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| 2020 | 240-GHz reflectometer with integrated transducer for dielectric spectroscopy in a 130-nm SiGe BiCMOS technology
Wang, D.; Eissa, M.H.; Schmalz, K.; Kämpfe, T.; Kissinger, D. | Conference Paper |
| 2020 | 480-GHz Sensor With Subharmonic Mixer and Integrated Transducer in a 130-nm SiGe BiCMOS Technology
Wang, D.; Eissa, M.H.; Schmalz, K.; Kampfe, T.; Kissinger, D. | Journal Article |
| 2020 | Analysis of Hot-Carrier Degradation in 22nm FDSOI Transistors Using RF Small-Signal Characteristics
Huynh, D.K.; Le, Q.H.; Duhan, P.; Wang, D.; Kampfe, T.; Rudolph, M. | Conference Paper |
| 2020 | Analysis of the composition of tantalum nitride in CMOS metallization trenches using parallel angle‐resolved XPS
Wehring, B.; Gerlich, L.; Kia, A.M.; Wislicenus, M.; Uhlig, B. | Journal Article |
| 2020 | Automatisierte Berechnung und Visualisierung von Komorbiditätsindizes für den Tumorboard-Entscheid
Wald, T.; Birnbaum, Klemens; Wiegand, S.; Dietz, A.; Zebralla, V.; Wichmann, G. | Journal Article |
| 2020 | Back-End-of-Line Compatible Low-Temperature Furnace Anneal for Ferroelectric Hafnium Zirconium Oxide Formation
Lehninger, D.; Olivo, R.; Ali, T.; Lederer, M.; Kämpfe, T.; Mart, C.; Biedermann, K.; Kühnel, K.; Roy, L.; Kalkani, M.; Seidel, K. | Journal Article |
| 2020 | Bauelement und Verfahren zum Herstellen eines Bauelements
Kirbach, Sven; Weinreich, Wenke; Mart, Clemens; Zybell, Sabine; Haufe, Nora | Patent |
| 2020 | BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms
Wehring, Bettina; Hoffmann, R.; Gerlich, Lukas; Czernohorsky, Malte; Uhlig, B.; Seidel, R.; Barchewitz, T.; Schlaphof, F.; Meinshausen, L.; Leyens, C. | Conference Paper |
| 2020 | Chapter 49 - Micro mirrors
Schenk, Harald; Schulze, Matthias | Book Article |
| 2020 | Development of Rutile Titanium Oxide Thin Films as Battery Material Component Using Atomic Layer Deposition
Kia, A.M.; Bönhardt, S.; Zybell, S.; Kühnel, K.; Haufe, N.; Weinreich, W. | Journal Article |
| 2020 | Doping Effects in CMOS‐compatible CoSi Thin Films for Thermoelectric and Sensor Applications
Nichenametla, Charan Krishna; Calvo, Jesús; Riedel, Stefan; Gerlich, Lukas; Hindenberg, Meike; Novikov, Sergej; Alexander Burkov; Kozelj, Primoz; Cardoso-Gil, Raul; Wagner-Reetz, Maik | Journal Article |
| 2020 | Effect of Substrate Implant Tuning on the Performance of MFIS Silicon Doped Hafnium Oxide (HSO) FeFET Memory
Ali, T.; Kühnel, K.; Mertens, K.; Czernohorsky, M.; Rudolph, M.; Duhan, P.; Lehninger, D.; Hoffmann, R.; Steinke, P.; Müller, J.; Houdt, J. van; Seidel, K.; Eng, L.M. | Conference Paper |
| 2020 | Efficient FeFET crossbar accelerator for binary neural networks
Soliman, T.; Olivo, R.; Kirchner, T.; Parra, C. de la; Lederer, M.; Kämpfe, T.; Guntoro, A.; Wehn, N. | Conference Paper |
| 2020 | Entwicklung eines analogen 100MBIT / s-Transceiver-Frontends für die LI-FI-Kommunikation mit harten Echtzeitanforderungen
Jakob, Benjamin
: Kirrbach, René (Betreuer); Fischer, Wolf-Joachim (Betreuer) | Thesis |
| 2020 | Entwicklung eines integrierten, digitalen Empfängers für echtzeitfähige, leitungsungebundene, optische Übertragungen
Steinbach, Hagen
: Fitz, R. (Betreuer); Ebberg, A. (Betreuer); Faulwaßer, M. (Betreuer) | Master Thesis |
| 2020 | FeFET: A versatile CMOS compatible device with game-changing potential
Beyer, S.; Dünkel, S.; Trentzsch, M.; Müller, J.; Hellmich, A.; Utess, D.; Paul, J.; Kleimaier, D.; Pellerin, J.; Müller, S.; Ocker, J.; Benoist, A.; Zhou, H.; Mennenga, M.; Schuster, M.; Tassan, F.; Noack, M.; Pourkeramati, A.; Müller, F.; Lederer, M.; Ali, T.; Hoffmann, R.; Kämpfe, T.; Seidel, K.; Mulaosmanovic, H.; Breyer, E.T.; Mikolajick, T.; Slesazeck, S. | Conference Paper |
| 2020 | Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2019
| Annual Report |
| 2020 | HfO2-based ferroelectric FETs: Performance of single devices and mini-arrays
Mulaosmanovic, H.; Müller, F.; Breyer, E.T.; Dünkel, S.; Trentzsch, M.; Beyer, S.; Mikolajick, T.; Slesazeck, S. | Conference Paper |
| 2020 | Impact of Ferroelectric Wakeup on Reliability of Laminate based Si-doped Hafnium Oxide (HSO) FeFET Memory Cells
Ali, T.; Kühnel, K.; Czernohorsky, M.; Rudolph, M.; Pätzold, B.; Olivo, R.; Lehninger, D.; Mertens, K.; Müller, F.; Lederer, M.; Hoffmann, R.; Mart, C.; Kalkani, M.N.; Steinke, P.; Kämpfe, T.; Müller, J.; Houdt, J. van; Seidel, K.; Eng, L.M. | Conference Paper |
| 2020 | Innovative Concept of Tunable ECDLs Based on MEMS in the NIR and MIR Spectral Regime
Hoppe, M.; Rohling, H.; Schmidtmann, S.; Tatenguem, H.; Grahmann, J.; Milde, T.; Schanze, T.; Sacher, J.R. | Conference Paper |
| 2020 | Interplay Between Switching and Retention in HfO2-Based Ferroelectric FETs
Mulaosmanovic, H.; Müller, F.; Lederer, M.; Ali, T.; Hoffmann, R.; Seidel, K.; Zhou, H.; Ocker, J.; Mueller, S.; Dunkel, S.; Kleimaier, D.; Muller, J.; Trentzsch, M.; Beyer, S.; Breyer, E.T.; Mikolajick, T.; Slesazeck, S. | Journal Article |
| 2020 | Kundenakquise öffentlicher Forschungseinrichtungen in Deutschland. Eine explorative Fallstudie zum Einfluss von Kommunikationskanälen bei der Vermarktung von F&E Dienstleistungen
Grebe, Steffen
: Schefczyk, Michael (Betreuer); Ernst, Cornelia (Betreuer); Titze, Stephan (Betreuer) | Thesis |
| 2020 | Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation
Melnikov, Anton; Schenk, Hermann; Wall, Franziska; Spitz, B.; Ehrig, L.; Langa, S.; Stolz, M.; Kaiser, B.; Conrad, H.; Schenk, H. | Conference Paper |
| 2020 | Monolitic Hybrid Transmitter-Receiver Lens for Rotary On-Axis Communications
Kirrbach, R.; Faulwaßer, M.; Schneider, T.; Meißner, P.; Noack, A.; Deicke, F. | Journal Article |
| 2020 | Novel CMOS-integrated 512x320 tip-tilt micro mirror array and related technology platform
Gehner, Andreas; Döring, S.; Rudloff, D.; Kunze, D.; Dürr, P.; Francés, S.; Hänsel, L.; Torlee, H.; Elgner, A.; Eckert, M.; Friedrichs, M.; Heber, J.; Schmidt, J.; Pufe, W.; Hohle, C.; Schulze, M.; Wagner, M. | Conference Paper |
| 2020 | Obtaining Patient-Reported Outcomes Electronically with "OncoFunction" in Head and Neck Cancer Patients During Aftercare
Zebralla, Veit; Müller, Juliane; Wald, Theresa; Boehm, Andreas; Wichmann, Gunnar; Berger, Thomas; Birnbaum, Klemens; Heuermann, Katherina; Oeltze-Jafra, Steffen; Neumuth, Thomas; Singer, Susanne; Büttner, Matthias; Dietz, Andreas; Wiegand, Susanne | Journal Article |
| 2020 | Passiv arbeitender Transponder mit sensitiver Funktionalität
Holland, Hans-Jürgen | Patent |
| 2020 | Phase formation of a biocompatible Ti-based alloy under kinetic constraints studied via in-situ high-energy X-ray diffraction
Kosiba, K.; Rothkirch, A.; Han, J.; Deng, L.; Escher, B.; Wang, G.; Kühn, U.; Bednarcik, J. | Journal Article |
| 2020 | Piezoelectric Response of Polycrystalline Silicon-Doped Hafnium Oxide Thin Films Determined by Rapid Temperature Cycles
Mart, Clemens; Kämpfe, Thomas; Hoffmann, Raik; Eßlinger, Sophia; Kirbach, Sven; Kühnel, Kati; Czernohorsky, Malte; Eng, Lukas M.; Weinreich, Wenke | Journal Article |
| 2020 | Schöne neue Welt?
Ruffert, Christine | Book Article |
| 2020 | Sem image denoising and contour image estimation using deep learning
Chaudhary, N.; Savari, S.A.; Brackmann, V.; Friedrich, M. | Conference Paper |
| 2020 | Silicon-based microfluid control and switching valves using lateral electrostatic bending actuators
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Ruffert, Christine; Conrad, Holger; Schenk, Harald | Report |
| 2020 | Spannungskontrollierbarer Kondensator mit ferroelektrischer Schicht und Verfahren zum Herstellen des spannungskontrollierbaren Kondensators mit ferroelektrischer Schicht
Kämpfe, Thomas; Polakowski, Patrick; Seidel, Konrad | Patent |
| 2020 | Spannungskontrollierbarer Kondensator und Verfahren zum Herstellen eines spannungskontrollierbaren Kondensators
Kämpfe, Thomas; Polakowski, Patrick; Seidel, Konrad | Patent |
| 2020 | Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction
Lederer, M.; Kämpfe, T.; Vogel, N.; Utess, D.; Volkmann, B.; Ali, T.; Olivo, R.; Müller, J.; Beyer, S.; Trentzsch, M.; Seidel, K.; Eng, L.M. | Journal Article |
| 2020 | A Study on the Temperature-Dependent Operation of Fluorite-Structure-Based Ferroelectric HfO2 Memory FeFET: Pyroelectricity and Reliability
Ali, T.; Kühnel, K.; Czernohorsky, M.; Mart, C.; Rudolph, M.; Pätzold, B.; Lehninger, D.; Olivo, R.; Lederer, M.; Müller, F.; Hoffmann, R.; Metzger, J.; Binder, R.; Steinke, P.; Kämpfe, T.; Müller, J.; Seidel, K.; Eng, L.M. | Journal Article |
| 2020 | A Study on the Temperature-Dependent Operation of Fluorite-Structure-Based Ferroelectric HfO2 Memory FeFET: A Temperature-Modulated Operation
Ali, T.; Kühnel, K.; Czernohorsky, M.; Mart, C.; Rudolph, M.; Pätzold, B.; Lederer, M.; Olivo, R.; Lehninger, D.; Müller, F.; Hoffmann, R.; Metzger, J.; Binder, R.; Steinke, P.; Kämpfe, T.; Müller, J.; Seidel, K.; Eng, L.M. | Journal Article |
| 2020 | Surface Dependent Performance of Ultrathin TiN Films as an Electrically Conducting Li Diffusion Barrier for Li-Ion Based Devices
Speulmanns, Jan; Kia, Alireza M.; Kühnel, Kati; Bönhardt, Sascha; Weinreich, Wenke | Journal Article |
| 2020 | System integration of hybrid large aperture micro scanner array for fast scanning LiDAR sensors
Sandner, Thilo; Graßhoff, Thomas; Owe, Wolf-Dietrich; Herrmann, A.; Wildenhain, M.; Schwarzenberg, M. | Conference Paper |
| 2020 | Tunable non-volatile memory by conductive ferroelectric domain walls in lithium niobate thin films
Kämpfe, T.; Wang, B.; Haußmann, A.; Chen, L.-Q.; Eng, L.M. | Journal Article |
| 2020 | Ultra-Low PoweR TechnologIes and MEmory architectures for IoT
Seidel, Konrad; Eichler, Uwe | Report |
| 2020 | Vibration analysis of micro mirrors for LIDAR using on-chip piezo-resistive sensor
Grahmann, Jan; Schroedter, R.; Kiethe, Oliver; Todt, Ulrich | Conference Paper |
| 2020 | W-Band Noise Characterization with Back-Gate Effects for Advanced 22nm FDSOI mm-Wave MOSFETs
Le, Q.H.; Huynh, D.K.; Wang, D.; Zhao, Z.; Lehmann, S.; Kämpfe, T.; Rudolph, M. | Conference Paper |
| 2020 | Wafer-level vacuum-packaged translatory MEMS actuator with large stroke for NIR-FT spectrometers
Sandner, Thilo; Gaumont, Eric; Graßhoff, Thomas; Rieck, Andreas; Seifert, T.; Auböck, Gerald; Grahmann, Jan | Journal Article |
| 2020 | Whether Ge-Rich ZrO2 and Ge-Rich HfO2 Materials Have Similar Reaction on Annealing Treatment?
Khomenkova, L.; Lehninger, D.; Agocs, E.; Petrik, P.; Portier, X.; Korsunska, N.; Melnichuk, O.; Gourbilleau, F.; Heitmann, J. | Conference Paper |
| 2020 | Wide and fast mode-hop free MEMS tunable ECDL concept and realization in the NIR and MIR spectral regime
Hoppe, M.; Rohling, H.; Schmidtmann, S.; Honsberg, M.; Tatenguem, H.; Grahmann, J.; Milde, T.; Schanze, T.; Sacher, J.R. | Conference Paper |
| 2020 | WS2 and MoS2 counter electrode materials for dye‐sensitized solar cells
Rashidi, S.; Rashidi, S.; Heydari, R.K.; Esmaeili, S.; Tran, N.; Thangi, D.; Wei, W. | Journal Article |
| 2019 | Acoustic Validation of Electrostatic All-Silicon MEMS-Speakers
Ehrig, Lutz; Kaiser, Bert; Schenk, Hermann A.G.; Stolz, Michael; Langa, Sergiu; Conrad, Holger; Schenk, Harald; Männchen, Andreas; Brocks, Tobias | Conference Paper |
| 2019 | Advances of MOEMS-based external cavity QCLs
Härtelt, Marko; Hugger, Stefan; Butschek, Lorenz; Schilling, Christian; Merten, André; Schwarzenberg, Markus; Dreyhaupt, André; Grahmann, Jan; Rattunde, Marcel; Ostendorf, Ralf | Conference Paper |
| 2019 | Analysis of CMOS Metallization Trenches using Angle-Resolved XPS
Wehring, Bettina; Gerlich, Lukas; Wislicenus, Marcus | Poster |
| 2019 | The annealing effect on memory state stability and interlayer coupling in perpendicular magnetic tunnel junctions with ultrathin MgO barrier
Lv, Hua; Fidalgo, João; Leitão, Diana C.; Silva, Ana V.; Kämpfe, Thomas; Riedel, Stefan; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Freitas, Paolo P.; Cardoso, Susana | Journal Article |
| 2019 | Antiferroelektrische, eingebettete Dünnschichtkondensatoren als Energiespeicher für autarke Sensorelemente
Czernohorsky, Malte; Weder, Andreas; Mart, Clemens; Falidas, K.; Kühnel, K.; Viegas, A.E.; Holland, H.-J.; Weinreich, W. | Conference Paper |
| 2019 | Assessment of conduction mechanisms through MgO ultrathin barriers in CoFeB/MgO/CoFeB perpendicular magnetic tunnel junctions
Lv, Hua; Fidalgo, João; Silva, Ana V.; Leitão, Diana C.; Kämpfe, Thomas; Riedel, Stefan; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Freitas, Paolo P.; Cardoso, Susana | Journal Article |
| 2019 | Audio-Transducer für In-Ear Anwendungen auf der Basis CMOS-kompatibler, elektrostatischer Biegeaktoren
Spitz, Barbara; Wall, Franziska; Schenk, Hermann; Melnikov, Anton; Ehrig, Lutz; Langa, Sergiu; Stolz, Michael; Kaiser, Bert; Conrad, Holger; Schenk, Harald | Conference Paper |
| 2019 | Ein Beitrag zum Entwurf vibrationsbelasteter Microscanner
Kiethe, Oliver
: Janschek, Klaus; Schroedter, Richard (Betreuer); Todt, Ulrich (Betreuer) | Thesis |
| 2019 | Characterisation of ferroelectric thin films with scanning probe microscope methods
Norouzi Kalkani, Mahsa
: Kämpfe, Thomas (Betreuer); Ecke, Ramona (Betreuer); Schulz, Stefan E. (Gutachter) | Master Thesis |
| 2019 | CMOS-compatible transition metal disilicide for integrated thermoelectric applications
Nichenametla, C.K.; Calvo, J.; Dhavamani, A.; Drescher, M.; Göhler, T.; Wagner-Reetz, M. | Journal Article, Conference Paper |
| 2019 | CMUT with mechanically coupled plate actuators - Linearized electrostatic modeling
Krenkel, Marcel; Koch, Sandro; Kupnik, M. | Conference Paper |
| 2019 | CMUT with mechanically coupled plate actuators for low frequencies
Krenkel, Marcel; Stolz, Michael; Koch, Sandro G.; Kupnik, Mario | Journal Article |
| 2019 | Co-MOCVD processed seed layer for through silicon via copper metallization
Esmaeili, S.; Lilienthal, K.; Nagy, N.; Gerlich, L.; Krause, R.; Uhlig, B. | Journal Article |
| 2019 | Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers
Kaisers, B.; Langa, S.; Ehrig, L.; Stolz, M.; Schenk, H.; Conrad, H.; Schenk, H.; Schimmanz, K.; Schuftenhauer, D. | Journal Article |
| 2019 | Construction and Characterization of External Cavity Diode Lasers Based on a Microelectromechanical System Device
Hoppe, M.; Jiménez, A.; Rohling, H.; Schmidtmann, S.; Grahmann, J.; Tatenguem, H.; Milde, T.; Schanze, T.; Sacher, J.R. | Journal Article, Conference Paper |
| 2019 | Defects in oxidized p-type Si wafers observed by surface photovoltage spectroscopy
Kolkovsky, Vladimir | Journal Article |
| 2019 | Design and fabrication of liquid crystal microring resonator-based tunable optical add-drop filters
Costache, Florenta; Hartwig, H.; Martin, A.; Blasl, M.; Rieck, A.; Namdari, M. | Conference Paper |
| 2019 | Development of an illumination module for stroboscopic phase-shift interferometry on MEMS devices
Medeiros Ventura, Luiz Guilherme de; Wolschke, Steffen; Skupsch, Christoph; Berndt, D. | Conference Paper |
| 2019 | Doping hafnium oxide by in-situ precursor mixing
Weinreich, Wenke; Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Czernohorsky, Malte | Presentation |
| 2019 | Electrical and structural properties of direct current magnetron sputtered amorphous TiAl thin films
Kolkovsky, V.; Schmidt, Jan-Uwe; Döring, S. | Journal Article |
| 2019 | Electrocaloric temperature change in ferroelectric Si-doped hafnium oxide (HfO2) thin films
Mart, C.; Kämpfe, T.; Pätzold, B.; Rudolph, M.; Czernohorsky, M.; Müller, J.; Weinreich, W. | Presentation |
| 2019 | Electrocaloric temperature change in ferroelectric Si-doped hafnium oxide (HfO2) thin films
Mart, Clemens; Kämpfe, Thomas; Müller, Johannes; Pätzold, Björn; Rudolph, Matthias; Czernohorsky, Malte; Weinreich, Wenke | Presentation |
| 2019 | Electrostatic All-Silicon MEMS Speakers for In-Ear Audio Applications - Acoustic Measurements and Modelling Approach
Ehrig, Lutz; Wall, Franziska; Schenk, Hermann; Langa, Sergiu; Melnikov, Anton; Stolz, Michael; Kaiser, Bert; Conrad, Holger; Schenk, Harald | Conference Paper |
| 2019 | Entwurf eines analogen Hochgeschwindigkeits-Frontends für die optische drahtlose Kommunikation
Spundflasche, Martin
: Gärtner, Uwe (Prüfer); Noack, Alexander (Gutachter); Kirrbach, René (Gutachter) | Bachelor Thesis |
| 2019 | Epitaxial n++-InGaAs ultra-shallow junctions for highly scaled n-MOS devices
Tejedor, P.; Drescher, M.; Vázquez, L.; Wilde, L. | Journal Article |
| 2019 | Ferroelectric and pyroelectric properties of polycrystalline La-doped HfO2 thin films
Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke | Journal Article |
| 2019 | Formation of highly conformal spinel lithium titanate thin films based on a novel three-step atomic layer deposition process
Bönhardt, S.; Kühnel, K.; Kia, A.M.; Weinreich, W. | Journal Article |
| 2019 | Fraunhofer Institute for Photonic Microsystems. Annual Report 2018
| Annual Report |
| 2019 | Glow discharge optical emission spectrometry for quantitative depth profiling of CIGS thin-films
Kodalle, T.; Greiner, D.; Brackmann, V.; Prietzel, K.; Scheu, A.; Bertram, T.; Reyes-Figueroa, P.; Unold, T.; Abou-Ras, D.; Schlatmann, R.; Kaufmann, C.A.; Hoffmann, V. | Journal Article |
| 2019 | High-density energy storage in Si-doped hafnium oxide thin films on area-enhanced substrates
Kühnel, Kati; Czernohorsky, M.; Riedel, Steffen; Mart, Clemens; Weinreich, Wenke | Journal Article |
| 2019 | Hybrid assembled MEMS scanner array with large aperture for fast scanning LIDAR systems
Sandner, Thilo; Grasshoff, Thomas; Wildenhain, Michael; Schwarzenberg, M. | Journal Article |
| 2019 | Impedanzanpassungsvorrichtung, Wandlervorrichtung und Verfahren zum Herstellen einer Impedanzanpassungsvorrichtiung
Schweiger, Severin; Koch, Sandro; Grafe, Mario; Lange, Nicolas; Amelung, Jörg | Patent |
| 2019 | Investigation of mechanical and optical properties of 3D printed materials serving as substrate for place and bend assembly
Grüger, H.; Knobbe, J.; Sabiha, M.H. | Conference Paper |
| 2019 | Investigation of Pt-Salt-Doped-Standalone-Multiwall Carbon Nanotubes for On-Chip Interconnect Applications
Liang, J.; Chen, R.; Ramos, R.; Lee, J.; Okuno, H.; Kalita, D.; Georgiev, V.; Berrada, S.; Sadi, T.; Uhlig, B.; Lilienthal, K.; Dhavamani, A.; Könemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Asenov, A.; Dijon, J.; Todri-Sanial, A. | Journal Article |
| 2019 | Ionenmobilitätsspektrometer mit FAIMS-Filter in MEMS-Technologie
Graf, Alexander; Hild, Olaf Rüdiger | Conference Paper |
| 2019 | Kern für Echtzeit
Deicke, Frank; Beck, Monika | Electronic Publication |
| 2019 | Konzeptentwicklung eines optischen Messplatzes zur präzisen und hochdynamischen Bestimmung des zweidimensionalen Kippwinkels von 2D-Mikrospiegeln als Referenzmesssystem einer Echtzeitregelung
Stolba, Friedrich
: Czarske, Jürgen (Gutachter); Büttner, Lars (Gutachter); Sandner, Thilo (Gutachter) | Thesis |
| 2019 | Li-Fi for Augmented Reality Glasses: A Proof of Concept
Kirrbach, René; Faulwaßer, Michael; Jakob, Benjamin; Schneider, Tobias | Conference Paper |
| 2019 | MEMS based NIR spectrometer with extended spectral range
Grüger, H.; Knobbe, J.; Pügner, T. | Conference Paper |
| 2019 | MEMS mit einem beweglichen Strukturelement und MEMS-Array
Dürr, Peter; Neudert, Andreas | Patent |
| 2019 | MEMS piston mirror arrays with force-balanced single spring
Dürr, P.; Neudert, A.; Kunze, D.; Friedrichs, M. | Conference Paper |
| 2019 | Mikroelektromechanisches Bauteil sowie ein Verfahren zu seiner Herstellung
Döring, Sebastian; Friedrichs, Martin; Hürrich, Arnd; Rudloff, Dirk | Patent |
| 2019 | Non-rotationally Symmetric Freeform Fresnel-Lenses for Arbitrary Shaped Li-Fi Communication Channels
Kirrbach, René; Faulwaßer, Michael; Jakob, Benjamin | Conference Paper |
| 2019 | Novel atomic layer deposition of lithium-containing electrode and electrolyte thin films for 3D all-solid-state batteries
Speulmanns, Jan; Bönhardt, Sascha; Kia, Alireza M.; Weinreich, Wenke | Poster |
| 2019 | Optik für Sende- und/oder Empfangs-Element, Kommunikationsmodul, Arrays aus Kommunikationsmodulen, System aus mehreren Kommunikationsmodulen und Verfahren zur Herstellung einer Optik
Kirrbach, René | Patent |
| 2019 | Optische Charakterisierungsmethoden von siliziumbasierten MEMS mit verdeckten Strukturen
Stolz, Michael; Mrosk, A.; Kaiser, B.; Langa, S.; Ehrig, L.; Conrad, H.; Gaudet, M.; Schenk, H. | Conference Paper |
| 2019 | Platinum-Copper Defects in Silicon
Kolkovsky, V.; Kolkovsky, V.; Weber, J. | Journal Article |
| 2019 | Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K. | Conference Paper |
| 2019 | Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K. | Poster |
| 2019 | Pyroelectric Energy Conversion in Doped Hafnium Oxide (HfO2) Thin Films on Area-Enhanced Substrates
Hanrahan, Brendan; Mart, Clemens; Kämpfe, Thomas; Czernohorsky, M.; Weinreich, Wenke; Smith, A. | Journal Article |
| 2019 | Quasi-statischer MOEMS-Gitterscanner zum spektralen Durchstimmen eines MIR-Quantenkaskadenlasers
Merten, André; Schroedter, Richard; Dreyhaupt, André; Graßhoff, Thomas; Schwarzenberg, Markus; Hugger, Stefan; Schilling, Christian; Grahmann, Jan; Ostendorf, Ralf | Journal Article |
| 2019 | Rasterscan mit ruckbegrenzten Trajektorien für quasi-statisch/resonante Mikroscanner
Schroedter, Richard; Schwarzenberg, Markus; Janschek, K.; Grahmann, Jan | Conference Paper |
| 2019 | Reduced metal contamination from crucible and coating using a silicon nitride based diffusion barrier for the growth of cast quasi-single crystalline silicon ingots
Wolny, F.; Krause, A.; Müller, M.; Fischer, G.; Neuhaus, H. | Journal Article |
| 2019 | Sensoranordnung und Verfahren zum Herstellen einer Sensoranordnung
Mart, Clemens; Polakowski, Patrick; Kämpfe, Thomas; Weinreich, Wenke | Patent |
| 2019 | Separation of Individual Thermal Double-Donor Levels by Laplace Deep-Level Transient Spectroscopy
Gwozdz, K.; Kolkovsky, V.; Weber, J. | Journal Article |
| 2019 | Silicone oil damping for quasi-static micro scanners with electrostatic vertical staggered comb drives
Schroedter, Richard; Grahmann, Jan; Janschek, Klaus | Journal Article, Conference Paper |
| 2019 | Spektralanalysesystem zum Aufnehmen eines Spektrums
Knobbe, Jens; Grüger, Heinrich | Patent |
| 2019 | Spektralanalysesystem, mobiles Gerät mit einem Spektralanalysesystem, ein Verfahren zur Bestimmung einer Korrekturfunktion zur Abbildungskorrektur eines durch ein Spektralanalysesystem aufgenommenen Spektrums und Computerprogramm
Knobbe, Jens; Grüger, Heinrich | Patent |
| 2019 | Structure and Thermoelectric Properties of CoSi-Based Film Composites
Kuznetsova, V.S.; Novikov, S.V.; Nichenametla, C.K.; Calvo, J.; Wagner-Reetz, M. | Journal Article, Conference Paper |
| 2019 | Studentische Beschäftigungsverhältnisse als Quelle des Active Sourcings? Eine Analyse am Beispiel des Fraunhofer-Instituts für Photonische Mikrosysteme IPMS
Wendenburg, Anja
: Haubold, Anne-Katrin (Gutachter); Richter, Thorsten S. (Gutachter) | Bachelor Thesis |
| 2019 | Study of sub-volume activation in CoFeB/MgO memory devices near spin reorientation transition
Fidalgo, João; Lv, Hua; Silva, Ana V.; Leitão, Diana C.; Kämpfe, Thomas; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Cardoso, Susana | Poster |
| 2019 | Theory and Experiment of Antiferroelectric (AFE) Si-Doped Hafnium Oxide (HSO) Enhanced Floating-Gate Memory
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Zimmermann, K.; Biedermann, K.; Eng, L.M.; Seidel, K.; Müller, J. | Journal Article |
| 2019 | ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition
Kia, A.M.; Haufe, N.; Esmaeili, S.; Mart, C.; Utriainen, M.; Puurunen, R.L.; Weinreich, W. | Journal Article |
| 2019 | Wetting properties of LIPSS structured silicon surfaces
Varlamova, O.; Reif, J.; Stolz, M.; Borcia, R.; Borcia, I.D.; Bestehorn, M. | Journal Article |
| 2018 | 10 Gbit/s bidirectional transceiver with monolithic optic for rotary connector replacements
Faulwaßer, M.; Kirrbach, R.; Schneider, T.; Noack, A. | Conference Paper |
| 2018 | 14nm Ferroelectric FinFET technology with steep subthreshold slope for ultra low power applications
Krivokapic, Z.; Rana, U.; Galatage, R.; Razavieh, A.; Aziz, A.; Liu, J.; Shi, J.; Kim, H.J.; Sporer, R.; Serrao, C.; Busquet, A.; Polakowski, P.; Müller, J.; Kleemeier, W.; Jacob, A.; Brown, D.; Knorr, A.; Carter, R.; Banna, S. | Conference Paper |
| 2018 | 3D Analysis of Thin Layers by ToF-SIMS
Mohammadian Kia, Alireza; Esmaeili, Sajjad; Mart, Clemens; Utriainen, Mikko; Haufe, Nora; Puurunen, Riikka L.; Weinreich, Wenke | Poster |
| 2018 | Advances in MOEMS technologies for high quality imaging systems
Schenk, H.; Wagner, M.; Grahmann, J.; Merten, A. | Conference Paper |
| 2018 | Aktoren auf Basis elektroaktiver Polymer/Nanopartikel Komposite und deren Anwendung in einer Mikrolinse mit variablem Fokus
Pawlik, Boscij
: Lakner, Hubert (Betreuer); Grabmaier, Anton (Betreuer) | Dissertation |
| 2018 | Analog frontend for ultra low power 60-GHz RFID tag for back-scattering communication
Harutyunyan, A. | Conference Paper |
| 2018 | Aspects of high aspect ratio silicon etching - capacitor application
Rudolph, Matthias; Pätzold, Björn; Czernohorsky, Malte | Presentation |
| 2018 | Automatic tracking of Li-Fi links for wireless industrial ethernet
Kirrbach, René; Faulwaßer, Michael; Schneider, Tobias; Ostermann, Robert; Noack, Alexander | Conference Paper |
| 2018 | Automatic Tracking of Li-Fi Links for Wireless Industrial Ethernet
Kirrbach, René | Presentation |
| 2018 | Barrier breakdown mechanism in nano-scale perpendicular magnetic tunnel junctions with ultrathin MgO barrier
Lv, Hua; Leitao, Diana C.; Hou, Zhiwei; Freitas, Paulo P.; Cardoso, Susana; Kämpfe, Thomas; Müller, Johannes; Langer, Juergen; Wrona, Jerzy | Journal Article |
| 2018 | Bringing NIR spectrometers into mobile phones
Reinig, P.; Grüger, H.; Knobbe, J.; Pügner, T.; Meyer, S. | Conference Paper |
| 2018 | Carbon-hydrogen-related complexes in Si
Kolkovsky, V.; Stübner, Ronald; Gwozdz, K.; Weber, Jörg | Journal Article |
| 2018 | Challenges and Progress on Carbon Nanotube Integration for BEOL Interconnects
Uhlig, B.; Dhavamani, A.; Nagy, N.; Lilienthal, K.; Liske, R.; Ramos, R.; Dijon, J.; Okuno, H.; Kalita, D.; Lee, J.; Georgiev, V.; Asenov, A.; Amoroso, S.; Wang, L.; Koenemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Liang, J.; Pandey, R.R.; Chen, R.; Todri-Sanial, A. | Conference Paper |
| 2018 | Charakterisierung und Bewertung von CuPc-basierten OFET's im Hinblick auf eine Anwendung als NO2-Sensor
Reichelt, Christoph
: Zipser, Stephan (Betreuer); Graf, Alexander (Betreuer) | Bachelor Thesis |
| 2018 | Clamped-clamped in-plane electrostatic bending actuators in silicon-based microfluidic devices
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Schenk, Harald | Presentation |
| 2018 | CMOS compatible pyroelectric applications enabled by doped HfO2 films on deep-trench structures
Mart, Clemens; Weinreich, Wenke; Czernohorsky, Malte; Riedel, Stefan; Zybell, Sabine; Kühnel, Kati | Conference Paper |
| 2018 | CMOS design of Digital to Analog converters for active matrix Spatial Light Modulator applications
Paramesh, Vidwath
: Presberger, Thomas (Betr.); Horstmann, John Thomas (Betr.) | Master Thesis |
| 2018 | CMOS-kompatibler MEMS-Lautsprecher für Im-Ohr-Anwendungen
Conrad, Holger; Ehrig, Lutz; Kaiser, Bert; Schenk, Hermann; Schuffenhauer, David; Stolz, Michael; Gaudet, Matthieu; Schenk, Harald | Conference Paper |
| 2018 | CMUT with mechanically coupled plate actuators
Krenkel, Marcel; Kircher, Marco; Kupnik, Mario; Koch, Sandro | Conference Paper |
| 2018 | Cobalt integration solutions - integration (R&D accelerator)
Gerlich, Lukas; Wislicenus, Marcus; Koch, Johannes; Dhavamani, Abitha; Esmaeili, Sajjad; Uhlig, Benjamin | Presentation |
| 2018 | Copper electroplating with polyethylene Glycol. Pt.II. Experimental analysis and determination of model parameters
Yang, Hongliu; Krause, Robert; Scheunert, Christin; Liske, Romy; Uhlig, Benjamin; Preusse, Axel; Dianat, Arezoo; Bobeth, Manfred; Cuniberti, Gianaurelio | Journal Article |
| 2018 | Design of on-chip RFID transponder antennas
Heinig, Andreas | Conference Paper |
| 2018 | Design of On-Chip RFID Transponder Antennas
Heinig, Andreas | Presentation |
| 2018 | Development of titanium oxide conformal thin film by atomic layer deposition
Mohammadian Kia, Alireza | Poster |
| 2018 | Drahtlose Datenübertragung für kurze und lange Strecken. Alternative Li-Fi
Noack, Alexander | Journal Article |
| 2018 | Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald | Journal Article |
| 2018 | Enhancement of vertical integration density by engineered BSOI wafers
Kaden, C.; Langa, S.; Ludewig, T.; Schönberger, A.; Herrmann, A.; Göbel, A.; Kolkovsky, V.; Jeroch, W.; Pufe, W. | Journal Article |
| 2018 | Entwicklung eines Beleuchtungsmoduls für stroboskopische, phasenschiebende Interferometrie
Medeiros Ventura, Luiz Guilherme de
: Heitmann, Johannes (Gutachter); Skupsch, Christoph (Gutachter); Wolschke, Steffen (Betreuer) | Master Thesis |
| 2018 | Entwicklung eines Transmitters mit Hochleistungsleuchtdiode für die optische drahtlose Datenübertragung
Lei, Lei
: Ostermann, Robert (Betreuer); Fischer, Wolf-Joachim (Gutachter) | Thesis |
| 2018 | A FeFET based super-low-power ultra-fast embedded NVM technology for 22nm FDSOI and beyond
Dünkel, S.; Trentzsch, M.; Richter, R.; Moll, P.; Fuchs, C.; Gehring, O.; Majer, M.; Wittek, S.; Müller, B.; Melde, T.; Mulaosmanovic, H.; Slesazeck, S.; Müller, S.; Ocker, J.; Noack, M.; Löhr, D.-A.; Polakowski, P.; Müller, J.; Mikolajick, T.; Höntschel, J.; Rice, B.; Pellerin, J.; Beyer, S. | Conference Paper |
| 2018 | Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design
Schroedter, Richard; Roth, Matthias; Janschek, Klaus; Sandner, Thilo | Journal Article |
| 2018 | Fraunhofer Institute for Photonic Microsystems. Annual Report 2017
| Annual Report |
| 2018 | Frequency domain analysis of pyroelectric response in silicon-doped hafnium oxide (HfO2) thin films
Mart, Clemens; Czernohorsky, Malte; Zybell, Sabine; Kämpfe, Thomas; Weinreich, Wenke | Journal Article |
| 2018 | Functional integration - structure-integrated wireless sensor technology targeting smart mechanical engineering applications
Rülke, Steffen; Beyer, Volkhard; Zorn, Wolfgang; Meinig, Marco; Wecker, Julia; Reuter, Danny; Deicke, Frank; Clausner, André; Werner, Thomas | Conference Paper |
| 2018 | The gateone-project: A digital innovation hub accelerating innovation through ecosystem design and product trajectory
Hamelin, R.; Andrieux, G.; Chartier, I.; Roustom, B.; Healy, T.; Ali, Z.; Legrand, B.; Mayora, K.; Scholles, M.; Guerre, R. | Conference Paper |
| 2018 | Grundlegende Untersuchungen zur Phasenmodulation von Licht im Subnanometer-Bereich mittels diffraktiver Mikrospiegelarrays
Sicker, Cornelius
: Schenk, Harald; Reif, Jürgen | Dissertation |
| 2018 | High Endurance Ferroelectric Hafnium Oxide-Based FeFET Memory Without Retention Penalty
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Calvo, J.; Zimmermann, K.; Müller, J. | Journal Article |
| 2018 | High-Speed, Cellular Li-Fi HotSpot for Real-Time Applications
Kirrbach, René; Faulwaßer, Michael; Ostermann, Robert; Jakob, Benjamin; Noack, Alexander | Presentation |
| 2018 | Hydrogen-related defects in Al2O3 layers grown on n-type Si by the atomic layer deposition technique
Kolkovsky, Vladimir; Stübner, Ronald | Journal Article |
| 2018 | Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition technique
Kolkovsky, Vladimir; Scholz, Sebastian; Kolkovsky, Valery; Schmidt, Jan-Uwe; Heller, Rene | Journal Article |
| 2018 | Kanalkodierungen in der optisch-drahtlosen Übertragung
Audi, Maher
: Faulwaßer, Michael (Betreuer); Noack, Alexander (Betreuer); Tutsch, Dietmar (Gutachter); Möller, Reinhard (Gutachter) | Master Thesis |
| 2018 | Knickbares Substrat mit Bauelement
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino | Patent |
| 2018 | Konzeption und Herstellung von Systemdemonstratoren für miniaturisierte Im-Ohr-Lautsprecher mit drahtlosen Kommunikationsschnittstellen
Horky, Steve
: Kaiser, Bert (Betreuer); Bauer, Reinhard (Betreuer) | Thesis |
| 2018 | Konzipierung und Umsetzung eines Automotive Ethernet-MAC IP-Cores
Zhu, Hailong
: Hildebrandt, Ralf (Betreuer); Fischer, Wolf-Joachim (Gutachter) | Thesis |
| 2018 | Layer thickness scaling and wake-up effect of pyroelectric response in Si-doped HfO2
Mart, Clemens; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke | Journal Article |
| 2018 | Li-Fi für Kurzstrecken. Drahtlose Industriekommunikation
Noack, Alexander | Journal Article |
| 2018 | Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald | Journal Article |
| 2018 | Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald | Presentation |
| 2018 | Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald | Presentation |
| 2018 | Lithium Detection and Tracking for Solid State Battery Test Stacks
Mohammadian Kia, Alireza; Haufe, Nora; Zybell, Sabine; Bönhardt, Sascha; Kühnel, Kati; Speulmanns, Jan K.; Weinreich, Wenke | Poster |
| 2018 | LPCVD in-situ doped silicon for thermoelectric applications
Calvo, Jesús; Drescher, Maximilian; Kühnel, Kati; Sauer, Bodo; Müller, Michael; Schmidt, Christian; Boui, Fatima; Völklein, Friedemann; Wagner-Reetz, Maik | Journal Article, Conference Paper |
| 2018 | Mechanically coupled capacitive ultrasonic transducer
Krenkel, Marcel; Lange, Nicolas; Koch, Sandro; Kircher, Marco | Conference Paper |
| 2018 | MEMS basierte Ultraschallwandler für die Anwendung in flüssigen und gasförmigen Umgebungen und Möglichkeiten der CMOS Integration
Lange, Nicolas; Grafe, Mario; Koch, Sandro; Kaden, Christiane; Schulze, Matthias | Presentation |
| 2018 | MEMS integration on foundry-fabricated CMOS backplanes
Hohle, Christoph; Schulze, Matthias | Book Article |
| 2018 | MEMS-Tunable VCSELs-Driven Terahertz Emitters Based on Conventional and Nanoelectrode Photomixers
Haidar, M.T. | Dissertation |
| 2018 | Microoptoelectromechanical systems-based external cavity quantum cascade lasers for real-time spectroscopy
Butschek, Lorenz; Hugger, Stefan; Jarvis, Jan-Philip; Härtelt, Marko; Merten, André; Schwarzenberg, Markus; Grahmann, Jan; Stothard, David; Warden, Matthew; Carson, Christoph; Macarthur, John; Fuchs, Frank; Ostendorf, Ralf; Wagner, Joachim | Journal Article |
| 2018 | Mikromechanische Bauelemente mit mechanischen Aktuatoren
Conrad, Holger; Gaudet, Matthieu; Schenk, Harald; Uhlig, Sebastian | Patent |
| 2018 | MMS, MMS-Array, MEMS-Aktuator und Verfahren zum Bereitstellen eines MMS
Dürr, Peter; Friedrichs, Martin; Gehner, Andreas; Kunze, Detlef | Patent |
| 2018 | Modellbasierter Systementwurf zur Steuerung und Regelung quasi-statischer Mikroscannerspiegel mit elektrostatischem Kammantrieb
Schroedter, Richard
: Hofmann, Wilfried; Janschek, Klaus | Dissertation |
| 2018 | Modulating complex beams in amplitude and phase using fast tilt-micromirror arrays and phase masks
Roth, M.; Heber, Jörg; Janschek, Klaus | Journal Article |
| 2018 | Monolithic integration for photonic applications: MEMS on CMOS and functional BSOI
Kaden, Christiane; Schulze, Matthias | Presentation |
| 2018 | MOSFET threshold Voltage Shift induced by Ion Implantation performed in different Implanters
Kalkovsky, Vladimir; Hürrich, Arnd; Ende, Lutz | Conference Paper |
| 2018 | New way to realize miniaturized complex optical systems in high volume
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino; Reinig, Peter; Meyer, Sebastian | Conference Paper |
| 2018 | Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology
Gehner, A.; Dürr, P.; Kunze, D.; Rudloff, D.; Elgner, A.; Heber, J.; Francés, S.; Skupsch, C.; Torlee, H.; Eckert, M.; Friedrichs, M.; Schmidt, J.; Pufe, W.; Döring, S.; Hohle, C.; Schulze, M.; Wagner, M. | Conference Paper |
| 2018 | A novel electrostatic actuator, the Nano-E-Drive, and its integration in a micropump design
Gaudet, Matthieu | Presentation |
| 2018 | Optische Anordnung für ein Spektralanalysesystem, Verfahren zu dessen Herstellung und Spektralanalysesystem
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino | Patent |
| 2018 | Optische Anordnung zur Erzeugung von Lichtfeldverteilungen und Verfahren zum Betrieb einer optischen Anordnung
Heber, Jörg; Janschek, Klaus; Roth, Matthias | Patent |
| 2018 | Passive RFID sensors - battery-free, wireless pressure measurements
Weder, Andreas; Koch, Sandro; Grätz, Hagen; Kircher, Marco | Presentation |
| 2018 | Passive sensor transponders - wireless, battery-free sensing with RFID technology
Weder, Andreas | Presentation |
| 2018 | A physics-based investigation of Pt-salt doped carbon nanotubes for local interconnects
Liang, J.; Ramos, R.; Dijon, J.; Okuno, H.; Kalita, D.; Renaud, D.; Lee, J.; Georgiev, V.P.; Berrada, S.; Sadi, T.; Asenov, A.; Uhlig, B.; Lilienthal, K.; Dhavamani, A.; Könemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Teo, K.; Pandey, R.R.; Todri-Sanial, A. | Conference Paper |
| 2018 | Plagiatschutz mittels RFID
Holland, Hans-Jürgen | Presentation |
| 2018 | Progress on carbon nanotube BEOL interconnects
Uhlig, B.; Liang, J.; Lee, J.; Ramos, R.; Dhavamani, A.; Nagy, N.; Dijon, J.; Okuno, H.; Kalita, D.; Georgiev, V.; Asenov, A.; Amoroso, S.; Wang, L.; Millar, C.; Konemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Pandey, R.R.; Chen, R.; Todri-Sanial, A. | Conference Paper |
| 2018 | Rapid Synthesis of Sub‐10 nm Hexagonal NaYF4‐Based Upconverting Nanoparticles using Therminol® 66
Hesse, J.; Klier, D.T.; Sgarzi, M.; Nsubuga, A.; Bauer, C.; Grenzer, J.; Hübner, R.; Wislicenus, M.; Joshi, T.; Kumke, M.U.; Stephan, H. | Journal Article |
| 2018 | Reliable high-density energy storage in Si-doped HfO2 thin films on 3D-structures
Kühnel, Kati; Riedel, Stefan; Mart, Clemens; Weinreich, Wenke | Presentation |
| 2018 | Repetitive nonlinear control for linear scanning micro mirrors
Schroedter, R.; Schwarzenberg, M.; Grahmann, J.; Sandner, T.; Janschek, K. | Conference Paper |
| 2018 | Research Fab Microelectronics Germany - A novel cooperation concept for jointly technology development
Amelung, J. | Conference Paper |
| 2018 | A review of acoustic impedance matching methods to validate additive manufactured metamaterial for capacitive micromachined ultrasonic transducers
Schweiger, Severin; Koch, Sandro | Conference Paper |
| 2018 | Silicon doped hafnium oxide (HSO) and hafnium zirconium oxide (HZO) based FeFET
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Thrun, X.; Hanisch, N.; Steinke, P.; Calvo, J.; Müller, J. | Journal Article |
| 2018 | Smart and efficient optimization of NED actuators
Schuffenhauer, David; Gaudet, Matthieu; Conrad, Holger | Conference Paper |
| 2018 | Subnanometer calibration of diffractive micromirror arrays
Sicker, C.; Heber, J.; Berndt, D. | Abstract |
| 2018 | Subnanometer calibration of diffractive micromirror arrays
Sicker, Cornelius; Heber, Jörg; Berndt, Dirk | Presentation |
| 2018 | System zur Analyse von elektromagnetischer Strahlung und Bauelement zur Herstellung desselben
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino | Patent |
| 2018 | Towards a compact, portable, handheld device for contactless real-time standoff detection of hazardous substances
Carson, Christopher; Macarthur, John; Warden, Matthew; Stothard, David; Butschek, Lorenz; Hugger, Stefan; Jarvis, Jan-Philip; Härtelt, Marko; Ostendorf, Ralf; Merten, André; Schwarzenberg, Markus; Grahmann, Jan; Ratajczyk, Marcin | Conference Paper |
| 2018 | Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers
Sandner, Thilo; Gaumont, Eric; Grasshoff, Thomas; Auböck, Gerald; Kenda, Andreas; Gisler, Thomas; Langa, Sergiu; Herrmann, Andreas; Grahmann, Jan | Conference Paper |
| 2018 | Tuning parameters and their impact on ferroelectric hafnium oxide
Polakowski, Patrick; Büttner, Teresa; Ali, Tarek Nadi Ismail; Riedel, Stefan; Kämpfe, Thomas; Seidel, Konrad; Müller, Johannes; Pätzold, Björn | Presentation |
| 2018 | Ultrathin Lithium Ion Diffusion Barrier for On-Chip 3D All-Solid-State Batteries
Speulmanns, Jan; Zybell, Sabine; Mohammadian Kia, Alireza; Bönhardt, Sascha; Weinreich, Wenke; Liske, Romy | Poster |
| 2018 | Understanding Electromigration in Cu-CNT Composite Interconnects
Lee, J.; Berrada, S.; Adamu-Lema, F.; Nagy, N.; Georgiev, V.P.; Sadi, T.; Liang, J.; Ramos, R.; Carrillo-Nunez, H.; Kalita, D.; Lilienthal, K.; Wislicenus, M.; Pandey, R.; Chen, B.; Teo, K.B.K.; Goncalves, G.; Okuno, H.; Uhlig, B.; Todri-Sanial, A.; Dijon, J.; Asenov, A. | Journal Article |
| 2018 | Vertically aligned carbon nanotube films as absorption layers for IR applications
Kini, Mandar; Bonitz, Jens; Müller, Michael; Schulz, Stefan E.; Hermann, Sascha | Conference Paper |
| 2018 | Vertically integrated modeling of light-induced defects
Laine, H.S.; Vahlman, H.; Haarahiltunen, A.; Jensen, M.A.; Modanese, C.; Wagner, M.; Wolny, F.; Buonassisi, T.; Savin, H. | Conference Paper |
| 2018 | Vollduplex-Transceiver für die optische drahtlose Hochgeschwindigkeitskommunikation
Faulwaßer, Michael
: Fischer, Wolf-Joachim; Jamshidi, Kambiz; Henker, Matthias | Dissertation |
| 2018 | Wake-up effect of pyroelectric response in doped HfO2
Mart, Clemens; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke | Abstract |
| 2017 | Acoustic simulation and characterization of capacitive micromachined ultrasonic transducers
Klemm, Markus
: Gerlach, Gerald (Gutachter); Kupnik, Mario | Dissertation |
| 2017 | Adsorptionsuntersuchungen in einem Mehrkomponenten-Additiv-System bei der elektrochemischen Kupferabscheidung im Bereich Halbleitermetallisierung
Scheunert, Christin
: Krause, Robert (Betreuer); Kalies, Grit (Betreuer) | Bachelor Thesis |
| 2017 | ASIC zur Ansteuerung und Signalerfassung eines CMUT
Pietzsch, Marcus; Weder, Andreas; Heinig, Andreas; Amelung, Jörg; Koch, Sandro; Kircher, Marco | Conference Paper |
| 2017 | Atomic Layer Deposition (ALD) and characterization of Ti- and Co-based films for Lithium-Ion Batteries (LIB)
Hoßbach, C.; Neumann, V.; Reddy, K.D.S.; Bönhardt, S.; Stoeck, A.; Fischer, D.; Reif, J.; Shukla, S.; Zybell, S.; Albert, M.; Giebeler, L.; Bartha, J.W. | Poster |
| 2017 | Atomic layer deposition of functional films for all-solid-state lithium-ion microbatteries
Zybell, Sabine | Presentation |
| 2017 | Atomic layer deposition of lithium titanate on planar and 3D-structured 200 mm silicon substrates
Bönhardt, Sascha | Presentation |
| 2017 | Ein Beitrag zur Simulation und Realisierung repetitiver Regelungsalgorithmen für elektrostatische quasi-statische Mikrospiegel
Che, Xingqi
: Schroedter, Richard (Betreuer); Janschek, Klaus (Betreuer) | Thesis |
| 2017 | BEoL post CMP cleaning challenges for 22 nm FD-SOI and beyond
Koch, Johannes; Rehschuh, Stephan; Gerlich, Lukas; Dhavamani, Abitha; Steinke, Philipp; Krause, Robert; Naue, Johannes; Bott, Sascha; Vasilev, Boris; Breuer, Dirk; Seidel, Robert; Preusse, Axel; Bartha, Johann Wolfgang; Uhlig, Benjamin | Conference Paper |
| 2017 | Capacitance maximization of ultra-thin Si-capacitors by atomic layer deposition of anti-ferroelectric HfO2 in high aspect ratio structures
Riedel, Stefan; Weinreich, Wenke; Mart, Clemens; Müller, Johannes | Presentation |
| 2017 | Carbon-hydrogen related defects in SiGe observed after dc H plasma treatment
Stübner, Ronald; Kolkovsky, Vladimir; Weber, Jörg; Abrosimov, Nikolay V. | Journal Article |
| 2017 | Carbon-related defects in microelectronics
Kolkovsky, V.; Stübner, R.; Weber, J. | Journal Article |
| 2017 | Charakterisierung der Zuverlässigkeit in der High-k Metal Gate Technologie
Drescher, Maximilian; Erben, Elke; Grass, Carsten; Trentzsch, Martin; Lazarevic, Florian; Leitsmann, Roman; Plaenitz, Philipp; Mchedlidze, Teimuraz; Seidel, Konrad; Liske, Romy; Bartha, Johann Wolfgang | Conference Paper |
| 2017 | CMOS-design of a cascadable front-end ASIC for capacitive micromachined ultrasonic transducer (CMUT) arrays
Weder, Andreas; Koch, Sandro; Pietzsch, Marcus; Heinig, Andreas; Kircher, Marco; Lange, Nicolas; Amelung, Jörg | Conference Paper |
| 2017 | CMOS-design of a cascadable front-end ASIC for capacitive micromachined ultrasonic transducer (CMUT) arrays
Weder, Andreas; Koch, Sandro; Pietzsch, Marcus; Heinig, Andreas; Kircher, Marco; Lange, Nicolas; Amelung, Jörg | Presentation |
| 2017 | CMOS-design of a cascadable front-end ASIC for CMUT arrays
Koch, Sandro G.; Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas; Kircher, Marco; Grafe, Mario; Lange, Nicolas; Amelung, Jörg | Presentation |
| 2017 | CMOS-kompatible elektrostatische Biegeaktoren
Conrad, Holger; Gaudet, Matthieu; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Schenk, Harald | Conference Paper |
| 2017 | Concept for a new approach to realize complex optical systems in high volume
Grüger, H.; Knobbe, J.; Pügner, T.; Leuckefeld, M.; Reinig, P.; Meyer, S. | Conference Paper |
| 2017 | Concept for the fast modulation of light in amplitude and phase using analog tilt-mirror arrays
Roth, M.; Heber, J.; Janschek, K. | Conference Paper |
| 2017 | Concept for the fast modulation of light in amplitude and phase using analog tilt-mirror arrays
Roth, Matthias; Heber, Jörg; Janschek, Klaus | Presentation |
| 2017 | A contribution to the expansion of the applicability of electrostatic forces in micro transducers
Schenk, H.; Conrad, H.; Gaudet, M.; Uhlig, S.; Kaiser, B.; Langa, S.; Stolz, M.; Schimmanz, K. | Conference Paper |
| 2017 | Customized BSOI wafers integration of additional interconnects into the handle wafer
Kaden, Christiane; Langa, Sergiu | Presentation |
| 2017 | Customized micro mirror array for highly parallel industrial laser direct processing on the micro- and nanoscale
Schmidt, Jan-Uwe; Dürr, Peter; Wagner, Michael | Conference Paper |
| 2017 | Development of CMOS-compatible materials for thermoelectric and sensor applications in semiconductor industry
Wagner-Reetz, M.; Calvo, J.; Nichenametla, C.K.; Kühnel, K.; Göhler, T.; Schulz, S.; Burkov, A.; Uhlig, B. | Presentation |
| 2017 | Development of MEMS-based capacitive ultrasonic transducers - technology, applications and perspectives for ultrasonic sensing
Kircher, Marco | Presentation |
| 2017 | Development of metal oxide processes for highly conformal thin layers by plasma enhanced atomic layer deposition
Kia, Alireza Mohammadian
: Hiller, Karla (Betreuer); Weinreich, Wenke (Betreuer) | Master Thesis |
| 2017 | Development of transition metal silicides as thinfilm materials for thermoelectric applications
Nichenametla, Charan Krishna
: Wagner-Reetz, Maik; Schulz, Stefan E. | Master Thesis |
| 2017 | Druckvorrichtung zum Drucken einer dreidimensionalen Struktur
Unamuno-Eguren, Anartz; Klemm, Markus | Patent |
| 2017 | Electrically tunable micro-lens with a strain-enhanced polymer nanocomposite actuator
Costache, Florenta; Pawlik, Boscij; Rieck, Andreas | Conference Paper |
| 2017 | Electrochemical characterization of lithium containing thin films
Dorai Swamy Reddy, Keerthi
: Zybell, Sabine (Betreuer); Neumann, Volker (Betreuer); Bartha, Johann Wolfgang (Gutachter); Albert, Matthias (Gutachter) | Master Thesis |
| 2017 | Electrostactically in-plane driven silicon micropump for modular configuration
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald | Conference Paper |
| 2017 | Electrostatic bending actuators with a liquid filled nanometer scale gap
Gaudet, Matthieu; Uhlig, Sebastian; Stolz, Michael; Arscott, Steve; Conrad, Holger; Langa, Sergiu; Kaiser, Bert; Schenk, Harald | Conference Paper |
| 2017 | Elektrooptisch induzierte Wellenleiter in paranematischen Flüssigkeitskristallen
Blasl, Martin
: Schenk, Harald (Gutachter); Seibold, Götz (Gutachter); Schröder, Thomas (Gutachter); Küppers, Franko (Gutachter) | Dissertation |
| 2017 | Enhanced reliability and capacitance stability of ZrO2-based decoupling capacitors by interface doping with Al2O3
Mart, Clemens; Zybell, Sabine; Riedel, Stefan; Czernohorsky, Malte; Seidel, Konrad; Weinreich, Wenke | Journal Article, Conference Paper |
| 2017 | Entwicklung und Simulation einer Kollimator- und Fokusoptik für die optische drahtlose Datenübertragung
Kirrbach, René
: Noack, Alexander (Betreuer); Fischer, Wolf-Joachim (Gutachter); Marschner, Uwe (Gutachter) | Thesis |
| 2017 | Entwicklung von Mechanismen für die unbeaufsichtigte Windows-10-Installation im Fraunhofer IPMS unter Berücksichtigung spezifischer Datenschutzrichtlinien
Keller, Denni
: Richter, Felix (Betreuer); Baumgartl, Robert (Betreuer) | Thesis |
| 2017 | Entwurf und Analyse einer Forward-Error-Correction (FEC) für optische Übertragungssysteme mit Intensitätsmodulation, limitierenden Verstärkern und begrenzten Decoder-Ressourcen
Müller, Franz
: Henker, M. (Betreuer); Faulwaßer, M. (Betreuer) | Master Thesis |
| 2017 | Erarbeitung eines Lösungsvorschlages zur Erstellung einer TestBench mittels der "Universal Vertification Methodology" (UVM)
Miersch, Matthias
: Hildebrandt, Ralf (Betreuer); Fischer, Wolf-Joachim (Gutachter); Marschner, Uwe (Gutachter) | Thesis |
| 2017 | Erarbeitung von Lösungsvorschlägen für integrierte Temperatursensoren in RFID-Transponder
Li, Bo
: Landwehr, Matthias; Fischer, Wolf-Joachim | Thesis |
| 2017 | Erarbeitung von Lösungsvorschlägen zur Optimierung einer vorhandenen UHF-RFID-Frontend-Schaltung
Gottfried, Tobias
: Landwehr, Matthias; Klix, Wilfried | Thesis |
| 2017 | Erhöhte Sicherheit durch RFID-Sensorik für Predictive Maintenance Anwendungen
Weder, A. | Journal Article |
| 2017 | Erhöhung der Zuverlässigkeit von High-k Dielektrika für integrierte hochkapazitive Kondensatoren
Mart, Clemens
: Weber, Jörg (Gutachter); Lakner, Hubert (Gutachter); Weinreich, Wenke (Betreuer) | Master Thesis |
| 2017 | Evaluation of an electrochemical corrosion technique for the determination of static etch rates of post CMP cleaning chemicals
Krause, Robert; Koch, Johannes; Rehschuh, Stephan; Naue, Johannes; Bott, Sascha; Uhlig, Benjamin; Vasilev, Boris | Presentation |
| 2017 | The fabrication of copper-carbon nanotube composites for global interconnects
Nagy, Nicole; Lilienthal, Katharina; Uhlig, Benjamin | Poster |
| 2017 | Ferroelectric HfO2 thin film testing and whole wafer mapping with non-contact corona-Kelvin metrology
Marinskiy, D.; Polakowski, P.; Edelman, P.; Wilson, M.; Lagowski, J.; Metzger, J.; Binder, R.; Müller, J. | Journal Article |
| 2017 | Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2016
| Annual Report |
| 2017 | From machine data to forecast model: How data-driven new maintenance concepts are created for the production
Reichelt, Dirk | Presentation |
| 2017 | Gewitter im Chip - Resistive Speicher für low-power Anwendungen
Seidel, Konrad; Riedel, Stefan; Kalishettyhalli Ma, Mamathamba; Polakowski, Patrick; Müller, Johannes | Conference Paper |
| 2017 | Herstellung und Charakterisierung von LiPON als Feststoffelektrolyt für integrierbare Lithium-Ionen-Batterien auf Siliziumbasis
Krämer, Vincent
: Zybell, Sabine (Betr.); Ingebrandt, Sven (Betr.); Saumer, Monika (Betr.) | Master Thesis |
| 2017 | Herstellung und Messung von elektrischen Teststrukturen zur Untersuchung von Elektromigration in Kupfer-CNT-Kompositen
Makus, Steffen
: Lilienthal, Katharina (Betreuer) | Master Thesis |
| 2017 | High-K metal gate stacks with ultra-thin interfacial layers formed by low temperature microwave-based plasma oxidation
Czernohorsky, M.; Seidel, K.; Kühnel, K.; Niess, J.; Sacher, N.; Kegel, W.; Lerch, W. | Journal Article |
| 2017 | How to analyze food and future requirements for NIR spectroscopy
Reinig, Peter; Grüger, Heinrich; Hintschich, Susanne; Knobbe, Jens; Pügner, Tino | Conference Paper |
| 2017 | How to integrate MEMS on foundry-fabricated CMOS backplanes
Schulze, Matthias; Hohle, Christoph; Friedrichs, Martin | Conference Paper |
| 2017 | Interface traps in 28 nm node field effect transistors detected by capacitance transient spectroscopy
Mchedlidze, T.; Drescher, M.; Erben, E.; Weber, J. | Journal Article |
| 2017 | Josephson effects at iron pnictide superconductors: Approaching phase-sensitive experiments
Schmidt, S.; Döring, S.; Hasan, N.; Schmidl, F.; Tympel, V.; Kurth, F.; Iida, K.; Ikuta, H.; Wolf, T.; Seidel, P. | Journal Article |
| 2017 | Kapazitive mikromechanische Ultraschallsysteme (CMUT) für die zerstörungsfreie Materialcharakterisierung und -überwachung
Koch, Sandro G.; Kircher, Marco; Grafe, Mario | Presentation |
| 2017 | Kapazitive mikromechanische Ultraschallsysteme (CMUT) für die zerstörungsfreie Prüfung und Überwachung
Koch, Sandro G.; Lange, Nicolas; Kircher, Marco; Krenkel, Marcel; Grafe, Mario; Rudloff, Dirk; Amelung, Jörg | Conference Paper |
| 2017 | Kapazitive mikromechanische Ultraschallwandler für die zerstörungsfreie Prüfung und Überwachung
Koch, Sandro G.; Lange, Nicolas; Kircher, Marco; Krenkel, Marcel; Grafe, Mario; Rudloff, Dirk; Amelung, Jörg | Poster |
| 2017 | Lebensmittellabor im Handy. Dem Food Scanner einen Schritt näher
Grüger, Heinrich | Report |
| 2017 | Li-Fi - Optical Wireless Communication
Deicke, Frank | Journal Article |
| 2017 | Li-Fi roadshow trail. For the smart systems hub
Noack, Alexander | Presentation |
| 2017 | MEMS-based ultrasonic sensor systems for applications in fluid environment
Grafe, Mario | Presentation |
| 2017 | MiBot-Einsatz in der Gruppe MESYS
Schimmanz, Klaus | Presentation |
| 2017 | Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner with on-chip piezo-resistive sensor feedback
Schroedter, Richard; Schwarzenberg, Markus; Dreyhaupt, André; Barth, Robert; Sandner, Thilo; Janschek, Klaus | Conference Paper |
| 2017 | Mikrochip mit einer RFID-Transponder-Schaltung und einer ON-Chip-Schlitzantenne
Heiß, Michael | Patent |
| 2017 | Miniature photonic system for next generation food quality authentication
Hintschich, Susanne; Reinig, Peter | Poster |
| 2017 | Miniaturisierte Laserlichtquelle für Infrarotspektroskopie
Merten, A.; Dreyhaupt, A.; Hugger, S.; Butschek, L.; Grahmann, J.; Schwarzenberg, M.; Ostendorf, R.; Jarvis, J.; Härtelt, M. | Conference Paper |
| 2017 | Miniaturized NIR spectrometers - state of the art & recent developments
Reinig, Peter; Knobbe, Jens; Pügner, Tino; Hintschich, Susanne; Meyer, Sebastian; Grüger, Heinrich | Presentation |
| 2017 | Miniaturized sensor for the detection of environmental pollutants
Graf, Alexander; Stübner, Ronald; Kunath, Christian; Meyer, Sebastian; Schenk, Harald | Conference Paper |
| 2017 | Miniaturized sensor for the detection of environmental pollutants
Graf, Alexander; Stübner, Ronald; Kunath, Christian; Meyer, Sebastian; Schenk, Harald | Poster |
| 2017 | Modeling the effects of lanthanum, nitrogen, and fluorine treatments of Si-SiON-HfO2-TiN gate stacks in 28 nm high-k-metal gate technology
Leitsmann, R.; Lazarevic, F.; Drescher, M.; Erben, E. | Journal Article |
| 2017 | Modellierung und Simulation des Chemisch-mechanischen Planarisierens unter besonderer Berücksichtigung langreichweitiger Wechselwirkungen auf der Chipskala
Bott, Sascha
: Gerlach, G.; Bartha, J.W.; Heitmann, J. | Dissertation |
| 2017 | Morphology-driven control of metabolite selectivity using nanostructure-initiator mass spectrometry
Gao, Jian; Louie, Katherine B.; Steinke, Philipp; Bowen, Benjamin P.; Raad, Markus de; Zuckermann, Ronald N.; Siuzdak, Gary; Northen, Trent R. | Journal Article |
| 2017 | Nano-powerplant for on-chip autonomous systems
Weinreich, Wenke | Presentation |
| 2017 | Nitrogen Engineering in the Ultrathin SiO2 Interface Layer of High- k CMOS Devices: A First-Principles Investigation of Fluorine, Oxygen, and Boron Defect Migration
Lazarevic, F.; Leitsmann, R.; Drescher, M.; Erben, E.; Plänitz, P.; Schreiber, M. | Journal Article |
| 2017 | A novel electrostatic actuator technology for integrated RF MEMS and optical switches
Shashank; Conrad, Holger; Gaudet, Matthieu; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald | Poster |
| 2017 | Novel ferroelectric FET based synapse for neuromorphic systems
Mulaosmanovic, H.; Ocker, J.; Müller, S.; Noack, M.; Müller, J.; Polakowski, P.; Mikolajick, T.; Slesazeck, S. | Conference Paper |
| 2017 | Novel TSV metallization and simplified ECD processes for ultra-large scale integration (ULSI) technology
Esmaeili Dehkalani, M. Sajjad
: Lilienthal, Katharina (Betreuer); Adelung, Rainer (Betreuer) | Master Thesis |
| 2017 | Numerische Optimierung von Mikroaktoren
Schuffenhauer, David
: Gaudet, Matthieu (Betreuer); Schenk, Harald (Betreuer) | Master Thesis |
| 2017 | PEALD and pulsed CVD of Cobalt thin films using the precursor cyclopentadienylcobalt dicarbonyl
Hossbach, Christoph; Shukla, Shashank; Fischer, Dustin; Reif, Johanna; Bönhardt, Sascha; Geidel, Marion; Albert, Matthias; Bartha, Johann W. | Poster |
| 2017 | A photonic smart system for food quality and safety sensing: First integration and measurement results
Bertani, Francesca Romana; Bourgos, Paraskevas; Businaro, Luca; Gambacorta, Lucia; Gerardino, Annamaria; Hintschich, Susanne; Koutalieris, Georgios; Logothesis, Marios; Martinelli, Eugenio; Nychas, George John; Solfrizzo, Michele; Tosic, Milenko; Wunder, Gerhard | Poster |
| 2017 | Properties of ALD ferroelectric Si-doped HfO2 characterized with noncontact Corona-Kelvin metrology
Polakowski, Patrick; Müller, Johannes; Marinskiy, Dmitriy; Findlay, Andrew; Edelman, Piotr; Wilson, Marshall; Lagowski, Jacek; Metzger, Joachim; Binder, Robert | Presentation |
| 2017 | PVD and ALD process development of advanced oxide-based RRAM-stacks
Kalishetthyhalli Mahadevaiah, Mamathamba
: Müller, Johannes (Gutachter); Lakner, Hubert (Gutachter); Fischer, Wolf-Joachim (Gutachter) | Master Thesis |
| 2017 | Real-time spectroscopy enabled by external cavity QCLs with MOEMS diffraction gratings
Butschek, Lorenz; Hugger, Stefan; Jarvis, Jan-Philip; Härtelt, Marko; Merten, André; Grahmann, Jan; Boskovic, Dusan; Fuchs, Frank; Ostendorf, Ralf; Schilling, Christian; Rattunde, Marcel; Wagner, Joachim | Conference Paper |
| 2017 | Regelung nicht-resonanter Mikrospiegel mit elektrostatischem Kammantrieb
Schroedter, Richard; Janschek, Klaus | Presentation |
| 2017 | Reliability improvements of TiN/Al2O3/TiN for linear high voltage metal-insulator-metal capacitors using an optimized thermal treatment
Lefevre, A.; Ferreira, D.; Veillerot, M.; Barnes, J.-P.; Parat, G.; Czernohorsky, M.; Lallemand, F. | Journal Article |
| 2017 | Repetitive flachheitsbasierte Folgeregelung von quasi-statischen Mikroscannern
Schroedter, Richard; Che, Xingqi; Roth, Matthias; Sandner, Thilo; Janschek, Klaus | Conference Paper |
| 2017 | Repetitive flachheitsbasierte Folgeregelung von quasi-statischen Mikroscannern
Schroedter, Richard; Che, Xingqi; Roth, Matthias; Sandner, Thilo; Janschek, Klaus | Poster |
| 2017 | RFID meets OPC-UA - transparent and secure integration of sensor nodes into industrial and cloud environments
Weder, Andreas; Grätz, Hagen; Voß, Kim; Deicke, Frank; Reichelt, Dirk | Conference Paper |
| 2017 | RFID-Sensoren für das Internet der Dinge
Deicke, Frank | Journal Article |
| 2017 | Seed-layer resistance and its impact on the electrochemical copper deposition
Wislicenus, Marcus; Gerlich, Lukas; Koch, Johannes; Uhlig, Benjamin | Presentation |
| 2017 | Sicherheitsmerkmal, Verfahren zum Herstellen eines Sicherheitsmerkmals und Verfahren zum Authentifizieren eines Benutzers unter Verwendung eines Sicherheitsmerkmals
Reinig, Peter; Knobbe, Jens; Hohle, Christoph | Patent |
| 2017 | Silicon-doped hafnium oxide anti-ferroelectric thin films for energy storage
Ali, F.; Liu, X.; Zhou, D.; Yang, X.; Xu, J.; Schenk, T.; Müller, J.; Schroeder, U.; Cao, F.; Dong, X. | Journal Article |
| 2017 | Smart hip prosthesis - an overview
Deicke, Frank | Presentation |
| 2017 | Spatially aware connectivity for wearables using Li-Fi technology
Noack, Alexander | Presentation |
| 2017 | A survey of carbon nanotube interconnects for energy efficient integrated circuits
Todri-Sanial, A.; Ramos, R.; Okuno, H.; Dijon, J.; Dhavamani, A.; Wislicenus, M.; Lilienthal, K.; Uhlig, B.; Sadi, T.; Georgiev, V.; Asenov, A.; Amoroso, S.; Pender, A.; Brown, A.; Millar, C.; Motzfeld, F.; Gotsmann, B.; Liang, J.; Goncalves, G.; Rupesinghe, N.; Teo, K. | Journal Article |
| 2017 | Switching kinetics in nanoscale hafnium oxide based ferroelectric field-effect transistors
Mulaosmanovic, Halid; Ocker, Johannes; Müller, Stefan; Schroeder, Uwe; Müller, Johannes; Polakowski, Patrick; Flachowsky, Stefan; Bentum, Ralf van; Mikolajick, Thomas; Slesazeck, Stefan | Journal Article |
| 2017 | Technological aspects of a new micro‑electro‑mechanical actuation principle: Nano‑e‑drive
Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Gaudet, Matthieu; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald | Journal Article |
| 2017 | Tragbare Vorrichtung zur Übermittlung von personenbezogenen Daten an ein Verarbeitungssystem und das Verarbeitungssystem zum Ausgeben eines Steuersignals in Abhängigkeit der personenbezogenen Daten
Amelung, Jörg; Grüger, Heinrich | Patent |
| 2017 | Trench filling with a-Si using a PE-CVD process and back etch sequence
Elsäßer, Linus; Naumann, A. | Conference Paper |
| 2017 | A user-friendly guide to the optimum ultraviolet photolithographic exposure and greyscale dose of SU-8 photoresist on common MEMS, microsystems, and microelectronics coatings and materials
Gaudet, Matthieu; Arscott, Steve | Journal Article |
| 2017 | Valence EELS below the limit of inelastic delocalization using conical dark field EFTEM or Bessel beams
Stöger-Pollach, M.; Schachinger, T.; Biedermann, K.; Beyer, V. | Journal Article |
| 2017 | Vorrichtung und Verfahren zur Erzeugung eines optischen Musters aus Bildpunkten in einer Bildebene
Dürr, Peter; Mai, Alexander | Patent |
| 2017 | Wireless industrial real-time networks with Li-Fi
Faulwaßer, Michael; Noack, Alexander; Ostermann, Robert; Schneider, Tobias; Zschorn, Christopher | Conference Paper |
| 2016 | A 28nm HKMG super low power embedded NVM technology based on ferroelectric FETs
Trentzsch, M.; Flachowsky, S.; Richter, R.; Paul, J.; Reimer, B.; Utess, D.; Jansen, S.; Mulaosmanovic, H.; Müller, S.; Slesazeck, S.; Ocker, J.; Noack, M.; Müller, J.; Polakowski, P.; Schreiter, J.; Beyer, S.; Mikolajick, T.; Rice, B. | Conference Paper |
| 2016 | Adaptives Prothesensystem - Entwicklung eines Prothesensystems zur Optimierung und adaptiven Anpassung der ossären Verankerung von Gelenkendoprothesen
Rotsch, Christian; Grätz, Hagen; Kluess, Daniel; Gille, Katarina; Heinig, Andreas; Schulze, Christian; Bader, Rainer; Hunger, Sandra; Töppel, Thomas; Drossel, Welf-Guntram | Conference Paper |
| 2016 | Antenna design for a 24 GHz RFID tag with an on-chip-antenna
Heiss, Michael; Lischer, Sascha | Poster |
| 2016 | Atomic layer deposition system for fast precursor screening
Shukla, Shashank; Hossbach, Christoph; Sundqvist, Jonas; Bönhardt, Sascha; Feddersen-Clausen, Oliver; Sharma, Varun; Albert, Matthias; Bartha, Johann W. | Poster |
| 2016 | Aufbau und Inbetriebnahme eines Messplatzes für die Charakterisierung von gegeneinander rotierenden optisch-drahtlosen Transceiver-Modulen
Kunz, Julian Elias
: Noack, Alexander (Betr.); Ostermann, Robert (Betr.); Fischer, Wolf-Joachim (Betr.) | Thesis |
| 2016 | Back-end-of-line integration technology of capacitive micromachined ultrasonic transducers (CMUT)
Amelung, Jörg; Klemm, Markus; Elsäßer, Linus; Kircher, Marco; Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas; Müller, Michael; Grüger, Heinrich | Conference Paper |
| 2016 | Back-End-of-Line integration technology of capacitive micromachined ultrasonic transducers (CMUT)
Koch, Sandro; Amelung, Jörg; Elsäßer, Linus; Kircher, Marco; Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas; Müller, Michael | Presentation |
| 2016 | Capacitance transient spectroscopy measurements on high-k metal gate field effect transistors fabricated using 28nm technology node
Mchedlidze, T.; Drescher, M.; Erben, E.; Weber, J. | Conference Paper |
| 2016 | Carbon-hydrogen complexes in n- and p-type SiGe-alloys studied by Laplace deep level transient spectroscopy
Stübner, Ronald; Kolkovsky, Vladimir; Weber, Jörg; Abrosimov, N.V. | Conference Paper |
| 2016 | Catalytic ALD of SiO2 as spacer for an E-Beam direct write self-aligned double patterning process on 300 mm wafers
Kühnel, Kati; Riedel, Stefan; Weinreich, Wenke; Thrun, Xaver; Czernohorsky, Malte; Pätzold, Björn; Rudolph, Matthias | Presentation |
| 2016 | Characterization of low temperature plasma generated oxides on germanium based substrates
Poduval, Geedhika Kallidil
: Czernohorsky, Malte (Betreuer); Lakner, Hubert (Gutachter); Fischer, Wolf-Joachim (Gutachter) | Master Thesis |
| 2016 | Charge-trapping phenomena in HfO2-based FeFET-type nonvolatile memories
Yurchuk, Ekaterina; Müller, Johannes; Müller, Stefan; Paul, Jan; Pesic, Milan; Benthum, Ralf van; Schroeder, Uwe; Mikolajick, Thomas | Journal Article |
| 2016 | Correlation between the macroscopic ferroelectric material properties of Si:HfO2 and the statistics of 28nm FeFET memory arrays
Mueller, S.; Slesazeck, S.; Henker, S.; Flachowsky, S.; Polakowski, P.; Paul, J.; Smith, E.; Müller, J.; Mikolajick, T. | Journal Article, Conference Paper |
| 2016 | CVD-CoXN for advanced semiconductor metallization
Dhavamani, Abitha; Wislicenus, Marcus; Gerlich, Lukas; Uhlig, Benjamin | Presentation |
| 2016 | Development and electrical characterization of a metal-ferroelectric-insulator semiconductor FET test structure
Ali, Tarek
: Müller, Johannes (Betreuer); Lakner, Hubert (Betreuer); Heyns, Marc | Master Thesis |
| 2016 | Enhanced dielectric properties of thin Ta2O5 films grown on 65 nm SiO2/Si
Kolkovsky, V.; Kurth, E.; Kunath, C. | Journal Article, Conference Paper |
| 2016 | Evaluation of water based intelligent fluids for resist stripping in single wafer cleaning tools
Rudolph, Matthias; Esche, Silvio; Hohle, Christoph; Schumann, Dirk; Steinke, Philipp; Thrun, Xaver; Sonntag, Justus von | Conference Paper |
| 2016 | Experimentalaufbau zur Messung vertikaler Oberflächen von mikromechanischen Aktoren am DHM
Lemcke, Klaus Benjamin | Bachelor Thesis |
| 2016 | Experimentelle Untersuchungen an lateralen elektrostatischen Nanoaktoren
Stolz, Michael
: Schenk, Harald (Betr.); Seibold, Götz (Betr.) | Master Thesis |
| 2016 | Eye safety analysis for non-uniform retinal scanning laser trajectories
Schelinski, Uwe; Dallmann, Hans-Georg; Grüger, Heinrich; Knobbe, Jens; Pügner, Tino; Reinig, Peter; Woittennek, Franziska | Conference Paper |
| 2016 | Fabrication and characterization of a novel electrostatic actuator
Gaudet, Matthieu | Presentation |
| 2016 | FAST LIGHT: Möglichkeiten der Li-Fi Kommunikation aus technischer Sicht
Noack, Alexander | Presentation |
| 2016 | Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2015
| Annual Report |
| 2016 | Geometric and chemical components of the giant piezoresistance in silicon nanowires
McClarty, M.M.; Jegenyes, N.; Gaudet, M.; Toccafondi, C.; Ossikovski, R.; Vaurette, F.; Arscott, S.; Rowe, A.C.H. | Journal Article |
| 2016 | Hardware-Software-System zum ambulanten EKG-Monitoring unter Routinebedingungen
Noack, Alexander | Dissertation |
| 2016 | HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias | Poster |
| 2016 | HF-release of sacrificial layers in CMOS-integrated MOEMS structures
Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias | Journal Article, Conference Paper |
| 2016 | High endurance strategies for hafnium oxide based ferroelectric field effect transistor
Müller, J.; Polakowski, P.; Müller, S.; Mulaosmanovic, H.; Ocker, J.; Mikolajick, T.; Slesazeck, S.; Flachowsky, S.; Trentzsch, T. | Conference Paper |
| 2016 | Hyperspectral image analysis for standoff trace detection using IR laser spectroscopy
Jarvis, J.P.; Fuchs, F.; Hugger, S.; Ostendorf, R.; Butschek, L.; Yang, Q.; Dreyhaupt, A.; Grahmann, J.; Wagner, J. | Conference Paper |
| 2016 | Identification of carbon-hydrogen complexes in n- and p-type silicon
Stübner, Ronald; Kolkovsky, Vladimir; Scheffler, Leopold; Weber, Jörg | Journal Article, Conference Paper |
| 2016 | Impact of field cycling on HfO2 based non-volatile memory devices
Schroeder, U.; Pesic, M.; Schenk, T.; Mulaosmanovic, H.; Slesazeck, S.; Ocker, J.; Richter, C.; Yurchuk, E.; Khullar, K.; Müller, J.; Polakowski, P.; Grimley, E.D.; LeBeau, J.M.; Flachowsky, S.; Jansen, S.; Kolodinski, S.; Bentum, R. van; Kersch, A.; Künneth, C.; Mikolajick, T. | Conference Paper |
| 2016 | Implementation und Konfiguration eines Linux-Systems auf ein Xilinx Zynq-SoC-System
Lehl, Dmitrij
: Grafe, Mario (Betreuer); Schönherr, J. (Betreuer) | Thesis |
| 2016 | In situ bow change of Al-alloy MEMS micromirrors during 248-nm laser irradiation
Mai, Alexander; Bunce, Christopher; Hübner, René; Pahner, Daniel; Dauderstädt, Ulrike | Journal Article |
| 2016 | The influence of adsorption kinetics on copper superfilling for dual damascene
Liske, Romy; Krause, Robert; Uhlig, Benjamin; Gerlich, Lukas; Bott, Sascha; Wislicenus, Marcus; Preusse, Axel | Journal Article |
| 2016 | Influence of annealing in H atmosphere on the electrical properties of Al2O3 layers grown on p-type Si by the atomic layer deposition technique
Kolkovsky, V.; Stübner, R.; Langa, S.; Wende, U.; Kaiser, B.; Conrad, H.; Schenk, H. | Journal Article |
| 2016 | Influence of the applied charge on the electro-chemical degradation in green phosphorescent organic light emitting diodes
de Moraes, I.R.; Scholz, S.; Leo, K. | Journal Article |
| 2016 | Innovative Energieoptimierung. Forschungsprojekt soll Energiemanagement revolutionieren
Hörschelmann, L.; Reichelt, D. | Journal Article |
| 2016 | Integration von Maschinendaten in eine Big-Data-Lösung am Beispiel von Halbleiter-Frontendtools
Schmidt, Martin
: Reichelt, Dirk (Betreuer); Gehrhardt, Ingolf (Betreuer) | Master Thesis |
| 2016 | Der intelligente Mobilitätsassistent - Unterstützung der autonomen Mobilität älterer Menschen
Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas | Presentation |
| 2016 | Investigation of the influence of the sample topography on the measurement uncertainty of a scanning white light interferometer
Adapa, Bharath Reddy
: Skupsch, Christoph (Betr.); Lemmer, Uli (Betr.) | Master Thesis |
| 2016 | IoT Future: Visible Light Communication/Light Fidelity
Noack, Alexander | Presentation |
| 2016 | La-doped ZrO2 based Back End of Line (BEoL) decoupling capacitors
Weinreich, Wenke; Seidel, Konrad; Polakowski, Patrick; Drescher, Maximilian; Gummenscheimer, A.; Nolan, M.G.; Cheng, L.; Triyoso, D.H. | Poster |
| 2016 | La-doped ZrO2 based BEoL decoupling capacitors
Weinreich, W.; Seidel, K.; Polakowski, P.; Drescher, M.; Gummenscheimer, A.; Nolan, M.G.; Cheng, L.; Triyoso, D.H. | Conference Paper |
| 2016 | Laser-induced periodic surface structures of thin, complex multi-component films
Reif, J.; Varlamova, O.; Ratzke, M.; Uhlig, S. | Journal Article |
| 2016 | Li-Fi communication for industrial real-time data links
Faulwaßer, Michael | Presentation |
| 2016 | Li-Fi interconnects for embedded designs in industry 4.0
Faulwaßer, Michael; Deicke, Frank; Ostermann, Robert; Schneider, Tobias | Conference Paper |
| 2016 | Licht - eine Alternative zu Funk?
Deicke, Frank; Faulwaßer, Michael | Journal Article |
| 2016 | Lichtausbreitung in einstellbaren Mikroringresonatoren
Martin, Anja
: Costache, Florenta (Betr.); Hartmann, Peter (Betr.) | Master Thesis |
| 2016 | Liquid crystal waveguide switch for fast fiber optic sensor monitoring
Blasl, M.; Costache, F. | Conference Paper |
| 2016 | Lithographische Techniken für die hochauflösende Zell-Mikroskopie: Strahlformung in der Biologie mit strukturierten UV-Schichten
Heber, Jörg; Rückerl, F.; Berndt, Dirk; Schmidt, Jan; Bellow, S.; Tivenez, J.-Y.; Knobbe, Jens; Shorte, S.L.; Wagner, Michael | Presentation |
| 2016 | Low-temperature microwave-based plasma oxidation of Ge and oxidation of silicon followed by plasma nitridation
Lerch, W.; Schick, T.; Sacher, N.; Kegel, W.; Niess, J.; Czernohorsky, M.; Riedel, S. | Conference Paper |
| 2016 | LPCVD in-situ doped silicon for thermoelectric applications
Calvo, J.; Müller, M.; Sauer, B.; Drescher, M.; Schmidt, C.; Völklein, F.; Wagner-Reetz, M. | Presentation |
| 2016 | MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies
Grahmann, Jan; Dreyhaupt, André; Drabe, Christian; Schroedter, Richard; Kamenz, Jörg; Sandner, Thilo | Conference Paper |
| 2016 | MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben
Schenk, Harald; Conrad, Holger; Gaudet, Matthieu; Schimmanz, Klaus; Langa, Sergiu | Patent |
| 2016 | Micro scanning mirrors and enabling technology for applied optics
Sandner, Thilo | Conference Paper |
| 2016 | Migration from CAN to CAN FD - how to boost network performance
Hildebrandt, Ralf; Deicke, Frank | Conference Paper |
| 2016 | Mikromechanische Vorrichtung mit einem aktiv biegbaren Element
Gaudet, Matthieu; Schimmanz, Klaus; Stolz, Michael; Langa, Sergiu; Kaiser, Bert | Patent |
| 2016 | Miniaturized NIR scanning grating spectrometer for use in mobile phones
Knobbe, Jens; Pügner, Tino; Grüger, Heinrich | Conference Paper |
| 2016 | Mobilitätsassistent "MOVEAS" - Unterstützung der Mobilität älterer Menschen
Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas | Presentation |
| 2016 | MOEMS based scanning grating facilitates miniaturization and tuning speed enhancement of an EC-QCL towards a µEC-QCL for real time spectroscopic sensing
Grahmann, Jan | Conference Paper |
| 2016 | Near-infrared grating spectrometer for mobile phone applications
Pügner, T.; Knobbe, J.; Grüger, H. | Journal Article |
| 2016 | Novel applications of photonic micro sensor systems: Real-world examples from plastics recycling to burglary monitoring
Reinig, Peter | Presentation |
| 2016 | A novel electrostatic actuator class
Conrad, Holger; Kaiser, Bert; Gaudet, Matthieu; Langa, Sergiu; Stolz, Michael; Uhlig, Sebastian; Schimmanz, Klaus; Schenk, Harald | Journal Article, Conference Paper |
| 2016 | A novel electrostatic micro-actuator class and its application potential for optical MEMS
Schenk, Harald; Conrad, Holger; Gaudet, Matthieu; Uhlig, Sebastian; Kaiser, Bert; Langa, Sergiu; Stolz, Michael; Schimmanz, Klaus | Conference Paper |
| 2016 | Patterning and Imaging with Electrons: Assessing Multi-Beam SEM for e-Beam Structured CMOS Samples
Garbowski, Tomasz; Panteleit, Friedhelm; Dellemann, Gregor; Gutsch, Manuela; Hohle, Christoph; Reich, Elke; Rudolph, Matthias; Steidel, Katja; Thrun, Xaver; Zeidler, Dirk | Conference Paper |
| 2016 | Plano-convex variable focal length micro-lens with a polymer nanocomposite actuator
Pawlik, Boscij; Rieck, Andreas; Costache, Florenta | Journal Article, Conference Paper |
| 2016 | Predictive Maintenance mittels Big Data
Reichelt, Dirk | Presentation |
| 2016 | Prozessanalyse der Tetramethylammoniumhydroxid-Ätzung von Silizium zur Qualitätsverbesserung optischer Gitter
Benter, Sandra
: Schnabel, Hans-Dieter (Betr.); Kaden, Christiane (Betr.) | Bachelor Thesis |
| 2016 | Raman tensor elements of β-Ga2O3
Kranert, C.; Sturm, C.; Schmidt-Grund, R.; Grundmann, M. | Journal Article |
| 2016 | Reaktives Ionenätzen zur Mehrfachstrukturierung und Elektrodentrennung für Kondensatoranwendungen in der Halbleiterindustrie
Pätzold, Björn
: Hohle, Christoph; Rudolph, Matthias; Rennekamp, Reinhold | Master Thesis |
| 2016 | Real-time closed-loop control for micro mirrors with quasistatic comb drives
Schroedter, Richard; Sandner, Thilo; Janschek, Klaus; Roth, Matthias; Hruschka, Clemens | Conference Paper |
| 2016 | Recent advances and applications of external Cavity-QCLs towards hyperspectral imaging for standoff detection and real-time spectroscopic sensing of chemicals
Ostendorf, R.; Butschek, L.; Hugger, S.; Fuchs, F.; Yang, Q.; Jarvis, J.; Schilling, C.; Rattunde, M.; Merten, A.; Grahmann, J.; Boskovic, D.; Tybussek, T.; Rieblinger, K.; Wagner, J. | Journal Article |
| 2016 | Requirements and challenges for MEMS on CMOS
Schulze, Matthias | Presentation |
| 2016 | RF simulation of the transmission path of a RFID backscatter transponder between reader and transponder antenna with ANSYS HFSS
Zhai, Wenqian
: Fischer, Wolf-Joachim (Betreuer); Heiß, Michael (Betreuer) | Master Thesis |
| 2016 | RFID meets OPC UA - wie man mittels Standardisierung Integrations-Aufwand verringert
Reichelt, Dirk | Presentation |
| 2016 | RFID-Sensor Transponder - "smarte" Integration mittels OPC-UA
Weder, Andreas; Reichelt, Dirk | Presentation |
| 2016 | RFID-Transponder mit einer integrierten Antennenanordnung
Heiß, Michael | Patent |
| 2016 | RTLS based services by APP based indoor localization and navigation
Scheibner, Christian; Voß, Kim | Presentation |
| 2016 | Scanning optical MEMS with very high frequencies
Drabe, Christian; Graßhoff, Thomas; Todt, Ulrich; Flemming, André; Sandner, Thilo; Grahmann, Jan | Presentation |
| 2016 | Schallwandlerarray mit gekoppelten Wandlern
Klemm, Markus; Elsäßer, Linus; Unamuno-Eguren, Anartz; Kupnik, Mario; Unger, Alexander | Patent |
| 2016 | Simulation und Charakterisierung eines neuartigen mikromechanischen elektrostatischen Aktors
Kaiser, Bert
: Schenk, Harald (Betreuer); Bestehorn, Michael (Betreuer); Kupnik, Mario (Betreuer) | Dissertation |
| 2016 | Size reduction of RFID tags by using an on-chip antenna
Heiß, Michael; Lischer, Sascha | Conference Paper |
| 2016 | Smart walls with wireless humidity measurement
Heiß, Michael; Hildebrandt, Ralf; Scheibner, Christian | Conference Paper |
| 2016 | Spatially resolved scatter measurement of diffractive micromirror arrays
Sicker, Cornelius; Heber, Jörg; Berndt, Dirk | Journal Article |
| 2016 | Spatio-angular illumination control using diffractive micromirror arrays
Heber, Jörg; Rückerl, Florian; Berndt, Dirk; Schmidt, Jan; Bellow, Sebastien; Tinevez, Jean-Yves; Knobbe, Jens; Shorte, Spencer; Wagner, Michael | Conference Paper |
| 2016 | Status of ferroelectric HfO2 based 1T FeFET memories
Mikolajick, T.; Schroeder, U.; Slesazeck, S.; Müller, S.; Schenk, T.; Müller, J. | Presentation |
| 2016 | System design of programmable 4f phase modulation techniques for rapid intensity shaping - a conceptual comparison
Roth, Matthias; Heber, Jörg; Janschek, Klaus | Conference Paper |
| 2016 | A thermally robust and thickness independent ferroelectric phase in laminated hafnium zirconium oxide
Riedel, S.; Polakowski, P.; Müller, J. | Journal Article |
| 2016 | Track & trace scenarios to increase shop floor flexibility and productivity
Reichelt, Dirk | Presentation |
| 2015 | A 24 GHz RFID system-on-a-chip with on-chip antenna, compatible to ISO 18000-6C / EPC C1G2
Lischer, Sascha; Heiß, Michael; Landwehr, Matthias; Fischer, Wolf-Joachim | Conference Paper |
| 2015 | About stress in filled DRIE-trenches
Kaiser, Bert; Drabe, Christian; Graßhoff, Thomas; Conrad, Holger; Schenk, Harald; Grahmann, Jan | Journal Article |
| 2015 | Advanced Wet-Etch-Only Process for Complete Tri-Layer Rework
Steinke, Philipp; Calvo, Jesús; Uhlig, Benjamin | Journal Article, Conference Paper |
| 2015 | All-reflective optical power zoom objectives
Grüger, Heinrich | Conference Paper |
| 2015 | Alternative ULK integration approach using a sacrificial layer in a standard dual damascene flow
Uhlig, B.; Calvo, J.; Koch, J.; Thrun, X.; Liske, R. | Conference Paper |
| 2015 | Analyses of boundary conditions for process integration of sensor elements in complex fibre-reinforced thermoplastic spacer structures
Möbius, T.; Krahl, M.; Helwig, M.; Adam, F.; Modler, N.; Starke, E.; Sauer, S.; Fischer, W.J. | Conference Paper |
| 2015 | Ansteuerung eines MEMS-basierten Laserprojektionssystems mittels einer Xilinx Zynq-SoC Plattform
Nibio, Vincent
: Grafe, Mario (Betreuer) | Master Thesis |
| 2015 | Antennenentwurf für Radio-Frequency Identification (RFID)-Sensor-Transponder
Heiß, Michael | Dissertation |
| 2015 | Characterisation of environmental influences on a new class of nano-actuators
Gerntrup, Marie-Louise
: Conrad, Holger (Betreuer) | Bachelor Thesis |
| 2015 | Co-evaporant induced crystallization of zinc phthalocyanine: C60 blends for solar cells
Holzmueller, Felix; Wilde, Lutz; Wölzl, Florian; Koerner, Christian; Vandewal, Koen; Leo, Karl | Journal Article |
| 2015 | Cobalt advanced barrier metallization: A resistivity composition analysis
Wislicenus, M.; Liske, R.; Gerlich, L.; Vasilev, B.; Preusse, A. | Journal Article, Conference Paper |
| 2015 | Degradation mechanisms and reactions in organic light-emitting devices
Scholz, Sebastian; Kondakov, Denis; Lüssem, Björn; Leo, Karl | Journal Article |
| 2015 | Development and characterization of a novel CoXN barrier film for future semiconductor technology nodes
Dhavamani, Abitha
: Uhlig, Benjamin (Betr.); Bartha, Johann Wolfgang (Gutachter) | Master Thesis |
| 2015 | Development of a MEMS-based confocal laser scanning microscope for fluorescence imaging
Bechtel, Christin | Dissertation |
| 2015 | Electric field and temperature scaling of polarization reversal in silicon doped hafnium oxide ferroelectric thin films
Zhou, D.Y.; Guan, Y.; Vopson, M.M.; Xu, J.; Liang, H.L.; Cao, F.; Dong, X.L.; Mueller, J.; Schenk, T.; Schroeder, U. | Journal Article |
| 2015 | Entwicklung eines hybrid-integrierten Gitterspektrometers basierend auf einem mikro-opto-elektro-mechanischen Bauelement
Pügner, Tino | Dissertation |
| 2015 | Entwicklung eines miniaturisierten Ionenfilters und Detektors für die potentielle Anwendung in Ionenmobilitätsspektrometern
Graf, Alexander | Dissertation |
| 2015 | Entwicklung eines Systems und Optimierung von Treibersignalen zur Ansteuerung von Kapazitiven Mikromechanischen Ultraschallwandlern (CMUT)
Söberdt, Toni
: Budzier, Helmut (Betreuer); Klemm, Markus (Betreuer) | Thesis |
| 2015 | Entwicklung von chipangepassten RFID-Transponder-Antennen
Reum, Thomas
: Michelfeit, Reinhold (Betr.); Heiß, Michael (Betr.) | Bachelor Thesis |
| 2015 | Entwurf einer Mehrgrößenregelung zur hochdynamischen und präzisen zweidimensionalen Positionierung eines mikromechanischen Vektorscanners
Volkmann, Stefan
: Sandner, Thilo (Betreuer); Janschek, Klaus (Betreuer) | Thesis |
| 2015 | Evidence of single domain switching in hafnium oxide based FeFETs: Enabler for multi-level FeFET memory cells
Mulaosmanovic, H.; Slesazeck, S.; Ocker, J.; Pesic, M.; Müller, S.; Flachowsky, S.; Müller, J.; Polakowski, J.; Paul, J.; Jansen, S.; Kolodinski, S.; Richter, C.; Piontek, S.; Schenk, T.; Kersch, A.; Künneth, C.; Bentum, R. van; Schröder, U.; Mikolajick, T. | Conference Paper |
| 2015 | Ferroelectric hafnium oxide based materials and devices: Assessment of current status and future prospects
Müller, J.; Polakowski, P.; Mueller, S.; Mikolajick, T. | Journal Article |
| 2015 | Ferroelectricity and antiferroelectricity of doped thin HfO2-based films
Park, M.H.; Lee, Y.H.; Kim, H.J.; Kim, Y.J.; Moon, T.; Do Kim, K.; Müller, J.; Kersch, A.; Schroeder, U.; Mikolajick, T.; Hwang, C.S. | Journal Article |
| 2015 | Ferroelectricity in undoped hafnium oxide
Polakowski, P.; Müller, J. | Journal Article |
| 2015 | Ferroelektrizität in Hafniumdioxid und deren Anwendung in nicht-flüchtigen Halbleiterspeichern
Müller, Johannes | Dissertation |
| 2015 | Fluorine interface treatments within the gate stack for defect passivation in 28 nm high-k metal gate technology
Drescher, M.; Naumann, A.; Sundqvist, J.; Erben, E.; Grass, C.; Trentzsch, M.; Lazarevic, F.; Leitsmann, R.; Plaenitz, P. | Journal Article |
| 2015 | Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2014
| Annual Report |
| 2015 | Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera
Sandner, T.; Baulig, C.; Grasshoff, T.; Wildenhain, M.; Schwarzenberg, M.; Dahlmann, H.-G.; Schwarzer, S. | Conference Paper |
| 2015 | Impact of temperature on the efficiency of organic light emitting diodes
Moraes, I.R. de; Scholz, S.; Hermenau, M.; Tietze, M.L.; Schwab, T.; Hofmann, S.; Gather, M.C.; Leo, K. | Journal Article |
| 2015 | Improved electrical behavior of ZrO2-based MIM structures by optimizing the O3 oxidation pulse time
Paskaleva, A.; Weinreich, W.; Bauer, A.J.; Lemberger, M.; Frey, L. | Journal Article |
| 2015 | Integration challenges of ferroelectric hafnium oxide based embedded memory (Invited)
Müller, Johannes; Polakowski, Patrick; Paul, Jan; Riedel, Stefan; Hoffmann, Raik; Drescher, Maximilian; Slesazeck, Stefan; Müller, Stefan; Mulaosmanovic, Halid; Schröder, Uwe; Mikolajick, Thomas; Flachowsky, Stefan; Erben, Elke; Smith, Elliot; Binder, Robert; Triyoso, Dina H.; Metzger, Joachim; Kolodinski, Sabine | Conference Paper |
| 2015 | Investigation of the reliability degradation of scaled SONOS memory transistors
Ocker, J.; Slesazeck, S.; Hoffmann, R.; Beyer, V.; Skouris, A.; Srowik, R.; Buschbeck, S.; Günther, S.; Mikolajick, T. | Conference Paper |
| 2015 | Ein ISO 18000-6C / EPC C1G2 kompatibles 24-GHz-RFID-Ein-Chip-System mit integrierter Antenne
Lischer, Sascha; Heiß, Michael | Conference Paper |
| 2015 | Konzeption eines High-Density-Interconnect (HDI) Verdrahtungsträgers zur hochparallelen Signalübertragung und dessen Optimierung anhand von Simulationen
Müller, Franz
: Torlee, Hannes (Betr.); Binner, A. (Betr.); Michalke, N. (Betr.) | Thesis |
| 2015 | Low temperature deposition of silicon nitride using Si3Cl8
Riedel, S.; Sundqvist, J.; Gumprecht, T. | Journal Article |
| 2015 | MEMS scanner mirror based system for retina scanning and in eye projection
Woittennek, F.; Knobbe, J.; Pügner, T.; Dallmann, H.G.; Schelinski, U.; Grüger, H. | Conference Paper |
| 2015 | Mikroelektromechanisches System zum Durchstimmen von Lasern
Schenk, Harald; Grahmann, Jan; Wagner, Joachim; Ostendorf, Ralf; Rattunde, Marcel | Patent |
| 2015 | Modellgestützte flachheitsbasierte Folgeregelung von quasistatischen Mikroscannern
Schroedter, Richard; Roth, Matthias; Sandner, Thilo; Janschek, Klaus | Conference Paper |
| 2015 | A Movement Resilient, Mobile, 24-Bit, Long-term ECG-Monitoring Platform
Weder, A.; Kircher, Marco; Noack, Alexander | Presentation |
| 2015 | Multi-Channel Beat Detector for a mobile ECG Monitoring Device
Noack, Alexander | Presentation |
| 2015 | Nano patterning at Fraunhofer IPMS-CNT: Fabrication of silicon master for NIL via e-beam direct write
Thrun, Xaver; Choi, Kang-Hoon; Gutsch, Manuela; Hohle, Christoph; Rudolph, Matthias; Seidel, Konrad | Poster |
| 2015 | Next-generation ferroelectric memories based on FE-HfO2
Müller, S.; Slesazeck, S.; Mikolajick, T.; Müller, Johannes; Polakowski, Patrick; Flachowsky, S. | Conference Paper |
| 2015 | On the voltage scaling potential of SONOS non-volatile memory transistors
Ocker, J.; Slesazeck, S.; Mikolajick, T.; Buschbeck, S.; Günther, S.; Yurchuk, E.; Hoffmann, R.; Beyer, V. | Conference Paper |
| 2015 | On treatment of ultra-low-k SiCOH in CF4 plasmas: Correlation between the concentration of etching products and etching rate
Lang, N.; Zimmermann, S.; Zimmermann, H.; Macherius, U.; Uhlig, B.; Schaller, M.; Schulz, S.E.; Röpcke, J. | Journal Article |
| 2015 | Optischer Empfänger für eine optische drahtlose Kommunikation
Deicke, Frank; Schneider, Tobias | Patent |
| 2015 | Optischer Schweißelektroden-Überwachungssensor
Grüger, H.; Reinig, P. | Journal Article |
| 2015 | Organosilane Downstream Plasma On Ultra Low-k Dielectrics: Comparing Repair With Post Etch Treatment
Calvo, J.; Steinke, P.; Wislicenus, M.; Gerlich, L.; Seidel, R.; Clauss, E.; Uhlig, B. | Conference Paper |
| 2015 | Performance assessment of CMUT arrays based on electrical impedance test results
Klemm, Markus; Unamuno, Anartz; Elsäßer, Linus; Jeroch, Werner | Journal Article |
| 2015 | Planare Mehrfrequenzantenne
Heiß, Michael | Patent |
| 2015 | Polarization independent electro-optical waveguides with liquid crystals in isotropic phase
Costache, Florenta; Blasl, Martin; Bornhorst, Kirstin | Conference Paper |
| 2015 | Polarization insensitive variable optical attenuator based on field induced waveguides with a liquid crystal core
Blasl, M.; Bornhorst, K.; Costache, F. | Conference Paper |
| 2015 | Polymer energy harvester for powering wireless communication systems
Costache, Florenta; Schirrmann, Christian; Seifert, Ruben; Bornhorst, Kirstin; Pawlik, Boscij; Despang, Hans-Günter; Heinig, Andreas | Journal Article, Conference Paper |
| 2015 | Preface
Boulmer-Leborgne, C.; Bulgakova, N.M.; Costache, F.; Pervolaraki, M.; Serna, R. | Journal Article, Conference Paper |
| 2015 | Pulse plating of manganese oxide nanoparticles on aligned MWCNT
Schneider, Michael; Weiser, Mathias; Schrötke, Carl; Meißner, Frank; Endler, Ingolf; Michaelis, Alexander | Journal Article |
| 2015 | The Rayleigh law in silicon doped hafnium oxide ferroelectric thin films
Guan, Yan; Zhou, Dayu; Xu, Jin; Liu, Xiaohua; Cao, Fei; Dong, Xianlin; Müller, Johannes; Schenk, Tony; Schroeder, Uwe | Journal Article |
| 2015 | Reactively sputtered hafnium oxide on silicon dioxide: Structural and electrical properties
Kolkovsky, V.; Lukat, K.; Kurth, E.; Kunath, C. | Journal Article |
| 2015 | Recent trends in developments of MEMS and nanoelectronic sensors
Scholles, Michael | Conference Paper |
| 2015 | Removable Identification Technology to Differentiate Food Contact PET in Mixed Waste Streams: Interim Report
Pilon, Laura; Stewart, Angela; Bahia, Raminder; Hintschich, Susanne; Willner, Claudia; Eder, Hans | Report |
| 2015 | Resonant enhancement of damping within the free layer of a microscale magnetic tunnel valve
Keatley, P.S.; Kruglyak, V.V.; Neudert, A.; Hicken, R.J.; Poimanov, V.D.; Childress, J.R.; Katine, J.A. | Journal Article |
| 2015 | Scaling and optimization of ferroelectric hafnium oxide for memory applications and beyond
Müller, Johannes; Riedel, Stefan; Polakowski, Patrick | Presentation |
| 2015 | Self-organized surface structures with ultrafast white-light: First investigation of LIPSS with supercontinuum
Uhlig, S. | Master Thesis |
| 2015 | Self-Organizing Mobile Multi-Sensor Surveillance Platform for Emergency Management Situations
Noack, Alexander; Weder, Andreas; Heinig, Andreas | Presentation |
| 2015 | Sensitivity analysis for high accuracy proximity effect correction
Thrun, Xaver; Browning, Clyde; Choi, Kang-Hoon; Figueiro, Thiago; Hohle, Christoph; Saib, Mohamed; Schiavone, Patrick; Bartha, Johann W. | Conference Paper |
| 2015 | A small-gap electrostatic micro-actuator for large deflections
Conrad, Holger; Schenk, Harald; Kaiser, Bert; Langa, Sergiu; Gaudet, Matthieu; Schimmanz, Klaus; Stolz, Michael; Lenz, Miriam | Journal Article |
| 2015 | Spatially resolved contrast measurement of diffractive micromirror arrays
Sicker, Cornelius; Heber, Jörg; Berndt, Dirk; Rückerl, Florian; Tinevez, Jean-Yves; Shorte, Spencer; Wagner, Michael; Schenk, Harald | Conference Paper |
| 2015 | Spatio-angular light control in microscopes using micro mirror arrays
Rückerl, F.; Bellow, S.; Berndt, Dirk; Tinevez, J.-Y.; Heber, Jörg; Wagner, Michael; Shorte, S. | Conference Paper |
| 2015 | Stabilizing the ferroelectric phase in doped hafnium oxide
Hoffmann, M.; Schroeder, U.; Schenk, T.; Shimizu, T.; Funakubo, H.; Sakata, O.; Pohl, D.; Drescher, M.; Adelmann, C.; Materlik, R.; Kersch, A.; Mikolajick, T. | Journal Article |
| 2015 | Steerable patterned OLED backlight for autostereoscopic display application
Vogel, U.; Fehse, K.; Wartenberg, P.; Knobbe, J.; Scholles, M.; Richter, B.; Hild, O. | Conference Paper |
| 2015 | Stress controlled CMUT fabrication based on a CMOS compatible sacrificial release process
Elsäßer, Linus; Friedrichs, Martin; Klemm, Markus; Unamuno, Anartz | Conference Paper |
| 2015 | Structural and Dielectric Properties of Subnanometric Laminates of Binary Oxides
Kahouli, A.; Lebedev, O.; Ben Elbahri, M.; Mercey, B.; Prellier, W.; Riedel, S.; Czernohorsky, M.; Lallemand, F.; Bunel, C.; Lüders, U. | Journal Article |
| 2015 | Theory of co-adsorption and its application to copper superfilling
Liske, Romy; Krause, Robert; Uhlig, Benjamin; Gerlich, Lukas; Bott, Sascha; Wislicenus, Marcus; Preusse, Axel | Presentation |
| 2015 | Ultra-Thin high density capacitors for advanced packaging solutions
Seidel, K.; Böttcher, M.; Dobritz, S.; Czernohorsky, M.; Riedel, S.; Weinreich, W. | Conference Paper |
| 2015 | Untersuchung des Korrosionsverhaltens von kobalthaltigen Dünnschichten für den Einsatz in der Halbleitertechnologie
Nagy, Nicole
: Kalies, Grit (Betr.); Uhlig, Benjamin (Betr.) | Master Thesis |
| 2015 | Untersuchungen an Hard- und Firmware für ein fehlertolerantes Sensornetzwerk, welches in faserverstärkte Verbundwerkstoffe integrierbar ist
Bartl, Clemens
: Heinig, Andreas (Betr.); Fischer, Wolf-Joachim (Betr.) | Thesis |
| 2015 | Verfahren zum Herstellen eines kapazitiven Ultraschallwandlers und Anordnung einer Mehrzahl von kapazitiven Ultraschallwandlern
Unamuno-Eguren, Anartz; Friedrichs, Martin | Patent |
| 2015 | Verfahren, Vorrichtung und Computerprogrammprodukt zum Bestimmen eines isoelektrischen Punkts
Noack, Alexander; Poll, Rüdiger | Patent |
| 2015 | Verification of E-Beam direct write integration into 28nm BEOL SRAM technology
Hohle, Christoph; Choi, Kang-Hoon; Gutsch, Manuela; Hanisch, Norbert; Seidel, Robert; Steidel, Katja; Thrun, Xaver; Werner, Thomas | Conference Paper |
| 2015 | Vorrichtung mit einem mikromechanischen Bauelement
Pügner, Tino; Knobbe, Jens | Patent |
| 2015 | Wafer level vacuum packaging of micro-mirrors with buried signal lines
Langa, S.; Drabe, C.; Herrmann, A.; Ludewig, T.; Rieck, A.; Flemming, A.; Kaden, C. | Journal Article |
| 2015 | Widely tuneable quantum cascade lasers for spectroscopic sensing
Wagner, J.; Ostendorf, R.; Grahmann, Jan; Merten, André; Hugger, S.; Jarvis, J.P.; Fuchs, F.; Boskovic, D.; Schenk, Harald | Conference Paper |
| 2015 | Zuverlässige Zugangskontrolle durch Authentifizierung mittels MEMS basiertem Retinascanner mit zusätzlicher Projektionsoption
Woittennek, Franziska; Knobbe, Jens; Pügner, Tino; Dallmann, Hans-Georg; Schelinski, Uwe; Grüger, Heinrich | Conference Paper |
| 2014 | 10 Gbit/s bidirectional optical wireless communication module for docking devices
Faulwaßer, M.; Deicke, F.; Schneider, T. | Conference Paper |
| 2014 | ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM
Triyoso, D.H.; Weinreich, W.; Seidel, K.; Nolan, M.G.; Polakowski, P.; Utess, D.; Ohsiek, S.; Dittmar, K.; Weisheit, M.; Liebau, M.; Fox, R. | Conference Paper |
| 2014 | ALD ZrO2 processes for BEoL device applications
Weinreich, Wenke; Seidel, Konrad; Polakowski, Patrick; Riedel, Stefan; Wilde, Lutz; Sundqvist, Jonas; Triyoso, Dina H.; Nolan, Mark G. | Conference Paper |
| 2014 | Aluminium based micro mirrors exposed to UV laser light - in situ performance and degradation
Mai, Alexander | Dissertation |
| 2014 | Benefits and limitations by replacing high-speed data links with a modern optical wireless solution
Faulwaßer, Michael; Deicke, Frank; Schneider, Tobias | Conference Paper |
| 2014 | Characterization of a chloride-based titanium nitride atomic layer deposition process for back-end-of-line devices
Neuber, Markus
: Weinreich, Wenke (Betreuer) | Master Thesis |
| 2014 | Charakterisierung eines Digitalen Holographischen Mikroskops zur Analyse mikro-mechanischer Aktoren
Epperlein, Nadja
: Schenk, Harald (Betreuer) | Master Thesis |
| 2014 | Chewing after stress: Psychosocial stress influences chewing frequency, chewing efficacy, and appetite
Petrowski, Katja; Wintermann, Gloria-Beatrice; Joraschky, Peter; Päßler, Sebastian | Journal Article |
| 2014 | Claritas™ - a unique and robust endpoint technology for silicon drie processes with open area down to 0.05%
Ansell, O.; Barnett, R.; Haase, T.; Xie, L.; Vargo, S.; Thomas, D. | Conference Paper |
| 2014 | CMP process development for Cobalt liner integration at the 28-nm-node
Koch, J.; Bott, S.; Wislicenus, M.; Krause, R.; Gerlich, L.; Uhlig, B.; Liske, R.; Vasilev, B.; Preusse, A. | Conference Paper |
| 2014 | Cobalt advanced barrier metallization: A resist composition analysis
Wislicenus, Marcus; Liske, Romy; Gerlich, Lukas; Vasilev, Boris; Preusse, Axel | Conference Paper |
| 2014 | Combining external cavity quantum cascade lasers and MOEMS technology: An approach for miniaturization and fast wavelength scanning
Ambacher, O.; Ostendorf, R.; Bleh, D.; Merten, A.; Grahmann, J.; Schmidt, R.; Kunzer, M.; Hugger, S.; Wagner, J. | Conference Paper |
| 2014 | Compact driver module for closed-loop control of resonant 2D-MOEMS scanners
Tortschanoff, A.; Kenda, A.; Sandner, T.; Kremer, M.; Frank, A. | Conference Paper |
| 2014 | Compact optical position feedback scheme for MOEMS mirrors
Tortschanoff, A.; Baumgart, M.; Holzmann, D.; Lenzhofer, M.; Sandner, T.; Kenda, A. | Journal Article |
| 2014 | Deeper insight with MEMS based illumination
Skupsch, Christoph; Heber, Jörg; Berndt, Dirk; Wagner, Michael; Rückerl, Florian; Tinevez, Jean-Yves; Shorte, Spencer | Presentation |
| 2014 | Depth-resolved transport measurements and atom-probe tomography of heterogeneous, superconducting Ge:Ga films
Heera, V.; Fiedler, J.; Naumann, M.; Skrotzki, R.; Kölling, S.; Wilde, L.; Herrmannsdörfer, T.; Skorupa, W.; Wosnitza, J.; Helm, M. | Journal Article |
| 2014 | Design and fabrication of a tunable two-fluid micro-lens device with a large deflection polymer actuator
Schirrmann, Christian; Costache, Florenta; Bornhorst, Kirstin; Pawlik, Boscij; Rieck, Andreas; Schenk, Harald | Journal Article, Conference Paper |
| 2014 | Design of a MEMS-based retina scanning system for biometric authentication
Woittennek, Franziska; Knobbe, Jens; Pügner, Tino; Schelinski, Uwe; Grüger, Heinrich | Conference Paper |
| 2014 | Designoptimierung und Charakterisierung eines mittels Elektronenstrahldirektschreibens hergestellten Siliziumstempels zur Fertigung von plasmonisch aktiven Nanostrukturen
Kaiser, Michael
: Hohle, Christoph (Betreuer); Fischer, Wolf-Joachim (Betreuer) | Thesis |
| 2014 | Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives
Kenda, A.; Kraft, M.; Tortschanoff, A.; Scherf, W.; Sandner, T.; Schenk, H.; Lüttjohann, S.; Simon, A. | Conference Paper |
| 2014 | Direct UV-imprinting of hybrid-polymer photonic microring resonators and their characterization
Kirchner, R.; Finn, A.; Landgraf, R.; Nueske, L.; Teng, L.C.; Vogler, M.; Fischer, W.-J. | Journal Article |
| 2014 | Doped hafnium oxide - an enabler for ferroelectric field effect transistors
Mikolajick, T.; Müller, S.; Schenk, T.; Yurchuk, E.; Slesazeck, S.; Schröder, U.; Flachowsky, S.; Bentum, R. van; Kolodinski, S.; Polakowski, P.; Müller, J. | Conference Paper |
| 2014 | Drahtlos messen ohne Batterie
Fischer, Wolf-Joachim | Journal Article |
| 2014 | ECG-Home Project
Noack, Alexander; Göricke, Rico | Poster |
| 2014 | Effective corner rounding correction in the data preparation of electron beam lithography
Choi, Kang-Hoon; Browning, Clyde; Figueiro, Thiago; Hohle, Christoph; Kaiser, Michael; Schiavone, Patrick | Conference Paper |
| 2014 | Engineering blue fluorescent bulk emitters for OLEDs: Triplet harvesting by green phosphors
Hofmann, S.; Hummert, M.; Scholz, R.; Luschtinetz, R.; Murawski, C.; Will, P.-A.; Hintschich, S.I.; Alex, J.; Jankus, V.; Monkman, A.P.; Lüssem, B.; Leo, K.; Gather, M.C. | Journal Article |
| 2014 | Entwicklung eines VHDL-Moduls für die Ansteuerung und Regelung quasistatischer Scanner
Schütz, Sandra
: Schwarzenberg, Markus (Betreuer) | Thesis |
| 2014 | Entwicklung und Charakterisierung von Ansteuerprinzipien für Capactive Micromachined Ultrasonic Transducers (CMUT)
Blocher, Philipp
: Unamuno, Anartz (Betreuer) | Master Thesis |
| 2014 | Entwicklung von Bildaufnahme und -verarbeitung für eine multispektrale Kamera
Grafe, Mario
: Pügner, Tino (Betr.); Knobbe, Jens (Betr.) | Master Thesis |
| 2014 | Entwicklung von Bildverarbeitungsalgorithmen zur Bewertung der Fitness von Banknoten
Kleinschmidt, Sebastian
: Grafe, Mario (Betreuer) | Thesis |
| 2014 | Entwicklung von Hafniumoxid ALD-Prozessen mit alternativen Oxidationsmitteln
Paulack, Stephan
: Naumann, Andreas (Betreuer) | Bachelor Thesis |
| 2014 | Entwurf, Systemkonzeptionierung und Realisierung einer Ansteuerung für 2D-Mikroscannerspiegel
Barth, Robert
: Schwarzenberg, Markus (Betreuer) | Master Thesis |
| 2014 | Extension of frequency modulated Doppler global velocimetry for the investigation of unsteady spray flows
Fischer, A.; Wilke, U.; Schlüßler, R.; Haufe, D.; Sandner, T.; Czarske, J. | Journal Article |
| 2014 | Fast Nonlinear CMUT Simulation Model for Pull-In and Dynamic Fluid Coupled Deflection Analysis
Klemm, Markus; Unamuno, Anartz | Presentation |
| 2014 | Ferroelectric and antiferroelectric properties of Si-doped HfO2 thin films
Zhou, D.Y.; Xu, J.; Müller, J.; Schröder, U. | Journal Article |
| 2014 | Ferroelectric deep trench capacitors based on Al:HfO2 for 3D nonvolatile memory applications
Polakowski, Patrick; Riedel, Stefan; Weinreich, Wenke; Rudolf, M.; Sundqvist, Jonas; Seidel, Konrad; Müller, Johannes | Conference Paper |
| 2014 | Ferroelectric hafnium oxide based materials and devices
Müller, Johannes; Polakowski, Patrick; Müller, Stefan; Mikolajick, Thomas | Conference Paper |
| 2014 | Ferroelectric hafnium oxide: A game changer to FRAM?
Müller, J.; Polakowski, P.; Riedel, S.; Mueller, S.; Yurchuk, E.; Mikolajick, T. | Conference Paper |
| 2014 | Ferroelectricity in Si-doped HfO2 revealed: A binary lead-free ferroelectric
Martin, D.; Müller, J.; Schenk, T.; Arruda, T.M.; Kumar, A.; Strelcov, E.; Yurchuk, E.; Müller, S.; Pohl, D.; Schröder, U.; Kalinin, S.V.; Mikolajick, T. | Journal Article |
| 2014 | First-principles study of oxygen and aluminum defects in beta-Si3N4: Compensation and charge trapping
Grillo, M.E.; Elliott, S.D.; Rodríguez, J.; Añez, R.; Coll, D.S.; Suhane, A.; Breuil, L.; Arreghini, A.; Degraeve, R.; Shariq, A.; Beyer, V.; Czernohorsky, M. | Journal Article |
| 2014 | Food intake monitoring: Automated chew event detection in chewing sounds
Päßler, S.; Fischer, W.-J. | Journal Article |
| 2014 | Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2013
| Annual Report |
| 2014 | Graphen - Eigenschaften und mögliche Anwendungen
Beyer, Beatrice | Conference Paper |
| 2014 | Herstellungsverfahren
Langa, Sergiu; Drabe, Christian; Sandner, Thilo | Patent |
| 2014 | High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications
Schmidt, Jan-Uwe; Dauderstädt, Ulrike; Dürr, Peter; Friedrichs, Martin; Hughes, Thomas; Ludewig, Thomas; Rudloff, Dirk; Schwaten, Tino; Trenkler, Daniela; Wagner, Michael; Wullinger, Ingo; Bergström, Andreas; Björnängen, Peter; Jonsson, Fredrik; Karlin, Tord; Rönnholm, Peter; Sandström, Torbjörn | Conference Paper |
| 2014 | Impact of different dopants on the switching properties of ferroelectric hafniumoxide
Schroeder, U.; Yurchuk, E.; Müller, J.; Martin, D.; Schenk, T.; Polakowski, P.; Adelmann, C.; Popovici, M.I.; Kalinin, S.V.; Mikolajick, T. | Journal Article |
| 2014 | Impact of scaling on the performance of HfO2-based ferroelectric field effect transistors
Yurchuk, E.; Müller, J.; Paul, J.; Schlösser, T.; Martin, D.; Hoffmann, R.; Müller, S.; Slesazeck, S.; Schroeder, U.; Boschke, R.; Bentum, R. van; Mikolajick, T. | Journal Article |
| 2014 | Impact of the apex of an elongated dielectric tip upon its light absorption properties
Bogdanowicz, J.; Gilbert, M.; Koelling, S.; Vandervorst, W. | Journal Article, Conference Paper |
| 2014 | Influence of nitrogen trap states on the electronic properties of high-k metal gate transistors
Ocker, J.; Kupke, S.; Slesazeck, S.; Mikolajick, T.; Erben, E.; Drescher, M.; Naumann, A.; Lazarevic, F.; Leitsmann, R. | Conference Paper |
| 2014 | Innovative and water based stripping approach for thick and bulk photoresists
Rudolph, M.; Schumann, D.; Thrun, X.; Esche, S.; Hohle, C. | Conference Paper |
| 2014 | Integration of e-beam direct write in BEOL processes of 28nm SRAM technology node using mix and match
Gutsch, Manuela; Choi, Kang-Hoon; Hanisch, Norbert; Hohle, Christoph; Steidel, Katja; Thrun, Xaver; Seidel, Robert; Werner, Thomas | Conference Paper |
| 2014 | Introduction of an innovative water based photoresist stripping process using intelligent fluids
Rudolph, Matthias; Felten, Peter; Thrun, Xaver; Schumann, Dirk; Esche, Silvio; Hohle, Christoph | Conference Paper |
| 2014 | Jerk and current limited flatness-based open loop control of foveation scanning electrostatic micromirrors
Schroedter, Richard; Janschek, Klaus; Sandner, Thilo | Conference Paper |
| 2014 | Large field of view MEMS-based confocal laser scanning microscope for fluorescence imaging
Bechtel, Christin; Knobbe, Jens; Grüger, Heinrich; Lakner, Hubert | Journal Article |
| 2014 | MEMS based fluorescence microscope with 3D option for dermatological applications
Bechtel, C.; Knobbe, J.; Grüger, H.; Lakner, H. | Conference Paper |
| 2014 | MEMS-based miniature near-infrared spectrometer for application in environmental and food monitoring
Hintschich, Susanne; Pügner, Tino; Knobbe, Jens; Schröder, Julia; Reinig, Peter; Grüger, Heinrich; Schenk, Harald | Conference Paper |
| 2014 | Metasurfaces for colour printing
Zapata-Rodríguez, C.J.; Miret, J.J.; Rodríguez-Cantó, P.; Muñoz-Matutano, G.; Martínez-Pastor, J.P.; Abargues, R.; Pastor, D.; Kaiser, M.; Hohle, C. | Conference Paper |
| 2014 | Micro mirrors for high-speed laser deflection and patterning
Schenk, Harald; Grahmann, Jan; Sandner, Thilo; Wagner, Michael; Dauderstädt, Ulrike; Schmidt, Jan-Uwe | Conference Paper, Journal Article |
| 2014 | Micro-scanning mirrors for high-power laser applications in laser surgery
Sandner, Thilo; Kimme, Simon; Grasshoff, Thomas; Todt, Ulrich; Graf, Alexander; Tulea, Christian; Schenk, Harald | Conference Paper |
| 2014 | Multi-Level MOEMS structures for spatial light modulators
Mirabella, Simone; Friedrichs, Martin; Pufe, Wolfram; List, Matthias | Conference Paper |
| 2014 | OFETs with sub-100 nm channel length fabricated by wafer-scale NIL and comprehensive DC and AC characterizations
Teng, L.; Finn, A.; Plötner, M.; Shi, H.; Fischer, W.-J. | Journal Article |
| 2014 | Optical design of MOEMS-based micro-mechatronic modules for applications in spectroscopy
Tortschanoff, A.; Kremer, M.; Sandner, T.; Kenda, A. | Conference Paper |
| 2014 | Optical multi viewing sensor for welding tip analysis
Grüger, H.; Leuchefeld, M.; Knobbe, J.; Tedeschi, E. | Conference Paper |
| 2014 | Optical position detection for MOEMS scanner mirrors with arbitrary trajectories
Tortschanoff, Andreas; Baumgart, Marcus; Holzmann, Dominik; Mayer, Christoph; Sandner, Thilo; Kenda, Andreas | Conference Paper |
| 2014 | Origin of the endurance degradation in the novel HfO2-based 1T ferroelectric non-volatile memories
Yurchuk, E.; Mueller, S.; Martin, D.; Slesazeck, S.; Schroeder, U.; Mikolajick, T.; Müller, J.; Paul, J.; Hoffmann, R.; Sundqvist, J.; Schlösser, T.; Boschke, R.; Bentum, R. van; Trentzsch, M. | Conference Paper |
| 2014 | Phase separation in Zr56-xGdxCo 28Al16 metallic glasses (0 ⩽ x ⩽ 20)
Han, J.H.; Mattern, N.; Vainio, U.; Shariq, A.; Sohn, S.W.; Kim, D.H.; Eckert, J. | Journal Article |
| 2014 | Photoactivation and optogenetics with micro mirror enhanced illumination
Rückerl, Florian; Berndt, Dirk; Heber, Jörg; Shorte, Spencer | Conference Paper |
| 2014 | Post etch wet clean processes for advanced technology nodes
Uhlig, Benjamin; Steinke, Philipp; Liske, Romy; Ott, Andreas; Mieth, Oliver | Conference Paper |
| 2014 | Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera
Sandner, T.; Grasshoff, T.; Schwarzenberg, M.; Schroedter, R.; Schenk, H. | Conference Paper |
| 2014 | Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera
Sandner, T.; Grasshoff, T.; Schwarzenberg, M.; Schroedter, R.; Schenk, H. | Journal Article |
| 2014 | Quasistatisch-resonanter Mikroscanner zur adaptiven Auflösungssteuerung einer 3D ToF-Kamera
Sandner, T.; Grasshoff, T.; Schrödter, R.; Schwarzenberg, M. | Journal Article |
| 2014 | Quasistatisch-resonanter Mikroscanner zur adaptiven Auflösungssteuerung einer 3D ToF-Kamera
Sandner, T.; Grasshoff, T.; Schrödter, R.; Schwarzenberg, M. | Journal Article |
| 2014 | Realization of CMUT based ultrasonic sensor systems
Unamuno, Anartz; Klemm, Markus; Grüger, Heinrich | Conference Paper |
| 2014 | RFID-Transponder, der passiv betreibbar ist
Holland, Hans-Jürgen; Heiß, Michael; Fischer, Wolf-Joachim | Patent |
| 2014 | Role of the dielectric for the charging dynamics of the dielectric/barrier interface in AlGaN/GaN based metal-insulator-semiconductor structures under forward gate bias stress
Lagger, Peter; Steinschifter, P.; Reiner, M.; Stadtmüller, M.; Denifl, G.; Naumann, Andreas; Müller, Johannes; Wilde, Lutz; Sundqvist, Jonas; Pogany, D. | Journal Article |
| 2014 | Rolle-zu-Rolle Fertigung von TCM auf flexiblen Substraten - Chancen und Herausforderungen
Brückner, Jacqueline | Conference Paper |
| 2014 | Simulation model for CMUT with rapid structure fluid interaction in time domain
Klemm, Markus; Unamuno, Anartz | Conference Paper |
| 2014 | Strain-enhanced nanocomposites of electrostrictive polymers and high-k nanofillers for micro-actuation applications
Pawlik, Boscij; Schirrmann, Christian; Bornhorst, Kirstin; Costache, Florenta | Journal Article, Conference Paper |
| 2014 | Thin film growth of Fe-based superconductors: From fundamental properties to functional devices
Haindl, S.; Kidszun, M.; Oswald, S.; Hess, C.; Büchner, B.; Kölling, S.; Wilde, L.; Thersleff, T.; Yurchenko, V.V.; Jourdan, M.; Hiramatsu, H.; Hosono, H. | Journal Article |
| 2014 | Time domain resonance frequency measurement of inductively coupled resonant sensors using the matrix pencil method
Sauer, S.; Fischer, W.-J. | Conference Paper |
| 2014 | Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers
Sandner, T.; Grasshoff, T.; Gaumont, E.; Schenk, H.; Kenda, A. | Journal Article |
| 2014 | Tunable external cavity quantum cascade lasers (EC-QCL): An application field for MOEMS based scanning gratings
Grahmann, Jan; Merten, André; Ostendorf, Ralf; Fontenot, Michael; Bleh, Daniela; Schenk, Harald; Wagner, Hans-Joachim | Conference Paper |
| 2014 | Understanding the materials, electrical and reliability impact of Al-addition to ZrO2 for BEOL compatible MIM capacitors
Triyoso, D.H.; Chu, S.; Seidel, K.; Weinreich, W.; Yiang, K.-Y.; Nolan, M.G.; Brunco, D.P.; Rinderknecht, J.; Utess, D.; Kyono, C.; Miller, R.; Park, J.; Cheng, L.; Liebau, M.; Lomtscher, P.; Fox, R. | Conference Paper |
| 2014 | Variable Optical Power Splitter with Field-Induced Waveguides in Liquid Crystals Paranematic Phase
Costache, Florenta; Hartwig, Haldor; Bornhorst, Kirstin; Blasl, Martin | Conference Paper |
| 2014 | Ein Verfahren für die Synthese von Pass-Transistor-Schaltungen mit niedrigem Energieverbrauch
Zimmerling, Martin
: Fischer, Wolf-Joachim (Betreuer) | Dissertation |
| 2014 | Wave sequence based identification of sinus rhythm beats on a microcontroller
Noack, Alexander; Poll, Rüdiger; Fischer, Wolf-Joachim | Conference Paper |
| 2014 | A wireless passive humidity threshold monitoring solution based on a permanent resistance change
Sauer, S.; Fischer, W.-J. | Journal Article, Conference Paper |
| 2013 | (Invited) Hafnium oxide based CMOS compatible ferroelectric materials
Schroeder, U.; Martin, D.; Müller, J.; Yurchuk, E.; Mueller, S.; Adelmann, C.; Schloesser, T.; Bentum, R. van; Mikolajick, T. | Journal Article |
| 2013 | 15 days electron beam exposure for manufacturing of large area silicon based NIL master
Thrun, X.; Choi, K.-H.; Freitag, M.; Gutsch, M.; Hohle, C.; Paul, J.; Rudolph, M.; Steidel, K. | Journal Article |
| 2013 | Accurate and efficient physical simulation of program disturb in scaled NAND flash memories
Kuligk, A.; Nguyen, C.D.; Löhr, D.-A.; Beyer, V.; Meinerzhagen, B. | Conference Paper |
| 2013 | Actuation principles for hybrid two-dimensional quasistatic micro scanning mirrors
Kimme, Simon | Conference Paper |
| 2013 | Adaptive prefilter design for control of quasistatic microscanners
Janschek, K.; Sandner, T.; Schroedter, R.; Roth, M. | Conference Paper |
| 2013 | Analyse und Optimierung des Wissensmanagement in Forschung und Entwicklung
Bachmann, Alexander
: Deicke, Frank (Betreuer) | Master Thesis |
| 2013 | Angepasste Piezosensorelektronik und integrierte drahtlose Sensornetzwerke zur Herstellung intelligenter Leichtbauteile
Weder, Andreas; Geller, Sirko | Conference Paper |
| 2013 | Antenna design for a UHF RFID sensor tag inside a switchgear
Heiß, Michael; Hildebrandt, Ralf | Conference Paper |
| 2013 | Bildgebende und zeitlich hochauflösende Messungen von instationären Strömungsphänomenen mittels FM-DGV und einem Mikroscannerspiegel
Wilke, U.; Czarske, J.; Sandner, T.; Fischer, A. | Conference Paper |
| 2013 | Characterization of a MID-volume fabrication process for CMUT development
Unamuno, Anartz; Friedrichs, Martin; Jeroch, Werner; Grüger, Heinrich | Poster |
| 2013 | Chemical degradation mechanisms of highly efficient blue phosphorescent emitters used for organic light emitting diodes
Seifert, R.; Moraes, I.R. de; Scholz, S.; Gather, M.C.; Lüssem, B.; Leo, K. | Journal Article |
| 2013 | Closed-loop control driver for quasi-static MOEMS mirrors
Tortschanoff, Andreas; Holzmann, Dominik; Lenzhofer, Martin; Sandner, Thilo; Kenda, Andreas | Conference Paper |
| 2013 | Correlation of absorption profile and fill factor in organic solar cells: The role of mobility imbalance
Tress, W.; Merten, A.; Furno, M.; Hein, M.; Leo, K.; Riede, M. | Journal Article |
| 2013 | Counting x-ray line detector with monolithically integrated readout circuits
Lohse, T.; Krüger, P.; Heuer, H.; Oppermann, M.; Torlee, H.; Meyendorf, Norbert | Conference Paper |
| 2013 | Crystallographic texture of submicron thin aluminum nitride films on molybdenum electrode for suspended micro and nanosystems
Sah, R.E.; Kirste, L.; Kirmse, H.; Mildner, M.; Wilde, L.; Kopta, S.; Knöbber, F.; Krieg, M.; Cimalla, V.; Lebedev, V.; Ambacher, O. | Journal Article |
| 2013 | Design and characterization of a hybrid-integrated MEMS scanning grating spectrometer
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino; Schenk, Harald | Conference Paper |
| 2013 | Detailed leakage current analysis of metal-insulator-metal capacitors with ZrO2, ZrO2/SiO2/ZrO2, and ZrO2/Al2O3/ZrO2 as dielectric and TiN electrodes
Weinreich, W.; Shariq, A.; Seidel, K.; Sundqvist, J.; Paskaleva, A.; Lemberger, M.; Bauer, A.J. | Journal Article, Conference Paper |
| 2013 | Developing electro-optical tools for the characterization of microscanners
Kattungal, Jithin Vasanthan
: Dreyhaupt, André (Supervisor) | Master Thesis |
| 2013 | Direct imaging of 3D atomic-scale dopant-defect clustering processes in ion-implanted silicon
Koelling, S.; Richard, O.; Bender, H.; Uematsu, M.; Schulze, A.; Zschaetzsch, G.; Gilbert, M.; Vandervorst, W. | Journal Article |
| 2013 | Downscaling ferroelectric field effect transistors by using ferroelectric Si-doped HfO2
Martin, Dominik; Yurchuk, Ekaterina; Müller, Stefan; Müller, Johannes; Paul, Jan; Sundquist, Jonas; Slesazeck, S.; Schlösser, T.; Bentum, R. van; Trentzsch, M.; Schröder, U.; Mikolajick, T. | Conference Paper, Journal Article |
| 2013 | Effects on electron scattering and resist characteristics using assisting underlayers for e-beam direct write lithography
Thrun, Xaver; Choi, Kang-Hoon; Hanisch, Norbert; Hohle, Christoph; Steidel, Katja; Guerrero, Douglas; Figueiro, Thiago; Bartha, Johann W. | Conference Paper |
| 2013 | Electronic structure, morphology and emission polarization of enhanced symmetry InAs quantum-dot-like structures grown on InP substrates by molecular beam epitaxy
Marynski, A.; Sek, G.; Musia, A.; Andrzejewski, J.; Misiewicz, J.; Gilfert, C.; Reithmaier, J.P.; Capua, A.; Karni, O.; Gready, D.; Eisenstein, G.; Atiya, G.; Kaplan, W.D.; Kölling, S. | Journal Article |
| 2013 | Electrostrictive polymer - inorganic nanoparticle nanocomposites for actuator applications
Pawlik, Boscij; Schirrmann, Christian; Bornhorst, Kirstin; Costache, Florenta | Poster |
| 2013 | Elemental distribution, solute solubility and defect free volume in nanocrystalline restricted-equilibrium Cu-Ag alloys
Riedl, T.; Kirchner, A.; Eymann, K.; Shariq, A.; Schlesiger, R.; Schmitz, G.; Ruhnow, M.; Kieback, B. | Journal Article |
| 2013 | Entwurf anwendungsspezifischer drahtloser Körpernetzwerke zur Vitalparameterübertragung
Weder, Andreas | Dissertation |
| 2013 | Evaluation of an advanced dual hard mask stack for high resolution pattern transfer
Paul, Jan; Rudolph, M.; Riedel, S.; Thrun, X.; Wege, S.; Hohle, C. | Conference Paper |
| 2013 | Extreme long range process effects characterization and compensation
Figueiro, T.; Browning, C.; Thornton, M.J.; Vannuffel, C.; Hoon Choi, K.; Hohle, C.; Tortai, J.-H.; Schiavone, P. | Conference Paper |
| 2013 | Ferroelectric hafnium oxide: A CMOS-compatible and highly scalable approach to future ferroelectric memories
Müller, J.; Böscke, T.S.; Müller, S.; Yurchuk, E.; Polakowski, P.; Paul, J.; Martin, D.; Schenk, T.; Khullar, K.; Kersch, A.; Weinreich, W.; Riedel, S.; Seidel, K.; Kumar, A.; Arruda, T.M.; Kalinin, S.V.; Schlösser, T.; Boschke, R.; Bentum, R. van; Schröder, U.; Mikolajick, T. | Conference Paper |
| 2013 | First application close measurements applying the new hybrid integrated MEMS spectrometer
Grüger, H.; Pügner, T.; Knobbe, J.; Schenk, H. | Conference Paper |
| 2013 | Flatness-based open loop command tracking for quasistatic microscanners
Janschek, Klaus; Schroedter, Richard; Sandner, Thilo | Conference Paper |
| 2013 | Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2012
| Annual Report |
| 2013 | From MFM capacitors toward ferroelectric transistors: Endurance and disturb characteristics of HfO2-based FeFET devices
Mueller, S.; Müller, J.; Hoffmann, R.; Yurchuk, E.; Schlösser, T.; Boschke, R.; Paul, J.; Goldbach, M.; Herrmann, T.; Zaka, A.; Schröder, U.; Mikolajick, T. | Journal Article |
| 2013 | Hafnium oxide based CMOS compatible ferroelectric materials
Schroeder, U.; Mueller, S.; Mueller, J.; Yurchuk, E.; Martin, D.; Adelmann, C.; Schloesser, T.; Bentum, R. van; Mikolajick, T. | Journal Article |
| 2013 | Herstellung textilverstärkter Verbundbauteile mit strukturintegrierten Sensornetzwerken
Heinig, Andreas; Weder, Andreas; Fischer, Wolf-Joachim | Conference Paper |
| 2013 | Herstellung und Charakterisierung ultradünner ZrO2-basierter Schichten als Isolatoren in Metall-Isolator-Metall Kondensatoren
Weinreich, Wenke | Dissertation |
| 2013 | Heterogeneous 3D integration of hidden hinge micromirror arrays consisting of two layers of monocrystalline silicon
Lapisa, M.; Zimmer, F.; Stemme, G.; Gehner, A.; Niklaus, F. | Journal Article |
| 2013 | High aspect ratio pattern collapse of polymeric UV-nano-imprint molds due to cleaning
Finn, A.; Lu, B.; Kirchner, R.; Thrun, X.; Richter, K.; Fischer, W.-J. | Journal Article |
| 2013 | High-density capacitors for SiP and SoC applications based on three-dimensional integrated metal-isolator-metal structures
Weinreich, Wenke; Rudolph, Matthias; Koch, Johannes; Paul, Jan; Seidel, Konrad; Riedel, Stefan; Sundqvist, Jonas | Conference Paper |
| 2013 | High-temperature UHF RFID sensor measurements in a full-metal environment
Heiß, Michael; Hildebrandt, Ralf | Conference Paper |
| 2013 | Hybrid assembly of micro scanner arrays with large aperture and their system integration
Sandner, Thilo; Wildenhain, Michael; Schwarzenberg, Markus; Schenk, Harald | Conference Paper |
| 2013 | Impact of layer thickness on the ferroelectric behaviour of silicon doped hafnium oxide thin films
Yurchuk, E.; Müller, J.; Knebel, S.; Sundqvist, J.; Graham, A.P.; Melde, T.; Schröder, U.; Mikolajick, T. | Conference Paper, Journal Article |
| 2013 | Influence of copper on the diffusion length of the minority carriers in devices based on n-type Si/SiO2
Kolkovsky, V.; Lukat, K. | Journal Article, Conference Paper |
| 2013 | Influence of high-energy electron irradiation on ultra-low-k characteristics and transistor performance
Steidel, Katja; Choi, Kang-Hoon; Freitag, Martin; Gutsch, Manuela; Hohle, Christoph; Seidel, Robert; Thrun, Xaver; Werner, Thomas | Conference Paper |
| 2013 | Inkjet printed humidity threshold monitoring sensor solution with irreversible resistance change for passive RFID applications
Sauer, Sebastian; Türke, Alexander; Weder, Andreas; Fischer, Wolf-Joachim | Conference Paper |
| 2013 | Integrated electro-optical waveguide based devices with liquid crystals on a silicon Backplane
Costache, Florenta | Presentation |
| 2013 | Integration of multi-level MOEMS structure on CMOS for spatial light modulators
Friedrichs, Martin; List, Matthias; Müller, Michael | Conference Paper |
| 2013 | Interface engineering for the TaN/Ta barrier film deposition process to control Ta-crystal growth
Gerlich, L.; Ohsiek, S.; Klein, C.; Geiß, M.; Friedemann, M.; Kücher, P.; Schmeißer, D. | Journal Article |
| 2013 | Konzeptioneller Bauelemententwurf eines quasistatischen Mikroscanners mit Hybrid-Antrieb und großer Spiegelapertur zur hochdynamischen und präzisen zweidimensionalen Strahlpositionierung
Kimme, Simon
: Sandner, Thilo (Betreuer) | Thesis |
| 2013 | Light absorption in conical silicon particles
Bogdanowicz, J.; Gilbert, M.; Innocenti, N.; Koelling, S.; Vanderheyden, B.; Vandervorst, W. | Journal Article |
| 2013 | Local temperature determination in power loaded surface acoustic wave structures using Raman spectroscopy
Spindler, M.; Uhlig, B.; Menzel, S.B.; Huck, C.; Gemming, T.; Eckert, J. | Journal Article |
| 2013 | A medical wireless measurement system for hip prosthesis loosening detection based on vibration analysis
Sauer, S.; Kirsten, S.; Storck, F.; Grätz, H.; Marschner, U.; Ruwisch, D.; Fischer, W.-J. | Journal Article, Conference Paper |
| 2013 | MEMS-mirror tilt-detection based on a quadrant diode scheme
Tortschanoff, A.; Baumgart, M.; Holzmann, D.; Lenzhofer, M.; Mayer, Ch.; Sandner, T. | Conference Paper |
| 2013 | Mesoscopic analysis of leakage current suppression in ZrO2/Al2O3/ZrO2 nano-laminates
Martin, D.; Grube, M.; Weinreich, W.; Müller, J.; Weber, W.M.; Schröder, U.; Riechert, H.; Mikolajick, T. | Journal Article |
| 2013 | A method for characterizing the pad surface texture and modeling its impact on the planarization in CMP
Vasilev, B.; Bott, S.; Rzehak, R.; Liske, R.; Bartha, J.W. | Journal Article |
| 2013 | Metrology variability and its impact in process modeling
Figueiro, T.; Saib, M.; Choi, K.-H.; Hohle, C.; Thornton, M.J.; Vannufel, C.; Tortai, J.-H.; Schiavone, P. | Conference Paper |
| 2013 | Micro mirror array activities at the Fraunhofer IPMS Dresden
Bunce, Chris | Presentation |
| 2013 | Micro mirror arrays as high-resolution spatial light modulators for photoactivation and optogenetics
Rückerl, F.; Kielhorn, Martin; Tinevez, J.-Y.; Heber, Jörg; Heintzmann, R.; Shorte, S. | Conference Paper |
| 2013 | Micro-scanning mirrors for high-power laser applications in laser surgery
Sandner, T.; Kimme, S.; Grasshoff, T.; Todt, U.; Graf, A.; Tulea, C.; Lenenbach, A.; Schenk, H. | Conference Paper |
| 2013 | Mikrosysteme, MEMS und MOEMS vom Fraunhofer-IPMS
Biedorf, R. | Journal Article |
| 2013 | Ein mobiles System zur herzschlaggenauen Überwachung von Blutdruck und Stressniveau
Pietzsch, Marcus; Weder, Andreas | Conference Paper |
| 2013 | Modeling and characterization of a vernier latching MEMS variable optical attenuator
Unamuno, A.; Blue, R.; Uttamchandani, D. | Journal Article |
| 2013 | Modellgestützte Bewegungsführung von quasistatischen Mikroscannern
Schroedter, Richard; Roth, Matthias; Sandner, Thilo; Janschek, Klaus | Conference Paper |
| 2013 | A modular system for capacitive ecg-acquisition
Despang, H.G.; Weder, A.; Pietzsch, M.; Lindner, O.; Heinig, A.; Rentsch, W.; Paul, A.; Fischer, W.-J. | Journal Article |
| 2013 | Multi-gigabit class optical wireless indoor communication
Deicke, Frank; Faulwaßer, Michael; Schneider, Tobias | Conference Paper |
| 2013 | Nanoimprint assisted inkjet printing to fabricate sub-micron channel organic field effect transistors
Teng, L.; Plötner, M.; Türke, A.; Adolphi, B.; Finn, A.; Kirchner, R.; Fischer, W.-J. | Journal Article |
| 2013 | New applications for ultrasound technology through CMUTs
Unamuno, Anartz | Presentation |
| 2013 | A novel technology for the high-volume production of intelligent composite structures with integrated piezoceramic sensors and electronic components
Weder, A.; Geller, S.; Heinig, A.; Tyczynski, T.; Hufenbach, W.; Fischer, W.-J. | Journal Article, Conference Paper |
| 2013 | OLED - Die Flächenlichtquelle
Rahnfeld, Christian | Journal Article |
| 2013 | Optical guiding and loss mechanisms in electro-optically induced waveguides based on isotropic phase liquid crystals
Blasl, Martin; Hartwig, Haldor; Bornhorst, Kirstin; Costache, Florenta | Conference Paper |
| 2013 | Optical modulator based on electro-optically induced waveguides
Blasl, Martin; Hartwig, Haldor; Bornhorst, Kirstin; Costache, Florenta | Abstract |
| 2013 | Optical position feedback of quasi-static 2D MOEMS mirrors
Tortschanoff, A.; Baumgart, M.; Holzmann, D.; Lenzhofer, M.; Sandner, T.; Kenda, A. | Conference Paper |
| 2013 | Optimal laser positioning for laser-assisted atom probe tomography
Koelling, S.; Innocenti, N.; Bogdanowicz, J.; Vandervorst, W. | Journal Article, Conference Paper |
| 2013 | Optimization of screen printing processes for OLED substrate patterning
Philipp, André; Hild, Olaf Rüdiger; Leo, Karl; Baumann, Reinhard R. | Conference Paper |
| 2013 | Optimized electrode and interface for enhanced reliability of high-k based metal-insulator-metal capacitors
Koch, Johannes; Seidel, Konrad; Weinreich, Wenke; Riedel, Stefan; Chiang, Jung-Chin; Beyer, Volkhard | Journal Article |
| 2013 | Optische drahtlose Kommunikation für High-Speed Datenlinks
Deicke, Frank | Conference Paper |
| 2013 | Optische Kalibrierung von diffraktiven Mikrospiegelarrays
Berndt, Dirk | Dissertation |
| 2013 | Pad roughness evolution during break-in and its abrasion due to the pad-wafer contact in oxide CMP
Vasilev, B.; Bott, S.; Rzehak, R.; Bartha, J.W. | Journal Article |
| 2013 | Parameterizing radiative transfer to convert MAX-DOAS dSCDs into near-surface box-averaged mixing ratios
Sinreich, R.; Merten, A.; Molina, L.; Volkamer, R. | Journal Article |
| 2013 | Performance investigation and optimization of Si:HfO2 FeFETs on a 28 nm bulk technology
Mueller, S.; Yurchuk, E.; Slesazeck, S.; Mikolajick, T.; Müller, J.; Herrmann, T.; Zaka, A. | Conference Paper |
| 2013 | Publisher's Note: “Sponge-like Si-SiO2 nanocomposite—Morphology studies of spinodally decomposed silicon-rich oxide” [Appl. Phys. Lett. 103, 131911 (2013)]
Friedrich, D.; Schmidt, B.; Heinig, K.H.; Liedke, B.; Mücklich, A.; Hübner, R.; Wolf, D.; Kölling, S.; Mikolajick, T. | Journal Article |
| 2013 | QRS pattern recognition using a simple clustering approach for continuous data
Noack, Alexander; Poll, Rüdiger; Fischer, Wolf-Joachim; Zaunseder, Sebastian | Conference Paper |
| 2013 | Quasi-static microscanner with linearized scanning for an adaptive 3D-laser camera
Sandner, Thilo; Grasshoff, Thomas; Schwarzenberg, Markus; Schenk, Harald | Conference Paper |
| 2013 | Quasi-static microscanner with linearized scanning for an adaptive 3D-lasercamera
Sandner, T.; Grasshoff, T.; Schwarzenberg, M.; Schenk, H. | Conference Paper |
| 2013 | Reliability characteristics of ferroelectric Si: HfO2 thin films for memory applications
Mueller, S.; Müller, J.; Schroeder, U.; Mikolajick, T. | Journal Article |
| 2013 | Reliability comparison of pure ZrO2 and Al- doped ZrO2 MIM capacitors
Seidel, K.; Weinreich, Wenke; Polakowski, P.; Triyoso, D.H.; Nolan, M.G.; Yiang, K.Y.; Chu, S. | Conference Paper |
| 2013 | Room temperature bonding for vacuum applications: Climatic and long time tests
Langa, Sergiu; Utsumi, J.; Ludewig, Thomas; Drabe, Christian | Journal Article |
| 2013 | Scaling and optimization of high-density integrated Si-capacitors
Weinreich, W.; Seidel, K.; Rudolph, M.; Koch, J.; Paul, J.; Riedel, S.; Sundqvist, J.; Steidel, K.; Gutsch, M.; Beyer, V.; Hohle, C. | Conference Paper |
| 2013 | Small molecule bulk heterojunction organic solar cells with coumarin-6 as donor material
Beyer, Beatrice; Griese, Daniel; Schirrmann, Christian; Pfeifer, Richard; Kahmann, Simon; Hild, Olaf Rüdiger; Leo, Karl | Journal Article |
| 2013 | SmartVital - Advanced Cardiac Health Monitoring
Noack, Aexander; Pietzsch, Marcus; Zimmerling, Martin; Poll, Rüdiger | Presentation |
| 2013 | Sponge-like Si-SiO2 nanocomposite - Morphology studies of spinodally decomposed silicon-rich oxide
Friedrich, D.; Schmidt, B.; Heinig, K.H.; Liedke, B.; Mücklich, A.; Hübner, R.; Wolf, D.; Kölling, S.; Mikolajick, T. | Journal Article |
| 2013 | Strain-enhanced nanoparticle electrostrictive polymer blends for actuator applications
Pawlik, Boscij; Schirrmann, Christian; Bornhorst, Kirstin; Costache, Florenta | Conference Paper |
| 2013 | Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and doping
Weinreich, W.; Wilde, L.; Müller, J.; Sundqvist, J.; Erben, E.; Heitmann, J.; Lemberger, M.; Bauer, A.J. | Journal Article |
| 2013 | TEMAZ/O-3 atomic layer deposition process with doubled growth rate and optimized interface properties in metal-insulator-metal capacitors
Weinreich, W.; Tauchnitz, T.; Polakowski, P.; Drescher, M.; Riedel, S.; Sundqvist, J.; Seidel, K.; Shirazi, M.; Elliott, S.D.; Ohsiek, S.; Erben, E.; Trui, B. | Journal Article |
| 2013 | Thermal and spin-transfer-torque excitation of precessional modes in magnetic tunnel junction nanopillars with symmetric interfaces and a thick free layer
Gangmei, P.; Neudert, A.; Marcham, M.K.; Hicken, R.J.; Gubbins, M.A.; Cao, X.; Lamberton, R.R.; Johnston, A.B. | Journal Article |
| 2013 | Validation of a heart beat clustering algorithm for an ambulant holter monitoring device
Noack, Alexander; Pietzsch, Marcus; Zimmerling, Martin; Weder, Andreas | Conference Paper |
| 2013 | Validation of the use of heart rate variability measurements during meal intake in humans
Päßler, Sebastian; Noack, Alexander; Poll, Rüdiger; Fischer, Wolf-Joachim | Conference Paper |
| 2013 | Wafer level vacuum packaging of micro-mirrors with buried wiring
Langa, Sergiu; Drabe, Christian; Herrmann, Andreas; Ludewig, Thomas; Rieck, Andreas; Flemming, André; Kaden, Christiane | Poster |
| 2013 | Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods
Langa, Sergiu; Drabe, Christian; Kunath, Christian; Dreyhaupt, André; Schenk, Harald | Conference Paper |
| 2013 | Wake-up effects in Si-doped hafnium oxide ferroelectric thin films
Zhou, D.Y.; Xu, J.; Li, Q.; Guan, Y.; Cao, F.; Dong, X.L.; Müller, J.; Schenk, T.; Schröder, U. | Journal Article |
| 2013 | A wearable system for non-invasive beat-to-beat blood pressure estimations
Weder, Andreas; Pietzsch, Marcus; Zimmerling, Martin; Fischer, Wolf-Joachim | Poster |
| 2012 | 100. Geburtstag von Werner Hartmann (1912-1988), Begründer der Mikroelektronik im Osten Deutschlands
Becker, Hans W. | Book Article |
| 2012 | AAL-Anwendungen von Smart Vital
Despang, Hans Günter; Heinig, Andreas; Holland, Hans Jürgen; Fischer, Wolf-Joachim; Mehl, Susann; Henrich, Dietmar | Conference Paper |
| 2012 | Adaptation of models for food intake sound recognition using maximum a posteriori estimation algorithm
Päßler, Sebastian; Fischer, Wolf-Joachim; Kraljevski, I. | Conference Paper |
| 2012 | Advances in performance and miniaturization of a FT-IR spectrometer system based on a large stroke MOEMS piston mirror
Kenda, A.; Sandner, T.; Lüttjohann, S.; Kraft, M.; Tortschanoff, A.; Simon, A. | Conference Paper |
| 2012 | Anti stress app
Malberg, H.; Ziaziulchyk, L.; Braer, M.; Hoffmann, M.; Mittag, A.; Huhle, R.; Zaunseder, S.; Bonnemeier, H.; Heinig, A.; Fischer, W.-J. | Conference Paper, Journal Article |
| 2012 | Aspects of a head-mounted eye-tracker based on a bidirectional OLED microdisplay
Baumgarten, Judith; Schuchert, Tobias; Voth, Sascha; Wartenberg, Philipp; Richter, Bernd; Vogel, Uwe | Journal Article |
| 2012 | Ein Beitrag zur Steuerung und Regelung für quasistatische Mikrospiegel
Schroedter, Richard
: Sandner, Thilo (Betreuer) | Thesis |
| 2012 | Bi-resonant scanning mirror with piezo-resistive position sensor for WVGA laser projection systems
Drabe, C.; Kallweit, D.; Dreyhaupt, A.; Grahmann, J.; Schenk, H.; Davis, W. | Conference Paper |
| 2012 | Biosensing with optical waveguides
Schuster, Tobias; Landgraf, René; Finn, Andreas; Mertig, M. | Book Article |
| 2012 | Closed-loop control for quasi-static MOEMS mirrors
Tortschanoff, A.; Holzmann, D.; Lenzhofer, M.; Sandner, T. | Conference Paper |
| 2012 | Compact patch antenna with space for integrating sensors for an RFID-sensor-node
Heiß, Michael; Fischer, Wolf-Joachim | Conference Paper |
| 2012 | Confocal fluorescence microscope for clinical dermatologic applications
Bechtel, Christin; Knobbe, Jens; Grüger, Heinrich; Lakner, Hubert | Conference Paper |
| 2012 | Defekterkennung mittels IR Bildaufnahme auf flexiblen OLED Substraten
Bruchmann, Jens
: Mogck, Stefan (Betreuer) | Bachelor Thesis |
| 2012 | Design and realization of a flexible QQVGA AMOLED display with organic TFTs
Steudel, S.; Myny, K.; Schols, S.; Vicca, P.; Smout, S.; Tripathi, A.; Putten, B. van der; Steen, J.-L. van der; Neer, M. van; Schütze, F.; Hild, O.R.; Veenendaal, E. van; Lieshout, P. van; Mil, M. van; Genoe, J.; Gelinck, G.; Heremans, P. | Journal Article |
| 2012 | Design of a confocal fluorescence microscope - Space saving and affordable
Bechtel, C.; Knobbe, J.; Grüger, H.; Lakner, H.; Reichert, F. | Conference Paper |
| 2012 | Design of an affordable fluorescence confocal laser scanning microscope for medical diagnostics
Bechtel, Christin; Knobbe, Jens; Grüger, Heinrich; Lakner, Hubert | Conference Paper |
| 2012 | Design of an optical position detection unit for fast 2D-MOEMS scanners
Tortschanoff, A.; Sandner, Thilo; Kenda, A. | Conference Paper |
| 2012 | The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrors
Grahman, Jan; Jung, Denis; Kallweit, David; Sandner, Thilo; Graßhoff, Thomas; Schenk, Harald | Conference Paper |
| 2012 | Direct encapsulation of OLED on CMOS
Schmidt, C. | Book Article |
| 2012 | Direct nanoimprinting for micro- and nanosystems
Kirchner, Robert; Derix, J.; Nocke, A.; Landgraf, René | Book Article |
| 2012 | Drift-free micromirror arrays made of monocrystalline silicon for adaptive optics applications
Lapisa, M.; Zimmer, F.; Stemme, G.; Gehner, A.; Niklaus, F. | Journal Article |
| 2012 | Effect of the openings in a compact patch antenna for an RFID-sensor-node
Heiß, Michael | Conference Paper |
| 2012 | Elimination of interfering signals in 24 Bit electrocardiograms using wavelet packet transformation
Gräßer, Felix Magnus
: Noack, Alexander (Betreuer) | Thesis |
| 2012 | Entwicklung eines Multi-Gigabit-Moduls für die optische drahtlose Kommunikation
Röder, Thomas
: Deicke, Frank (Betreuer) | Thesis |
| 2012 | Entwicklung und Charakterisierung einer Giga-IR Entwicklungsplattform für die drahtlose Infrarotdatenübertragung
Faulwaßer, Michael
: Deicke, Frank (Betreuer) | Thesis |
| 2012 | Erarbeitung eines Technologiekosten-Verrechnungssystems für den Mikrodisplay-Reinraum des Fraunhofer IPMS/COMEDD
Franke, Juliana
: Böttger, Katja (Betreuer) | Bachelor Thesis |
| 2012 | Erstinbetriebnahme, Optimierung und Messreihen an einem telemedizinischen System zur Erfassung von EKG- und Pulswellen
Schwarz, Eric
: Heinig, A. (Betreuer) | Bachelor Thesis |
| 2012 | Evaluation of Algorithms for Chew Event Detection
Päßler, Sebastian; Fischer, Wolf-Joachim | Conference Paper |
| 2012 | Fabrication and characterization of sub-500 nm channel organic field effect transistor using UV nanoimprint lithography with cheap Si-mold
Teng, L.; Kirchner, R.; Plötner, M.; Türke, A.; Jahn, A.; He, J.; Hagemann, F.; Fischer, W.-J. | Journal Article, Conference Paper |
| 2012 | Flexible QQVGA AMOLED display with organic TFTs
Steudel, S.; Myny, K.; Schols, S.; Vicca, P.; Smout, S.; Tripathi, A.; Putten, B. van der; Steen, J.-L. van der; Neer, M. van; Schütze, F.; Hild, O.R.; Veenendaal, E. van; Mil, M. van; Genoe, J.; Gelinck, G.; Heremans, P. | Conference Paper |
| 2012 | Food intake activity detection using an artificial neural network
Päßler, Sebastian | Conference Paper, Journal Article |
| 2012 | Food intake monitoring: An acoustical approach to automated food intake activity detection and classification of consumed food
Päßler, Sebastian; Wolff, Matthias; Fischer, Wolf-Joachim | Journal Article |
| 2012 | Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2011
| Annual Report |
| 2012 | Herstellung und Charakterisierung hocheffizienter, mikromechanischer NIR-Beugungsgitter für den Einsatz in miniaturisierten Spektrometern
Zimmer, Fabian
: Schenk, Harald; Schmeißer, Dieter; Hoffmann, Martin | Dissertation |
| 2012 | Integrated electro-optical switching with phase-modified liquid crystal blends
Costache, Florenta; Blasl, Martin; Bornhorst, Kirstin; Rieck, Andreas; Hartwig, Haldor | Conference Paper |
| 2012 | Integration of piezoceramic sensor elements and electronic components in glass fibre reinforced polyurethane composite structures
Weder, Andreas; Geller, S.; Heinig, Andreas; Tyczynski, T.; Hufenbach, W.; Fischer, Wolf-Joachim | Journal Article, Conference Paper |
| 2012 | Laser projector solution based on two 1D resonant scanning micromirrors assembled in a low vertical distortion scan head
Grahmann, J.; Wildenhain, M.; Graßhoff, T.; Gerwig, C.; Dallmann, H.-G.; Wolter, A.; Schenk, H. | Conference Paper |
| 2012 | Li-Fi: A new paradigm in wireless communications
Deicke, Frank; Kraus, W.; Schwartz, J.; Wiedemann, R. | Journal Article |
| 2012 | Lighting of the future: Roll-to-roll fabrication for flexible OLED lighting
May, Christian; Mogck, Stefan | Journal Article |
| 2012 | Micromirror displays
Schenk, Harald; Hornbeck, Larry J. | Book Article |
| 2012 | Micromirror-based sending and detection optical assembly for time-of-flight laser scanners
Satzer, Britta; Baulig, Claudia; Sandner, Thilo; Schwarzer, S. | Conference Paper |
| 2012 | Monolithic integration of MOEMS on CMOS backplanes using surface micromachining techniques
List, Matthias; Friedrichs, Martin; Müller, Michael | Conference Paper |
| 2012 | Neuartiges Bauteilkonzept quasistatisch-resonanter 2D-Mikroscanner für die Zielanwendung ultrakompakter Laserprojektionsdisplays
Jung, D. | Dissertation |
| 2012 | On UV-nanoimprint-lithography as direct patterning tool for polymeric microsystems
Kirchner, Robert | Dissertation |
| 2012 | On-chip electro-optic waveguides in isotropic liquid crystal blends for switching applications
Costache, Florenta; Blasl, Martin; Bornhorst, Kirstin; Schenk, Harald | Conference Paper |
| 2012 | One-dimensional light modulator
Sinning, Steffen; Wullinger, I.; Schmidt, Jan-Uwe; Friedrichs, Martin; Dauderstädt, Ulrike; Wolschke, Steffen; Hughes, Thomas; Pahner, D.; Wagner, Michael | Conference Paper |
| 2012 | Optical position feedback for electrostatically driven MOEMS scanners
Tortschanoff, Andreas; Baumgart, M.; Frank, Albert; Wildenhain, Michael; Sandner, Thilo; Schenk, Harald; Kenda, Andreas | Conference Paper |
| 2012 | Optical wireless communication to eco-system
Deicke, Frank; Fischer, Wolf-Joachim; Faulwaßer, Michael | Conference Paper |
| 2012 | Passive wireless irreversible humidity threshold sensor exploiting the deliquescence behavior of salts
Sauer, S.; Fischer, W.-J. | Conference Paper |
| 2012 | Photonic smart systems
Scholles, Michael | Conference Paper |
| 2012 | Planar optical microring resonators used as biosensors: Guidelines for designing polymer compared to semiconductor-based waveguides
Landgraf, René; Haugwitz, Toni; Kirchner, Robert; Fischer, Wolf-Joachim | Conference Paper |
| 2012 | Polymer microring resonator directly patterned by multilevel-nanoimprint: Integration into a biosensor system with a miniaturized microfluidic system
Landgraf, René; Kirchner, Robert; Finn, Anthony; Arndt, Susann; Haugwitz, Toni; Deicke, Frank; Fischer, Wolf-Joachim | Conference Paper |
| 2012 | Process challenges for flexible OLED lighting
May, Christian | Conference Paper |
| 2012 | Production technologies for large area rigid and flexible OLED for lighting
May, Christian | Conference Paper |
| 2012 | Progress in miniaturization of a MEMS based hybrid-integrated NIR spectrometer
Grüger, Heinrich; Scholles, Michael | Conference Paper |
| 2012 | Realization of a hybrid-integrated MEMS scanning grating spectrometer
Pügner, Tino; Knobbe, Jens; Grüger, Heinrich; Schenk, Harald | Conference Paper |
| 2012 | Roll-to-roll processing of flexible OLED for lighting applications
May, Christian; Mogck, Stefan | Conference Paper |
| 2012 | Semi-transparent small molecule organic solar cells with laminated free-standing carbon nanotube top electrodes
Kim, Y.H.; Müller-Meskamp, L.; Zakhidov, A.A.; Sachse, C.; Meiss, J.; Bikova, J.; Cook, A.; Zakhidov, A.A.; Leo, K. | Journal Article |
| 2012 | Setup and properties of a fully inkjet printed humidity sensor on PET substrate
Starke, E.; Turke, A.; Schneider, M.; Fischer, W.-J. | Conference Paper |
| 2012 | A simulation model for WBSN protocol design
Weder, A. | Conference Paper |
| 2012 | Stamp-and-repeat UV-imprinting of spin-coated films: Pre-exposure and imprint defects
Kirchner, R.; Nüske, L.; Finn, A.; Lu, B.; Fischer, W.-J. | Journal Article, Conference Paper |
| 2012 | Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers
Sandner, T.; Grasshoff, T.; Schenk, H.; Kenda, A. | Conference Paper |
| 2012 | Transparente leitfähige Elektroden
Müller-Meskamp, Lars; Sachse, Christoph; Kim, Yong Hyun; Furno, Mauro; May, Christian; Leo, Karl | Journal Article |
| 2012 | Treiber- und Applikationsentwicklung für optische drahtlose High-Speed Datenübertragung
Fortenbacher, Michael
: Deicke, Frank (Betreuer) | Master Thesis |
| 2012 | Untersuchungen zur Bildqualität eines Microscanner-basierten Laserprojektionssystems
Wildenhain, Michael | Master Thesis |
| 2012 | UV-based nanoimprint lithography: Toward direct patterning of functional polymers
Kirchner, Robert; Finn, Andreas; Landgraf, René; Nueske, Lutz; Vogler, M.; Fischer, Wolf-Joachim | Journal Article |
| 2012 | Verkapselungstechnologie mit justiertem adhäsiven Waferbonden für OLED-auf-CMOS-Anwendungen
Schmidt, C. | Dissertation |
| 2012 | Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications
Jung, Denis; Sandner, Thilo; Kallweit, David; Schenk, Harald | Conference Paper |
| 2012 | A wireless double planar coil sensor arrangement for monitoring capacitance changes due to water uptake embedded in a thin fiber-reinforced composite
Sauer, S.; Fischer, W.-J. | Journal Article, Conference Paper |
| 2012 | Wireless RFID chip impedance measurement by using an reader and a statistically analysis
Heiß, Michael | Conference Paper |
| 2012 | Wireless UHF RFID chip impedance measurement by only using an RFID reader
Heiß, Michael; Fischer, Wolf-Joachim | Conference Paper |