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| 2019 | Advances of MOEMS-based external cavity QCLs
Härtelt, Marko; Hugger, Stefan; Butschek, Lorenz; Schilling, Christian; Merten, André; Schwarzenberg, Markus; Dreyhaupt, André; Grahmann, Jan; Rattunde, Marcel; Ostendorf, Ralf | Conference Paper |
| 2019 | The annealing effect on memory state stability and interlayer coupling in perpendicular magnetic tunnel junctions with ultrathin MgO barrier
Lv, Hua; Fidalgo, João; Leitão, Diana C.; Silva, Ana V.; Kämpfe, Thomas; Riedel, Stefan; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Freitas, Paolo P.; Cardoso, Susana | Journal Article |
| 2019 | Assessment of conduction mechanisms through MgO ultrathin barriers in CoFeB/MgO/CoFeB perpendicular magnetic tunnel junctions
Lv, Hua; Fidalgo, João; Silva, Ana V.; Leitão, Diana C.; Kämpfe, Thomas; Riedel, Stefan; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Freitas, Paolo P.; Cardoso, Susana | Journal Article |
| 2019 | Ein Beitrag zum Entwurf vibrationsbelasteter Microscanner
Kiethe, Oliver
: Janschek, Klaus; Schroedter, Richard (Betreuer); Todt, Ulrich (Betreuer) | Thesis |
| 2019 | Characterisation of ferroelectric thin films with scanning probe microscope methods
Norouzi Kalkani, Mahsa
: Kämpfe, Thomas (Betreuer); Ecke, Ramona (Betreuer); Schulz, Stefan E. (Gutachter) | Master Thesis |
| 2019 | CMUT with mechanically coupled plate actuators for low frequencies
Krenkel, Marcel; Stolz, Michael; Koch, Sandro G.; Kupnik, Mario | Journal Article |
| 2019 | Defects in oxidized p-type Si wafers observed by surface photovoltage spectroscopy
Kolkovsky, Vladimir | Journal Article |
| 2019 | Electrical and structural properties of direct current magnetron sputtered amorphous TiAl thin films
Kolkovsky, V.; Schmidt, Jan-Uwe; Döring, S. | Journal Article |
| 2019 | Electrocaloric temperature change in ferroelectric Si-doped hafnium oxide (HfO2) thin films
Mart, C.; Kämpfe, T.; Pätzold, B.; Rudolph, M.; Czernohorsky, M.; Müller, J.; Weinreich, W. | Presentation |
| 2019 | Entwurf eines analogen Hochgeschwindigkeits-Frontends für die optische drahtlose Kommunikation
Spundflasche, Martin
: Gärtner, Uwe (Prüfer); Noack, Alexander (Gutachter); Kirrbach, René (Gutachter) | Bachelor Thesis |
| 2019 | Ferroelectric and pyroelectric properties of polycrystalline La-doped HfO2 thin films
Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke | Journal Article |
| 2019 | Fraunhofer Institute for Photonic Microsystems. Annual Report 2018
| Annual Report |
| 2019 | High-density energy storage in Si-doped hafnium oxide thin films on area-enhanced substrates
Kühnel, Kati; Czernohorsky, M.; Riedel, Steffen; Mart, Clemens; Weinreich, Wenke | Journal Article |
| 2019 | Hybrid assembled MEMS scanner array with large aperture for fast scanning LIDAR systems
Sandner, T.; Grasshoff, T.; Wildenhain, M.; Schwarzenberg, M. | Journal Article |
| 2019 | Kern für Echtzeit
Deicke, Frank; Beck, Monika | Electronic Publication |
| 2019 | Konzeptentwicklung eines optischen Messplatzes zur präzisen und hochdynamischen Bestimmung des zweidimensionalen Kippwinkels von 2D-Mikrospiegeln als Referenzmesssystem einer Echtzeitregelung
Stolba, Friedrich
: Czarske, Jürgen (Gutachter); Büttner, Lars (Gutachter); Sandner, Thilo (Gutachter) | Thesis |
| 2019 | Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K. | Conference Paper |
| 2019 | Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K. | Poster |
| 2019 | Quasi-statischer MOEMS-Gitterscanner zum spektralen Durchstimmen eines MIR-Quantenkaskadenlasers
Merten, André; Schroedter, Richard; Dreyhaupt, André; Graßhoff, Thomas; Schwarzenberg, Markus; Hugger, Stefan; Schilling, Christian; Grahmann, Jan; Ostendorf, Ralf | Journal Article |
| 2019 | Reduced metal contamination from crucible and coating using a silicon nitride based diffusion barrier for the growth of cast quasi-single crystalline silicon ingots
Wolny, F.; Krause, A.; Müller, M.; Fischer, G.; Neuhaus, H. | Journal Article |
| 2019 | Studentische Beschäftigungsverhältnisse als Quelle des Active Sourcings? Eine Analyse am Beispiel des Fraunhofer-Instituts für Photonische Mikrosysteme IPMS
Wendenburg, Anja
: Haubold, Anne-Katrin (Gutachter); Richter, Thorsten S. (Gutachter) | Bachelor Thesis |
| 2019 | Study of sub-volume activation in CoFeB/MgO memory devices near spin reorientation transition
Fidalgo, João; Lv, Hua; Silva, Ana V.; Leitão, Diana C.; Kämpfe, Thomas; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Cardoso, Susana | Poster |
| 2018 | 10 Gbit/s bidirectional transceiver with monolithic optic for rotary connector replacements
Faulwaßer, M.; Kirrbach, R.; Schneider, T.; Noack, A. | Conference Paper |
| 2018 | 14nm Ferroelectric FinFET technology with steep subthreshold slope for ultra low power applications
Krivokapic, Z.; Rana, U.; Galatage, R.; Razavieh, A.; Aziz, A.; Liu, J.; Shi, J.; Kim, H.J.; Sporer, R.; Serrao, C.; Busquet, A.; Polakowski, P.; Müller, J.; Kleemeier, W.; Jacob, A.; Brown, D.; Knorr, A.; Carter, R.; Banna, S. | Conference Paper |
| 2018 | 3D Analysis of Thin Layers by ToF-SIMS
Mohammadian Kia, Alireza; Esmaeili, Sajjad; Mart, Clemens; Utriainen, Mikko; Haufe, Nora; Puurunen, Riikka L.; Weinreich, Wenke | Poster |
| 2018 | Advances in MOEMS technologies for high quality imaging systems
Schenk, H.; Wagner, M.; Grahmann, J.; Merten, A. | Conference Paper |
| 2018 | Aktoren auf Basis elektroaktiver Polymer/Nanopartikel Komposite und deren Anwendung in einer Mikrolinse mit variablem Fokus
Pawlik, Boscij
: Lakner, Hubert (Betreuer); Grabmaier, Anton (Betreuer) | Dissertation |
| 2018 | Aspects of high aspect ratio silicon etching - capacitor application
Rudolph, Matthias; Pätzold, Björn; Czernohorsky, Malte | Presentation |
| 2018 | Automatic tracking of Li-Fi links for wireless industrial ethernet
Kirrbach, René; Faulwaßer, Michael; Schneider, Tobias; Ostermann, Robert; Noack, Alexander | Conference Paper |
| 2018 | Automatic Tracking of Li-Fi Links for Wireless Industrial Ethernet
Kirrbach, René | Presentation |
| 2018 | Barrier breakdown mechanism in nano-scale perpendicular magnetic tunnel junctions with ultrathin MgO barrier
Lv, Hua; Leitao, Diana C.; Hou, Zhiwei; Freitas, Paulo P.; Cardoso, Susana; Kämpfe, Thomas; Müller, Johannes; Langer, Juergen; Wrona, Jerzy | Journal Article |
| 2018 | Bringing NIR spectrometers into mobile phones
Reinig, P.; Grüger, H.; Knobbe, J.; Pügner, T.; Meyer, S. | Conference Paper |
| 2018 | Carbon-hydrogen-related complexes in Si
Kolkovsky, V.; Stübner, Ronald; Gwozdz, K.; Weber, Jörg | Journal Article |
| 2018 | Challenges and Progress on Carbon Nanotube Integration for BEOL Interconnects
Uhlig, B.; Dhavamani, A.; Nagy, N.; Lilienthal, K.; Liske, R.; Ramos, R.; Dijon, J.; Okuno, H.; Kalita, D.; Lee, J.; Georgiev, V.; Asenov, A.; Amoroso, S.; Wang, L.; Koenemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Liang, J.; Pandey, R.R.; Chen, R.; Todri-Sanial, A. | Conference Paper |
| 2018 | Charakterisierung und Bewertung von CuPc-basierten OFET's im Hinblick auf eine Anwendung als NO2-Sensor
Reichelt, Christoph
: Zipser, Stephan (Betreuer); Graf, Alexander (Betreuer) | Bachelor Thesis |
| 2018 | Clamped-clamped in-plane electrostatic bending actuators in silicon-based microfluidic devices
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Schenk, Harald | Presentation |
| 2018 | CMOS compatible pyroelectric applications enabled by doped HfO2 films on deep-trench structures
Mart, Clemens; Weinreich, Wenke; Czernohorsky, Malte; Riedel, Stefan; Zybell, Sabine; Kühnel, Kati | Conference Paper |
| 2018 | CMOS design of Digital to Analog converters for active matrix Spatial Light Modulator applications
Paramesh, Vidwath
: Presberger, Thomas (Betr.); Horstmann, John Thomas (Betr.) | Master Thesis |
| 2018 | CMOS-kompatibler MEMS-Lautsprecher für Im-Ohr-Anwendungen
Conrad, Holger; Ehrig, Lutz; Kaiser, Bert; Schenk, Hermann; Schuffenhauer, David; Stolz, Michael; Gaudet, Matthieu; Schenk, Harald | Conference Paper |
| 2018 | CMUT with mechanically coupled plate actuators
Krenkel, Marcel; Kircher, Marco; Kupnik, Mario; Koch, Sandro | Conference Paper |
| 2018 | Cobalt integration solutions - integration (R&D accelerator)
Gerlich, Lukas; Wislicenus, Markus; Koch, Johannes; Dhavamani, Abitha; Esmaeili, Sajjad; Uhlig, Benjamin | Presentation |
| 2018 | Copper electroplating with polyethylene Glycol. Pt.II. Experimental analysis and determination of model parameters
Yang, Hongliu; Krause, Robert; Scheunert, Christin; Liske, Romy; Uhlig, Benjamin; Preusse, Axel; Dianat, Arezoo; Bobeth, Manfred; Cuniberti, Gianaurelio | Journal Article |
| 2018 | Design of on-chip RFID transponder antennas
Heinig, Andreas | Conference Paper |
| 2018 | Design of On-Chip RFID Transponder Antennas
Heinig, Andreas | Presentation |
| 2018 | Development of titanium oxide conformal thin film by atomic layer deposition
Mohammadian Kia, Alireza | Poster |
| 2018 | Drahtlose Datenübertragung für kurze und lange Strecken. Alternative Li-Fi
Noack, Alexander | Journal Article |
| 2018 | Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald | Journal Article |
| 2018 | Enhancement of vertical integration density by engineered BSOI wafers
Kaden, C.; Langa, S.; Ludewig, T.; Schönberger, A.; Herrmann, A.; Göbel, A.; Kolkovsky, V.; Jeroch, W.; Pufe, W. | Journal Article |
| 2018 | Entwicklung eines Beleuchtungsmoduls für stroboskopische, phasenschiebende Interferometrie
Medeiros Ventura, Luiz Guilherme de
: Heitmann, Johannes (Gutachter); Skupsch, Christoph (Gutachter); Wolschke, Steffen (Betreuer) | Master Thesis |
| 2018 | Entwicklung eines Transmitters mit Hochleistungsleuchtdiode für die optische drahtlose Datenübertragung
Lei, Lei
: Ostermann, Robert (Betreuer); Fischer, Wolf-Joachim (Gutachter) | Thesis |
| 2018 | A FeFET based super-low-power ultra-fast embedded NVM technology for 22nm FDSOI and beyond
Dünkel, S.; Trentzsch, M.; Richter, R.; Moll, P.; Fuchs, C.; Gehring, O.; Majer, M.; Wittek, S.; Müller, B.; Melde, T.; Mulaosmanovic, H.; Slesazeck, S.; Müller, S.; Ocker, J.; Noack, M.; Löhr, D.-A.; Polakowski, P.; Müller, J.; Mikolajick, T.; Höntschel, J.; Rice, B.; Pellerin, J.; Beyer, S. | Conference Paper |
| 2018 | Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design
Schroedter, Richard; Roth, Matthias; Janschek, Klaus; Sandner, Thilo | Journal Article |
| 2018 | Fraunhofer Institute for Photonic Microsystems. Annual Report 2017
| Annual Report |
| 2018 | Frequency domain analysis of pyroelectric response in silicon-doped hafnium oxide (HfO2) thin films
Mart, Clemens; Czernohorsky, Malte; Zybell, Sabine; Kämpfe, Thomas; Weinreich, Wenke | Journal Article |
| 2018 | Functional integration - structure-integrated wireless sensor technology targeting smart mechanical engineering applications
Rülke, Steffen; Beyer, Volkhard; Zorn, Wolfgang; Meinig, Marco; Wecker, Julia; Reuter, Danny; Deicke, Frank; Clausner, André; Werner, Thomas | Conference Paper |
| 2018 | The gateone-project: A digital innovation hub accelerating innovation through ecosystem design and product trajectory
Hamelin, R.; Andrieux, G.; Chartier, I.; Roustom, B.; Healy, T.; Ali, Z.; Legrand, B.; Mayora, K.; Scholles, M.; Guerre, R. | Conference Paper |
| 2018 | Grundlegende Untersuchungen zur Phasenmodulation von Licht im Subnanometer-Bereich mittels diffraktiver Mikrospiegelarrays
Sicker, Cornelius
: Schenk, Harald; Reif, Jürgen | Dissertation |
| 2018 | High Endurance Ferroelectric Hafnium Oxide-Based FeFET Memory Without Retention Penalty
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Calvo, J.; Zimmermann, K.; Müller, J. | Journal Article |
| 2018 | High-Speed, Cellular Li-Fi HotSpot for Real-Time Applications
Kirrbach, René; Faulwaßer, Michael; Ostermann, Robert; Jakob, Benjamin; Noack, Alexander | Presentation |