Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020A 4H-SiC UV Phototransistor with Excellent Optical Gain Based on Controlled Potential Barrier
Benedetto, L. di; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Rubino, A.
Journal Article
2020Active common-mode filter for capacitive-coupled isolated signalling
Angerer Martin; Schwanninger Raffael; März, Martin
Journal Article
2020Application of response surface methodology for optimization of Ag-Ag Direct Bonding for Wafer-Level Power Electronics Packaging
Yu, Zechun; Zeng, Weijian; Bayer, Christoph Friedrich; Schletz, Andreas; März, Martin
Conference Paper
2020Comprehensive accuracy examination of electrical power loss measurements of inductive components for frequencies up to 1 MHz
Stolzke, T.; Ehrlich, S.; Joffe, C.; März, M.
Journal Article
2020Depth Profiling of Ion-Implanted 4H-SiC Using Confocal Raman Spectroscopy
Song, Ying; Xu, Zongwei; Liu, Tao; Rommel, Mathias; Wang, Hong; Wang, Yufang; Fang, Fengzhou
Journal Article
2020Failure analysis of normally-off GaN HEMTs under avalanche conditions
Martinez, P.J.; Letz, S.; Maset, E.; Zhao, D.
Journal Article
2020Highly Integrated Switching Cell Design based on Copper Diamond Heat Spreader, 3D Printed Heat Sink and HTCC Logic Board
Sewergin, Alexander; Rittner, Martin; Burghardt, Andreas; Kriegel, Kai; Mitic, Gerhard; Zetterer, Thomas; Hutsch, Thomas; Neumann, Albert; Simon, Flaviu-Bogdan; Doncker, Rik W. de
Conference Paper
2020Impact of different SiO2 diffusion barrier layers on lifetime distribution in multi-crystalline silicon ingots
Trempa, M.; Sturm, F.; Kranert, C.; Schwanke, S.; Reimann, C.; Friedrich, J.; Schenk, C.
Journal Article
2020Integrated Passive Devices and Switching Circuit Design for a 3D DC/DC Converter up to 60 V
Saponara, S.; Ciarpi, G.; Erlbacher, Tobias; Rattmann, Gudrun
Journal Article
2020Integration of Printed Electronics in Potted Power Electronic Modules
Zimmermann, Victoria; Zoerner, Alicia; Yu, Zechun; Jank, Michael; Bayer, Christoph Friedrich; Schletz, Andreas; März, Martin
Conference Paper
2020Interplay between C-doping, threading dislocations, breakdown, and leakage in GaN on Si HEMT structures
Besendörfer, S.; Meissner, E.; Zweipfennig, T.; Yacoub, H.; Fahle, D.; Behmenburg, H.; Kalisch, H.; Vescan, A.; Friedrich, J.; Erlbacher, T.
Journal Article
2020Investigation of gas bubble growth in fused silica crucibles for silicon Czochralski crystal growth
Hirsch, A.; Trempa, M.; Kupka, I.; Schmidtner, L.; Kranert, C.; Reimann, C.; Friedrich, J.
Journal Article
2020An Iterative Surface Potential Algorithm including Interface Traps for Compact Modeling of SiC-MOSFETs
Albrecht, M.; Klüpfel, F.J.; Erlbacher, T.
Journal Article
2020A Method for the Characterization of Adhesion Strength Degradation of Thin Films on Si-Substrate under Thermal Cycling Test
Zhao, Dawei; Letz, Sebastian; Schletz, Andreas; März, Martin
Conference Paper
2020Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches
Xu, Zongwei; Liu, Lei; He, Zhongdu; Tian, Dongyu; Hartmaier, Alexander; Zhang, Junjie; Luo, Xichun; Rommel, Mathias; Nordlund, Kai; Zhang, Guoxiong; Fang, Fengzhou
Journal Article
2020Recent progress of high temperature vapor phase epitaxy for the growth of GaN layers - Controlled coalescence of nucleation layers
Schneider, T.; Förste, M.; Lukin, G.; Fischer, P.; Barchuk, M.; Schimpf, C.; Niederschlag, E.; Pätzold, O.; Rafaja, D.; Stelter, M.
Journal Article
2020Selektives Ag-Sintern auf Organischer Leiterplatte
Novak, M.; Grübl, W.; Müller, J.; Schletz, A.
Conference Paper
2020SiC Power Module with integrated RC-Snubber Design for Voltage Overshoot and Power Loss Reduction
Rettner, Cornelius; Schiedermeyer, Maximilian; Apelsmeier, Andreas; Heckel, Thomas; Diepgen, Antonia; Klische, Alexander; Dirksen, Daniel; März, Martin
Conference Paper
2020Vertical breakdown of GaN on Si due to V-pits
Besendörfer, S.; Meissner, E.; Tajalli, A.; Meneghini, M.; Freitas, J.A.; Derluyn, J.; Medjdoub, F.; Meneghesso, G.; Friedrich, J.; Erlbacher, T.
Journal Article
2020Vertical Leakage in GaN-on-Si Stacks Investigated by a Buffer Decomposition Experiment
Tajalli, A.; Borga, M.; Meneghini, M.; Santi, C.D.; Benazzi, D.; Besendörfer, S.; Püsche, R.; Derluyn, J.; Degroote, S.; Germain, M.; Kabouche, R.; Abid, I.; Meissner, E.; Zanoni, E.; Medjdoub, F.; Meneghesso, G.
Journal Article
20191700V 34mΩ 4H-SiC MOSFET With Retrograde Doping in Junction Field-Effect Transistor Region
Ni, W.; Wang, X.; Xiao, H.; Xu, M.; Li, M.; Schlichting, H.; Erlbacher, T.
Conference Paper
20193D mask effects in high NA EUV imaging
Erdmann, A.; Evanschitzky, P.; Bottiglieri, G.; Setten, E. van; Fliervoet, T.
Conference Paper
20193D-Integrated Multi-Sensor Demonstrator System for Environmental Monitoring
Köck, A.; Wimmer-Teubenbacher, R.; Sosada-Ludwikovska, F.; Rohracher, K.; Wachmann, E.; Herold, M.; Welden, T. an; Kim, J.M.; Ali, Z.; Poenninger, A.; Stahl-Offergeld, M.; Hohe, H.-P.; Lorenz, J.; Erlbacher, T.; Dolmans, G.; Offermans, P.; Vandecasteele, M.; Yurchenko, O.; Sicard, O. von; Pohle, R.; Udrea, F.; Falco, C.; Flandre, D.; Bol, D.; Comini, E.; Zappa, D.; Gardner, J.; Cole, M.; Theunis, J.; Peters, J.; Baldwin, A.
Conference Paper
2019Aktiver Filter zur Filterung von Gleichtaktstörungen
Schwanninger, Raffael; Angerer, Martin; März, Martin
Patent
2019Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC
Weiße, J.; Hauck, M.; Krieger, M.; Bauer, A.J.; Erlbacher, T.
Journal Article
2019Analysis of the geometry of the growth ridges and correlation to the thermal gradient during growth of silicon crystals by the Czochralski-method
Stockmeier, Ludwig; Kranert, Christian; Fischer, Peter; Epelbaum, Boris; Reimann, Christian; Friedrich, Jochen; Raming, Georg; Miller, Alfred
Journal Article
2019Attenuated phase shift mask for extreme ultraviolet: Can they mitigate three-dimensional mask effects?
Erdmann, A.; Evanschitzky, P.; Mesilhy, H.; Philipsen, V.; Hendrickx, E.; Bauer, M.
Journal Article
2019Bewertung von Bondverbindungen - Möglichkeiten, Normen und Herausforderungen
Dirksen, Daniel
Presentation
2019A Cascaded Control Concept for Modular Multilevel Converters with Capacitor Voltage Estimation using a Kalman Filter
Ruccius, Benjamin; Kraus, Thomas; Westermann, Robin; Heckel, Thomas; März, Martin; Wagner, Bernhard
Conference Paper
2019Ceramic Embedding Technologies for High Temperature Power Electronics
Bach, Linh; Yu, Zechun
Presentation
2019Channeling in 4H-SiC from an Application Point of View
Pichler, Peter; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton J.; Erlbacher, Tobias
Conference Paper
2019Characterization of a silicon carbide BCD process for 300°C circuits
Abbasi, A.; Roy, S.; Murphree, R.; Rashid, A.-U.; Hossain, M.M.; Lai, P.; Fraley, J.; Erlbacher, T.; Chen, Z.; Mantooth, A.
Conference Paper
2019A Compact Model Based on Bardeens Transfer Hamiltonian Formalism for Silicon Single Electron Transistors
Klüpfel, Fabian J.
Journal Article
2019Comparison between Ni-SALICIDE and Self-Aligned Lift-Off Used in Fabrication of Ohmic Contacts for SiC Power MOSFET
Sledziewski, Tomasz; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar; Chen, Ximing; Zhao, Yanli; Li, Chengzhan; Dai, Xiaoping
Conference Paper
2019Comprehensive SPICE Model for Power Inductor Losses
Ehrlich, S.; Joffe, C.; Thielke, H.; Leinfelder, M.; März, M.
Conference Paper
2019Considerations on the limitations of the growth rate during pulling of silicon crystals by the Czochralski technique for PV applications
Friedrich, J.; Jung, T.; Trempa, M.; Reimann, C.; Denisov, A.; Muehe, A.
Journal Article
2019Corrigendum to "Particle engulfment dynamics under oscillating crystal growth conditions" [J. Crystal Growth 468 (2017) 24-27]
Tao, Y.; Sorgenfrei, T.; Jauß, T.; Cröll, A.; Reimann, C.; Friedrich, J.; Derby, J.J.
Journal Article
2019Corrosion in PE Systems - Environmental Testing, Corrosion Detection and Protection
Zimmermann, Victoria; Diepgen, Antonia; Bayer, Christoph Friedrich
Presentation
2019Decoration of Al Implantation Profiles in 4H-SiC by Bevel Grinding and Dry Oxidation
Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Conference Paper
2019Deeper insight into lifetime-engineering in 4H-SiC by ion implantation
Erlekampf, J.; Kallinger, B.; Weiße, J.; Rommel, M.; Berwian, P.; Friedrich, J.; Erlbacher, T.
Journal Article
2019Depth profiling of ion-implanted 4H-SiC using confocal Raman spectroscopy
Song, Ying; Xu, Zongwei; Liu, Tao; Rommel, Mathias; Wang, Hong; Fang, Fengzhou
Poster
2019Design and fabrication of 3300V 100mΩ 4H-SiC MOSFET with Stepped p-body structure
Ni, W.; Wang, X.; Xu, M.; Li, M.; Feng, C.; Xiao, H.; Li, W.; Wang, Q.; Schlichting, H.; Erlbacher, T.
Conference Paper
2019Design Considerations for Robust Manufacturing and High Yield of 1.2 kV 4H-SiC VDMOS Transistors
Schlichting, H.; Sledziewski, T.; Bauer, A.J.; Erlbacher, T.
Conference Paper
2019Design of a 4H-SiC RESURF n-LDMOS Transistor for High Voltage Integrated Circuits
Weisse, Julietta; Mitlehner, Heinz; Frey, Lothar; Erlbacher, Tobias
Conference Paper
2019Determination of Compensation Ratios of Al-Implanted 4H-SiC by TCAD Modelling of TLM Measurements
Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zong Wei; Erlbacher, Tobias; Bauer, Anton J.
Conference Paper
2019Diffusion of phosphorus and boron from Atomic Layer Deposition oxides into silicon
Beljakova, Svetlana; Pichler, Peter; Kalkofen, Bodo; Hübner, René
Journal Article
2019Electron paramagnetic resonance characterization of aluminum ion implantation induced defects in 4H-SiC
Wang, Xiuhong; Xu, Zongwei; Rommel, Mathias; Dong, Bing; Song, Le; Tee, Clarence Augustine T.H.; Fang, Fengzhou
Journal Article
2019Erlangen - An Important Center of Crystal Growth and Epitaxy. Major Scientific Results and Technological Solutions of the Last Four Decades
Friedrich, J.; Müller, G.
Journal Article
2019Evaluation of improvement strategies of grain structure properties in high performance multi-crystalline silicon ingots
Trempa, M.; Kranert, C.; Kupka, I.; Reimann, C.; Friedrich, J.
Journal Article
2019Feasibility of 4H-SiC p-i-n diode for sensitive temperature measurements between 20.5 K and 802 K
Matthus, C.D.; Benedetto, L. di; Kocher, M.; Bauer, A.J.; Licciardo, G.D.; Rubino, A.; Erlbacher, T.
Journal Article
2019First Experimental Test on Bipolar Mode Field Effect Transistor Prototype in 4H-SiC. A Proof of Concept
Benedetto, L. di; Licciardo, G.D.; Huerner, A.; Erlbacher, T.; Bauer, A.J.; Rubino, A.
Conference Paper
2019Fraunhofer IISB erforscht Korrosion
Bayer, Christoph
Journal Article
2019Future Packaging Technologies in Power Electronic Modules
Bayer, Christoph Friedrich
Presentation
2019Future Packaging Technologies in Power Electronic Modules
Bayer, C.F.
Presentation
2019Heteroepitaxial growth of GaN on sapphire substrates by high temperature vapor phase epitaxy
Lukin, G.; Schneider, T.; Förste, M.; Barchuk, M.; Schimpf, C.; Röder, C.; Zimmermann, F.; Niederschlag, E.; Pätzold, O.; Beyer, F.C.; Rafaja, D.; Stelter, M.
Journal Article
2019Hybrid Cooling Towers in a Free-Cooling Application: Modeling and Field Measurement Verification
Puls, P.; Lange, C.; Öchsner, R.
Journal Article, Conference Paper
2019A hybrid frequency-time-domain approach to determine the vibration fatigue life of electronic devices
Schriefer, T.; Hofmann, M.
Journal Article
2019Improving 5V Digital 4H-SiC CMOS ICs for Operating at 400°C Using PMOS Channel Implantation
Albrecht, M.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2019In Situ Liquid Cell TEM Studies on Etching and Growth Mechanisms of Gold Nanoparticles at a Solid-Liquid-Gas Interface
Hutzler, A.; Fritsch, B.; Jank, M.P.M.; Branscheid, R.; Martens, R.C.; Spiecker, E.; März, M.
Journal Article
2019Influence of Aluminum Compensation Effects in 4H-SiC on the Performance of VDMOS Transistors
Schlichting, Holger; Kocher, Matthias; Weiße, Julietta; Erlbacher, Tobias; Bauer, Anton J.
Poster
2019Influence of Quantum Dot Characteristics on the Performance of Hybrid SET-FET Circuits
Amat, Esteve; Klüpfel, Fabian; Bausells, Joan; Perez-Murano, Francesc
Journal Article
2019Influence of Sacrificial Layer Germanium Content on Stacked-Nanowire FET Performance
Klüpfel, Fabian J.
Journal Article
2019Influence of shallow pits and device design of 4H-SiC VDMOS transistors on in-line defect analysis by using PL scanning
Kocher, Matthias; Schlichting, Holger; Kallinger, Birgit; Rommel, Mathias; Bauer, Anton J.; Erlbacher, Tobias
Poster
2019Influence of Trench Design on the Electrical Properties of 650V 4H-SiC JBS Diodes
Rusch, Oleg; Moult, Jonathan; Erlbacher, Tobias
Conference Paper
2019Innovative Technologien für intelligente dezentrale Energiesysteme
: März, Martin; Öchsner, Richard
Book
2019Large-Area Layer Counting of Two-Dimensional Materials Evaluating the Wavelength Shift in Visible-Reflectance Spectroscopy
Hutzler, Andreas; Matthus, Christian D.; Dolle, Christian; Rommel, Mathias; Jank, Michael P.M.; Spiecker, Erdmann; Frey, Lothar
Journal Article
2019Laser Writing of Scalable Single Color Centers in Silicon Carbide
Chen, Y.-C.; Salter, P.S.; Niethammer, M.; Widmann, M.; Kaiser, F.; Nagy, R.; Morioka, N.; Babin, C.; Erlekampf, J.; Berwian, P.; Booth, M.J.; Wrachtrup, J.
Journal Article
2019Lifetime engineering in 4H-SiC materials and devices
Rommel, Mathias; Erlekampf, Jürgen; Kallinger, Birgit; Weiße, Julietta; Berwian, Patrick; Friedrich, Jochen; Erlbacher, Tobias
Presentation
2019Low-resistance ohmic contact formation by laser annealing of N-implanted 4H-SiC
Hellinger, Carsten; Rusch, Oleg; Rommel, Mathias; Bauer, Anton J.; Erlbacher, Tobias
Poster
2019Luminescent properties of Ce3+ doped LiLuP4O12 tetraphosphate under synchrotron radiation excitation
Zorenko, T.; Paprocki, K.; Levchuk, I.; Batentschuk, M.; Epelbaum, B.; Fedorov, A.; Zorenko, Y.
Journal Article
2019Mask absorber development to enable next-generation EUVL
Philipsen, V.; Luong, K.V.; Opsomer, K.; Souriau, L.; Rip, J.; Detavernier, C.; Erdmann, A.; Evanschitzky, P.; Laubis, C.; Honicke, P.; Soltwisch, V.; Hendrickx, E.
Conference Paper
2019Methodology for the investigation of threading dislocations as a source of vertical leakage in AlGaN/GaN-HEMT heterostructures for power devices
Besendörfer, S.; Meissner, E.; Lesnik, A.; Friedrich, J.; Dadgar, A.; Erlbacher, T.
Journal Article
2019NanoElectronics roadmap for Europe: From nanodevices and innovative materials to system integration
Ahopelto, J.; Ardila, G.; Baldi, L.; Balestra, F.; Belot, D.; Fagas, G.; Gendt, S. de; Demarchi, D.; Fernandez-Bolaños, M.; Holden, D.; Ionescu, A.M.; Meneghesso, G.; Mocuta, A.; Pfeffer, M.; Popp, R.M.; Sangiorgi, E.; Sotomayor Torres, C.M.
Journal Article
2019Ohmic Contact Mechanism for Ni/C-Faced 4H-n-SiC Substrate
Kim, Seongjun; Kim, Hong-Ki; Lim, Minwho; Jeong, Seonghoon; Kang, Min-Jae; Kang, Min-Sik; Lee, Nam-Suk; Coung, Tran Viet; Kim, Hyunsoo; Erlbacher, Tobias; Bauer, Anton J.; Shin, Hoon-Kyu
Journal Article
2019On a Novel Source Technology for Deep Aluminum Diffusion for Silicon Power Electronics
Rattmann, Gudrun; Pichler, Peter; Erlbacher, Tobias
Journal Article
2019On the Origin of Charge Compensation in Aluminum-Implanted n-Type 4H-SiC by Analysis of Hall Effect Measurements
Weisse, Julietta; Hauck, Martin; Sledziewski, Tomasz; Krieger, Michael; Bauer, Anton J.; Mitlehner, Heinz; Frey, Lothar; Erlbacher, Tobias
Conference Paper
2019On-Board-Ladegerät eines Elektro- oder Hybridfahrzeugs
Endres, Stefan; Pfizenmaier, Tim; Spesser, Daniel
Patent
2019Optimierung und Qualifizierung eines Bondprozesses. Tests und Analyseverfahren
Dirksen, Daniel
Presentation
2019Optimization of Ag-Ag Direct Bonding for Wafer-Level Power Electronics Packaging via Design of Experiments
Yu, Z.; Wang, S.; Letz, S.; Bayer, C.F.; Häußler, F.; Schletz, A.; Suganuma, K.
Conference Paper
2019Parylene Coatings in Power Electronic Modules
Diepgen, A.; Zimmermann, V.; Bayer, C.F.; Zhou, Y.; Forster, C.; Wilbers, P.; Leib, J.; Schletz, A.; Virtanen, S.; März, M.
Presentation
2019Performance of 4H-SiC Bipolar Diodes as Temperature Sensor at Low Temperatures
Benedetto, L. di; Matthus, C.D.; Erlbacher, T.; Bauer, A.J.; Licciardo, G.D.; Rubino, A.; Frey, L.
Conference Paper
2019Post-Implantation Annealing of Platinum in Silicon
Johnsson, Anna
: Pichler, Peter; Weigel, Robert
Dissertation
2019Power module platform for automotive reliability requirements
Pavlicek, N.; Liu, C.; Loisy, J.-Y.; Salvatore, G.; Mohn, F.; Schuderer, J.; Apelsmeier, A.; Dresel, F.; Schletz, A.; Vater, S.
Conference Paper
2019Pre-deposition interfacial oxidation and post-deposition interface nitridation of LPCVD TEOS used as gate dielectric on 4H-SiC
Lim, Minwho; Sledziewski, Tomasz; Rommel, Mathias; Erlbacher, Tobias; Kim, Hong-Ki; Kim, Seongjun; Shin, Hoon-Kyu; Bauer, Anton
Poster
2019Preparation of graphene-supported microwell liquid cells for in situ transmission electron microscopy
Hutzler, A.; Fritsch, B.; Jank, M.P.M.; Branscheid, R.; Spiecker, E.; März, M.
Journal Article
2019Process and design optimization of SiC MOSFET for low on-state resistance
Sledziewski, Tomasz; Erlbacher, Tobias; Bauer, Anton
Presentation
2019Process variability - technological challenge and design issue for nanoscale devices
Lorenz, Jürgen; Bär, Eberhard; Barraud, Sylvain; Brown, Andrew R.; Evanschitzky, Peter; Klüpfel, Fabian; Wang, Liping
Journal Article
2019Production of high performance multi-crystalline silicon ingots for PV application by using contamination-free SixNy seed particles
Schwanke, S.; Trempa, M.; Reimann, C.; Kuczynski, M.; Schroll, G.; Sans, J.; Friedrich, J.
Journal Article
2019Publisher’s Note: "Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC" [AIP Advances 9, 055308 (2019)]
Weiße, J.; Hauck, M.; Krieger, M.; Bauer, A.J.; Erlbacher, T.
Journal Article
2019Raman Characterization of Carrier Concentrations of Al-implanted 4H-SiC with Low Carrier Concentration by Photo-Generated Carrier Effect
Liu, Tao; Xu, Zongwei; Rommel, Mathias; Wang, Hong; Song, Ying; Wang, Yufang; Fang, Fengzhou
Journal Article
2019Raman Spectroscopy Characterization of Ion Implanted 4H-SiC and its Annealing Effects
Xu, Zongwei; Song, Ying; Rommel, Mathias; Liu, T.; Kocher, Matthias; He, Z.D.; Wang, H.; Yao, B.T.; Liu, L.; Fang, Fengzhou
Conference Paper
2019Reducing On-Resistance for SiC Diodes by Thin Wafer and Laser Anneal Technology
Rusch, O.; Hellinger, C.; Moult, J.; Corcoran, Y.; Erlbacher, T.
Poster
2019Research Platform: Decentralized Energy System for Sector Coupling
Öchsner, R.; Nuß, A.; Lange, C.; Rueß, A.
Journal Article
2019Resistless Ga+ beam lithography for flexible prototyping of nanostructures
Rommel, Mathias
Presentation
2019Robuste und zuverlässige Leistungselektronik: Umwelt- und Lebensdauertests
Schletz, Andreas
Presentation
2019Second use or recycling of hydrogen waste gas from the semiconductor industry - Economic analysis and technical demonstration of possible pathways
Rochlitz, L.; Steinberger, M.; Oechsner, R.; Weber, A.; Schmitz, S.; Schillinger, K.; Wolff, M.; Bayler, A.
Journal Article
2019SIC device manufacturing using ion implantation. Opportunities and challenges
Erlbacher, Tobias
Presentation
2019SiC MOSFET with a self-aligned channel defined by shallow source-JFET implantation: A simulation study
Sledziewski, Tomasz; Erlbacher, Tobias
Poster
2019Silicon RC-Snubber for 900 V Applications Utilising non-Stoichiometric Silicon Nitride
Boettcher, N.; Heckel, T.; Erlbacher, T.; Pelaic, K.
Conference Paper
2019Simulationsgestützte Effizienzoptimierung von industriellen Kaltwassersystemen mit thermischen Speichern
Puls, Philipp
: Pichler, Peter; Müller, Karsten
Dissertation
2019Spatial and Temporal Temperature Homogenization in an Automotive Lithium-Ion Pouch Cell Battery Module
Gepp, Markus; Lorentz, V.R.H.; März, M.; Geffray, F.; Guyon, E.; Chopard, F.
Conference Paper
2019A Spectroscopic Investigation of Eu3+ Incorporation in LnPO4 (Ln = Tb, Gd1-xLux, X = 0.3, 0.5, 0.7, 1) Ceramics
Lösch, H.; Hirsch, A.; Holthausen, J.; Peters, L.; Xiao, B.; Neumeier, S.; Schmidt, M.; Huittinen, N.
Journal Article
2019Sr4N[CN2][C2N]: The First Carbodiimide Acetonitriletriide
Jach, F.; Höhn, P.; Prots, Y.; Ruck, M.
Journal Article
2019Stackable SiC Embedded Ceramic Packages for High Voltage and High Temperature Power Electronics Applications
Bach, Linh; Dirksen, D.; Blechinger, C.; Endres, T.M.; Bayer, C.F.; Schletz, A.; März, M.
Conference Paper, Journal Article
2019State of Charge Estimation using Recurrent Neural Networks with Long Short-Term Memory for Lithium-Ion Batteries
Bockrath, Steffen; Rosskopf, Andreas; Koffel, Stéphane; Waldhör, Stefan; Srivastava, Kushal; Lorentz, Vincent
Conference Paper
2019State of the Art Packaging
Schletz, Andreas; Endruschat, Achim; Heckel, Thomas
Presentation
2019Stromrichterschaltung
Malipaard, Dirk; März, Martin; Ruccius, Benjamin
Patent
2019Surface Characterization of Ion Implanted 4H-SiC Epitaxial Layers with Ion Energy and Concentration Variations
Kim, Hong-Ki; Kim, Seongjun; Buettner, Jonas; Lim, Minwho; Erlbacher, Tobias; Bauer, Anton J.; Koo, Sang-Mo; Lee, Nam-Suk; Shin, Hoon-Kyu
Conference Paper
2019Surface-enhanced Raman scattering on nanodiamond-derived carbon onions
Song, Ying; Xu, Zongwei; Rosenkranz, Andreas; Rommel, Mathias; Shi, Changkun; Fang, Fengzhou
Journal Article
2019A TCAD Process Model with Monte Carlo Ion Implantation for 4H-SiC JBS Diode Analysis and Design
Büttner, J.; Beuer, S.; Petersen, S.; Rommel, M.; Erlbacher, T.; Bauer, A.
Poster
2019Technological advances towards 4H-SiC JBS diodes for wind power applications
Buettner, Jonas; Erlbacher, Tobias; Bauer, Anton
Conference Paper
2019Technologische Justierung der spektralen Empfindlichkeit von 4H-SiC-UV-Sensoren
Matthus, Christian David
: Lerch, Reinhard; Erlbacher, Tobias; Schmauß, Bernhard
Dissertation
2019Temperature Challenges for Integrated Systems due to High Power Density
Schletz, Andreas; Bayer, Christoph; Hutzler, Aaron
Presentation
2019Testing Wide Band-Gap Devices II (Focus on Packaging)
Schletz, Andreas
Presentation
2019Theoretical aspects and microstructural investigations on V-pit defects in HVPE grown GaN
Knetzger, M.; Meissner, E.; Schröter, C.; Friedrich, J.
Journal Article
2019Thermoelectric properties of silicon and recycled silicon sawing waste
He, R.; Heyn, W.; Thiel, F.; Pérez, N.; Damm, C.; Pohl, D.; Rellinghaus, B.; Reimann, C.; Beier, M.; Friedrich, J.; Zhu, H.; Ren, Z.; Nielsch, K.; Schierning, G.
Journal Article
2019TSV-based passive networks for monolithic integration in smartpower ICS for automotive applications
Erlbacher, Tobias; Rattmann, Gudrun
Presentation
2019A Universal SPICE Field-Effect Transistor Model Applied on SiC and GaN Transistors
Endruschat, A.; Novak, C.; Gerstner, H.; Heckel, T.; Joffe, C.; März, M.
Journal Article
2019UV-Strahlungssensor auf Basis von Diamant
Erlbacher, Tobias
Patent
2019Wässrige Suspension enthaltend Metallcarbid-Partikel
Schwanke, Stanislaus; Müller, Stephan; Meißner, Elke; Epelbaum, Boris; Friedrich, Jochen; Reimann, Christian; Becker, Lucas
Patent
2019Wavelength-selective 4H-SiC UV-sensor array
Matthus, C.D.; Bauer, A.J.; Frey, L.; Erlbacher, T.
Journal Article
2018The 2018 GaN power electronics roadmap
Amano, H.; Baines, Y.; Beam, E.; Borga, M.; Bouchet, T.; Chalker, P.R.; Charles, M.; Chen, K.J.; Chowdhury, N.; Chu, R.; Santi, C. de; Souza, M.M. de; Decoutere, S.; Cioccio, L. di; Eckardt, B.; Egawa, T.; Fay, P.; Freedsman, J.J.; Guido, L.; Häberlen, O.; Haynes, G.; Heckel, T.; Hemakumara, D.; Houston, P.; Hu, J.; Hua, M.; Huang, Q.; Huang, A.; Jiang, S.; Kawai, H.; Kinzer, D.; Kuball, M.; Kumar, A.; Lee, K.B.; Li, X.; Marcon, D.; März, M.; McCarthy, R.; Meneghesso, G.; Meneghini, M.; Morvan, E.; Nakajima, A.; Narayanan, E.M.S.; Oliver, S.; Palacios, T.; Piedra, D.; Plissonnier, M.; Reddy, R.; Sun, M.; Thayne, I.; Torres, A.; Trivellin, N.; Unni, V.; Uren, M.J.; Hove, M. van; Wallis, D.J.; Wang, J.; Xie, J.; Yagi, S.; Yang, S.; Youtsey, C.; Yu, R.; Zanoni, E.; Zeltner, S.; Zhang, Y.
Journal Article
2018A 3.6 kV full SiC fuel cell boost converter for high power electric aircraft
Kreutzer, O.; Gerner, M.; Billmann, M.; Maerz, M.
Conference Paper
2018Accurate determination of 3D PSF and resist effects in grayscale laser lithography
Onanuga, T.; Kaspar, C.; Sailer, H.; Erdmann, A.
Conference Paper
2018An advanced control concept for modular multilevel converter using capacitor voltage estimation
Ruccius, B.; Preller, B.; März, M.; Wagner, B.
Conference Paper
2018Advanced vehicle charging solutions using SiC and GaN power devices
Eckardt, B.; Wild, M.; Joffe, C.; Zeltner, S.; Endres, S.; März, M.
Conference Paper
2018Advances in Li-Ion battery management for electric vehicles
Morello, R.; Rienzo, R. di; Roncella, R.; Saletti, R.; Schwarz, R.; Lorentz, V.R.H.; Hoedemaekers, E.R.G.; Rosca, B.; Baronti, F.
Conference Paper
2018Advances in thermal laser separation: Process monitoring in a kerf-free laser-based cutting technology to ensure high yield
Barreto, M.C.; Roeder, G.; Steinhoff, M.; Schellenberger, M.; Bauer, A.
Journal Article, Conference Paper
2018Analysis of a multiphase multi-star PMSM drive system with sic-based inverter for an automotive application
Piepenbreier, S.; Berlinecke, J.; Burani, N.; Bittnerbittner, R.; Matichyn, S.; Streit, F.; Hofmann, M.; Plikat, R.
Conference Paper
2018Analysis of compensation effects in aluminum-implanted 4H-SiC devices
Weisse, J.; Hauck, M.; Sledziewski, T.; Tschiesche, M.; Krieger, M.; Bauer, A.; Mitlehner, H.; Frey, L.; Erlbacher, T.
Conference Paper
2018Analytical model for the influence of the gate-voltage on the forward conduction properties of the body-diode in SiC-MOSFETs
Huerner, A.; Heckel, T.; Enduschat, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2018Anode recirculation and purge strategies for PEM fuel cell operation with diluted hydrogen feed gas
Steinberger, Michael; Geiling, Johannes; Öchsner, Richard; Frey, Lothar
Journal Article
2018Application of deep learning algorithms for Lithographic mask characterization
Woldeamanual, D.S.; Erdmann, A.; Maier, A.
Conference Paper
2018Assessing the vibrational response and robustness of electronic systems by dissolving time and length scale
Schriefer, T.; Hofmann, M.
Conference Paper
2018Attenuated PSM for EUV
Erdmann, A.; Evanschitzky, P.; Mesilhy, H.; Philipsen, V.; Hendrickx, E.; Bauer, M.
Conference Paper
2018Aufbau für mindestens einen mit elektronischen und/oder elektrischen Bauelementen bestückten Träger
Bayer, Christoph; Schletz, Andreas; Waltrich, Uwe
Patent
2018Autonomous circuit design of a resonant converter (LLC) for on-board chargers using genetic algorithms
Rosskopf, A.; Volmering, S.; Ditze, S.; Joffe, C.; Bär, E.
Conference Paper
2018Calculation of frequency dependent power losses in inductive systems with litz wire conductors by a coupled numeric approach
Rosskopf, Andreas
: Frey, Lothar
Dissertation
2018Ceramic Embedding as Packaging Solution for Future Power Electronic Applications
Bach, H.L.; Endres, T.M.; Dirksen, D.; Zischler, S.; Bayer, C.F.; Schletz, A.; März, M.
Conference Paper
2018Charakterisierung dynamischer Eigenschaften und Modellbildung neuartiger Leistungshalbleiterbauelemente auf Basis von SiC und GaN
Heckel, Thomas
Dissertation
2018Comparative Study of 4H-SiC UV-Sensors with Ion Implanted and Epitaxially Grown p-Emitter
Matthus, C.D.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2018The correlation between sintered silver joint reliability and pressure assisted sintering parameters
Ng, W.C.W.; Sweatman, K.; Kumagai, K.; Takamura, K.; Nishimura, T.; Letz, S.; Schletz, A.
Conference Paper
2018Decoration of Al implantation profiles in 4H-SiC by bevel grinding and dry oxidation
Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton
Poster
2018Defect functional structures of 4H-SiC and diamond induced by ion implantation: MD simulation and spectral characterization
Xu, Zongwei; Zhao, Junlei; Djurabekova, Flyura; Rommel, Mathias; Nordlund, Kai
Presentation
2018Defects and carrier lifetime in 4H-Silicon Carbide
Kallinger, Birgit; Erlekampf, Jürgen; Rommel, Mathias; Berwian, Patrick; Friedrich, J.; Matthus, Christian D.
Presentation
2018Design of a Power Flow Control Converter for Bipolar Meshed LVDC Distribution Grids
Purgat, P.; MacKay, L.; Schulz, M.; Han, Y.; Qin, Z.; März, M.; Bauer, P.
Conference Paper
2018Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy
Stumpf, Florian; Abu Quba, A.A.; Singer, Philip; Rumler, Maximilian; Cherkashin, Nikolay; Schamm-Chardon, Sylvie; Cours, Robin; Rommel, Mathias
Journal Article
2018Determination of compensation ratios of Al-implanted 4H-SiC by TCAD modelling of TLM measurements
Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zongwei; Erlbacher, Tobias; Bauer, Anton
Poster
2018Dose dependent profile deviation of implanted aluminum in 4H-SiC during high temperature annealing
Kocher, Matthias; Rommel, Mathias; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton
Poster
2018Dose Dependent Profile Deviation of Implanted Aluminum in 4H-SiC During High Temperature Annealing
Kocher, Matthias; Rommel, Mathias; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton J.
Conference Paper
2018Dynamic Mechanical Analysis of a Power Electronic Gate Driver Board
Schriefer, T.; Hofmann, M.
Conference Paper
2018Edge facet dynamics during the growth of heavily doped n-type silicon by the Czochralski-method
Stockmeier, Ludwig; Kranert, Christian; Raming, Georg; Miller, Alfred; Reimann, Christian; Rudolph, Peter; Friedrich, Jochen
Journal Article
2018The effect of etching and deposition processes on the width of spacers created during self-aligned double patterning
Baer, Eberhard; Lorenz, Juergen
Conference Paper
2018Efficiency investigation of full-sic versus si-based automotive inverter power modules at equal commutation speed
Pai, A.P.; Reiter, T.; Maerz, M.
Conference Paper
2018Electrical properties of schottky-diodes based on B doped diamond
Erlbacher, T.; Huerner, A.; Zhu, Y.; Bach, L.; Schletz, A.; Zürbig, Verena; Pinti, Lucas; Kirste, Lutz; Giese, Christian; Nebel, Christoph E.; Bauer, A.J.; Frey, L.
Conference Paper
2018Electrochemical corrosion on ceramic substrates for power electronics causes, phenomenological description and outlook
Bayer, Christoph Friedrich; Diepgen, Antonia; Filippi, Thomas; Fuchs, Carmen; Wüstefeld, Sophie; Kellner, Simon; Waltrich, Uwe; Schletz, Andreas
Conference Paper
2018Elektrisch leitende Verbindung zwischen mindestens zwei elektrischen Komponenten an einem mit elektronischen und/oder elektrischen Bauelementen bestücktem Träger, die mit einem Bonddraht ausgebildet ists.
Bayer, Christoph; Schletz, Andreas; Waltrich, Uwe
Patent
2018Elektrochemische Korrosion auf keramischen Substraten für leistungselektronische Module
Bayer, C.F.
Journal Article
2018Elektronik
Bauer, Anton; Bär, Eberhard; Erlbacher, Tobias; Friedrich, Jochen; Lorenz, Jürgen; Rommel, Mathias; Schellenberger, Martin
Book Article
2018Entwicklung und Charakterisierung eines doppelseitig gekühlten leistungselektronischen Moduls
Kraft, Silke
Presentation
2018Environmental testing, corrosion, failure analysis. Power electronics in harsh environments
Bayer, Christoph Friedrich; Kokot, Alexandra; Filippi, Thomas; Hutzler, Aaron; Fuchs, Carmen; Wüstefeld, Sophie; Kellner, Simon; Diepgen, Antonia; Zimmernmann, Victoria
Presentation
2018Evaluation of DC-DC-converter impedance passivity using pseudo-random test signals
Ott, L.; Han, Y.; Wunder, B.; März, M.; Bodensteiner, F.
Conference Paper
2018Evidence of low injection efficiency for implanted p-emitters in bipolar 4H-SiC high-voltage diodes
Matthus, C.D.; Huerner, A.; Erlbacher, T.; Bauer, A.; Frey, L.
Journal Article
2018Fault Considerations of Non-Isolated Electric Vehicle Chargers with a Mutual DC Supply
Gosses, K.; Kaiser, J.; Ott, L.; Schulz, M.; Fersterra, F.; Wunder, B.; Han, Y.; Lavery, M.; März, M.
Conference Paper
2018Flexible thin film bending sensor based on Bragg gratings in hybrid polymers
Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Conference Paper
2018Fourier ptychography for lithography high NA systems
Dejkameh, A.; Erdmann, A.; Evanschitzky, P.; Ekinci, Y.
Conference Paper
2018Fraunhofer Institute for Integrated Systems and Device Technology. Achievements and Results. Annual Report 2017
 
Annual Report
2018Free cooling reduces energy consumption of cold water systems
Puls, Philipp
Presentation
2018Future technology trends
Lorenz, Leo; Erlbacher, Tobias; Hilt, Oliver
Book Article
2018The GaN trench gate MOSFET with floating islands
Shen, L.; Müller, S.; Cheng, X.; Zhang, D.; Zheng, L.; Xu, D.; Yu, Y.; Meissner, E.; Erlbacher, T.
Journal Article
2018Heavily n-type doped silicon and the dislocation formation during its growth by the Czochralski method
Stockmeier, Ludwig
: Lerch, R.; Frey, L.; Danilewsky, A.N.
Dissertation
2018Heterogeneous integration of vertical GaN power transistor on Si capacitor for DC-DC converters
Yu, Zechun; Zeltner, Stefan; Boettcher, Norman; Rattmann, Gudrun; Leib, Jürgen; Bayer, Christoph Friedrich; Schletz, Andreas; Erlbacher, Tobias; Frey, Lothar
Presentation
2018Highly reliable power modules by pressureless sintering
Waltrich, U.; Bayer, C.F.; Zötl, S.; Tokarski, A.; Zischler, S.; Schletz, A.; März, M.
Conference Paper
2018Hochvolt-Kraftfahrzeugbordnetz
Billmann, Markus; Lausser, Christof; Reifert, Eugen; Sutter, Ulrich; Tchobanov, Dimitar
Patent
2018Human Sweat Analysis Using a Portable Device Based on a Screen‐printed Electrolyte Sensor
Zoerner, A.; Oertel, S.; Jank, M.P.M.; Frey, L.; Langenstein, B.; Bertsch, T.
Journal Article
2018Impact of Al-ion implantation on the formation of deep defects in n-type 4H-SiC
Weiße, Julietta; Hauck, Martin; Krieger, Michael; Erlekampf, Jürgen; Mitlehner, Heinz; Bauer, Anton J.; Rommel, Mathias; Häublein, Volker; Erlbacher, Tobias; Csato, Constantin; Rüb, Michael; Akhmadaliev, Shavkat; Frey, Lothar
Conference Paper
2018Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC
Erlekampf, Jürgen; Kaminzky, Daniel; Rosshirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar
Conference Paper
2018Influence of Al doping concentration and annealing parameters on TiAl based Ohmic contacts on 4H-SiC
Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton J.
Conference Paper
2018Influence of substrate properties on the defectivity and minority carrier lifetime in 4H-SiC homoepitaxial layers
Kallinger, Birgit; Erlekampf, Jürgen; Roßhirt, Katharina; Berwian, Patrick; Stockmeier, Matthias; Vogel, Michael; Hens, Philip; Wischmeyer, Frank
Presentation
2018Influence of the pulse length and temperature swing on the relative lifetime estimation for sintered/soldered chip-on-substrate samples. Numerical investigation
Simon, Flaviu-Bogdan
Poster
2018Influence of triangular defects on the electrical characteristics of 4H-SiC devices
Schoeck, J.; Schlichting, H.; Kallinger, B.; Erlbacher, T.; Rommel, M.; Bauer, A.J.
Conference Paper
2018Investigation of Ga ion implantation-induced damage in single-crystal 6H-SiC
He, Zhongdu; Xu, Zongwei; Rommel, Mathias; Yao, Boteng; Liu, Tao; Song, Ying; Fang, Fengzhou
Journal Article
2018Is an antiparallel SiC-Schottky diode necessary? Calorimetric analysis of SiC-MOSFETS switching behavior
Kreutzer, O.; Billmann, M.; März, M.
Conference Paper
2018Korrosion in leistungselektronischen Modulen
Bayer, Christoph Friedrich; Kokot, Alexandra; Filippi, Thomas; Hutzler, Aaron; Fuchs, Carmen; Wüstefeld, Sophie; Kellner, Simon; Diepgen, Antonia; Zimmermann, Victoria
Presentation
2018Large-area layer counting of 2D materials via visible reflection spectroscopy
Hutzler, Andreas; Matthus, C.D.; Dolle, C.; Rommel, M.; Jank, M.P.M.; Spiecker, E.; Frey, L.
Poster
2018Laser Surface Microstructuring of a Bio-Resorbable Polymer to Anchor Stem Cells, Control Adipocyte Morphology, and Promote Osteogenesis
Ortiz, Rocio; Aurrekoetxea-Rodríguez, Iskander; Rommel, Mathias; Quintana, Iban; Vivanco, Maria; Toca-Herrera, Jose Luis
Journal Article
2018Lifetime testing method for ceramic capacitors for power electronics applications
Dresel, Fabian; Tham, Nils; Erlbacher, Tobias; Schletz, Andreas
Conference Paper
2018Mass Separation Issues for the Implantation of Doubly Charged Aluminum Ions
Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper
2018Minimum Volume Design of a Forced-Air Cooled Three-Phase Power Factor Correction Stage for Electric Vehicle Chargers
Schultheiß, F.; Nguyen-Xuan, T.; Endruschat, A.; März, M.
Conference Paper
2018Mission Profile Analysis of a SiC Hybrid Module for Automotive Traction Inverters and its Experimental Power-loss Validation with Electrical and Calorimetric Methods
Pai, A.P.; Reiter, T.; Vodyakho, O.; Maerz, M.
Journal Article
2018Modeling of block copolymer dry etching for directed self-assembly lithography
Belete, Zelalem; Bär, Eberhard; Erdmann, Andreas
Conference Paper
2018Modeling the rate-dependent inelastic deformation behavior of porous polycrystalline silver films
Letz, S.A.; Farooghian, A.; Simon, F.B.; Schletz, A.
Journal Article
2018Modeling the rate-dependent inelastic deformation of porous polycrystalline silver films
Letz, Sebastian; Farooghian, Azin; Simon, Flaviu-Bogdan; Schletz, Andreas
Presentation
2018Modular multilevel submodules for converters, from the state of the art to future trends
Billmann, M.
Conference Paper
2018Nano- and micro-patterned S-, H- and X-PDMS for cell-based applications: Comparison of wettability, roughness and cell-derived parameters
Scharin-Mehlmann, Marina; Häring, Aaron; Rommel, Mathias; Dirnecker, Tobias; Friedrich, Oliver; Frey, Lothar; Gilbert, Daniel F.
Journal Article
2018Non-linear Input Capacitance Determination of WBG Power FETs using Gate Charge Measurements
Gerstner, H.; Endruschat, A.; Heckel, T.; Joffe, C.; Eckardt, B.; März, M.
Conference Paper
2018Normalized differential conductance to study current conduction mechanisms in MOS structures
Nouibat, T.H.; Messai, Z.; Chikouch, D.; Ouennoughi, Z.; Rouag, N.; Rommel, Mathias; Frey, Lothar
Journal Article
2018Novel approach based on continuous trench modelling to predict focused ion beam prepared freeform surfaces
Bilbao-Guillerna, A.; Eachambadi, R.T.; Cadot, G.B.J.; Axinte, D.A.; Billingham, J.; Stumpf, F.; Beuer, S.; Rommel, M.
Journal Article
2018Novel EUV mask absorber evaluation in support of next-generation EUV imaging
Philipsen, V.; Luong, K.V.; Opsomer, K.; Detavernier, C.; Hendrickx, E.; Erdmann, A.; Evanschitzky, P.; Kruijs, R.W.E. van de; Heidarnia-Fathabad, Z.; Scholze, F.; Laubis, C.
Conference Paper
2018On the limits of scalpel AFM for the 3D electrical characterization of nanomaterials
Chen, Shaochuan; Jiang, Lanlan; Buckwell, Mark; Jing, Xu; Ji, Yanfeng; Grustan-Gutierrez, Enric; Hui, Fei; Shi, Yuanyuan; Rommel, Mathias; Paskaleva, Albena; Benstetter, Günther; Ng, Wing. H.; Mehonic, Adnan; Kenyon, Anthony J.; Lanza, Mario
Journal Article
2018One-step nanoimprinted Bragg grating sensor based on hybrid polymers
Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Stumpf, Florian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar
Journal Article
2018Optical stressing of 4H-SiC material and devices
Kallinger, B.; Kaminzky, D.; Berwian, P.; Friedrich, J.; Oppel, S.
Conference Paper
2018Optimized 2D positioning of windings in inductive components by genetic algorithm
Rosskopf, Andreas; Knoerzer, Karsten; Baer, Eberhard; Ehrlich, Stefan
Conference Paper
2018Platinum in Silicon after Post-Implantation Annealing: From Experiments to Process and Device Simulations
Hauf, Moritz; Schmidt, Gerhard; Niedernostheide, Franz-Josef; Johnsson, Anna; Pichler, Peter
Conference Paper
2018Power antifuse device to bypass or turn-off battery cells in safety-critical and fail-operational systems
Lorentz, V.R.H.; Waller, R.; Waldhör, S.; Wenger, M.; Gepp, M.; Schwarz, R.; Koffel, S.; Wacker, S.; Akdere, M.; Giegerich, M.; März, M.
Conference Paper
2018Power electronics packaging at Fraunhofer IISB
Bayer, Christoph F.
Presentation
2018Power Interconnect Trends - Cost Savings for PCB Power Electronics by Enabling Wear Out
Schletz, Andreas
Presentation
2018Principle of lifetime-engineering in 4H-SiC by ion implantation
Erlekampf, Jürgen; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen; Frey, Lothar; Erlbacher, Tobias
Poster
2018Process variability for devices at and beyond the 7 nm node
Lorenz, Jürgen; Asenov, Asen; Bär, Eberhard; Barraud, Sylvain; Millar, Campbell; Nedjalkov, Mihail
Conference Paper
2018Process variability for devices at and beyond the 7 nm node
Lorenz, Juergen; Asenov, Asen; Baer, Eberhard; Barraud, Sylvain; Kluepfel, Fabian; Millar, Campbell; Nedjalkov, Mihail
Journal Article
2018Quantum dot location relevance into SET-FET circuits based on FinFET devices
Amat, Esteve; Moral, Alberto del; Bausells, Joan; Perez-Murano, Francesc; Klüpfel, Fabian
Conference Paper
2018Raman spectroscopy characterization of ion implanted 4H-SiC and its annealing effects
Xu, Zongwei; Song, Y.; Rommel, Mathias; Liu, T.; Kocher, Matthias; He, Z.D.; Wang, H.; Yao, B.T.; Liu, L.; Fang, F.Z.
Poster
2018Schottky diode and method for its manufacturing
Erlbacher, Tobias; Hürner, Andreas
Patent
2018Selective silver sintering of semiconductor dies on PCB
Dresel, Fabian; Letz, Sebastian; Zischler, Sigrid; Schletz, Andreas; Novak, Michael
Conference Paper
2018Simulation in power electronics design. Simulation, possibilities, and issues
Bayer, Christoph Friedrich
Presentation
2018Simulation study of illumination effects in high-NA EUV lithography
Ismail, M.; Evanschitzky, P.; Erdmann, A.; Bottiglieri, G.; Setten, E. van; Fliervoet, T.F.
Conference Paper
2018Strukturierungsverfahren
Fader, Robert; Lorenz, Jürgen; Rommel, Mathias; Baum, Mario; Danylyuk, Serhiy; Gillner, Arnold; Stollenwerk, Jochen; Bläsi, Benedikt
Book Article
2018Symmetry and structure of carbon-nitrogen complexes in gallium arsenide from infrared spectroscopy and first-principles calculations
Künneth, C.; Kölbl, S.; Wagner, H.E.; Häublein, V.; Kersch, A.; Alt, H.C.
Journal Article
2018TiO2 surface functionalization of COC based planar waveguide Bragg gratings for refractive index sensing
Rosenberger, Manuel; Girschikofsky, Maiko; Förthner, Michael; Belle, Stefan; Rommel, Mathias; Frey, Lothar; Schmauß, Bernhard; Hellmann, Ralf
Journal Article
2018TLS-dicing for SiC - Latest assessment results
Lewke, D.; Cerezuela Barreto, M.; Dohnke, K.; Zühlke, H.-U.; Belgardt, C.; Schellenberger, M.
Conference Paper
2018Topic review: Application of raman spectroscopy characterization in micro/nano-machining
Xu, Zongwei; He, Zhongdu; Song, Ying; Fu, Xiu; Rommel, Mathias; Luo, Xichun; Hartmaier, Alexander; Zhang, Junjie; Fang, Fengzhou
Journal Article
2018Träger, der mit mindestens einem Leistungshalbleiterbauelement bestückt ist
Schletz, Andreas; Waltrich, Uwe
Patent
2018Unravelling the Mechanisms of Gold–Silver Core–Shell Nanostructure Formation by in Situ TEM Using an Advanced Liquid Cell Design
Hutzler, A.; Schmutzler, T.; Jank, M.P.M.; Branscheid, R.; Unruh, T.; Spiecker, E.; Frey, L.
Journal Article
2018Untersuchung der elektrischen Feldstärke und des Teilentladungsverhaltens an keramischen Schaltungsträgern
Bayer, Christoph Friedrich
: Frey, Lothar
Dissertation
2018Verfahren und Vorrichtung zur Energieerzeugung aus wasserstoffreichem Industrie-Abgas
Frey, Lothar; König, Karl-Heinz; Steinberger, Michael; Öchsner, Richard
Patent
2018Vias in DBC substrates for embedded power modules
Bach, Hoang Linh; Yu, Zechun; Letz, Sebastian; Bayer, Christoph Friedrich; Waltrich, Uwe; Schletz, Andreas; März, Martin
Conference Paper
20173.3 kV SiC JBS diode configurable rectifier module
Mouawad, B.; Wang, Z.; Buettner, J.; Castellazzi, A.
Conference Paper
20173D simulation of silicon-based single-electron transistors
Klüpfel, Fabian J.; Pichler, Peter
Conference Paper
20174.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density
Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Conference Paper
20176 kW bidirectional, insulated on-board charger with normally-off GaN gate injection transistors
Endres, S.; Sessler, C.; Zeltner, S.; Eckardt, B.; Morita, T.
Conference Paper
2017Advanced 4H-SiC p-i-n Diode as Highly Sensitive High-Temperature Sensor Up To 460 degrees C
Matthus, C.D.; Erlbacher, T.; Hess, A.; Bauer, A.J.; Frey, L.
Journal Article
2017Anordnung mit multifuntionalem Anschluss für Energiespeicherzellen oder Energieverbraucher
Lorentz, Vincent; März, Martin; Wenger, Martin
Patent
2017Application-related characterization and theoretical potential of wide-bandgap devices
Endruschat, A.; Heckel, T.; Gerstner, H.; Joffe, C.; Eckardt, B.; März, M.
Conference Paper
2017A bidirectional approach for segregated DC microgrids
Fersterra, F.; Gosses, K.; Schulz, M.; Wunder, B.; März, M.
Conference Paper
2017Bulk lifetime characterization of corona charged silicon wafers with high resistivity by means of microwave detected photoconductivity
Engst, Christian R.; Rommel, Mathias; Bscheid, Christian; Eisele, Ignaz; Kutter, Christoph
Journal Article
2017A calorimetric method for measuring power losses in power semiconductor modules
Pai, A.P.; Reiter, T.; Vodyakho, O.; Yoo, I.; Maerz, M.
Conference Paper
2017Characterization and mitigation of 3D mask effects in extreme ultraviolet lithography
Erdmann, A.; Xu, D.; Evanschitzky, P.; Philipsen, V.; Luong, V.; Hendrickx, E.
Journal Article
2017Characterizing the conducted EMI performance of a power module through passive measurement
Liu, Y.; Kochetov, S.; Smazinka, T.; Lindemann, A.
Conference Paper
2017Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques
Steinberg, Christian; Rumler, Maximilian; Runkel, Manuel; Papenheim, Marc; Wang, Si; Mayer, Andre; Becker, Marco; Rommel, Mathias; Scheer, Hella-Christin
Journal Article
2017Determination of the selectivity of printed wearable sweat sensors
Zörner, A.; Oertel, S.; Schmitz, B.; Lang, N.; Jank, M.P.M.; Frey, L.
Conference Paper
2017Digital control of hard switched converters by phase modulated pulse width modulation PMPWM
Matlok, S.; Eckardt, B.; Seliger, B.; März, M.
Conference Paper
2017Dislocation formation in heavily As-doped Czochralski grown silicon
Stockmeier, Ludwig; Lehmann, Lothar; Miller, Alfred; Reimann, Christian; Friedrich, Jochen
Journal Article, Conference Paper
2017Droop controlled cognitive power electronics for DC microgrids
Wunder, B.; Ott, L.; Kaiser, J.; Gosses, K.; Schulz, M.; Fersterra, F.; März, M.; Lavery, M.; Han, Y.
Conference Paper
2017Dynamic Modeling of Critical Velocities for the Pushing/Engulfment Transition in the Si-SiC System Under Gravity Conditions
Kundin, J.; Aufgebauer, H.; Reimann, C.; Seebeck, J.; Friedrich, J.; Jauss, T.; Sorgenfrei, T.; Croell, A.
Journal Article
2017Efficient simulation of EUV pellicles
Evanschitzky, P.; Erdmann, A.
Conference Paper
2017Elektrische Energiespeicherzelle mit integrierter Überbrückungseinrichtung
Lorentz, Vincent; März, Martin; Waller, Reinhold
Patent
2017Elektrische Überbrückungseinrichtung zum Überbrücken einer elektrischen Energiequelle oder eines Energieverbrauchers
Lorentz, Vincent; März, Martin; Waller, Reinhold
Patent
2017Elektrische Überbrückungseinrichtung zum Überbrücken elektrischer Bauelemente, insbesondere einer Energiequelle oder eines Energieverbrauchs
Waller, Reinhold; Lorentz, Vincent; März, Martin
Patent
2017Elektrischer Spannungswandler mit mehreren Speicherdrosseln
Matlok, Stefan
Patent
2017Engulfment and pushing of Si3N4 and SiC particles during directional solidification of silicon under microgravity conditions
Friedrich, J.; Reimann, C.; Jauss, T.; Cröll, A.; Sorgenfrei, T.; Tao, Y.; Derby, J.J.
Journal Article
2017Enhanced contamination control methods in advanced wafer processing
Pfeffer, M.; Richter, H.; Altmann, R.; Leibold, A.; Bauer, A.
Conference Paper
2017Enhancing chiller efficiencies via use of cold energy storage
Puls, Philipp; Linhardt, Simon; Öchsner, Richard
Conference Paper
2017Entwicklungsperspektiven für Zellformate von Lithium-Ionen-Batterien in der Elektromobilität
Hettesheimer, Tim; Thielmann, Axel; Neef, Christoph; Möller, Kai-Christian; Wolter, Mareike; Lorentz, Vincent; Gepp, Markus; Wenger, Martin; Prill, Torben; Zausch, Jochen; Kitzler, Peter; Montnacher, Joachim; Miller, Martin; Hagen, Markus; Fanz, Patrik; Tübke, Jens
Study
2017Evaluation of a novel reactor concept for the process intensification and intelligent heat management in the hydrogenation and dehydrogenation of Liquid Organic Hydrogen Carriers
Preuster, P.; Wagner, L.; Nuß, A.; Geiling, J.; Steinberger, M.; Bösmann, A.; Wasserscheid, P.
Conference Paper
2017Evolution of grain structure and recombination active dislocations in extraordinary tall conventional and high performance multi-crystalline silicon ingots
Trempa, M.; Kupka, I.; Kranert, C.; Lehmann, T.; Reimann, C.; Friedrich, J.
Journal Article
2017Experimental verification of a self-triggered solid-state circuit breaker based on a SiC BIFET
Albrecht, M.; Hürner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2017Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Presentation
2017Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Conference Paper
2017Fraunhofer uses semiconductor process exhaust in fuel cell
Steinberger, Michael; Barrett, Steve
Journal Article
2017Generalized approach to design multi-layer stacks for enhanced optical detectability of ultrathin layers
Hutzler, Andreas; Matthus, Christian D.; Rommel, Mathias; Frey, Lothar
Journal Article
2017Grid behavior under fault situations in ±380 VDC distribution systems
Kaiser, J.; Gosses, K.; Ott, L.; Han, Y.; Wunder, B.; März, M.; Weiss, R.
Conference Paper
2017Implementation of 4H-SiC PiN-diodes as nearly linear temperature sensors up to 800 K towards SiC multi-sensor integration
Matthus, C.D.; Erlbacher, T.; Schöfer, B.; Bauer, A.J.; Frey, L.
Conference Paper
2017Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC
Erlekampf, Jürgen; Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar
Poster
2017Influence of Al doping concentration and annealing parameters on TiAl based ohmic contacts on 4H-SiC
Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Poster
2017Influence of different nucleation layers on the initial grain structure of multicrystalline silicon ingots
Kupka, I.; Lehmann, T.; Trempa, M.; Kranert, C.; Reimann, C.; Friedrich, J.
Journal Article
2017Influence of modulation and voltage balancing on spectral emission of modular multilevel converters
Coumont, M.; Hanson, J.; Hermanns, K.; Griepentrog, G.; Lukaschik, A.
Conference Paper
2017Influence of triangular defects on the electrical characteristics of 4H-SiC devices
Schöck, Johannes; Schlichting, Holger; Kallinger, Birgit; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Poster
2017Introduction and application of formation methods based on serial-connected lithium-ion battery cells
Müller, V.; Kaiser, R.; Poller, S.; Sauerteig, D.; Schwarz, R.; Wenger, M.; Lorentz, V.R.H.; März, M.
Journal Article
2017Investigation of dislocation cluster evolution during directional solidification of multicrystalline silicon
Oriwol, D.; Trempa, M.; Sylla, L.; Leipner, H.S.
Journal Article
2017Investigation of high-k dielectric stacks by C-AFM: Advantages, limitations, and possible applications
Rommel, Mathias; Paskaleva, Albena
Book Article
2017Kühlelement für mindestens einen mit elektronischen und/oder elektrischen Bauelementen bestückten Träger
Schletz, Andreas; Schimanek, Ernst
Patent
2017Large area manufacturing of plasmonic colour filters using substrate conformal imprint lithography
Rumler, Maximilian; Foerthner, M.; Baier, L.; Evanschitzky, P.; Becker, M.; Rommel, M.; Frey, L.
Journal Article
2017Layout and Setup for a Conversion System of Hydrogen Exhaust Gas Streams into Electricity using a PEM Fuel Cell
Steinberger, Michael; Müller, Michael; Hoffmann, Patrick; Geiling, Johannes; Öchsner, Richard
Conference Paper
2017Levet-set-based inverse lithography under random field shape uncertainty in a vector Hopkins imaging model
Wu, X.; Fühner, T.; Erdmann, A.; Lam, E.Y.
Conference Paper
2017Mechatronic design of 2 kW SiC DC/AC converter with 200 W/inch
Menrath, T.; Endres, S.; Zeltner, S.; Matlok, S.; Eckardt, B.
Conference Paper
2017Mission profile analysis and calorimetric loss measurement of a SiC hybrid module for main inverter application of electric vehicles
Poonjal Pai, A.; Reiter, T.; Maerz, M.
Conference Paper
2017Monolithically integrated solid-state-circuit-breaker for high power applications
Huerner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2017Nanoimprinted surface relief Bragg gratings for sensor applications
Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar
Poster
2017New methods to evaluate cleaning processes by detecting the particle load on surfaces of diamond wire sawn silicon wafers
Lottspeich, L.; Herold, I.; Richter, H.; Kaden, T.
Conference Paper, Journal Article
2017Novel advanced analytical design tool for 4H-SiC VDMOSFET devices
Benedetto, L. di; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Rubino, A.
Conference Paper
2017One-step fabrication of hierarchical structures
Rumler, Maximilian; Förthner, Michael; Kollmuss, Manuel; Baier, Leander; Stumpf, Florian; Becker, Marco; Rommel, Mathias; Frey, Lothar
Poster
2017One-step fabrication of hierarchical structures by direct laser writing through PDMS molds
Rumler, Maximilian; Förthner, Michael; Baier, Leander; Marhenke, Julius; Kollmuss, Manuel; Michel, Felix; Becker, Marco; Rommel, Mathias
Presentation
2017Optical stressing of 4H-SiC material and devices
Kallinger, Birgit; Kaminzky, Daniel; Berwian, Patrick; Friedrich, Jochen; Oppel, Steffen
Poster
2017Optimization of 4H-SiC photodiodes as selective UV sensors
Matthus, C.D.; Burenkov, A.; Erlbacher, T.
Conference Paper
2017Parasitic inductance analysis of a fast switching 100 kW full SiC inverter
Kegeleers, M.; Koerner, J.; Matlok, S.; Hofmann, M.; Maerz, M.
Conference Paper
2017Particle engulfment dynamics under oscillating crystal growth conditions
Tao, Y.; Sorgenfrei, T.; Jauß, T.; Cröll, A.; Reimann, C.; Friedrich, J.; Derby, J.J.
Journal Article
2017A passively cooled 15 kW, 800 V DCDC converter with a peak efficiency of 99.7 %
Kreutzer, O.; Billmann, M.; Maerz, M.
Conference Paper
2017A physical model for innovative laser direct write lithography
Onanuga, T.; Rumler, M.; Erdmann, A.
Conference Paper
2017Platinum diffusion for advanced silicon power devices
Badr, Elie
: Pichler, Peter; Wellmann, Peter
Dissertation
2017Point contact current voltage measurements of 4H-SiC samples with different doping profiles
Kocher, Matthias; Niebauer, Michael; Rommel, Mathias; Haeublein, Volker; Bauer, Anton
Conference Paper
2017Polymerization related deformations in multilayer soft stamps for nanoimprint
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Scheer, Hella-Christin; Frey, Lothar
Journal Article
2017A practical example of GaN-LED failure cause analysis by application of combined electron microscopy techniques
Meissner, E.; Haeckel, M.; Friedrich, J.
Journal Article
2017A quantitative model with new scaling for silicon carbide particle engulfment during silicon crystal growth
Derby, J.J.; Tao, Y.; Reimann, C.; Friedrich, J.; Jauß, T.; Sorgenfrei, T.; Cröll, A.
Journal Article
2017Raman micro-spectroscopy as a non-destructive key analysis tool in current power semiconductor manufacturing
Biasio, M. de; Kraft, M.; Geier, E.; Goller, B.; Bergmann, C.; Esteve, R.; Cerezuela-Barreto, M.; Lewke, D.; Schellenberger, M.; Roesner, M.
Conference Paper
2017Reducing EUV mask 3D effects by alternative metal absorbers
Philipsen, V.; Luong, K.V.; Souriau, L.; Hendrickx, E.; Erdmann, A.; Xu, D.; Evanschitzky, P.; Kruijs, R.W.E. van de; Edrisi, A.; Scholze, F.; Laubis, C.; Irmscher, M.; Naasz, S.; Reuter, C.
Conference Paper
2017Reducing extreme ultraviolet mask three-dimensional effects by alternative metal absorbers
Philipsen, V.; Luong, K.V.; Souriau, L.; Erdmann, A.; Xu, D.; Evanschitzky, P.; Kruijs, R.W.E. van de; Edrisi, A.; Scholze, F.; Laubis, C.; Irmscher, M.; Naasz, S.; Reuter, C.; Hendrickx, E.
Journal Article
2017Resistless Ga+ beam lithography for flexible prototyping of nanostructures in different materials by reactive ion etching
Rommel, Mathias; Rumler, Maximilian; Haas, Anke; Beuer, Susanne
Presentation
2017Resonant electric arcs in DC microgrids with low system impedance in the VLF-band
Strobl, C.; Ott, L.; Kaiser, J.; Streck, M.; Nothnagel, F.; Berger, F.; Schäfer, M.; Rabenstein, R.
Conference Paper
2017Safety considerations for the operation of bipolar DC-grids
Kaiser, J.; Gosses, K.; Ott, L.; Han, Y.; Wunder, B.; März, M.; Schork, F.; Bühler, K.; Böhm, T.
Conference Paper
2017SiC power module loss reduction by PWM gate drive patterns and impedance-optimized gate drive voltages
Gerstner, H.; Heckel, T.; Endruschat, A.; Roßkopf, A.; Eckardt, B.; März, M.
Conference Paper
2017Silicon self-interstitial properties deduced from platinum profiles after annealing with controlled cooling
Johnsson, Anna; Pichler, Peter; Schmidt, Gerhard
Journal Article
2017Simulation flow and model verification for laser direct-write lithography
Onanuga, T.; Rumler, M.; Erdmann, A.
Journal Article
2017Special issue on ptychography
Erdmann, A.; Situ, G.
Journal Article
2017Stress reduction in high voltage MIS capacitor fabrication
Banzhaf, S.; Kenntner, J.; Grieb, M.; Schwaiger, S.; Erlbacher, T.; Bauer, A.J.; Frey, L.; Frey, L.
Conference Paper
2017Switching SiC devices faster and more efficient using a DBC mounted terminal decoupling Si-RC element
Matlok, S.; Erlbacher, T.; Krach, F.; Eckardt, B.
Conference Paper
2017System integration of printed biosensors for sweat electrolytes with data acquisition via Bluetooth to App
Oertel, S.; Jank, M.; Zörner, A.; Schmitz, B.; Lang, N.
Conference Paper
2017Tiegel zur Herstellung von Silicium-Ingots, Verfahren zu dessen Herstellung sowie Silicium-Ingot
Schneider, Veronika; Reimann, Christian; Friedrich, Jochen; Sans, Jürgen; Kuczynski, Maciej
Patent
2017Verfahren zu Ausbildung elektrisch leitender Durchkontaktierungen in keramischen Schaltungsträgern
Schletz, Andreas; Tham, Nils; Hutzler, Aaron
Patent
2017Verfahren zur Überprüfung eines Trennschrittes bei der Zerteilung eines flachen Werkstückes in Teilstücke
Tobisch, Alexander; Schellenberger, Martin; Lewke, Dirk
Patent
2017Waste heat energy harvesting by use of BaTiO3 for pyroelectric hydrogen generation
Belitz, R.; Meisner, P.; Coeler, Matthias; Wunderwald, U.; Friedrich, Jochen; Zosel, J.; Schelter, Matthias; Jachalke, Sven; Mehner, Erik
Journal Article
2017Waveguide bragg gratings in Ormocer®s for temperature sensing
Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Journal Article
20163D simulation of light exposure and resist effects in laser direct write lithography
Onanuga, Temitope; Erdmann, Andreas
Conference Paper
20164.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density
Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Poster
2016Advanced detection method for polymer residues on semiconductor substrates
Richter, H.; Pfitzner, L.; Pfeffer, M.; Bauer, A.; Siegert, J.; Bodner, T.
Conference Paper
2016Analytical Model and Design of 4H-SiC Planar and Trenched JBS Diodes
Di Benedetto, L.; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Bellone, S.
Journal Article
2016ATHENIS-3D: Automotive tested high-voltage and embedded non-volatile integrated SoC platform with 3D technology
Wachmann, Ewald; Saponara, Sergio; Zambelli, C.; Tisserand, Pierre; Charbonnier, Jean; Erlbacher, Tobias; Grünler, Saeideh; Hartler, C.; Siegert, J.; Chassard, P.; Ton, D.M.; Ferrari, L.; Fanucci, L.
Conference Paper
2016Automated source/mask/directed self-assembly optimization using a self-adaptive hierarchical modeling approach
Fühner, T.; Michalak, P.; Wu, X.; Erdmann, A.
Conference Paper
2016Aviation battery monitoring electronics in lithium-ion based battery systems for electrified sailplanes and aircrafts
Schwarz, R.; Waller, R.; Wenger, M.; Akdere, M.; Neureuther, J.; Gepp, M.; Koffel, S.; Lorentz, V.R.H.; März, M.; Holtsmark, A.; Gribov, V.; Lange, A.
Conference Paper
2016Bipolar degradation of 6.5 kV SiC pn-Diodes: Result prediction by photoluminescence
Wehrhahn-Kilian, L.; Dohnke, K.O.; Kaminzky, D.; Kallinger, B.; Oppel, S.
Conference Paper
2016Calculation of power losses in litz wire systems by coupling FEM and PEEC method
Roßkopf, Andreas; Bär, Eberhard; Joffe, Christopher; Bonse, Clemens
Journal Article
2016Challenges and simulation solutions for advanced lithography for nanometer interconnect patterning
Evanschitzky, Peter
Presentation
2016Challenges for predictive EUV mask modeling
Evanschitzky, Peter; Erdmann, Andreas
Presentation
2016Clarification of the relation between the grain structure of industrial grown mc-Si and the area fraction of electrical active defects by means of statistical grain structure evaluation
Lehmann, T.; Reimann, C.; Meissner, E.; Friedrich, J.
Journal Article
2016Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication
Rumler, Maximilian; Kollmuss, M.; Baier, L.; Michel, F.; Förthner, M.; Becker, M.; Rommel, M.; Frey, L.
Conference Paper
2016Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication
Rumler, Maximilian; Kollmuss, Manuel; Baier, Leander; Michel, Felix; Förthner, Michael; Becker, Marco; Rommel, Mathias; Frey, Lothar
Poster
2016Comparative spatially resolved characterization of a Czochralski-grown silicon crystal by different laser-based imaging techniques
Herms, Martin; Wagner, Matthias; Molchanov, Alexander; Rommel, Mathias; Zschorsch, Markus; Würzner, Sindy
Conference Paper
2016Conduction loss reduction for bipolar injection field-effect-transistors (BIFET)
Hürner, Andreas; Mitlehner, Heinz; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Contamination control for wafer container used within 300 mm manufacturing for power microelectronics
Schneider, G.; Nguyen, T.Q.; Taubert, M.; Bounouar, J.; Le-Guet, C.; Leibold, A.; Richter, H.; Pfeffer, M.
Conference Paper
2016Correlation of carbon doping variations with the vertical breakdown of GaN-on-Si for power electronics
Knetzger, M.; Meissner, E.; Derluyn, J.; Germain, M.; Friedrich, J.
Journal Article
2016Correlation of film morphology and defect content with the charge-carrier transport in thin-film transistors based on ZnO nanoparticles
Polster, S.; Jank, M.P.M.; Frey, L.
Journal Article
2016COSIVU - Compact, smart and reliable drive unit for fully electric vehicles
Andersson, D.R.; Brinkfeldt, K.; Nord, S.; Ottosson, J.; Lampic, G.; Gotovac, G.; Zschieschang, O.; Baumgartel, H.; Brusius, M.; Kaulfersch, E.; Hilpert, F.; Otto, A.; Frankeser, S.
Conference Paper
2016Design and optimization of a multi-coil system for inductive charging with small air gap
Joffe, C.; Rosskopf, A.; Ehrlich, S.; Dobmeier, C.; März, M.
Conference Paper
2016Determination of Fowler-Nordheim tunneling parameters in Metal-Oxide-Semiconductor structure including oxide field correction using a vertical optimization method
Toumi, S.; Ouennoughi, Z.; Strenger, K.C.; Frey, L.
Journal Article
2016Dimensioning of a novel design concept for MMC submodules
Waltrich, U.; Russius, B.; Malipaard, D.; Schletz, A.; März, M.
Conference Paper
2016Direct optical stress sensing in semiconductor manufacturing using raman micro-spectrometry
Biasio, M. de; Kraft, M.; Roesner, M.; Bergmann, C.; Cerezuela-Barreto, M.; Lewke, D.; Schellenberger, M.
Conference Paper
2016Dislocation formation in seed crystals induced by feedstock indentation during growth of quasimono crystalline silicon ingots
Trempa, M.; Beier, M.; Reimann, C.; Roßhirth, K.; Friedrich, J.; Löbel, C.; Sylla, L.; Richter, T.
Journal Article
2016Drill-down analysis with equipment health monitoring
Krauel, Christopher; Weishäupl, Laura; Pfeffer, Markus
Presentation
2016The efficiency of hydrogen-doping as a function of implantation temperature
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2016Efficient simulation of EUV pellicles
Evanschitzky, Peter; Erdmann, Andreas
Presentation
2016Effizienter Einsatz von Kältespeichern zur Reduktion der Kältegestehungskosten
Puls, Philipp
Presentation
2016Einsatz von Kältespeichern zur Steigerung der Effizienz von Kälteversorgungssystemen
Puls, Philipp; Linhardt, Simon; Lange, C.; Öchsner, Richard
Poster
2016Electrical properties of solution processed layers based on Ge-Si alloy nanoparticles
Meric, Z.; Mehringer, C.; Jank, M.P.M.; Peukert, W.; Frey, L.
Journal Article
2016Electrically inactive dopants in heavily doped as-grown czochralski silicon
Stockmeier, L.; Elsayed, M.; Krause-Rehberg, R.; Zschorsch, M.; Lehmann, L.; Friedrich, J.
Conference Paper
2016Empirical cluster modeling revisited
Pichler, Peter
Conference Paper
2016Enhancement of the partial discharge inception voltage of ceramic substrates for power modules by trench coating
Waltrich, U.; Bayer, C.F.; Reger, M.; Meyer, A.; Tang, X.; Schletz, A.
Conference Paper
2016Enhancement of the partial discharge inception voltage of DBCs by adjusting the permittivity of the encapsulation
Bayer, Christoph Friedrich; Waltrich, Uwe; Soueidan, Amal; Schneider, Richard; Bär, Eberhard; Schletz, Andreas
Conference Paper
2016Enhancing partial discharge inception voltage of DBCs by geometrical variations based on simulations of the electric field strength
Bayer, Christoph Friedrich; Waltrich, Uwe; Schneider, Richard; Soueidan, Amal; Bär, Eberhard; Schletz, Andreas
Conference Paper
2016Equipment simulation for studying the growth rate and its uniformity of oxide layers deposited by plasma-enhanced oxidation
Baer, Eberhard; Niess, Juergen
Conference Paper
2016Erweiterte Messsystemanalyse mittels statistischer Versuchsplanung. Anwendungsbeispiel anhand eines Lebensdauertests für Leistungselektronik
Hutzler, Aaron; Schletz, Andreas
Presentation
2016Estimation of the excitation current and the rotor resistance of an externally excited synchronous machine with an inductively supplied excitation coil
Köhler, S.; Wagner, B.; Endres, S.
Conference Paper
2016Extending VLSI and alternative technology with optical and complementary lithography
Lai, K.; Erdmann, A.
Journal Article
2016Extreme ultraviolet multilayer defect analysis and geometry reconstruction
Xu, D.; Evanschitzky, P.; Erdmann, A.
Journal Article
2016Flexographic printing of nanoparticulate tin-doped indium oxide inks on PET foils and glass substrates
Wegener, M.; Spiehl, D.; Sauer, H.M.; Mikschl, F.; Liu, X.; Kölpin, N.; Schmidt, M.; Jank, M.P.M.; Dörsam, E.; Roosen, A.
Journal Article
2016Fraunhofer Institute for Integrated Systems and Device Technology. Achievements and Results. Annual Report 2015
 
Annual Report
2016Fraunhofer topics of the future "SUPERGRID". Supergrid - Approach for the integration of renewable energy in Europe and North Africa
Platzer, Werner; Boie, Inga; Ragwitz, Mario; Kost, Christoph; Thoma, Jürgen; Vogel, Axel; Fluri, Thomas; Pfeiffer, Wulf; Burmeister, Frank; Tham, Nils; Pudlik, Martin; Bohn, Sven; Agsten, Michael; Bretschneider, Peter; Westermann, Dirk; Kranzer, Dirk; Schlegl, Thomas
Report
2016Fraunhofer Zukunftsthemen "SUPERGRID". Supergrid - Ansatz für die Integration von Erneuerbaren Energien in Europa und Nordafrika
Platzer, Werner; Boie, Inga; Ragwitz, Mario; Kost, Christoph; Thoma, Jürgen; Vogel, Axel; Fluri, Thomas; Pfeiffer, Wulf; Burmeister, Frank; Tham, Nils; Pudlik, Martin; Bohn, Sven; Agsten, Michael; Bretschneider, Peter; Westermann, Dirk; Kranzer, Dirk; Schlegl, Thomas
Report
2016Fundamental efficiency limits in power electronic systems
Heckel, T.; Rettner, C.; März, M.
Conference Paper
2016Gettering and defect engineering in semiconductor technology XVI
: Pichler, Peter (Hrsg.)
Conference Proceedings
2016Hardware and software framework for an open battery management system in safety-critical applications
Akdere, M.; Giegerich, M.; Wenger, M.; Schwarz, R.; Koffel, S.; Fühner, T.; Waldhör, S.; Wachtler, J.; Lorentz, V.R.H.; März, M.
Conference Paper
2016Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings
Förthner, Michael; Rumler, Maximilian; Stumpf, Florian; Fader, Robert; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Journal Article
2016Imaging defect luminescence of 4H-SiC by ultraviolet-photoluminescence
Berwian, Patrick; Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Friedrich, Jochen; Oppel, Steffen; Schneider, Adrian; Schütz, Michael
Conference Paper
2016Implementation of simultaneous energy and data transfer in a contactless connector
Trautmann, M.; Joffe, C.; Pflaum, F.; Sanftl, B.; Weigel, R.; Heckel, T.; Koelpin, A.
Conference Paper
2016Incorporating photomask shape uncertainty in computational lithography
Wu, X.; Liu, S.; Erdmann, A.; Lam, E.Y.
Conference Paper
2016Inductive power transfer system with a rotary transformer for contactless energy transfer on rotating applications
Ditze, S.; Endruschat, A.; Schriefer, T.; Rosskopf, A.; Heckel, T.
Conference Paper
2016Influence of different seed materials on multi-crystalline silicon ingot properties
Reimann, C.; Trempa, M.; Lehmann, T.; Rosshirt, K.; Stenzenberger, J.; Friedrich, J.; Hesse, K.; Dornberger, E.
Journal Article
2016Influence of the junction capacitance of the secondary rectifier diodes on output characteristics in multi-resonant converters
Ditze, S.; Heckel, T.; März, M.
Conference Paper
2016Influence of varying bundle structures on power electronic systems simulated by a coupled approach of FEM and PEEC
Rosskopf, A.; Schuster, S.; Endruschat, A.; Bär, E.
Conference Paper
2016An integrated source/mask/DSA optimization approach
Fühner, T.; Michalak, P.; Welling, U.; Orozco-Rey, J.C.; Müller, M.
Conference Paper
2016Interaction of SiC particles with moving solid-liquid interface during directional solidification of silicon
Friedrich, J.; Reimann, C.; Jauss, T.; Cröll, A.; Sorgenfrei, T.
Journal Article
2016Inverse image modeling for defect detection and optical system characterization
Xu, Dongbo
: Erdmann, Andreas
Dissertation
2016Investigations of critical structural defects in active layers of GaN-on-Si for power electronic devices
Knetzger, M.; Meissner, E.; Derluyn, J.; Germain, M.; Friedrich, J.
Conference Paper
2016Ion implantation of polypropylene films for the manufacture of thin film capacitors
Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Djupmyr, M.
Conference Paper
2016Ion implanted 4H-SiC UV pin-diodes for solar radiation detection - simulation and characterization
Matthus, Christian D.; Erlbacher, Tobias; Burenkov, Alexander; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Lifetime and manufacturability of integrated power electronics
Randoll, R.; Wondrak, W.; Schletz, A.
Journal Article
2016Mask-induced best-focus shifts in deep ultraviolet and extreme ultraviolet lithography
Erdmann, A.; Evanschitzky, P.; Neumann, J.T.; Gräupner, P.
Journal Article
2016Materials integration for printed zinc oxide thin-film transistors: Engineering of a fully-printed semiconductor/contact scheme
Liu, X.; Wegener, M.; Polster, S.; Jank, M.P.M.; Roosen, A.; Frey, L.
Journal Article
2016Mechanical properties of silver-sintering bond lines
Letz, Sebastian; Hutzler, Aaron; Schletz, Andreas; Waltrich, Uwe
Conference Paper
2016Metastable defects in proton implanted and annealed silicon
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Job, Reinhart; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2016Methodologie und Prüfverfahren zur EMV Qualifizierung von Leistungsmodulen
Kochetov, S.; Smazinka, T.
Conference Paper
2016A model of electric field distribution in gate oxide and JFET-region of 4H-SiC DMOSFETs
Benedetto, Luigi di; Licciardo, Gian D.; Erlbacher, Tobias; Bauer, Anton J.; Liguori, R.; Rubino, Alfredo
Journal Article
2016Model-based fault current estimation for low fault-energy 380VDC distribution systems
Ott, L.; Kaiser, J.; Gosses, K.; Han, Y.; Wunder, B.; März, M.; Strobl, C.
Conference Paper
2016Modeling the post-implantation annealing of platinum
Badr, Elie; Pichler, Peter; Schmidt, Gerhard
Conference Paper
2016Modelling of effective minority carrier lifetime in 4H-SiC n-type epilayers
Kaminzky, Daniel; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
Conference Paper
2016Monitoring of biomarkers in sweat with printed sensors combined with sport wearables
Oertel, S.; Jank, M.; Schmitz, B.; Lang, N.
Conference Paper
2016Monolithic 3D TSV-based high-voltage, high-temperature capacitors
Gruenler, S.; Rattmann, G.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Journal Article, Conference Paper
2016Multivariate approach for equipment health monitoring
Krauel, C.; Weishäupl, L.
Journal Article, Conference Paper
2016A new behavioral model for accurate loss calculations in power semiconductors
Pai, A.P.; Reiter, T.; Maerz, M.
Conference Paper
2016Nitride bonded silicon nitride as a reusable crucible material for directional solidification of silicon
Schneider, V.; Reimann, C.; Friedrich, J.; Müller, G.
Journal Article
2016Non-isolated three-port DC/DC converter for ±380V DC microgrids
Han, Y.; Kaiser, J.; Ott, L.; Schulz, M.; Fersterra, F.; Wunder, B.; Maerz, M.
Conference Paper
2016Non-isolating DC/DC converter for a fuel cell powered aircraft
Kreutzer, O.; Billmann, M.; Maerz, M.; Lange, A.
Conference Paper
2016A novel submodule concept for modular multilevel converters
Ruccius, B.; Burani, N.; Galek, M.; Malipaard, D.
Conference Paper
2016Open, flexible and extensible battery management system for lithium-ion batteries in mobile and stationary applications
Giegerich, M.; Akdere, M.; Freund, C.; Fühner, T.; Grosch, J.L.; Koffel, S.; Schwarz, R.; Waldhör, S.; Wenger, M.; Lorentz, V.R.H.; März, M.
Conference Paper
2016Optimization of 4H-SiC UV photodiode performance using numerical process and device simulation
Burenkov, Alex; Matthus, Christian David; Erlbacher, Tobias
Journal Article
2016Optimized design for 4H-SiC power DMOSFETs
Benedetto, Luigi di; Licciardo, Gian D.; Erlbacher, Tobias; Bauer, Anton J.; Rubino, Alfredo
Journal Article
2016Partial discharges in ceramic substrates - correlation of electric field strength simulations with phase resolved partial discharge measurements
Bayer, Christoph Friedrich; Waltrich, Uwe; Soueidan, Amal; Baer, Eberhard; Schletz, Andreas
Conference Paper
2016Partial discharges in ceramic substrates - correlation of electric field strength simulations with phase resolved partial discharge measurements
Bayer, Christoph Friedrich; Waltrich, Uwe; Soueidan, Amal; Bär, Eberhard; Schletz, Andreas
Journal Article
2016Particle free handling of substrates
Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.
Journal Article
2016Phase-field simulations of particle capture during the directional solidification of silicon
Aufgebauer, H.; Kundin, J.; Emmerich, H.; Azizi, M.; Reimann, C.; Friedrich, J.; Jauß, T.; Sorgenfrei, T.; Cröll, A.
Journal Article
2016A possible explanation of the record electrical performance of silicon nanowire tunnel FETs with silicided source contact
Burenkov, Alex; Lorenz, Juergen
Conference Paper
2016Post-trench processing of silicon deep trench capacitors for power electronic applications
Banzhaf, Stefanie; Schwaiger, Stefan; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Potential energy savings via use of free cooling and cold energy storage
Puls, Philipp
Presentation
2016Potential of 4H-SiC CMOS for high temperature applications using advanced lateral p-MOSFETs
Albrecht, Matthäus; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Process informed accurate compact modelling of 14-nm FinFET variability and application to statistical 6T-SRAM simulations
Wang, Xingsheng; Reid, Dave; Wang, Liping; Millar, Campbell; Burenkov, Alex; Evanschitzky, Peter; Baer, Eberhard; Lorenz, Juergen; Asenov, Asen
Conference Paper
2016Prospects and issues of nanomaterials use in microelectronics
Jank, Michael; Bauer, Anton; Frey, Lothar
Poster
2016Quantification and reduction of deformations in multilayer soft-NIL stamps
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar
Poster
2016Quantification and reduction of deformations in multilayer soft-NIL stamps
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar
Poster
2016Reliabe data link for power transfer control in an inductive charging system for electric vehicles
Sanftl, B.; Joffe, C.; Trautmann, M.; Weigel, R.; Koelpin, A.
Conference Paper
2016Reliability assessment of a smart and compact inverter developed for electrically powered construction vehicles
Otto, A.; Gadhiya, G.; Rzepka, S.; Kaulfersch, E.; Hilpert, F.; Brabandt, I.
Conference Paper
2016Resolution enhancements for semiconductor lithography: A computational perspective
Erdmann, A.
Conference Paper
2016Scalable insulated DC/DC converters for safe and efficient coupling of fuel cells, electrolyzers and DC grids
Seliger, B.; Matlok, S.; Zeltner, S.
Conference Paper