectronics coatings and materials
Gaudet, Matthieu; Arscott, Steve
Journal Article
2017Valence EELS below the limit of inelastic delocalization using conical dark field EFTEM or Bessel beams
Stöger-Pollach, M.; Schachinger, T.; Biedermann, K.; Beyer, V.
Journal Article
2017Vorrichtung und Verfahren zur Erzeugung eines optischen Musters aus Bildpunkten in einer Bildebene
Dürr, Peter; Mai, Alexander
Patent
2017Wireless industrial real-time networks with Li-Fi
Faulwaßer, Michael; Noack, Alexander; Ostermann, Robert; Schneider, Tobias; Zschorn, Christopher
Conference Paper
2016A 28nm HKMG super low power embedded NVM technology based on ferroelectric FETs
Trentzsch, M.; Flachowsky, S.; Richter, R.; Paul, J.; Reimer, B.; Utess, D.; Jansen, S.; Mulaosmanovic, H.; Müller, S.; Slesazeck, S.; Ocker, J.; Noack, M.; Müller, J.; Polakowski, P.; Schreiter, J.; Beyer, S.; Mikolajick, T.; Rice, B.
Conference Paper
2016Adaptives Prothesensystem - Entwicklung eines Prothesensystems zur Optimierung und adaptiven Anpassung der ossären Verankerung von Gelenkendoprothesen
Rotsch, Christian; Grätz, Hagen; Kluess, Daniel; Gille, Katarina; Heinig, Andreas; Schulze, Christian; Bader, Rainer; Hunger, Sandra; Töppel, Thomas; Drossel, Welf-Guntram
Conference Paper
2016Antenna design for a 24 GHz RFID tag with an on-chip-antenna
Heiss, Michael; Lischer, Sascha
Poster
2016Atomic layer deposition system for fast precursor screening
Shukla, Shashank; Hossbach, Christoph; Sundqvist, Jonas; Bönhardt, Sascha; Feddersen-Clausen, Oliver; Sharma, Varun; Albert, Matthias; Bartha, Johann W.
Poster
2016Aufbau und Inbetriebnahme eines Messplatzes für die Charakterisierung von gegeneinander rotierenden optisch-drahtlosen Transceiver-Modulen
Kunz, Julian Elias
: Noack, Alexander (Betr.); Ostermann, Robert (Betr.); Fischer, Wolf-Joachim (Betr.)
Thesis
2016Back-end-of-line integration technology of capacitive micromachined ultrasonic transducers (CMUT)
Amelung, Jörg; Klemm, Markus; Elsäßer, Linus; Kircher, Marco; Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas; Müller, Michael; Grüger, Heinrich
Conference Paper
2016Back-End-of-Line integration technology of capacitive micromachined ultrasonic transducers (CMUT)
Koch, Sandro; Amelung, Jörg; Elsäßer, Linus; Kircher, Marco; Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas; Müller, Michael
Presentation
2016Capacitance transient spectroscopy measurements on high-k metal gate field effect transistors fabricated using 28nm technology node
Mchedlidze, T.; Drescher, M.; Erben, E.; Weber, J.
Conference Paper
2016Carbon-hydrogen complexes in n- and p-type SiGe-alloys studied by Laplace deep level transient spectroscopy
Stübner, Ronald; Kolkovsky, Vladimir; Weber, Jörg; Abrosimov, N.V.
Journal Article, Conference Paper
2016Catalytic ALD of SiO2 as spacer for an E-Beam direct write self-aligned double patterning process on 300 mm wafers
Kühnel, Kati; Riedel, Stefan; Weinreich, Wenke; Thrun, Xaver; Czernohorsky, Malte; Pätzold, Björn; Rudolph, Matthias
Presentation
2016Characterization of low temperature plasma generated oxides on germanium based substrates
Poduval, Geedhika Kallidil
: Czernohorsky, Malte (Betreuer); Lakner, Hubert (Gutachter); Fischer, Wolf-Joachim (Gutachter)
Master Thesis
2016Charge-trapping phenomena in HfO2-based FeFET-type nonvolatile memories
Yurchuk, Ekaterina; Müller, Johannes; Müller, Stefan; Paul, Jan; Pesic, Milan; Benthum, Ralf van; Schroeder, Uwe; Mikolajick, Thomas
Journal Article
2016Correlation between the macroscopic ferroelectric material properties of Si:HfO2 and the statistics of 28nm FeFET memory arrays
Mueller, S.; Slesazeck, S.; Henker, S.; Flachowsky, S.; Polakowski, P.; Paul, J.; Smith, E.; Müller, J.; Mikolajick, T.
Journal Article, Conference Paper
2016CVD-CoXN for advanced semiconductor metallization
Dhavamani, Abitha; Wislicenus, Marcus; Gerlich, Lukas; Uhlig, Benjamin
Presentation
2016Development and electrical characterization of a metal-ferroelectric-insulator semiconductor FET test structure
Ali, Tarek
: Müller, Johannes (Betreuer); Lakner, Hubert (Betreuer); Heyns, Marc
Master Thesis
2016Enhanced dielectric properties of thin Ta2O5 films grown on 65 nm SiO2/Si
Kolkovsky, V.; Kurth, E.; Kunath, C.
Journal Article, Conference Paper
2016Evaluation of water based intelligent fluids for resist stripping in single wafer cleaning tools
Rudolph, Matthias; Esche, Silvio; Hohle, Christoph; Schumann, Dirk; Steinke, Philipp; Thrun, Xaver; Sonntag, Justus von
Conference Paper
2016Experimentalaufbau zur Messung vertikaler Oberflächen von mikromechanischen Aktoren am DHM
Lemcke, Klaus Benjamin
Bachelor Thesis
2016Experimentelle Untersuchungen an lateralen elektrostatischen Nanoaktoren
Stolz, Michael
: Schenk, Harald (Betr.); Seibold, Götz (Betr.)
Master Thesis
2016Eye safety analysis for non-uniform retinal scanning laser trajectories
Schelinski, Uwe; Dallmann, Hans-Georg; Grüger, Heinrich; Knobbe, Jens; Pügner, Tino; Reinig, Peter; Woittennek, Franziska
Conference Paper
2016Fabrication and characterization of a novel electrostatic actuator
Gaudet, Matthieu
Presentation
2016FAST LIGHT: Möglichkeiten der Li-Fi Kommunikation aus technischer Sicht
Noack, Alexander
Presentation
2016Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2015
 
Annual Report
2016Geometric and chemical components of the giant piezoresistance in silicon nanowires
McClarty, M.M.; Jegenyes, N.; Gaudet, M.; Toccafondi, C.; Ossikovski, R.; Vaurette, F.; Arscott, S.; Rowe, A.C.H.
Journal Article
2016Hardware-Software-System zum ambulanten EKG-Monitoring unter Routinebedingungen
Noack, Alexander
Dissertation
2016HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias
Poster
2016HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias
Journal Article, Conference Paper
2016High endurance strategies for hafnium oxide based ferroelectric field effect transistor
Müller, J.; Polakowski, P.; Müller, S.; Mulaosmanovic, H.; Ocker, J.; Mikolajick, T.; Slesazeck, S.; Flachowsky, S.; Trentzsch, T.
Conference Paper
2016Hyperspectral image analysis for standoff trace detection using IR laser spectroscopy
Jarvis, J.P.; Fuchs, F.; Hugger, S.; Ostendorf, R.; Butschek, L.; Yang, Q.; Dreyhaupt, A.; Grahmann, J.; Wagner, J.
Conference Paper
2016Identification of carbon-hydrogen complexes in n- and p-type silicon
Stübner, Ronald; Kolkovsky, Vladimir; Scheffler, Leopold; Weber, Jörg
Journal Article, Conference Paper
2016Impact of field cycling on HfO2 based non-volatile memory devices
Schroeder, U.; Pesic, M.; Schenk, T.; Mulaosmanovic, H.; Slesazeck, S.; Ocker, J.; Richter, C.; Yurchuk, E.; Khullar, K.; Müller, J.; Polakowski, P.; Grimley, E.D.; LeBeau, J.M.; Flachowsky, S.; Jansen, S.; Kolodinski, S.; Bentum, R. van; Kersch, A.; Künneth, C.; Mikolajick, T.
Conference Paper
2016Implementation und Konfiguration eines Linux-Systems auf ein Xilinx Zynq-SoC-System
Lehl, Dmitrij
: Grafe, Mario (Betreuer); Schönherr, J. (Betreuer)
Thesis
2016In situ bow change of Al-alloy MEMS micromirrors during 248-nm laser irradiation
Mai, Alexander; Bunce, Christopher; Hübner, René; Pahner, Daniel; Dauderstädt, Ulrike
Journal Article
2016The influence of adsorption kinetics on copper superfilling for dual damascene
Liske, Romy; Krause, Robert; Uhlig, Benjamin; Gerlich, Lukas; Bott, Sascha; Wislicenus, Marcus; Preusse, Axel
Journal Article
2016Influence of annealing in H atmosphere on the electrical properties of Al2O3 layers grown on p-type Si by the atomic layer deposition technique
Kolkovsky, V.; Stübner, R.; Langa, S.; Wende, U.; Kaiser, B.; Conrad, H.; Schenk, H.
Journal Article
2016Influence of the applied charge on the electro-chemical degradation in green phosphorescent organic light emitting diodes
de Moraes, I.R.; Scholz, S.; Leo, K.
Journal Article
2016Innovative Energieoptimierung. Forschungsprojekt soll Energiemanagement revolutionieren
Hörschelmann, L.; Reichelt, D.
Journal Article
2016Integration von Maschinendaten in eine Big-Data-Lösung am Beispiel von Halbleiter-Frontendtools
Schmidt, Martin
: Reichelt, Dirk (Betreuer); Gehrhardt, Ingolf (Betreuer)
Master Thesis
2016Der intelligente Mobilitätsassistent - Unterstützung der autonomen Mobilität älterer Menschen
Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas
Presentation
2016Investigation of the influence of the sample topography on the measurement uncertainty of a scanning white light interferometer
Adapa, Bharath Reddy
: Skupsch, Christoph (Betr.); Lemmer, Uli (Betr.)
Master Thesis
2016IoT Future: Visible Light Communication/Light Fidelity
Noack, Alexander
Presentation
2016La-doped ZrO2 based Back End of Line (BEoL) decoupling capacitors
Weinreich, Wenke; Seidel, Konrad; Polakowski, Patrick; Drescher, Maximilian; Gummenscheimer, A.; Nolan, M.G.; Cheng, L.; Triyoso, D.H.
Poster
2016La-doped ZrO2 based BEoL decoupling capacitors
Weinreich, W.; Seidel, K.; Polakowski, P.; Drescher, M.; Gummenscheimer, A.; Nolan, M.G.; Cheng, L.; Triyoso, D.H.
Conference Paper
2016Laser-induced periodic surface structures of thin, complex multi-component films
Reif, J.; Varlamova, O.; Ratzke, M.; Uhlig, S.
Journal Article
2016Li-Fi communication for industrial real-time data links
Faulwaßer, Michael
Presentation
2016Li-Fi interconnects for embedded designs in industry 4.0
Faulwaßer, Michael; Deicke, Frank; Ostermann, Robert; Schneider, Tobias
Conference Paper
2016Licht - eine Alternative zu Funk?
Deicke, Frank; Faulwaßer, Michael
Journal Article
2016Lichtausbreitung in einstellbaren Mikroringresonatoren
Martin, Anja
: Costache, Florenta (Betr.); Hartmann, Peter (Betr.)
Master Thesis
2016Liquid crystal waveguide switch for fast fiber optic sensor monitoring
Blasl, M.; Costache, F.
Conference Paper
2016Lithographische Techniken für die hochauflösende Zell-Mikroskopie: Strahlformung in der Biologie mit strukturierten UV-Schichten
Heber, Jörg; Rückerl, F.; Berndt, Dirk; Schmidt, Jan; Bellow, S.; Tivenez, J.-Y.; Knobbe, Jens; Shorte, S.L.; Wagner, Michael
Presentation
2016Low-temperature microwave-based plasma oxidation of Ge and oxidation of silicon followed by plasma nitridation
Lerch, W.; Schick, T.; Sacher, N.; Kegel, W.; Niess, J.; Czernohorsky, M.; Riedel, S.
Conference Paper
2016LPCVD in-situ doped silicon for thermoelectric applications
Calvo, J.; Müller, M.; Sauer, B.; Drescher, M.; Schmidt, C.; Völklein, F.; Wagner-Reetz, M.
Presentation
2016MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies
Grahmann, Jan; Dreyhaupt, André; Drabe, Christian; Schroedter, Richard; Kamenz, Jörg; Sandner, Thilo
Conference Paper
2016MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben
Schenk, Harald; Conrad, Holger; Gaudet, Matthieu; Schimmanz, Klaus; Langa, Sergiu
Patent
2016Micro scanning mirrors and enabling technology for applied optics
Sandner, Thilo
Conference Paper
2016Migration from CAN to CAN FD - how to boost network performance
Hildebrandt, Ralf; Deicke, Frank
Conference Paper
2016Mikromechanische Vorrichtung mit einem aktiv biegbaren Element
Gaudet, Matthieu; Schimmanz, Klaus; Stolz, Michael; Langa, Sergiu; Kaiser, Bert
Patent
2016Miniaturized NIR scanning grating spectrometer for use in mobile phones
Knobbe, Jens; Pügner, Tino; Grüger, Heinrich
Conference Paper
2016Mobilitätsassistent "MOVEAS" - Unterstützung der Mobilität älterer Menschen
Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas
Presentation
2016MOEMS based scanning grating facilitates miniaturization and tuning speed enhancement of an EC-QCL towards a µEC-QCL for real time spectroscopic sensing
Grahmann, Jan
Conference Paper
2016Near-infrared grating spectrometer for mobile phone applications
Pügner, T.; Knobbe, J.; Grüger, H.
Journal Article
2016Novel applications of photonic micro sensor systems: Real-world examples from plastics recycling to burglary monitoring
Reinig, Peter
Presentation
2016A novel electrostatic actuator class
Conrad, Holger; Kaiser, Bert; Gaudet, Matthieu; Langa, Sergiu; Stolz, Michael; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald
Journal Article, Conference Paper
2016A novel electrostatic micro-actuator class and its application potential for optical MEMS
Schenk, Harald; Conrad, Holger; Gaudet, Matthieu; Uhlig, Sebastian; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Schimmanz, Klaus
Conference Paper
2016Patterning and Imaging with Electrons: Assessing Multi-Beam SEM for e-Beam Structured CMOS Samples
Garbowski, Tomasz; Panteleit, Friedhelm; Dellemann, Gregor; Gutsch, Manuela; Hohle, Christoph; Reich, Elke; Rudolph, Matthias; Steidel, Katja; Thrun, Xaver; Zeidler, Dirk
Conference Paper
2016Plano-convex variable focal length micro-lens with a polymer nanocomposite actuator
Pawlik, Boscij; Rieck, Andreas; Costache, Florenta
Journal Article, Conference Paper
2016Predictive Maintenance mittels Big Data
Reichelt, Dirk
Presentation
2016Prozessanalyse der Tetramethylammoniumhydroxid-Ätzung von Silizium zur Qualitätsverbesserung optischer Gitter
Benter, Sandra
: Schnabel, Hans-Dieter (Betr.); Kaden, Christiane (Betr.)
Bachelor Thesis
2016Raman tensor elements of β-Ga2O3
Kranert, C.; Sturm, C.; Schmidt-Grund, R.; Grundmann, M.
Journal Article
2016Reaktives Ionenätzen zur Mehrfachstrukturierung und Elektrodentrennung für Kondensatoranwendungen in der Halbleiterindustrie
Pätzold, Björn
: Hohle, Christoph; Rudolph, Matthias; Rennekamp, Reinhold
Master Thesis
2016Real-time closed-loop control for micro mirrors with quasistatic comb drives
Schroedter, Richard; Sandner, Thilo; Janschek, Klaus; Roth, Matthias; Hruschka, Clemens
Conference Paper
2016Recent advances and applications of external Cavity-QCLs towards hyperspectral imaging for standoff detection and real-time spectroscopic sensing of chemicals
Ostendorf, R.; Butschek, L.; Hugger, S.; Fuchs, F.; Yang, Q.; Jarvis, J.; Schilling, C.; Rattunde, M.; Merten, A.; Grahmann, J.; Boskovic, D.; Tybussek, T.; Rieblinger, K.; Wagner, J.
Journal Article
2016Requirements and challenges for MEMS on CMOS
Schulze, Matthias
Presentation
2016RF simulation of the transmission path of a RFID backscatter transponder between reader and transponder antenna with ANSYS HFSS
Zhai, Wenqian
: Fischer, Wolf-Joachim (Betreuer); Heiß, Michael (Betreuer)
Master Thesis
2016RFID meets OPC UA - wie man mittels Standardisierung Integrations-Aufwand verringert
Reichelt, Dirk
Presentation
2016RFID-Sensor Transponder - "smarte" Integration mittels OPC-UA
Weder, Andreas; Reichelt, Dirk
Presentation
2016RFID-Transponder mit einer integrierten Antennenanordnung
Heiß, Michael
Patent
2016RTLS based services by APP based indoor localization and navigation
Scheibner, Christian; Voß, Kim
Presentation
2016Scanning optical MEMS with very high frequencies
Drabe, Christian; Graßhoff, Thomas; Todt, Ulrich; Flemming, André; Sandner, Thilo; Grahmann, Jan
Presentation
2016Schallwandlerarray mit gekoppelten Wandlern
Klemm, Markus; Elsäßer, Linus; Unamuno-Eguren, Anartz; Kupnik, Mario; Unger, Alexander
Patent
2016Simulation und Charakterisierung eines neuartigen mikromechanischen elektrostatischen Aktors
Kaiser, Bert
: Schenk, Harald (Betreuer); Bestehorn, Michael (Betreuer); Kupnik, Mario (Betreuer)
Dissertation
2016Size reduction of RFID tags by using an on-chip antenna
Heiß, Michael; Lischer, Sascha
Conference Paper
2016Smart walls with wireless humidity measurement
Heiß, Michael; Hildebrandt, Ralf; Scheibner, Christian
Conference Paper
2016Spatially resolved scatter measurement of diffractive micromirror arrays
Sicker, Cornelius; Heber, Jörg; Berndt, Dirk
Journal Article
2016Spatio-angular illumination control using diffractive micromirror arrays
Heber, Jörg; Rückerl, Florian; Berndt, Dirk; Schmidt, Jan; Bellow, Sebastien; Tinevez, Jean-Yves; Knobbe, Jens; Shorte, Spencer; Wagner, Michael
Conference Paper
2016Status of ferroelectric HfO2 based 1T FeFET memories
Mikolajick, T.; Schroeder, U.; Slesazeck, S.; Müller, S.; Schenk, T.; Müller, J.
Presentation
2016System design of programmable 4f phase modulation techniques for rapid intensity shaping - a conceptual comparison
Roth, Matthias; Heber, Jörg; Janschek, Klaus
Conference Paper
2016A thermally robust and thickness independent ferroelectric phase in laminated hafnium zirconium oxide
Riedel, S.; Polakowski, P.; Müller, J.
Journal Article
2016Track & trace scenarios to increase shop floor flexibility and productivity
Reichelt, Dirk
Presentation
2015A 24 GHz RFID system-on-a-chip with on-chip antenna, compatible to ISO 18000-6C / EPC C1G2
Lischer, Sascha; Heiß, Michael; Landwehr, Matthias; Fischer, Wolf-Joachim
Conference Paper
2015About stress in filled DRIE-trenches
Kaiser, Bert; Drabe, Christian; Graßhoff, Thomas; Conrad, Holger; Schenk, Harald; Grahmann, Jan
Journal Article
2015Advanced Wet-Etch-Only Process for Complete Tri-Layer Rework
Steinke, Philipp; Calvo, Jesús; Uhlig, Benjamin
Journal Article, Conference Paper
2015All-reflective optical power zoom objectives
Grüger, Heinrich
Conference Paper
2015Alternative ULK integration approach using a sacrificial layer in a standard dual damascene flow
Uhlig, B.; Calvo, J.; Koch, J.; Thrun, X.; Liske, R.
Conference Paper
2015Analyses of boundary conditions for process integration of sensor elements in complex fibre-reinforced thermoplastic spacer structures
Möbius, T.; Krahl, M.; Helwig, M.; Adam, F.; Modler, N.; Starke, E.; Sauer, S.; Fischer, W.J.
Conference Paper
2015Ansteuerung eines MEMS-basierten Laserprojektionssystems mittels einer Xilinx Zynq-SoC Plattform
Nibio, Vincent
: Grafe, Mario (Betreuer)
Master Thesis
2015Antennenentwurf für Radio-Frequency Identification (RFID)-Sensor-Transponder
Heiß, Michael
Dissertation
2015Characterisation of environmental influences on a new class of nano-actuators
Gerntrup, Marie-Louise
: Conrad, Holger (Betreuer)
Bachelor Thesis
2015Co-evaporant induced crystallization of zinc phthalocyanine: C60 blends for solar cells
Holzmueller, Felix; Wilde, Lutz; Wölzl, Florian; Koerner, Christian; Vandewal, Koen; Leo, Karl
Journal Article
2015Cobalt advanced barrier metallization: A resistivity composition analysis
Wislicenus, M.; Liske, R.; Gerlich, L.; Vasilev, B.; Preusse, A.
Journal Article, Conference Paper
2015Degradation mechanisms and reactions in organic light-emitting devices
Scholz, Sebastian; Kondakov, Denis; Lüssem, Björn; Leo, Karl
Journal Article
2015Development and characterization of a novel CoXN barrier film for future semiconductor technology nodes
Dhavamani, Abitha
: Uhlig, Benjamin (Betr.); Bartha, Johann Wolfgang (Gutachter)
Master Thesis
2015Development of a MEMS-based confocal laser scanning microscope for fluorescence imaging
Bechtel, Christin
Dissertation
2015Electric field and temperature scaling of polarization reversal in silicon doped hafnium oxide ferroelectric thin films
Zhou, D.Y.; Guan, Y.; Vopson, M.M.; Xu, J.; Liang, H.L.; Cao, F.; Dong, X.L.; Mueller, J.; Schenk, T.; Schroeder, U.
Journal Article
2015Entwicklung eines hybrid-integrierten Gitterspektrometers basierend auf einem mikro-opto-elektro-mechanischen Bauelement
Pügner, Tino
Dissertation
2015Entwicklung eines miniaturisierten Ionenfilters und Detektors für die potentielle Anwendung in Ionenmobilitätsspektrometern
Graf, Alexander
Dissertation
2015Entwicklung eines Systems und Optimierung von Treibersignalen zur Ansteuerung von Kapazitiven Mikromechanischen Ultraschallwandlern (CMUT)
Söberdt, Toni
: Budzier, Helmut (Betreuer); Klemm, Markus (Betreuer)
Thesis
2015Entwicklung von chipangepassten RFID-Transponder-Antennen
Reum, Thomas
: Michelfeit, Reinhold (Betr.); Heiß, Michael (Betr.)
Bachelor Thesis
2015Entwurf einer Mehrgrößenregelung zur hochdynamischen und präzisen zweidimensionalen Positionierung eines mikromechanischen Vektorscanners
Volkmann, Stefan
: Sandner, Thilo (Betreuer); Janschek, Klaus (Betreuer)
Thesis
2015Evidence of single domain switching in hafnium oxide based FeFETs: Enabler for multi-level FeFET memory cells
Mulaosmanovic, H.; Slesazeck, S.; Ocker, J.; Pesic, M.; Müller, S.; Flachowsky, S.; Müller, J.; Polakowski, J.; Paul, J.; Jansen, S.; Kolodinski, S.; Richter, C.; Piontek, S.; Schenk, T.; Kersch, A.; Künneth, C.; Bentum, R. van; Schröder, U.; Mikolajick, T.
Conference Paper
2015Ferroelectric hafnium oxide based materials and devices: Assessment of current status and future prospects
Müller, J.; Polakowski, P.; Mueller, S.; Mikolajick, T.
Journal Article
2015Ferroelectricity and antiferroelectricity of doped thin HfO2-based films
Park, M.H.; Lee, Y.H.; Kim, H.J.; Kim, Y.J.; Moon, T.; Do Kim, K.; Müller, J.; Kersch, A.; Schroeder, U.; Mikolajick, T.; Hwang, C.S.
Journal Article
2015Ferroelectricity in undoped hafnium oxide
Polakowski, P.; Müller, J.
Journal Article
2015Ferroelektrizität in Hafniumdioxid und deren Anwendung in nicht-flüchtigen Halbleiterspeichern
Müller, Johannes
Dissertation
2015Fluorine interface treatments within the gate stack for defect passivation in 28 nm high-k metal gate technology
Drescher, M.; Naumann, A.; Sundqvist, J.; Erben, E.; Grass, C.; Trentzsch, M.; Lazarevic, F.; Leitsmann, R.; Plaenitz, P.
Journal Article
2015Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2014
 
Annual Report
2015Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera
Sandner, T.; Baulig, C.; Grasshoff, T.; Wildenhain, M.; Schwarzenberg, M.; Dahlmann, H.-G.; Schwarzer, S.
Conference Paper
2015Impact of temperature on the efficiency of organic light emitting diodes
Moraes, I.R. de; Scholz, S.; Hermenau, M.; Tietze, M.L.; Schwab, T.; Hofmann, S.; Gather, M.C.; Leo, K.
Journal Article
2015Improved electrical behavior of ZrO2-based MIM structures by optimizing the O3 oxidation pulse time
Paskaleva, A.; Weinreich, W.; Bauer, A.J.; Lemberger, M.; Frey, L.
Journal Article
2015Integration challenges of ferroelectric hafnium oxide based embedded memory (Invited)
Müller, Johannes; Polakowski, Patrick; Paul, Jan; Riedel, Stefan; Hoffmann, Raik; Drescher, Maximilian; Slesazeck, Stefan; Müller, Stefan; Mulaosmanovic, Halid; Schröder, Uwe; Mikolajick, Thomas; Flachowsky, Stefan; Erben, Elke; Smith, Elliot; Binder, Robert; Triyoso, Dina H.; Metzger, Joachim; Kolodinski, Sabine
Conference Paper
2015Investigation of the reliability degradation of scaled SONOS memory transistors
Ocker, J.; Slesazeck, S.; Hoffmann, R.; Beyer, V.; Skouris, A.; Srowik, R.; Buschbeck, S.; Günther, S.; Mikolajick, T.
Conference Paper
2015Ein ISO 18000-6C / EPC C1G2 kompatibles 24-GHz-RFID-Ein-Chip-System mit integrierter Antenne
Lischer, Sascha; Heiß, Michael
Conference Paper
2015Konzeption eines High-Density-Interconnect (HDI) Verdrahtungsträgers zur hochparallelen Signalübertragung und dessen Optimierung anhand von Simulationen
Müller, Franz
: Torlee, Hannes (Betr.); Binner, A. (Betr.); Michalke, N. (Betr.)
Thesis
2015Low temperature deposition of silicon nitride using Si3Cl8
Riedel, S.; Sundqvist, J.; Gumprecht, T.
Journal Article
2015MEMS scanner mirror based system for retina scanning and in eye projection
Woittennek, F.; Knobbe, J.; Pügner, T.; Dallmann, H.G.; Schelinski, U.; Grüger, H.
Conference Paper
2015Mikroelektromechanisches System zum Durchstimmen von Lasern
Schenk, Harald; Grahmann, Jan; Wagner, Joachim; Ostendorf, Ralf; Rattunde, Marcel
Patent
2015Modellgestützte flachheitsbasierte Folgeregelung von quasistatischen Mikroscannern
Schroedter, Richard; Roth, Matthias; Sandner, Thilo; Janschek, Klaus
Conference Paper
2015A Movement Resilient, Mobile, 24-Bit, Long-term ECG-Monitoring Platform
Weder, A.; Kircher, Marco; Noack, Alexander
Presentation
2015Multi-Channel Beat Detector for a mobile ECG Monitoring Device
Noack, Alexander
Presentation
2015Nano patterning at Fraunhofer IPMS-CNT: Fabrication of silicon master for NIL via e-beam direct write
Thrun, Xaver; Choi, Kang-Hoon; Gutsch, Manuela; Hohle, Christoph; Rudolph, Matthias; Seidel, Konrad
Poster
2015Next-generation ferroelectric memories based on FE-HfO2
Müller, S.; Slesazeck, S.; Mikolajick, T.; Müller, Johannes; Polakowski, Patrick; Flachowsky, S.
Conference Paper
2015On the voltage scaling potential of SONOS non-volatile memory transistors
Ocker, J.; Slesazeck, S.; Mikolajick, T.; Buschbeck, S.; Günther, S.; Yurchuk, E.; Hoffmann, R.; Beyer, V.
Conference Paper
2015On treatment of ultra-low-k SiCOH in CF4 plasmas: Correlation between the concentration of etching products and etching rate
Lang, N.; Zimmermann, S.; Zimmermann, H.; Macherius, U.; Uhlig, B.; Schaller, M.; Schulz, S.E.; Röpcke, J.
Journal Article
2015Optischer Empfänger für eine optische drahtlose Kommunikation
Deicke, Frank; Schneider, Tobias
Patent
2015Optischer Schweißelektroden-Überwachungssensor
Grüger, H.; Reinig, P.
Journal Article
2015Organosilane Downstream Plasma On Ultra Low-k Dielectrics: Comparing Repair With Post Etch Treatment
Calvo, J.; Steinke, P.; Wislicenus, M.; Gerlich, L.; Seidel, R.; Clauss, E.; Uhlig, B.
Conference Paper
2015Performance assessment of CMUT arrays based on electrical impedance test results
Klemm, Markus; Unamuno, Anartz; Elsäßer, Linus; Jeroch, Werner
Journal Article
2015Planare Mehrfrequenzantenne
Heiß, Michael
Patent
2015Polarization independent electro-optical waveguides with liquid crystals in isotropic phase
Costache, Florenta; Blasl, Martin; Bornhorst, Kirstin
Conference Paper
2015Polarization insensitive variable optical attenuator based on field induced waveguides with a liquid crystal core
Blasl, M.; Bornhorst, K.; Costache, F.
Conference Paper
2015Polymer energy harvester for powering wireless communication systems
Costache, Florenta; Schirrmann, Christian; Seifert, Ruben; Bornhorst, Kirstin; Pawlik, Boscij; Despang, Hans-Günter; Heinig, Andreas
Journal Article, Conference Paper
2015Preface
Boulmer-Leborgne, C.; Bulgakova, N.M.; Costache, F.; Pervolaraki, M.; Serna, R.
Journal Article, Conference Paper
2015Pulse plating of manganese oxide nanoparticles on aligned MWCNT
Schneider, Michael; Weiser, Mathias; Schrötke, Carl; Meißner, Frank; Endler, Ingolf; Michaelis, Alexander
Journal Article
2015The Rayleigh law in silicon doped hafnium oxide ferroelectric thin films
Guan, Yan; Zhou, Dayu; Xu, Jin; Liu, Xiaohua; Cao, Fei; Dong, Xianlin; Müller, Johannes; Schenk, Tony; Schroeder, Uwe
Journal Article
2015Reactively sputtered hafnium oxide on silicon dioxide: Structural and electrical properties
Kolkovsky, V.; Lukat, K.; Kurth, E.; Kunath, C.
Journal Article
2015Recent trends in developments of MEMS and nanoelectronic sensors
Scholles, Michael
Conference Paper
2015Removable Identification Technology to Differentiate Food Contact PET in Mixed Waste Streams: Interim Report
Pilon, Laura; Stewart, Angela; Bahia, Raminder; Hintschich, Susanne; Willner, Claudia; Eder, Hans
Report
2015Resonant enhancement of damping within the free layer of a microscale magnetic tunnel valve
Keatley, P.S.; Kruglyak, V.V.; Neudert, A.; Hicken, R.J.; Poimanov, V.D.; Childress, J.R.; Katine, J.A.
Journal Article
2015Scaling and optimization of ferroelectric hafnium oxide for memory applications and beyond
Müller, Johannes; Riedel, Stefan; Polakowski, Patrick
Presentation
2015Self-organized surface structures with ultrafast white-light: First investigation of LIPSS with supercontinuum
Uhlig, S.
Master Thesis
2015Self-Organizing Mobile Multi-Sensor Surveillance Platform for Emergency Management Situations
Noack, Alexander; Weder, Andreas; Heinig, Andreas
Presentation
2015Sensitivity analysis for high accuracy proximity effect correction
Thrun, Xaver; Browning, Clyde; Choi, Kang-Hoon; Figueiro, Thiago; Hohle, Christoph; Saib, Mohamed; Schiavone, Patrick; Bartha, Johann W.
Conference Paper
2015A small-gap electrostatic micro-actuator for large deflections
Conrad, Holger; Schenk, Harald; Kaiser, Bert; Langa, Sergiu; Gaudet, Matthieu; Schimmanz, Klaus; Stolz, Michael; Lenz, Miriam
Journal Article
2015Spatially resolved contrast measurement of diffractive micromirror arrays
Sicker, Cornelius; Heber, Jörg; Berndt, Dirk; Rückerl, Florian; Tinevez, Jean-Yves; Shorte, Spencer; Wagner, Michael; Schenk, Harald
Conference Paper
2015Spatio-angular light control in microscopes using micro mirror arrays
Rückerl, F.; Bellow, S.; Berndt, Dirk; Tinevez, J.-Y.; Heber, Jörg; Wagner, Michael; Shorte, S.
Conference Paper
2015Stabilizing the ferroelectric phase in doped hafnium oxide
Hoffmann, M.; Schroeder, U.; Schenk, T.; Shimizu, T.; Funakubo, H.; Sakata, O.; Pohl, D.; Drescher, M.; Adelmann, C.; Materlik, R.; Kersch, A.; Mikolajick, T.
Journal Article
2015Steerable patterned OLED backlight for autostereoscopic display application
Vogel, U.; Fehse, K.; Wartenberg, P.; Knobbe, J.; Scholles, M.; Richter, B.; Hild, O.
Conference Paper
2015Stress controlled CMUT fabrication based on a CMOS compatible sacrificial release process
Elsäßer, Linus; Friedrichs, Martin; Klemm, Markus; Unamuno, Anartz
Conference Paper
2015Structural and Dielectric Properties of Subnanometric Laminates of Binary Oxides
Kahouli, A.; Lebedev, O.; Ben Elbahri, M.; Mercey, B.; Prellier, W.; Riedel, S.; Czernohorsky, M.; Lallemand, F.; Bunel, C.; Lüders, U.
Journal Article
2015Theory of co-adsorption and its application to copper superfilling
Liske, Romy; Krause, Robert; Uhlig, Benjamin; Gerlich, Lukas; Bott, Sascha; Wislicenus, Marcus; Preusse, Axel
Presentation
2015Ultra-Thin high density capacitors for advanced packaging solutions
Seidel, K.; Böttcher, M.; Dobritz, S.; Czernohorsky, M.; Riedel, S.; Weinreich, W.
Conference Paper
2015Untersuchung des Korrosionsverhaltens von kobalthaltigen Dünnschichten für den Einsatz in der Halbleitertechnologie
Nagy, Nicole
: Kalies, Grit (Betr.); Uhlig, Benjamin (Betr.)
Master Thesis
2015Untersuchungen an Hard- und Firmware für ein fehlertolerantes Sensornetzwerk, welches in faserverstärkte Verbundwerkstoffe integrierbar ist
Bartl, Clemens
: Heinig, Andreas (Betr.); Fischer, Wolf-Joachim (Betr.)
Thesis
2015Verfahren zum Herstellen eines kapazitiven Ultraschallwandlers und Anordnung einer Mehrzahl von kapazitiven Ultraschallwandlern
Unamuno-Eguren, Anartz; Friedrichs, Martin
Patent
2015Verfahren, Vorrichtung und Computerprogrammprodukt zum Bestimmen eines isoelektrischen Punkts
Noack, Alexander; Poll, Rüdiger
Patent
2015Verification of E-Beam direct write integration into 28nm BEOL SRAM technology
Hohle, Christoph; Choi, Kang-Hoon; Gutsch, Manuela; Hanisch, Norbert; Seidel, Robert; Steidel, Katja; Thrun, Xaver; Werner, Thomas
Conference Paper
2015Vorrichtung mit einem mikromechanischen Bauelement
Pügner, Tino; Knobbe, Jens
Patent
2015Wafer level vacuum packaging of micro-mirrors with buried signal lines
Langa, S.; Drabe, C.; Herrmann, A.; Ludewig, T.; Rieck, A.; Flemming, A.; Kaden, C.
Journal Article
2015Widely tuneable quantum cascade lasers for spectroscopic sensing
Wagner, J.; Ostendorf, R.; Grahmann, Jan; Merten, André; Hugger, S.; Jarvis, J.P.; Fuchs, F.; Boskovic, D.; Schenk, Harald
Conference Paper
2015Zuverlässige Zugangskontrolle durch Authentifizierung mittels MEMS basiertem Retinascanner mit zusätzlicher Projektionsoption
Woittennek, Franziska; Knobbe, Jens; Pügner, Tino; Dallmann, Hans-Georg; Schelinski, Uwe; Grüger, Heinrich
Conference Paper
201410 Gbit/s bidirectional optical wireless communication module for docking devices
Faulwaßer, M.; Deicke, F.; Schneider, T.
Conference Paper
2014ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM
Triyoso, D.H.; Weinreich, W.; Seidel, K.; Nolan, M.G.; Polakowski, P.; Utess, D.; Ohsiek, S.; Dittmar, K.; Weisheit, M.; Liebau, M.; Fox, R.
Conference Paper
2014ALD ZrO2 processes for BEoL device applications
Weinreich, Wenke; Seidel, Konrad; Polakowski, Patrick; Riedel, Stefan; Wilde, Lutz; Sundqvist, Jonas; Triyoso, Dina H.; Nolan, Mark G.
Conference Paper
2014Aluminium based micro mirrors exposed to UV laser light - in situ performance and degradation
Mai, Alexander
Dissertation
2014Benefits and limitations by replacing high-speed data links with a modern optical wireless solution
Faulwaßer, Michael; Deicke, Frank; Schneider, Tobias
Conference Paper
2014Characterization of a chloride-based titanium nitride atomic layer deposition process for back-end-of-line devices
Neuber, Markus
: Weinreich, Wenke (Betreuer)
Master Thesis
2014Charakterisierung eines Digitalen Holographischen Mikroskops zur Analyse mikro-mechanischer Aktoren
Epperlein, Nadja
: Schenk, Harald (Betreuer)
Master Thesis
2014Chewing after stress: Psychosocial stress influences chewing frequency, chewing efficacy, and appetite
Petrowski, Katja; Wintermann, Gloria-Beatrice; Joraschky, Peter; Päßler, Sebastian
Journal Article
2014Claritas™ - a unique and robust endpoint technology for silicon drie processes with open area down to 0.05%
Ansell, O.; Barnett, R.; Haase, T.; Xie, L.; Vargo, S.; Thomas, D.
Conference Paper
2014CMP process development for Cobalt liner integration at the 28-nm-node
Koch, J.; Bott, S.; Wislicenus, M.; Krause, R.; Gerlich, L.; Uhlig, B.; Liske, R.; Vasilev, B.; Preusse, A.
Conference Paper
2014Cobalt advanced barrier metallization: A resist composition analysis
Wislicenus, Marcus; Liske, Romy; Gerlich, Lukas; Vasilev, Boris; Preusse, Axel
Conference Paper
2014Combining external cavity quantum cascade lasers and MOEMS technology: An approach for miniaturization and fast wavelength scanning
Ambacher, O.; Ostendorf, R.; Bleh, D.; Merten, A.; Grahmann, J.; Schmidt, R.; Kunzer, M.; Hugger, S.; Wagner, J.
Conference Paper
2014Compact optical position feedback scheme for MOEMS mirrors
Tortschanoff, A.; Baumgart, M.; Holzmann, D.; Lenzhofer, M.; Sandner, T.; Kenda, A.
Journal Article
2014Deeper insight with MEMS based illumination
Skupsch, Christoph; Heber, Jörg; Berndt, Dirk; Wagner, Michael; Rückerl, Florian; Tinevez, Jean-Yves; Shorte, Spencer
Presentation
2014Depth-resolved transport measurements and atom-probe tomography of heterogeneous, superconducting Ge:Ga films
Heera, V.; Fiedler, J.; Naumann, M.; Skrotzki, R.; Kölling, S.; Wilde, L.; Herrmannsdörfer, T.; Skorupa, W.; Wosnitza, J.; Helm, M.
Journal Article
2014Design and fabrication of a tunable two-fluid micro-lens device with a large deflection polymer actuator
Schirrmann, Christian; Costache, Florenta; Bornhorst, Kirstin; Pawlik, Boscij; Rieck, Andreas; Schenk, Harald
Journal Article, Conference Paper
2014Design of a MEMS-based retina scanning system for biometric authentication
Woittennek, Franziska; Knobbe, Jens; Pügner, Tino; Schelinski, Uwe; Grüger, Heinrich
Conference Paper
2014Designoptimierung und Charakterisierung eines mittels Elektronenstrahldirektschreibens hergestellten Siliziumstempels zur Fertigung von plasmonisch aktiven Nanostrukturen
Kaiser, Michael
: Hohle, Christoph (Betreuer); Fischer, Wolf-Joachim (Betreuer)
Thesis
2014Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives
Kenda, A.; Kraft, M.; Tortschanoff, A.; Scherf, W.; Sandner, T.; Schenk, H.; Lüttjohann, S.; Simon, A.
Conference Paper
2014Direct UV-imprinting of hybrid-polymer photonic microring resonators and their characterization
Kirchner, R.; Finn, A.; Landgraf, R.; Nueske, L.; Teng, L.C.; Vogler, M.; Fischer, W.-J.
Journal Article
2014Doped hafnium oxide - an enabler for ferroelectric field effect transistors
Mikolajick, T.; Müller, S.; Schenk, T.; Yurchuk, E.; Slesazeck, S.; Schröder, U.; Flachowsky, S.; Bentum, R. van; Kolodinski, S.; Polakowski, P.; Müller, J.
Conference Paper
2014Drahtlos messen ohne Batterie
Fischer, Wolf-Joachim
Journal Article
2014ECG-Home Project
Noack, Alexander; Göricke, Rico
Poster
2014Effective corner rounding correction in the data preparation of electron beam lithography
Choi, Kang-Hoon; Browning, Clyde; Figueiro, Thiago; Hohle, Christoph; Kaiser, Michael; Schiavone, Patrick
Conference Paper
2014Engineering blue fluorescent bulk emitters for OLEDs: Triplet harvesting by green phosphors
Hofmann, S.; Hummert, M.; Scholz, R.; Luschtinetz, R.; Murawski, C.; Will, P.-A.; Hintschich, S.I.; Alex, J.; Jankus, V.; Monkman, A.P.; Lüssem, B.; Leo, K.; Gather, M.C.
Journal Article
2014Entwicklung eines VHDL-Moduls für die Ansteuerung und Regelung quasistatischer Scanner
Schütz, Sandra
: Schwarzenberg, Markus (Betreuer)
Thesis
2014Entwicklung und Charakterisierung von Ansteuerprinzipien für Capactive Micromachined Ultrasonic Transducers (CMUT)
Blocher, Philipp
: Unamuno, Anartz (Betreuer)
Master Thesis
2014Entwicklung von Bildaufnahme und -verarbeitung für eine multispektrale Kamera
Grafe, Mario
: Pügner, Tino (Betr.); Knobbe, Jens (Betr.)
Master Thesis
2014Entwicklung von Bildverarbeitungsalgorithmen zur Bewertung der Fitness von Banknoten
Kleinschmidt, Sebastian
: Grafe, Mario (Betreuer)
Thesis
2014Entwicklung von Hafniumoxid ALD-Prozessen mit alternativen Oxidationsmitteln
Paulack, Stephan
: Naumann, Andreas (Betreuer)
Bachelor Thesis
2014Entwurf, Systemkonzeptionierung und Realisierung einer Ansteuerung für 2D-Mikroscannerspiegel
Barth, Robert
: Schwarzenberg, Markus (Betreuer)
Master Thesis
2014Extension of frequency modulated Doppler global velocimetry for the investigation of unsteady spray flows
Fischer, A.; Wilke, U.; Schlüßler, R.; Haufe, D.; Sandner, T.; Czarske, J.
Journal Article
2014Fast Nonlinear CMUT Simulation Model for Pull-In and Dynamic Fluid Coupled Deflection Analysis
Klemm, Markus; Unamuno, Anartz
Presentation
2014Ferroelectric and antiferroelectric properties of Si-doped HfO2 thin films
Zhou, D.Y.; Xu, J.; Müller, J.; Schröder, U.
Journal Article
2014Ferroelectric deep trench capacitors based on Al:HfO2 for 3D nonvolatile memory applications
Polakowski, Patrick; Riedel, Stefan; Weinreich, Wenke; Rudolf, M.; Sundqvist, Jonas; Seidel, Konrad; Müller, Johannes
Conference Paper
2014Ferroelectric hafnium oxide based materials and devices
Müller, Johannes; Polakowski, Patrick; Müller, Stefan; Mikolajick, Thomas
Conference Paper
2014Ferroelectric hafnium oxide: A game changer to FRAM?
Müller, J.; Polakowski, P.; Riedel, S.; Mueller, S.; Yurchuk, E.; Mikolajick, T.
Conference Paper
2014Ferroelectricity in Si-doped HfO2 revealed: A binary lead-free ferroelectric
Martin, D.; Müller, J.; Schenk, T.; Arruda, T.M.; Kumar, A.; Strelcov, E.; Yurchuk, E.; Müller, S.; Pohl, D.; Schröder, U.; Kalinin, S.V.; Mikolajick, T.
Journal Article
2014First-principles study of oxygen and aluminum defects in beta-Si3N4: Compensation and charge trapping
Grillo, M.E.; Elliott, S.D.; Rodríguez, J.; Añez, R.; Coll, D.S.; Suhane, A.; Breuil, L.; Arreghini, A.; Degraeve, R.; Shariq, A.; Beyer, V.; Czernohorsky, M.
Journal Article
2014Food intake monitoring: Automated chew event detection in chewing sounds
Päßler, S.; Fischer, W.-J.
Journal Article
2014Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2013
 
Annual Report
2014Graphen - Eigenschaften und mögliche Anwendungen
Beyer, Beatrice
Conference Paper
2014Herstellungsverfahren
Langa, Sergiu; Drabe, Christian; Sandner, Thilo
Patent
2014High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications
Schmidt, Jan-Uwe; Dauderstädt, Ulrike; Dürr, Peter; Friedrichs, Martin; Hughes, Thomas; Ludewig, Thomas; Rudloff, Dirk; Schwaten, Tino; Trenkler, Daniela; Wagner, Michael; Wullinger, Ingo; Bergström, Andreas; Björnängen, Peter; Jonsson, Fredrik; Karlin, Tord; Rönnholm, Peter; Sandström, Torbjörn
Conference Paper
2014Impact of different dopants on the switching properties of ferroelectric hafniumoxide
Schroeder, U.; Yurchuk, E.; Müller, J.; Martin, D.; Schenk, T.; Polakowski, P.; Adelmann, C.; Popovici, M.I.; Kalinin, S.V.; Mikolajick, T.
Journal Article
2014Impact of scaling on the performance of HfO2-based ferroelectric field effect transistors
Yurchuk, E.; Müller, J.; Paul, J.; Schlösser, T.; Martin, D.; Hoffmann, R.; Müller, S.; Slesazeck, S.; Schroeder, U.; Boschke, R.; Bentum, R. van; Mikolajick, T.
Journal Article
2014Impact of the apex of an elongated dielectric tip upon its light absorption properties
Bogdanowicz, J.; Gilbert, M.; Koelling, S.; Vandervorst, W.
Journal Article, Conference Paper
2014Influence of nitrogen trap states on the electronic properties of high-k metal gate transistors
Ocker, J.; Kupke, S.; Slesazeck, S.; Mikolajick, T.; Erben, E.; Drescher, M.; Naumann, A.; Lazarevic, F.; Leitsmann, R.
Conference Paper
2014Innovative and water based stripping approach for thick and bulk photoresists
Rudolph, M.; Schumann, D.; Thrun, X.; Esche, S.; Hohle, C.
Conference Paper
2014Integration of e-beam direct write in BEOL processes of 28nm SRAM technology node using mix and match
Gutsch, Manuela; Choi, Kang-Hoon; Hanisch, Norbert; Hohle, Christoph; Steidel, Katja; Thrun, Xaver; Seidel, Robert; Werner, Thomas
Conference Paper
2014Introduction of an innovative water based photoresist stripping process using intelligent fluids
Rudolph, Matthias; Felten, Peter; Thrun, Xaver; Schumann, Dirk; Esche, Silvio; Hohle, Christoph
Conference Paper
2014Jerk and current limited flatness-based open loop control of foveation scanning electrostatic micromirrors
Schroedter, Richard; Janschek, Klaus; Sandner, Thilo
Conference Paper
2014Large field of view MEMS-based confocal laser scanning microscope for fluorescence imaging
Bechtel, Christin; Knobbe, Jens; Grüger, Heinrich; Lakner, Hubert
Journal Article
2014MEMS-based miniature near-infrared spectrometer for application in environmental and food monitoring
Hintschich, Susanne; Pügner, Tino; Knobbe, Jens; Schröder, Julia; Reinig, Peter; Grüger, Heinrich; Schenk, Harald
Conference Paper
2014Metasurfaces for colour printing
Zapata-Rodríguez, C.J.; Miret, J.J.; Rodríguez-Cantó, P.; Muñoz-Matutano, G.; Martínez-Pastor, J.P.; Abargues, R.; Pastor, D.; Kaiser, M.; Hohle, C.
Conference Paper
2014Micro mirrors for high-speed laser deflection and patterning
Schenk, Harald; Grahmann, Jan; Sandner, Thilo; Wagner, Michael; Dauderstädt, Ulrike; Schmidt, Jan-Uwe
Conference Paper, Journal Article
2014Micro-scanning mirrors for high-power laser applications in laser surgery
Sandner, Thilo; Kimme, Simon; Grasshoff, Thomas; Todt, Ulrich; Graf, Alexander; Tulea, Christian; Schenk, Harald
Conference Paper
2014Multi-Level MOEMS structures for spatial light modulators
Mirabella, Simone; Friedrichs, Martin; Pufe, Wolfram; List, Matthias
Conference Paper
2014OFETs with sub-100 nm channel length fabricated by wafer-scale NIL and comprehensive DC and AC characterizations
Teng, L.; Finn, A.; Plötner, M.; Shi, H.; Fischer, W.-J.
Journal Article
2014Optical design of MOEMS-based micro-mechatronic modules for applications in spectroscopy
Tortschanoff, A.; Kremer, M.; Sandner, T.; Kenda, A.
Conference Paper
2014Optical position detection for MOEMS scanner mirrors with arbitrary trajectories
Tortschanoff, Andreas; Baumgart, Marcus; Holzmann, Dominik; Mayer, Christoph; Sandner, Thilo; Kenda, Andreas
Conference Paper
2014Origin of the endurance degradation in the novel HfO2-based 1T ferroelectric non-volatile memories
Yurchuk, E.; Mueller, S.; Martin, D.; Slesazeck, S.; Schroeder, U.; Mikolajick, T.; Müller, J.; Paul, J.; Hoffmann, R.; Sundqvist, J.; Schlösser, T.; Boschke, R.; Bentum, R. van; Trentzsch, M.
Conference Paper
2014Phase separation in Zr56-xGdxCo 28Al16 metallic glasses (0 ⩽ x ⩽ 20)
Han, J.H.; Mattern, N.; Vainio, U.; Shariq, A.; Sohn, S.W.; Kim, D.H.; Eckert, J.
Journal Article
2014Photoactivation and optogenetics with micro mirror enhanced illumination
Rückerl, Florian; Berndt, Dirk; Heber, Jörg; Shorte, Spencer
Conference Paper
2014Post etch wet clean processes for advanced technology nodes
Uhlig, Benjamin; Steinke, Philipp; Liske, Romy; Ott, Andreas; Mieth, Oliver
Conference Paper
2014Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera
Sandner, T.; Grasshoff, T.; Schwarzenberg, M.; Schroedter, R.; Schenk, H.
Conference Paper
2014Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera
Sandner, T.; Grasshoff, T.; Schwarzenberg, M.; Schroedter, R.; Schenk, H.
Journal Article
2014Quasistatisch-resonanter Mikroscanner zur adaptiven Auflösungssteuerung einer 3D ToF-Kamera
Sandner, T.; Grasshoff, T.; Schrödter, R.; Schwarzenberg, M.
Journal Article
2014Quasistatisch-resonanter Mikroscanner zur adaptiven Auflösungssteuerung einer 3D ToF-Kamera
Sandner, T.; Grasshoff, T.; Schrödter, R.; Schwarzenberg, M.
Journal Article
2014Realization of CMUT based ultrasonic sensor systems
Unamuno, Anartz; Klemm, Markus; Grüger, Heinrich
Conference Paper
2014RFID-Transponder, der passiv betreibbar ist
Holland, Hans-Jürgen; Heiß, Michael; Fischer, Wolf-Joachim
Patent
2014Role of the dielectric for the charging dynamics of the dielectric/barrier interface in AlGaN/GaN based metal-insulator-semiconductor structures under forward gate bias stress
Lagger, Peter; Steinschifter, P.; Reiner, M.; Stadtmüller, M.; Denifl, G.; Naumann, Andreas; Müller, Johannes; Wilde, Lutz; Sundqvist, Jonas; Pogany, D.
Journal Article
2014Rolle-zu-Rolle Fertigung von TCM auf flexiblen Substraten - Chancen und Herausforderungen
Brückner, Jacqueline
Conference Paper
2014Simulation model for CMUT with rapid structure fluid interaction in time domain
Klemm, Markus; Unamuno, Anartz
Conference Paper
2014Strain-enhanced nanocomposites of electrostrictive polymers and high-k nanofillers for micro-actuation applications
Pawlik, Boscij; Schirrmann, Christian; Bornhorst, Kirstin; Costache, Florenta
Journal Article, Conference Paper
2014Thin film growth of Fe-based superconductors: From fundamental properties to functional devices
Haindl, S.; Kidszun, M.; Oswald, S.; Hess, C.; Büchner, B.; Kölling, S.; Wilde, L.; Thersleff, T.; Yurchenko, V.V.; Jourdan, M.; Hiramatsu, H.; Hosono, H.
Journal Article
2014Time domain resonance frequency measurement of inductively coupled resonant sensors using the matrix pencil method
Sauer, S.; Fischer, W.-J.
Conference Paper
2014Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers
Sandner, T.; Grasshoff, T.; Gaumont, E.; Schenk, H.; Kenda, A.
Journal Article
2014Tunable external cavity quantum cascade lasers (EC-QCL): An application field for MOEMS based scanning gratings
Grahmann, Jan; Merten, André; Ostendorf, Ralf; Fontenot, Michael; Bleh, Daniela; Schenk, Harald; Wagner, Hans-Joachim
Conference Paper
2014Understanding the materials, electrical and reliability impact of Al-addition to ZrO2 for BEOL compatible MIM capacitors
Triyoso, D.H.; Chu, S.; Seidel, K.; Weinreich, W.; Yiang, K.-Y.; Nolan, M.G.; Brunco, D.P.; Rinderknecht, J.; Utess, D.; Kyono, C.; Miller, R.; Park, J.; Cheng, L.; Liebau, M.; Lomtscher, P.; Fox, R.
Conference Paper
2014Variable Optical Power Splitter with Field-Induced Waveguides in Liquid Crystals Paranematic Phase
Costache, Florenta; Hartwig, Haldor; Bornhorst, Kirstin; Blasl, Martin
Conference Paper
2014Ein Verfahren für die Synthese von Pass-Transistor-Schaltungen mit niedrigem Energieverbrauch
Zimmerling, Martin
: Fischer, Wolf-Joachim (Betreuer)
Dissertation
2014Wave sequence based identification of sinus rhythm beats on a microcontroller
Noack, Alexander; Poll, Rüdiger; Fischer, Wolf-Joachim
Conference Paper
2014A wireless passive humidity threshold monitoring solution based on a permanent resistance change
Sauer, S.; Fischer, W.-J.
Journal Article, Conference Paper
2013(Invited) Hafnium oxide based CMOS compatible ferroelectric materials
Schroeder, U.; Martin, D.; Müller, J.; Yurchuk, E.; Mueller, S.; Adelmann, C.; Schloesser, T.; Bentum, R. van; Mikolajick, T.
Journal Article
201315 days electron beam exposure for manufacturing of large area silicon based NIL master
Thrun, X.; Choi, K.-H.; Freitag, M.; Gutsch, M.; Hohle, C.; Paul, J.; Rudolph, M.; Steidel, K.
Journal Article
2013Accurate and efficient physical simulation of program disturb in scaled NAND flash memories
Kuligk, A.; Nguyen, C.D.; Löhr, D.-A.; Beyer, V.; Meinerzhagen, B.
Conference Paper
2013Actuation principles for hybrid two-dimensional quasistatic micro scanning mirrors
Kimme, Simon
Conference Paper
2013Adaptive prefilter design for control of quasistatic microscanners
Janschek, K.; Sandner, T.; Schroedter, R.; Roth, M.
Conference Paper
2013Analyse und Optimierung des Wissensmanagement in Forschung und Entwicklung
Bachmann, Alexander
: Deicke, Frank (Betreuer)
Master Thesis
2013Angepasste Piezosensorelektronik und integrierte drahtlose Sensornetzwerke zur Herstellung intelligenter Leichtbauteile
Weder, Andreas; Geller, Sirko
Conference Paper
2013Antenna design for a UHF RFID sensor tag inside a switchgear
Heiß, Michael; Hildebrandt, Ralf
Conference Paper
2013Bildgebende und zeitlich hochauflösende Messungen von instationären Strömungsphänomenen mittels FM-DGV und einem Mikroscannerspiegel
Wilke, U.; Czarske, J.; Sandner, T.; Fischer, A.
Conference Paper
2013Characterization of a MID-volume fabrication process for CMUT development
Unamuno, Anartz; Friedrichs, Martin; Jeroch, Werner; Grüger, Heinrich
Poster
2013Chemical degradation mechanisms of highly efficient blue phosphorescent emitters used for organic light emitting diodes
Seifert, R.; Moraes, I.R. de; Scholz, S.; Gather, M.C.; Lüssem, B.; Leo, K.
Journal Article
2013Closed-loop control driver for quasi-static MOEMS mirrors
Tortschanoff, Andreas; Holzmann, Dominik; Lenzhofer, Martin; Sandner, Thilo; Kenda, Andreas
Conference Paper
2013Correlation of absorption profile and fill factor in organic solar cells: The role of mobility imbalance
Tress, W.; Merten, A.; Furno, M.; Hein, M.; Leo, K.; Riede, M.
Journal Article
2013Counting x-ray line detector with monolithically integrated readout circuits
Lohse, T.; Krüger, P.; Heuer, H.; Oppermann, M.; Torlee, H.; Meyendorf, Norbert
Conference Paper
2013Crystallographic texture of submicron thin aluminum nitride films on molybdenum electrode for suspended micro and nanosystems
Sah, R.E.; Kirste, L.; Kirmse, H.; Mildner, M.; Wilde, L.; Kopta, S.; Knöbber, F.; Krieg, M.; Cimalla, V.; Lebedev, V.; Ambacher, O.
Journal Article
2013Design and characterization of a hybrid-integrated MEMS scanning grating spectrometer
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino; Schenk, Harald
Conference Paper
2013Detailed leakage current analysis of metal-insulator-metal capacitors with ZrO2, ZrO2/SiO2/ZrO2, and ZrO2/Al2O3/ZrO2 as dielectric and TiN electrodes
Weinreich, W.; Shariq, A.; Seidel, K.; Sundqvist, J.; Paskaleva, A.; Lemberger, M.; Bauer, A.J.
Journal Article, Conference Paper
2013Developing electro-optical tools for the characterization of microscanners
Kattungal, Jithin Vasanthan
: Dreyhaupt, André (Supervisor)
Master Thesis
2013Direct imaging of 3D atomic-scale dopant-defect clustering processes in ion-implanted silicon
Koelling, S.; Richard, O.; Bender, H.; Uematsu, M.; Schulze, A.; Zschaetzsch, G.; Gilbert, M.; Vandervorst, W.
Journal Article
2013Downscaling ferroelectric field effect transistors by using ferroelectric Si-doped HfO2
Martin, Dominik; Yurchuk, Ekaterina; Müller, Stefan; Müller, Johannes; Paul, Jan; Sundquist, Jonas; Slesazeck, S.; Schlösser, T.; Bentum, R. van; Trentzsch, M.; Schröder, U.; Mikolajick, T.
Conference Paper, Journal Article
2013Effects on electron scattering and resist characteristics using assisting underlayers for e-beam direct write lithography
Thrun, Xaver; Choi, Kang-Hoon; Hanisch, Norbert; Hohle, Christoph; Steidel, Katja; Guerrero, Douglas; Figueiro, Thiago; Bartha, Johann W.
Conference Paper
2013Electronic structure, morphology and emission polarization of enhanced symmetry InAs quantum-dot-like structures grown on InP substrates by molecular beam epitaxy
Maryski, A.; Sk, G.; Musia, A.; Andrzejewski, J.; Misiewicz, J.; Gilfert, C.; Reithmaier, J.P.; Capua, A.; Karni, O.; Gready, D.; Eisenstein, G.; Atiya, G.; Kaplan, W.D.; Kölling, S.
Journal Article
2013Electrostrictive polymer - inorganic nanoparticle nanocomposites for actuator applications
Pawlik, Boscij; Schirrmann, Christian; Bornhorst, Kirstin; Costache, Florenta
Poster
2013Elemental distribution, solute solubility and defect free volume in nanocrystalline restricted-equilibrium Cu-Ag alloys
Riedl, T.; Kirchner, A.; Eymann, K.; Shariq, A.; Schlesiger, R.; Schmitz, G.; Ruhnow, M.; Kieback, B.
Journal Article
2013Entwurf anwendungsspezifischer drahtloser Körpernetzwerke zur Vitalparameterübertragung
Weder, Andreas
Dissertation
2013Evaluation of an advanced dual hard mask stack for high resolution pattern transfer
Paul, Jan; Rudolph, M.; Riedel, S.; Thrun, X.; Wege, S.; Hohle, C.
Conference Paper
2013Extreme long range process effects characterization and compensation
Figueiro, T.; Browning, C.; Thornton, M.J.; Vannuffel, C.; Hoon Choi, K.; Hohle, C.; Tortai, J.-H.; Schiavone, P.
Conference Paper
2013Ferroelectric hafnium oxide: A CMOS-compatible and highly scalable approach to future ferroelectric memories
Müller, J.; Böscke, T.S.; Müller, S.; Yurchuk, E.; Polakowski, P.; Paul, J.; Martin, D.; Schenk, T.; Khullar, K.; Kersch, A.; Weinreich, W.; Riedel, S.; Seidel, K.; Kumar, A.; Arruda, T.M.; Kalinin, S.V.; Schlösser, T.; Boschke, R.; Bentum, R. van; Schröder, U.; Mikolajick, T.
Conference Paper
2013First application close measurements applying the new hybrid integrated MEMS spectrometer
Grüger, H.; Pügner, T.; Knobbe, J.; Schenk, H.
Conference Paper
2013Flatness-based open loop command tracking for quasistatic microscanners
Janschek, Klaus; Schroedter, Richard; Sandner, Thilo
Conference Paper
2013Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2012
 
Annual Report
2013From MFM capacitors toward ferroelectric transistors: Endurance and disturb characteristics of HfO2-based FeFET devices
Mueller, S.; Müller, J.; Hoffmann, R.; Yurchuk, E.; Schlösser, T.; Boschke, R.; Paul, J.; Goldbach, M.; Herrmann, T.; Zaka, A.; Schröder, U.; Mikolajick, T.
Journal Article
2013Hafnium oxide based CMOS compatible ferroelectric materials
Schroeder, U.; Mueller, S.; Mueller, J.; Yurchuk, E.; Martin, D.; Adelmann, C.; Schloesser, T.; Bentum, R. van; Mikolajick, T.
Journal Article
2013Herstellung textilverstärkter Verbundbauteile mit strukturintegrierten Sensornetzwerken
Heinig, Andreas; Weder, Andreas; Fischer, Wolf-Joachim
Conference Paper
2013Herstellung und Charakterisierung ultradünner ZrO2-basierter Schichten als Isolatoren in Metall-Isolator-Metall Kondensatoren
Weinreich, Wenke
Dissertation
2013Heterogeneous 3D integration of hidden hinge micromirror arrays consisting of two layers of monocrystalline silicon
Lapisa, M.; Zimmer, F.; Stemme, G.; Gehner, A.; Niklaus, F.
Journal Article
2013High aspect ratio pattern collapse of polymeric UV-nano-imprint molds due to cleaning
Finn, A.; Lu, B.; Kirchner, R.; Thrun, X.; Richter, K.; Fischer, W.-J.
Journal Article
2013High-density capacitors for SiP and SoC applications based on three-dimensional integrated metal-isolator-metal structures
Weinreich, Wenke; Rudolph, Matthias; Koch, Johannes; Paul, Jan; Seidel, Konrad; Riedel, Stefan; Sundqvist, Jonas
Conference Paper
2013High-temperature UHF RFID sensor measurements in a full-metal environment
Heiß, Michael; Hildebrandt, Ralf
Conference Paper
2013Hybrid assembly of micro scanner arrays with large aperture and their system integration
Sandner, Thilo; Wildenhain, Michael; Schwarzenberg, Markus; Schenk, Harald
Conference Paper
2013Impact of layer thickness on the ferroelectric behaviour of silicon doped hafnium oxide thin films
Yurchuk, E.; Müller, J.; Knebel, S.; Sundqvist, J.; Graham, A.P.; Melde, T.; Schröder, U.; Mikolajick, T.
Conference Paper, Journal Article
2013Influence of copper on the diffusion length of the minority carriers in devices based on n-type Si/SiO2
Kolkovsky, V.; Lukat, K.
Journal Article, Conference Paper
2013Influence of high-energy electron irradiation on ultra-low-k characteristics and transistor performance
Steidel, Katja; Choi, Kang-Hoon; Freitag, Martin; Gutsch, Manuela; Hohle, Christoph; Seidel, Robert; Thrun, Xaver; Werner, Thomas
Conference Paper
2013Inkjet printed humidity threshold monitoring sensor solution with irreversible resistance change for passive RFID applications
Sauer, Sebastian; Türke, Alexander; Weder, Andreas; Fischer, Wolf-Joachim
Conference Paper
2013Integrated electro-optical waveguide based devices with liquid crystals on a silicon Backplane
Costache, Florenta
Presentation
2013Integration of multi-level MOEMS structure on CMOS for spatial light modulators
Friedrichs, Martin; List, Matthias; Müller, Michael
Conference Paper
2013Interface engineering for the TaN/Ta barrier film deposition process to control Ta-crystal growth
Gerlich, L.; Ohsiek, S.; Klein, C.; Geiß, M.; Friedemann, M.; Kücher, P.; Schmeißer, D.
Journal Article
2013Konzeptioneller Bauelemententwurf eines quasistatischen Mikroscanners mit Hybrid-Antrieb und großer Spiegelapertur zur hochdynamischen und präzisen zweidimensionalen Strahlpositionierung
Kimme, Simon
: Sandner, Thilo (Betreuer)
Thesis
2013Light absorption in conical silicon particles
Bogdanowicz, J.; Gilbert, M.; Innocenti, N.; Koelling, S.; Vanderheyden, B.; Vandervorst, W.
Journal Article
2013Local temperature determination in power loaded surface acoustic wave structures using Raman spectroscopy
Spindler, M.; Uhlig, B.; Menzel, S.B.; Huck, C.; Gemming, T.; Eckert, J.
Journal Article
2013A medical wireless measurement system for hip prosthesis loosening detection based on vibration analysis
Sauer, S.; Kirsten, S.; Storck, F.; Grätz, H.; Marschner, U.; Ruwisch, D.; Fischer, W.-J.
Journal Article, Conference Paper
2013MEMS-mirror tilt-detection based on a quadrant diode scheme
Tortschanoff, A.; Baumgart, M.; Holzmann, D.; Lenzhofer, M.; Mayer, Ch.; Sandner, T.
Conference Paper
2013Mesoscopic analysis of leakage current suppression in ZrO2/Al2O3/ZrO2 nano-laminates
Martin, D.; Grube, M.; Weinreich, W.; Müller, J.; Weber, W.M.; Schröder, U.; Riechert, H.; Mikolajick, T.
Journal Article
2013A method for characterizing the pad surface texture and modeling its impact on the planarization in CMP
Vasilev, B.; Bott, S.; Rzehak, R.; Liske, R.; Bartha, J.W.
Journal Article
2013Metrology variability and its impact in process modeling
Figueiro, T.; Saib, M.; Choi, K.-H.; Hohle, C.; Thornton, M.J.; Vannufel, C.; Tortai, J.-H.; Schiavone, P.
Conference Paper
2013Micro mirror array activities at the Fraunhofer IPMS Dresden
Bunce, Chris
Presentation
2013Micro mirror arrays as high-resolution spatial light modulators for photoactivation and optogenetics
Rückerl, F.; Kielhorn, Martin; Tinevez, J.-Y.; Heber, Jörg; Heintzmann, R.; Shorte, S.
Conference Paper
2013Micro-scanning mirrors for high-power laser applications in laser surgery
Sandner, T.; Kimme, S.; Grasshoff, T.; Todt, U.; Graf, A.; Tulea, C.; Lenenbach, A.; Schenk, H.
Conference Paper
2013Mikrosysteme, MEMS und MOEMS vom Fraunhofer-IPMS
Biedorf, R.
Journal Article
2013Ein mobiles System zur herzschlaggenauen Überwachung von Blutdruck und Stressniveau
Pietzsch, Marcus; Weder, Andreas
Conference Paper
2013Modeling and characterization of a vernier latching MEMS variable optical attenuator
Unamuno, A.; Blue, R.; Uttamchandani, D.
Journal Article
2013Modellgestützte Bewegungsführung von quasistatischen Mikroscannern
Schroedter, Richard; Roth, Matthias; Sandner, Thilo; Janschek, Klaus
Conference Paper
2013A modular system for capacitive ecg-acquisition
Despang, H.G.; Weder, A.; Pietzsch, M.; Lindner, O.; Heinig, A.; Rentsch, W.; Paul, A.; Fischer, W.-J.
Journal Article
2013Multi-gigabit class optical wireless indoor communication
Deicke, Frank; Faulwaßer, Michael; Schneider, Tobias
Conference Paper
2013Nanoimprint assisted inkjet printing to fabricate sub-micron channel organic field effect transistors
Teng, L.; Plötner, M.; Türke, A.; Adolphi, B.; Finn, A.; Kirchner, R.; Fischer, W.-J.
Journal Article
2013New applications for ultrasound technology through CMUTs
Unamuno, Anartz
Presentation
2013A novel technology for the high-volume production of intelligent composite structures with integrated piezoceramic sensors and electronic components
Weder, A.; Geller, S.; Heinig, A.; Tyczynski, T.; Hufenbach, W.; Fischer, W.-J.
Journal Article, Conference Paper
2013OLED - Die Flächenlichtquelle
Rahnfeld, Christian
Journal Article
2013Optical guiding and loss mechanisms in electro-optically induced waveguides based on isotropic phase liquid crystals
Blasl, Martin; Hartwig, Haldor; Bornhorst, Kirstin; Costache, Florenta
Conference Paper
2013Optical modulator based on electro-optically induced waveguides
Blasl, Martin; Hartwig, Haldor; Bornhorst, Kirstin; Costache, Florenta
Abstract
2013Optical position feedback of quasi-static 2D MOEMS mirrors
Tortschanoff, A.; Baumgart, M.; Holzmann, D.; Lenzhofer, M.; Sandner, T.; Kenda, A.
Conference Paper
2013Optimal laser positioning for laser-assisted atom probe tomography
Koelling, S.; Innocenti, N.; Bogdanowicz, J.; Vandervorst, W.
Journal Article, Conference Paper
2013Optimization of screen printing processes for OLED substrate patterning
Philipp, André; Hild, Olaf Rüdiger; Leo, Karl; Baumann, Reinhard R.
Conference Paper
2013Optimized electrode and interface for enhanced reliability of high-k based metal-insulator-metal capacitors
Koch, Johannes; Seidel, Konrad; Weinreich, Wenke; Riedel, Stefan; Chiang, Jung-Chin; Beyer, Volkhard
Journal Article
2013Optische drahtlose Kommunikation für High-Speed Datenlinks
Deicke, Frank
Conference Paper
2013Optische Kalibrierung von diffraktiven Mikrospiegelarrays
Berndt, Dirk
Dissertation
2013Pad roughness evolution during break-in and its abrasion due to the pad-wafer contact in oxide CMP
Vasilev, B.; Bott, S.; Rzehak, R.; Bartha, J.W.
Journal Article
2013Parameterizing radiative transfer to convert MAX-DOAS dSCDs into near-surface box-averaged mixing ratios
Sinreich, R.; Merten, A.; Molina, L.; Volkamer, R.
Journal Article
2013Performance investigation and optimization of Si:HfO2 FeFETs on a 28 nm bulk technology
Mueller, S.; Yurchuk, E.; Slesazeck, S.; Mikolajick, T.; Müller, J.; Herrmann, T.; Zaka, A.
Conference Paper
2013QRS pattern recognition using a simple clustering approach for continuous data
Noack, Alexander; Poll, Rüdiger; Fischer, Wolf-Joachim; Zaunseder, Sebastian
Conference Paper
2013Quasi-static microscanner with linearized scanning for an adaptive 3D-laser camera
Sandner, Thilo; Grasshoff, Thomas; Schwarzenberg, Markus; Schenk, Harald
Conference Paper
2013Quasi-static microscanner with linearized scanning for an adaptive 3D-lasercamera
Sandner, T.; Grasshoff, T.; Schwarzenberg, M.; Schenk, H.
Conference Paper
2013Reliability characteristics of ferroelectric Si: HfO2 thin films for memory applications
Mueller, S.; Müller, J.; Schroeder, U.; Mikolajick, T.
Journal Article
2013Reliability comparison of pure ZrO2 and Al- doped ZrO2 MIM capacitors
Seidel, K.; Weinreich, Wenke; Polakowski, P.; Triyoso, D.H.; Nolan, M.G.; Yiang, K.Y.; Chu, S.
Conference Paper
2013Room temperature bonding for vacuum applications: Climatic and long time tests
Langa, Sergiu; Utsumi, J.; Ludewig, Thomas; Drabe, Christian
Journal Article
2013Scaling and optimization of high-density integrated Si-capacitors
Weinreich, W.; Seidel, K.; Rudolph, M.; Koch, J.; Paul, J.; Riedel, S.; Sundqvist, J.; Steidel, K.; Gutsch, M.; Beyer, V.; Hohle, C.
Conference Paper
2013Small molecule bulk heterojunction organic solar cells with coumarin-6 as donor material
Beyer, Beatrice; Griese, Daniel; Schirrmann, Christian; Pfeifer, Richard; Kahmann, Simon; Hild, Olaf Rüdiger; Leo, Karl
Journal Article
2013SmartVital - Advanced Cardiac Health Monitoring
Noack, Aexander; Pietzsch, Marcus; Zimmerling, Martin; Poll, Rüdiger
Presentation
2013Sponge-like Si-SiO2 nanocomposite - Morphology studies of spinodally decomposed silicon-rich oxide
Friedrich, D.; Schmidt, B.; Heinig, K.H.; Liedke, B.; Mücklich, A.; Hübner, R.; Wolf, D.; Kölling, S.; Mikolajick, T.
Journal Article
2013Strain-enhanced nanoparticle electrostrictive polymer blends for actuator applications
Pawlik, Boscij; Schirrmann, Christian; Bornhorst, Kirstin; Costache, Florenta
Conference Paper
2013Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and doping
Weinreich, W.; Wilde, L.; Müller, J.; Sundqvist, J.; Erben, E.; Heitmann, J.; Lemberger, M.; Bauer, A.J.
Journal Article
2013TEMAZ/O-3 atomic layer deposition process with doubled growth rate and optimized interface properties in metal-insulator-metal capacitors
Weinreich, W.; Tauchnitz, T.; Polakowski, P.; Drescher, M.; Riedel, S.; Sundqvist, J.; Seidel, K.; Shirazi, M.; Elliott, S.D.; Ohsiek, S.; Erben, E.; Trui, B.
Journal Article
2013Thermal and spin-transfer-torque excitation of precessional modes in magnetic tunnel junction nanopillars with symmetric interfaces and a thick free layer
Gangmei, P.; Neudert, A.; Marcham, M.K.; Hicken, R.J.; Gubbins, M.A.; Cao, X.; Lamberton, R.R.; Johnston, A.B.
Journal Article
2013Validation of a heart beat clustering algorithm for an ambulant holter monitoring device
Noack, Alexander; Pietzsch, Marcus; Zimmerling, Martin; Weder, Andreas
Conference Paper
2013Validation of the use of heart rate variability measurements during meal intake in humans
Päßler, Sebastian; Noack, Alexander; Poll, Rüdiger; Fischer, Wolf-Joachim
Conference Paper
2013Wafer level vacuum packaging of micro-mirrors with buried wiring
Langa, Sergiu; Drabe, Christian; Herrmann, Andreas; Ludewig, Thomas; Rieck, Andreas; Flemming, André; Kaden, Christiane
Poster
2013Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods
Langa, Sergiu; Drabe, Christian; Kunath, Christian; Dreyhaupt, André; Schenk, Harald
Conference Paper
2013Wake-up effects in Si-doped hafnium oxide ferroelectric thin films
Zhou, D.Y.; Xu, J.; Li, Q.; Guan, Y.; Cao, F.; Dong, X.L.; Müller, J.; Schenk, T.; Schröder, U.
Journal Article
2013A wearable system for non-invasive beat-to-beat blood pressure estimations
Weder, Andreas; Pietzsch, Marcus; Zimmerling, Martin; Fischer, Wolf-Joachim
Poster
2012100. Geburtstag von Werner Hartmann (1912-1988), Begründer der Mikroelektronik im Osten Deutschlands
Becker, Hans W.
Book Article
2012AAL-Anwendungen von Smart Vital
Despang, Hans Günter; Heinig, Andreas; Holland, Hans Jürgen; Fischer, Wolf-Joachim; Mehl, Susann; Henrich, Dietmar
Conference Paper
2012Adaptation of models for food intake sound recognition using maximum a posteriori estimation algorithm
Päßler, Sebastian; Fischer, Wolf-Joachim; Kraljevski, I.
Conference Paper
2012Advances in performance and miniaturization of a FT-IR spectrometer system based on a large stroke MOEMS piston mirror
Kenda, A.; Sandner, T.; Lüttjohann, S.; Kraft, M.; Tortschanoff, A.; Simon, A.
Conference Paper
2012Anti stress app
Malberg, H.; Ziaziulchyk, L.; Braer, M.; Hoffmann, M.; Mittag, A.; Huhle, R.; Zaunseder, S.; Bonnemeier, H.; Heinig, A.; Fischer, W.-J.
Conference Paper, Journal Article
2012Aspects of a head-mounted eye-tracker based on a bidirectional OLED microdisplay
Baumgarten, Judith; Schuchert, Tobias; Voth, Sascha; Wartenberg, Philipp; Richter, Bernd; Vogel, Uwe
Journal Article
2012Ein Beitrag zur Steuerung und Regelung für quasistatische Mikrospiegel
Schroedter, Richard
: Sandner, Thilo (Betreuer)
Thesis
2012Bi-resonant scanning mirror with piezo-resistive position sensor for WVGA laser projection systems
Drabe, C.; Kallweit, D.; Dreyhaupt, A.; Grahmann, J.; Schenk, H.; Davis, W.
Conference Paper
2012Biosensing with optical waveguides
Schuster, Tobias; Landgraf, René; Finn, Andreas; Mertig, M.
Book Article
2012Closed-loop control for quasi-static MOEMS mirrors
Tortschanoff, A.; Holzmann, D.; Lenzhofer, M.; Sandner, T.
Conference Paper
2012Compact patch antenna with space for integrating sensors for an RFID-sensor-node
Heiß, Michael; Fischer, Wolf-Joachim
Conference Paper
2012Confocal fluorescence microscope for clinical dermatologic applications
Bechtel, Christin; Knobbe, Jens; Grüger, Heinrich; Lakner, Hubert
Conference Paper
2012Defekterkennung mittels IR Bildaufnahme auf flexiblen OLED Substraten
Bruchmann, Jens
: Mogck, Stefan (Betreuer)
Bachelor Thesis
2012Design and realization of a flexible QQVGA AMOLED display with organic TFTs
Steudel, S.; Myny, K.; Schols, S.; Vicca, P.; Smout, S.; Tripathi, A.; Putten, B. van der; Steen, J.-L. van der; Neer, M. van; Schütze, F.; Hild, O.R.; Veenendaal, E. van; Lieshout, P. van; Mil, M. van; Genoe, J.; Gelinck, G.; Heremans, P.
Journal Article
2012Design of a confocal fluorescence microscope - Space saving and affordable
Bechtel, C.; Knobbe, J.; Grüger, H.; Lakner, H.; Reichert, F.
Conference Paper
2012Design of an affordable fluorescence confocal laser scanning microscope for medical diagnostics
Bechtel, Christin; Knobbe, Jens; Grüger, Heinrich; Lakner, Hubert
Conference Paper
2012Design of an optical position detection unit for fast 2D-MOEMS scanners
Tortschanoff, A.; Sandner, Thilo; Kenda, A.
Conference Paper
2012The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrors
Grahman, Jan; Jung, Denis; Kallweit, David; Sandner, Thilo; Graßhoff, Thomas; Schenk, Harald
Conference Paper
2012Direct encapsulation of OLED on CMOS
Schmidt, C.
Book Article
2012Direct nanoimprinting for micro- and nanosystems
Kirchner, Robert; Derix, J.; Nocke, A.; Landgraf, René
Book Article
2012Drift-free micromirror arrays made of monocrystalline silicon for adaptive optics applications
Lapisa, M.; Zimmer, F.; Stemme, G.; Gehner, A.; Niklaus, F.
Journal Article
2012Effect of the openings in a compact patch antenna for an RFID-sensor-node
Heiß, Michael
Conference Paper
2012Elimination of interfering signals in 24 Bit electrocardiograms using wavelet packet transformation
Gräßer, Felix Magnus
: Noack, Alexander (Betreuer)
Thesis
2012Entwicklung eines Multi-Gigabit-Moduls für die optische drahtlose Kommunikation
Röder, Thomas
: Deicke, Frank (Betreuer)
Thesis
2012Entwicklung und Charakterisierung einer Giga-IR Entwicklungsplattform für die drahtlose Infrarotdatenübertragung
Faulwaßer, Michael
: Deicke, Frank (Betreuer)
Thesis
2012Erarbeitung eines Technologiekosten-Verrechnungssystems für den Mikrodisplay-Reinraum des Fraunhofer IPMS/COMEDD
Franke, Juliana
: Böttger, Katja (Betreuer)
Bachelor Thesis
2012Erstinbetriebnahme, Optimierung und Messreihen an einem telemedizinischen System zur Erfassung von EKG- und Pulswellen
Schwarz, Eric
: Heinig, A. (Betreuer)
Bachelor Thesis
2012Evaluation of Algorithms for Chew Event Detection
Päßler, Sebastian; Fischer, Wolf-Joachim
Conference Paper
2012Fabrication and characterization of sub-500 nm channel organic field effect transistor using UV nanoimprint lithography with cheap Si-mold
Teng, L.; Kirchner, R.; Plötner, M.; Türke, A.; Jahn, A.; He, J.; Hagemann, F.; Fischer, W.-J.
Journal Article, Conference Paper
2012Flexible QQVGA AMOLED display with organic TFTs
Steudel, S.; Myny, K.; Schols, S.; Vicca, P.; Smout, S.; Tripathi, A.; Putten, B. van der; Steen, J.-L. van der; Neer, M. van; Schütze, F.; Hild, O.R.; Veenendaal, E. van; Mil, M. van; Genoe, J.; Gelinck, G.; Heremans, P.
Conference Paper
2012Food intake activity detection using an artificial neural network
Päßler, Sebastian
Conference Paper, Journal Article
2012Food intake monitoring: An acoustical approach to automated food intake activity detection and classification of consumed food
Päßler, Sebastian; Wolff, Matthias; Fischer, Wolf-Joachim
Journal Article
2012Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2011
 
Annual Report
2012Herstellung und Charakterisierung hocheffizienter, mikromechanischer NIR-Beugungsgitter für den Einsatz in miniaturisierten Spektrometern
Zimmer, F.
: Schmeißer, D.
Dissertation
2012Integrated electro-optical switching with phase-modified liquid crystal blends
Costache, Florenta; Blasl, Martin; Bornhorst, Kirstin; Rieck, Andreas; Hartwig, Haldor
Conference Paper
2012Integration of piezoceramic sensor elements and electronic components in glass fibre reinforced polyurethane composite structures
Weder, Andreas; Geller, S.; Heinig, Andreas; Tyczynski, T.; Hufenbach, W.; Fischer, Wolf-Joachim
Journal Article, Conference Paper
2012Laser projector solution based on two 1D resonant scanning micromirrors assembled in a low vertical distortion scan head
Grahmann, J.; Wildenhain, M.; Graßhoff, T.; Gerwig, C.; Dallmann, H.-G.; Wolter, A.; Schenk, H.
Conference Paper
2012Li-Fi: A new paradigm in wireless communications
Deicke, Frank; Kraus, W.; Schwartz, J.; Wiedemann, R.
Journal Article
2012Lighting of the future: Roll-to-roll fabrication for flexible OLED lighting
May, Christian; Mogck, Stefan
Journal Article
2012Micromirror displays
Schenk, Harald; Hornbeck, Larry J.
Book Article
2012Micromirror-based sending and detection optical assembly for time-of-flight laser scanners
Satzer, Britta; Baulig, Claudia; Sandner, Thilo; Schwarzer, S.
Conference Paper
2012Monolithic integration of MOEMS on CMOS backplanes using surface micromachining techniques
List, Matthias; Friedrichs, Martin; Müller, Michael
Conference Paper
2012Neuartiges Bauteilkonzept quasistatisch-resonanter 2D-Mikroscanner für die Zielanwendung ultrakompakter Laserprojektionsdisplays
Jung, D.
Dissertation
2012On UV-nanoimprint-lithography as direct patterning tool for polymeric microsystems
Kirchner, Robert
Dissertation
2012On-chip electro-optic waveguides in isotropic liquid crystal blends for switching applications
Costache, Florenta; Blasl, Martin; Bornhorst, Kirstin; Schenk, Harald
Conference Paper
2012One-dimensional light modulator
Sinning, Steffen; Wullinger, I.; Schmidt, Jan-Uwe; Friedrichs, Martin; Dauderstädt, Ulrike; Wolschke, Steffen; Hughes, Thomas; Pahner, D.; Wagner, Michael
Conference Paper
2012Optical position feedback for electrostatically driven MOEMS scanners
Tortschanoff, Andreas; Baumgart, M.; Frank, Albert; Wildenhain, Michael; Sandner, Thilo; Schenk, Harald; Kenda, Andreas
Conference Paper
2012Optical wireless communication to eco-system
Deicke, Frank; Fischer, Wolf-Joachim; Faulwaßer, Michael
Conference Paper
2012Passive wireless irreversible humidity threshold sensor exploiting the deliquescence behavior of salts
Sauer, S.; Fischer, W.-J.
Conference Paper
2012Photonic smart systems
Scholles, Michael
Conference Paper
2012Planar optical microring resonators used as biosensors: Guidelines for designing polymer compared to semiconductor-based waveguides
Landgraf, René; Haugwitz, Toni; Kirchner, Robert; Fischer, Wolf-Joachim
Conference Paper
2012Polymer microring resonator directly patterned by multilevel-nanoimprint: Integration into a biosensor system with a miniaturized microfluidic system
Landgraf, René; Kirchner, Robert; Finn, Anthony; Arndt, Susann; Haugwitz, Toni; Deicke, Frank; Fischer, Wolf-Joachim
Conference Paper
2012Process challenges for flexible OLED lighting
May, Christian
Conference Paper
2012Production technologies for large area rigid and flexible OLED for lighting
May, Christian
Conference Paper
2012Progress in miniaturization of a MEMS based hybrid-integrated NIR spectrometer
Grüger, Heinrich; Scholles, Michael
Conference Paper
2012Realization of a hybrid-integrated MEMS scanning grating spectrometer
Pügner, Tino; Knobbe, Jens; Grüger, Heinrich; Schenk, Harald
Conference Paper
2012Roll-to-roll processing of flexible OLED for lighting applications
May, Christian; Mogck, Stefan
Conference Paper
2012Semi-transparent small molecule organic solar cells with laminated free-standing carbon nanotube top electrodes
Kim, Y.H.; Müller-Meskamp, L.; Zakhidov, A.A.; Sachse, C.; Meiss, J.; Bikova, J.; Cook, A.; Zakhidov, A.A.; Leo, K.
Journal Article
2012Setup and properties of a fully inkjet printed humidity sensor on PET substrate
Starke, E.; Turke, A.; Schneider, M.; Fischer, W.-J.
Conference Paper
2012A simulation model for WBSN protocol design
Weder, A.
Conference Paper
2012Stamp-and-repeat UV-imprinting of spin-coated films: Pre-exposure and imprint defects
Kirchner, R.; Nüske, L.; Finn, A.; Lu, B.; Fischer, W.-J.
Journal Article, Conference Paper
2012Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers
Sandner, T.; Grasshoff, T.; Schenk, H.; Kenda, A.
Conference Paper
2012Transparente leitfähige Elektroden
Müller-Meskamp, Lars; Sachse, Christoph; Kim, Yong Hyun; Furno, Mauro; May, Christian; Leo, Karl
Journal Article
2012Treiber- und Applikationsentwicklung für optische drahtlose High-Speed Datenübertragung
Fortenbacher, Michael
: Deicke, Frank (Betreuer)
Master Thesis
2012Untersuchungen zur Bildqualität eines Microscanner-basierten Laserprojektionssystems
Wildenhain, Michael
Master Thesis
2012UV-based nanoimprint lithography: Toward direct patterning of functional polymers
Kirchner, Robert; Finn, Andreas; Landgraf, René; Nueske, Lutz; Vogler, M.; Fischer, Wolf-Joachim
Journal Article
2012Verkapselungstechnologie mit justiertem adhäsiven Waferbonden für OLED-auf-CMOS-Anwendungen
Schmidt, C.
Dissertation
2012Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications
Jung, Denis; Sandner, Thilo; Kallweit, David; Schenk, Harald
Conference Paper
2012A wireless double planar coil sensor arrangement for monitoring capacitance changes due to water uptake embedded in a thin fiber-reinforced composite
Sauer, S.; Fischer, W.-J.
Conference Paper
2012Wireless RFID chip impedance measurement by using an reader and a statistically analysis
Heiß, Michael
Conference Paper
2012Wireless UHF RFID chip impedance measurement by only using an RFID reader
Heiß, Michael; Fischer, Wolf-Joachim
Conference Paper