Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC
Weiße, J.; Hauck, M.; Krieger, M.; Bauer, A.J.; Erlbacher, T.
Journal Article
2019Analysis of the geometry of the growth ridges and correlation to the thermal gradient during growth of silicon crystals by the Czochralski-method
Stockmeier, Ludwig; Kranert, Christian; Fischer, Peter; Epelbaum, Boris; Reimann, Christian; Friedrich, Jochen; Raming, Georg; Miller, Alfred
Journal Article
2019Attenuated phase shift mask for extreme ultraviolet: Can they mitigate three-dimensional mask effects?
Erdmann, A.; Evanschitzky, P.; Mesilhy, H.; Philipsen, V.; Hendrickx, E.; Bauer, M.
Journal Article
2019Bewertung von Bondverbindungen - Möglichkeiten, Normen und Herausforderungen
Dirksen, Daniel
Presentation
2019Channeling in 4H-SiC from an Application Point of View
Pichler, Peter; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton J.; Erlbacher, Tobias
Conference Paper
2019A Compact Model Based on Bardeens Transfer Hamiltonian Formalism for Silicon Single Electron Transistors
Klüpfel, Fabian J.
Journal Article
2019Decoration of Al Implantation Profiles in 4H-SiC by Bevel Grinding and Dry Oxidation
Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Conference Paper
2019Determination of Compensation Ratios of Al-Implanted 4H-SiC by TCAD Modelling of TLM Measurements
Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zong Wei; Erlbacher, Tobias; Bauer, Anton J.
Conference Paper
2019Diffusion of phosphorus and boron from Atomic Layer Deposition oxides into silicon
Beljakova, Svetlana; Pichler, Peter; Kalkofen, Bodo; Hübner, René
Journal Article
2019Evaluation of improvement strategies of grain structure properties in high performance multi-crystalline silicon ingots
Trempa, M.; Kranert, C.; Kupka, I.; Reimann, C.; Friedrich, J.
Journal Article
2019Feasibility of 4H-SiC p-i-n diode for sensitive temperature measurements between 20.5 K and 802 K
Matthus, C.D.; Benedetto, L. di; Kocher, M.; Bauer, A.J.; Licciardo, G.D.; Rubino, A.; Erlbacher, T.
Journal Article
2019Fraunhofer IISB erforscht Korrosion
Bayer, Christoph
Journal Article
2019Influence of Sacrificial Layer Germanium Content on Stacked-Nanowire FET Performance
Klüpfel, Fabian J.
Journal Article
2019Innovative Technologien für intelligente dezentrale Energiesysteme
: März, Martin; Öchsner, Richard
Book
2019Large-Area Layer Counting of Two-Dimensional Materials Evaluating the Wavelength Shift in Visible-Reflectance Spectroscopy
Hutzler, Andreas; Matthus, Christian D.; Dolle, Christian; Rommel, Mathias; Jank, Michael P.M.; Spiecker, Erdmann; Frey, Lothar
Journal Article
2019Luminescent properties of Ce3+ doped LiLuP4O12 tetraphosphate under synchrotron radiation excitation
Zorenko, T.; Paprocki, K.; Levchuk, I.; Batentschuk, M.; Epelbaum, B.; Fedorov, A.; Zorenko, Y.
Journal Article
2019Methodology for the investigation of threading dislocations as a source of vertical leakage in AlGaN/GaN-HEMT heterostructures for power devices
Besendörfer, S.; Meissner, E.; Lesnik, A.; Friedrich, J.; Dadgar, A.; Erlbacher, T.
Journal Article
2019On a Novel Source Technology for Deep Aluminum Diffusion for Silicon Power Electronics
Rattmann, Gudrun; Pichler, Peter; Erlbacher, Tobias
Journal Article
2019Optimierung und Qualifizierung eines Bondprozesses. Tests und Analyseverfahren
Dirksen, Daniel
Presentation
2019Process and design optimization of SiC MOSFET for low on-state resistance
Sledziewski, Tomasz; Erlbacher, Tobias; Bauer, Anton
Presentation
2019Process variability - technological challenge and design issue for nanoscale devices
Lorenz, Jürgen; Bär, Eberhard; Barraud, Sylvain; Brown, Andrew R.; Evanschitzky, Peter; Klüpfel, Fabian; Wang, Liping
Journal Article
2019Raman Spectroscopy Characterization of Ion Implanted 4H-SiC and its Annealing Effects
Xu, Zongwei; Song, Ying; Rommel, Mathias; Liu, T.; Kocher, Matthias; He, Z.D.; Wang, H.; Yao, B.T.; Liu, L.; Fang, Fengzhou
Conference Paper
2019SIC device manufacturing using ion implantation. Opportunities and challenges
Erlbacher, Tobias
Presentation
2019Simulationsgestützte Effizienzoptimierung von industriellen Kaltwassersystemen mit thermischen Speichern
Puls, Philipp
: Pichler, Peter; Müller, Karsten
Dissertation
2019Spatial and Temporal Temperature Homogenization in an Automotive Lithium-Ion Pouch Cell Battery Module
Gepp, Markus; Lorentz, V.R.H.; März, M.; Geffray, F.; Guyon, E.; Chopard, F.
Conference Paper
2019A Spectroscopic Investigation of Eu3+ Incorporation in LnPO4 (Ln = Tb, Gd1-xLux, X = 0.3, 0.5, 0.7, 1) Ceramics
Lösch, H.; Hirsch, A.; Holthausen, J.; Peters, L.; Xiao, B.; Neumeier, S.; Schmidt, M.; Huittinen, N.
Journal Article
2019Sr4N[CN2][C2N]: The First Carbodiimide Acetonitriletriide
Jach, F.; Höhn, P.; Prots, Y.; Ruck, M.
Journal Article
2019Stackable SiC Embedded Ceramic Packages for High Voltage and High Temperature Power Electronics Applications
Bach, Linh; Dirksen, D.; Blechinger, C.; Endres, T.M.; Bayer, C.F.; Schletz, A.; März, M.
Conference Paper
2019State of the Art Packaging
Schletz, Andreas; Endruschat, Achim; Heckel, Thomas
Presentation
2019Surface-enhanced Raman scattering on nanodiamond-derived carbon onions
Song, Ying; Xu, Zongwei; Rosenkranz, Andreas; Rommel, Mathias; Shi, Changkun; Fang, Fengzhou
Journal Article
2019Technological advances towards 4H-SiC JBS diodes for wind power applications
Buettner, Jonas; Erlbacher, Tobias; Bauer, Anton
Conference Paper
2019Temperature Challenges for Integrated Systems due to High Power Density
Schletz, Andreas; Bayer, Christoph; Hutzler, Aaron
Presentation
2019Testing Wide Band-Gap Devices II (Focus on Packaging)
Schletz, Andreas
Presentation
2019TSV-based passive networks for monolithic integration in smartpower ICS for automotive applications
Erlbacher, Tobias; Rattmann, Gudrun
Presentation
2019Wavelength-selective 4H-SiC UV-sensor array
Matthus, C.D.; Bauer, A.J.; Frey, L.; Erlbacher, T.
Journal Article
2018The 2018 GaN power electronics roadmap
Amano, H.; Baines, Y.; Beam, E.; Borga, M.; Bouchet, T.; Chalker, P.R.; Charles, M.; Chen, K.J.; Chowdhury, N.; Chu, R.; Santi, C. de; Souza, M.M. de; Decoutere, S.; Cioccio, L. di; Eckardt, B.; Egawa, T.; Fay, P.; Freedsman, J.J.; Guido, L.; Häberlen, O.; Haynes, G.; Heckel, T.; Hemakumara, D.; Houston, P.; Hu, J.; Hua, M.; Huang, Q.; Huang, A.; Jiang, S.; Kawai, H.; Kinzer, D.; Kuball, M.; Kumar, A.; Lee, K.B.; Li, X.; Marcon, D.; März, M.; McCarthy, R.; Meneghesso, G.; Meneghini, M.; Morvan, E.; Nakajima, A.; Narayanan, E.M.S.; Oliver, S.; Palacios, T.; Piedra, D.; Plissonnier, M.; Reddy, R.; Sun, M.; Thayne, I.; Torres, A.; Trivellin, N.; Unni, V.; Uren, M.J.; Hove, M. van; Wallis, D.J.; Wang, J.; Xie, J.; Yagi, S.; Yang, S.; Youtsey, C.; Yu, R.; Zanoni, E.; Zeltner, S.; Zhang, Y.
Journal Article
2018A 3.6 kV full SiC fuel cell boost converter for high power electric aircraft
Kreutzer, O.; Gerner, M.; Billmann, M.; Maerz, M.
Conference Paper
2018Accurate determination of 3D PSF and resist effects in grayscale laser lithography
Onanuga, T.; Kaspar, C.; Sailer, H.; Erdmann, A.
Conference Paper
2018An advanced control concept for modular multilevel converter using capacitor voltage estimation
Ruccius, B.; Preller, B.; März, M.; Wagner, B.
Conference Paper
2018Analysis of compensation effects in aluminum-implanted 4H-SiC devices
Weisse, J.; Hauck, M.; Sledziewski, T.; Tschiesche, M.; Krieger, M.; Bauer, A.; Mitlehner, H.; Frey, L.; Erlbacher, T.
Conference Paper
2018Analytical model for the influence of the gate-voltage on the forward conduction properties of the body-diode in SiC-MOSFETs
Huerner, A.; Heckel, T.; Enduschat, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2018Anode recirculation and purge strategies for PEM fuel cell operation with diluted hydrogen feed gas
Steinberger, Michael; Geiling, Johannes; Öchsner, Richard; Frey, Lothar
Journal Article
2018Application of deep learning algorithms for Lithographic mask characterization
Woldeamanual, D.S.; Erdmann, A.; Maier, A.
Conference Paper
2018Assessing the vibrational response and robustness of electronic systems by dissolving time and length scale
Schriefer, T.; Hofmann, M.
Conference Paper
2018Attenuated PSM for EUV
Erdmann, A.; Evanschitzky, P.; Mesilhy, H.; Philipsen, V.; Hendrickx, E.; Bauer, M.
Conference Paper
2018Aufbau für mindestens einen mit elektronischen und/oder elektrischen Bauelementen bestückten Träger
Bayer, Christoph; Schletz, Andreas; Waltrich, Uwe
Patent
2018Autonomous circuit design of a resonant converter (LLC) for on-board chargers using genetic algorithms
Rosskopf, A.; Volmering, S.; Ditze, S.; Joffe, C.; Bär, E.
Conference Paper
2018Calculation of frequency dependent power losses in inductive systems with litz wire conductors by a coupled numeric approach
Rosskopf, Andreas
: Frey, Lothar
Dissertation
2018The correlation between sintered silver joint reliability and pressure assisted sintering parameters
Ng, W.C.W.; Sweatman, K.; Kumagai, K.; Takamura, K.; Nishimura, T.; Letz, S.; Schletz, A.
Conference Paper
2018Decoration of Al implantation profiles in 4H-SiC by bevel grinding and dry oxidation
Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton
Poster
2018Defect functional structures of 4H-SiC and diamond induced by ion implantation: MD simulation and spectral characterization
Xu, Zongwei; Zhao, Junlei; Djurabekova, Flyura; Rommel, Mathias; Nordlund, Kai
Presentation
2018Defects and carrier lifetime in 4H-Silicon Carbide
Kallinger, Birgit; Erlekampf, Jürgen; Rommel, Mathias; Berwian, Patrick; Friedrich, J.; Matthus, Christian D.
Presentation
2018Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy
Stumpf, Florian; Abu Quba, A.A.; Singer, Philip; Rumler, Maximilian; Cherkashin, Nikolay; Schamm-Chardon, Sylvie; Cours, Robin; Rommel, Mathias
Journal Article
2018Determination of compensation ratios of Al-implanted 4H-SiC by TCAD modelling of TLM measurements
Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zongwei; Erlbacher, Tobias; Bauer, Anton
Poster
2018Dose dependent profile deviation of implanted aluminum in 4H-SiC during high temperature annealing
Kocher, Matthias; Rommel, Mathias; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton
Poster
2018Dose Dependent Profile Deviation of Implanted Aluminum in 4H-SiC During High Temperature Annealing
Kocher, Matthias; Rommel, Mathias; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton J.
Conference Paper
2018Dynamic Mechanical Analysis of a Power Electronic Gate Driver Board
Schriefer, T.; Hofmann, M.
Conference Paper
2018Edge facet dynamics during the growth of heavily doped n-type silicon by the Czochralski-method
Stockmeier, Ludwig; Kranert, Christian; Raming, Georg; Miller, Alfred; Reimann, Christian; Rudolph, Peter; Friedrich, Jochen
Journal Article
2018The effect of etching and deposition processes on the width of spacers created during self-aligned double patterning
Baer, Eberhard; Lorenz, Juergen
Conference Paper
2018Electrical properties of schottky-diodes based on B doped diamond
Erlbacher, T.; Huerner, A.; Zhu, Y.; Bach, L.; Schletz, A.; Zürbig, Verena; Pinti, Lucas; Kirste, Lutz; Giese, Christian; Nebel, Christoph E.; Bauer, A.J.; Frey, L.
Conference Paper
2018Electrochemical corrosion on ceramic substrates for power electronics causes, phenomenological description and outlook
Bayer, Christoph Friedrich; Diepgen, Antonia; Filippi, Thomas; Fuchs, Carmen; Wüstefeld, Sophie; Kellner, Simon; Waltrich, Uwe; Schletz, Andreas
Conference Paper
2018Elektrochemische Korrosion auf keramischen Substraten für leistungselektronische Module
Bayer, C.F.
Journal Article
2018Elektronik
Bauer, Anton; Bär, Eberhard; Erlbacher, Tobias; Friedrich, Jochen; Lorenz, Jürgen; Rommel, Mathias; Schellenberger, Martin
Book Article
2018Entwicklung und Charakterisierung eines doppelseitig gekühlten leistungselektronischen Moduls
Kraft, Silke
Presentation
2018Environmental testing, corrosion, failure analysis. Power electronics in harsh environments
Bayer, Christoph Friedrich; Kokot, Alexandra; Filippi, Thomas; Hutzler, Aaron; Fuchs, Carmen; Wüstefeld, Sophie; Kellner, Simon; Diepgen, Antonia; Zimmernmann, Victoria
Presentation
2018Evidence of low injection efficiency for implanted p-emitters in bipolar 4H-SiC high-voltage diodes
Matthus, C.D.; Huerner, A.; Erlbacher, T.; Bauer, A.; Frey, L.
Journal Article
2018Fault Considerations of Non-Isolated Electric Vehicle Chargers with a Mutual DC Supply
Gosses, K.; Kaiser, J.; Ott, L.; Schulz, M.; Fersterra, F.; Wunder, B.; Han, Y.; Lavery, M.; März, M.
Conference Paper
2018Flexible thin film bending sensor based on Bragg gratings in hybrid polymers
Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Conference Paper
2018Fourier ptychography for lithography high NA systems
Dejkameh, A.; Erdmann, A.; Evanschitzky, P.; Ekinci, Y.
Conference Paper
2018Fraunhofer Institute for Integrated Systems and Device Technology. Achievements and Results. Annual Report 2017
 
Annual Report
2018Free cooling reduces energy consumption of cold water systems
Puls, Philipp
Presentation
2018Future technology trends
Lorenz, Leo; Erlbacher, Tobias; Hilt, Oliver
Book Article
2018The GaN trench gate MOSFET with floating islands
Shen, L.; Müller, S.; Cheng, X.; Zhang, D.; Zheng, L.; Xu, D.; Yu, Y.; Meissner, E.; Erlbacher, T.
Journal Article
2018Heavily n-type doped silicon and the dislocation formation during its growth by the Czochralski method
Stockmeier, Ludwig
: Lerch, R.; Frey, L.; Danilewsky, A.N.
Dissertation
2018Heterogeneous integration of vertical GaN power transistor on Si capacitor for DC-DC converters
Yu, Zechun; Zeltner, Stefan; Boettcher, Norman; Rattmann, Gudrun; Leib, Jürgen; Bayer, Christoph Friedrich; Schletz, Andreas; Erlbacher, Tobias; Frey, Lothar
Presentation
2018Highly reliable power modules by pressureless sintering
Waltrich, U.; Bayer, C.F.; Zötl, S.; Tokarski, A.; Zischler, S.; Schletz, A.; März, M.
Conference Paper
2018Hochvolt-Kraftfahrzeugbordnetz
Billmann, Markus; Lausser, Christof; Reifert, Eugen; Sutter, Ulrich; Tchobanov, Dimitar
Patent
2018Human Sweat Analysis Using a Portable Device Based on a Screen‐printed Electrolyte Sensor
Zoerner, A.; Oertel, S.; Jank, M.P.M.; Frey, L.; Langenstein, B.; Bertsch, T.
Journal Article
2018Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC
Erlekampf, Jürgen; Kaminzky, Daniel; Rosshirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar
Conference Paper
2018Influence of Al doping concentration and annealing parameters on TiAl based Ohmic contacts on 4H-SiC
Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton J.
Conference Paper
2018Influence of substrate properties on the defectivity and minority carrier lifetime in 4H-SiC homoepitaxial layers
Kallinger, Birgit; Erlekampf, Jürgen; Roßhirt, Katharina; Berwian, Patrick; Stockmeier, Matthias; Vogel, Michael; Hens, Philip; Wischmeyer, Frank
Presentation
2018Influence of the pulse length and temperature swing on the relative lifetime estimation for sintered/soldered chip-on-substrate samples. Numerical investigation
Simon, Flaviu-Bogdan
Poster
2018Influence of triangular defects on the electrical characteristics of 4H-SiC devices
Schoeck, J.; Schlichting, H.; Kallinger, B.; Erlbacher, T.; Rommel, M.; Bauer, A.J.
Conference Paper
2018Investigation of Ga ion implantation-induced damage in single-crystal 6H-SiC
He, Zhongdu; Xu, Zongwei; Rommel, Mathias; Yao, Boteng; Liu, Tao; Song, Ying; Fang, Fengzhou
Journal Article
2018Korrosion in leistungselektronischen Modulen
Bayer, Christoph Friedrich; Kokot, Alexandra; Filippi, Thomas; Hutzler, Aaron; Fuchs, Carmen; Wüstefeld, Sophie; Kellner, Simon; Diepgen, Antonia; Zimmermann, Victoria
Presentation
2018Large-area layer counting of 2D materials via visible reflection spectroscopy
Hutzler, Andreas; Matthus, C.D.; Dolle, C.; Rommel, M.; Jank, M.P.M.; Spiecker, E.; Frey, L.
Poster
2018Laser Surface Microstructuring of a Bio-Resorbable Polymer to Anchor Stem Cells, Control Adipocyte Morphology, and Promote Osteogenesis
Ortiz, Rocio; Aurrekoetxea-Rodríguez, Iskander; Rommel, Mathias; Quintana, Iban; Vivanco, Maria; Toca-Herrera, Jose Luis
Journal Article
2018Lifetime testing method for ceramic capacitors for power electronics applications
Dresel, Fabian; Tham, Nils; Erlbacher, Tobias; Schletz, Andreas
Conference Paper
2018Minimum Volume Design of a Forced-Air Cooled Three-Phase Power Factor Correction Stage for Electric Vehicle Chargers
Schultheiß, F.; Nguyen-Xuan, T.; Endruschat, A.; März, M.
Conference Paper
2018Modeling of block copolymer dry etching for directed self-assembly lithography
Belete, Zelalem; Bär, Eberhard; Erdmann, Andreas
Conference Paper
2018Modeling the rate-dependent inelastic deformation behavior of porous polycrystalline silver films
Letz, S.A.; Farooghian, A.; Simon, F.B.; Schletz, A.
Journal Article
2018Modeling the rate-dependent inelastic deformation of porous polycrystalline silver films
Letz, Sebastian; Farooghian, Azin; Simon, Flaviu-Bogdan; Schletz, Andreas
Presentation
2018Nano- and micro-patterned S-, H- and X-PDMS for cell-based applications: Comparison of wettability, roughness and cell-derived parameters
Scharin-Mehlmann, Marina; Häring, Aaron; Rommel, Mathias; Dirnecker, Tobias; Friedrich, Oliver; Frey, Lothar; Gilbert, Daniel F.
Journal Article
2018Normalized differential conductance to study current conduction mechanisms in MOS structures
Nouibat, T.H.; Messai, Z.; Chikouch, D.; Ouennoughi, Z.; Rouag, N.; Rommel, Mathias; Frey, Lothar
Journal Article
2018Novel approach based on continuous trench modelling to predict focused ion beam prepared freeform surfaces
Bilbao-Guillerna, A.; Eachambadi, R.T.; Cadot, G.B.J.; Axinte, D.A.; Billingham, J.; Stumpf, F.; Beuer, S.; Rommel, M.
Journal Article
2018On the limits of scalpel AFM for the 3D electrical characterization of nanomaterials
Chen, Shaochuan; Jiang, Lanlan; Buckwell, Mark; Jing, Xu; Ji, Yanfeng; Grustan-Gutierrez, Enric; Hui, Fei; Shi, Yuanyuan; Rommel, Mathias; Paskaleva, Albena; Benstetter, Günther; Ng, Wing. H.; Mehonic, Adnan; Kenyon, Anthony J.; Lanza, Mario
Journal Article
2018One-step nanoimprinted Bragg grating sensor based on hybrid polymers
Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Stumpf, Florian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar
Journal Article
2018Optical stressing of 4H-SiC material and devices
Kallinger, B.; Kaminzky, D.; Berwian, P.; Friedrich, J.; Oppel, S.
Conference Paper
2018Optimized 2D positioning of windings in inductive components by genetic algorithm
Rosskopf, Andreas; Knoerzer, Karsten; Baer, Eberhard; Ehrlich, Stefan
Conference Paper
2018Platinum in Silicon after Post-Implantation Annealing: From Experiments to Process and Device Simulations
Hauf, Moritz; Schmidt, Gerhard; Niedernostheide, Franz-Josef; Johnsson, Anna; Pichler, Peter
Conference Paper
2018Power antifuse device to bypass or turn-off battery cells in safety-critical and fail-operational systems
Lorentz, V.R.H.; Waller, R.; Waldhör, S.; Wenger, M.; Gepp, M.; Schwarz, R.; Koffel, S.; Wacker, S.; Akdere, M.; Giegerich, M.; März, M.
Conference Paper
2018Power electronics packaging at Fraunhofer IISB
Bayer, Christoph F.
Presentation
2018Power Interconnect Trends - Cost Savings for PCB Power Electronics by Enabling Wear Out
Schletz, Andreas
Presentation
2018Principle of lifetime-engineering in 4H-SiC by ion implantation
Erlekampf, Jürgen; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen; Frey, Lothar; Erlbacher, Tobias
Poster
2018Process variability for devices at and beyond the 7 nm node
Lorenz, Jürgen; Asenov, Asen; Bär, Eberhard; Barraud, Sylvain; Millar, Campbell; Nedjalkov, Mihail
Conference Paper
2018Process variability for devices at and beyond the 7 nm node
Lorenz, Juergen; Asenov, Asen; Baer, Eberhard; Barraud, Sylvain; Kluepfel, Fabian; Millar, Campbell; Nedjalkov, Mihail
Journal Article
2018Raman spectroscopy characterization of ion implanted 4H-SiC and its annealing effects
Xu, Zongwei; Song, Y.; Rommel, Mathias; Liu, T.; Kocher, Matthias; He, Z.D.; Wang, H.; Yao, B.T.; Liu, L.; Fang, F.Z.
Poster
2018Selective silver sintering of semiconductor dies on PCB
Dresel, Fabian; Letz, Sebastian; Zischler, Sigrid; Schletz, Andreas; Novak, Michael
Conference Paper
2018Simulation in power electronics design. Simulation, possibilities, and issues
Bayer, Christoph Friedrich
Presentation
2018Simulation study of illumination effects in high-NA EUV lithography
Ismail, M.; Evanschitzky, P.; Erdmann, A.; Bottiglieri, G.; Setten, E. van; Fliervoet, T.F.
Conference Paper
2018Strukturierungsverfahren
Fader, Robert; Lorenz, Jürgen; Rommel, Mathias; Baum, Mario; Danylyuk, Serhiy; Gillner, Arnold; Stollenwerk, Jochen; Bläsi, Benedikt
Book Article
2018Symmetry and structure of carbon-nitrogen complexes in gallium arsenide from infrared spectroscopy and first-principles calculations
Künneth, C.; Kölbl, S.; Wagner, H.E.; Häublein, V.; Kersch, A.; Alt, H.C.
Journal Article
2018TiO2 surface functionalization of COC based planar waveguide Bragg gratings for refractive index sensing
Rosenberger, Manuel; Girschikofsky, Maiko; Förthner, Michael; Belle, Stefan; Rommel, Mathias; Frey, Lothar; Schmauß, Bernhard; Hellmann, Ralf
Journal Article
2018TLS-dicing for SiC - Latest assessment results
Lewke, D.; Cerezuela Barreto, M.; Dohnke, K.; Zühlke, H.-U.; Belgardt, C.; Schellenberger, M.
Conference Paper
2018Topic review: Application of raman spectroscopy characterization in micro/nano-machining
Xu, Zongwei; He, Zhongdu; Song, Ying; Fu, Xiu; Rommel, Mathias; Luo, Xichun; Hartmaier, Alexander; Zhang, Junjie; Fang, Fengzhou
Journal Article
2018Untersuchung der elektrischen Feldstärke und des Teilentladungsverhaltens an keramischen Schaltungsträgern
Bayer, Christoph Friedrich
: Frey, Lothar
Dissertation
2018Vias in DBC substrates for embedded power modules
Bach, Hoang Linh; Yu, Zechun; Letz, Sebastian; Bayer, Christoph Friedrich; Waltrich, Uwe; Schletz, Andreas; März, Martin
Conference Paper
20173.3 kV SiC JBS diode configurable rectifier module
Mouawad, B.; Wang, Z.; Buettner, J.; Castellazzi, A.
Conference Paper
20173D simulation of silicon-based single-electron transistors
Klüpfel, Fabian J.; Pichler, Peter
Conference Paper
20174.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density
Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Conference Paper
20176 kW bidirectional, insulated on-board charger with normally-off GaN gate injection transistors
Endres, S.; Sessler, C.; Zeltner, S.; Eckardt, B.; Morita, T.
Conference Paper
2017Advanced 4H-SiC p-i-n Diode as Highly Sensitive High-Temperature Sensor Up To 460 degrees C
Matthus, C.D.; Erlbacher, T.; Hess, A.; Bauer, A.J.; Frey, L.
Journal Article
2017Anordnung mit multifuntionalem Anschluss für Energiespeicherzellen oder Energieverbraucher
Lorentz, Vincent; März, Martin; Wenger, Martin
Patent
2017Application-related characterization and theoretical potential of wide-bandgap devices
Endruschat, A.; Heckel, T.; Gerstner, H.; Joffe, C.; Eckardt, B.; März, M.
Conference Paper
2017A bidirectional approach for segregated DC microgrids
Fersterra, F.; Gosses, K.; Schulz, M.; Wunder, B.; März, M.
Conference Paper
2017Bulk lifetime characterization of corona charged silicon wafers with high resistivity by means of microwave detected photoconductivity
Engst, Christian R.; Rommel, Mathias; Bscheid, Christian; Eisele, Ignaz; Kutter, Christoph
Journal Article
2017A calorimetric method for measuring power losses in power semiconductor modules
Pai, A.P.; Reiter, T.; Vodyakho, O.; Yoo, I.; Maerz, M.
Conference Paper
2017Characterization and mitigation of 3D mask effects in extreme ultraviolet lithography
Erdmann, A.; Xu, D.; Evanschitzky, P.; Philipsen, V.; Luong, V.; Hendrickx, E.
Journal Article
2017Characterizing the conducted EMI performance of a power module through passive measurement
Liu, Y.; Kochetov, S.; Smazinka, T.; Lindemann, A.
Conference Paper
2017Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques
Steinberg, Christian; Rumler, Maximilian; Runkel, Manuel; Papenheim, Marc; Wang, Si; Mayer, Andre; Becker, Marco; Rommel, Mathias; Scheer, Hella-Christin
Journal Article
2017Determination of the selectivity of printed wearable sweat sensors
Zörner, A.; Oertel, S.; Schmitz, B.; Lang, N.; Jank, M.P.M.; Frey, L.
Conference Paper
2017Digital control of hard switched converters by phase modulated pulse width modulation PMPWM
Matlok, S.; Eckardt, B.; Seliger, B.; März, M.
Conference Paper
2017Dislocation formation in heavily As-doped Czochralski grown silicon
Stockmeier, Ludwig; Lehmann, Lothar; Miller, Alfred; Reimann, Christian; Friedrich, Jochen
Journal Article, Conference Paper
2017Droop controlled cognitive power electronics for DC microgrids
Wunder, B.; Ott, L.; Kaiser, J.; Gosses, K.; Schulz, M.; Fersterra, F.; März, M.; Lavery, M.; Han, Y.
Conference Paper
2017Dynamic Modeling of Critical Velocities for the Pushing/Engulfment Transition in the Si-SiC System Under Gravity Conditions
Kundin, J.; Aufgebauer, H.; Reimann, C.; Seebeck, J.; Friedrich, J.; Jauss, T.; Sorgenfrei, T.; Croell, A.
Journal Article
2017Efficient simulation of EUV pellicles
Evanschitzky, P.; Erdmann, A.
Conference Paper
2017Elektrische Energiespeicherzelle mit integrierter Überbrückungseinrichtung
Lorentz, Vincent; März, Martin; Waller, Reinhold
Patent
2017Elektrische Überbrückungseinrichtung zum Überbrücken einer elektrischen Energiequelle oder eines Energieverbrauchers
Lorentz, Vincent; März, Martin; Waller, Reinhold
Patent
2017Elektrische Überbrückungseinrichtung zum Überbrücken elektrischer Bauelemente, insbesondere einer Energiequelle oder eines Energieverbrauchs
Waller, Reinhold; Lorentz, Vincent; März, Martin
Patent
2017Elektrischer Spannungswandler mit mehreren Speicherdrosseln
Matlok, Stefan
Patent
2017Engulfment and pushing of Si3N4 and SiC particles during directional solidification of silicon under microgravity conditions
Friedrich, J.; Reimann, C.; Jauss, T.; Cröll, A.; Sorgenfrei, T.; Tao, Y.; Derby, J.J.
Journal Article
2017Enhanced contamination control methods in advanced wafer processing
Pfeffer, M.; Richter, H.; Altmann, R.; Leibold, A.; Bauer, A.
Conference Paper
2017Enhancing chiller efficiencies via use of cold energy storage
Puls, Philipp; Linhardt, Simon; Öchsner, Richard
Conference Paper
2017Entwicklungsperspektiven für Zellformate von Lithium-Ionen-Batterien in der Elektromobilität
Hettesheimer, Tim; Thielmann, Axel; Neef, Christoph; Möller, Kai-Christian; Wolter, Mareike; Lorentz, Vincent; Gepp, Markus; Wenger, Martin; Prill, Torben; Zausch, Jochen; Kitzler, Peter; Montnacher, Joachim; Miller, Martin; Hagen, Markus; Fanz, Patrik; Tübke, Jens
Study
2017Evaluation of a novel reactor concept for the process intensification and intelligent heat management in the hydrogenation and dehydrogenation of Liquid Organic Hydrogen Carriers
Preuster, P.; Wagner, L.; Nuß, A.; Geiling, J.; Steinberger, M.; Bösmann, A.; Wasserscheid, P.
Conference Paper
2017Evolution of grain structure and recombination active dislocations in extraordinary tall conventional and high performance multi-crystalline silicon ingots
Trempa, M.; Kupka, I.; Kranert, C.; Lehmann, T.; Reimann, C.; Friedrich, J.
Journal Article
2017Experimental verification of a self-triggered solid-state circuit breaker based on a SiC BIFET
Albrecht, M.; Hürner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2017Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Presentation
2017Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Conference Paper
2017Fraunhofer uses semiconductor process exhaust in fuel cell
Steinberger, Michael; Barrett, Steve
Journal Article
2017Generalized approach to design multi-layer stacks for enhanced optical detectability of ultrathin layers
Hutzler, Andreas; Matthus, Christian D.; Rommel, Mathias; Frey, Lothar
Journal Article
2017Grid behavior under fault situations in ±380 VDC distribution systems
Kaiser, J.; Gosses, K.; Ott, L.; Han, Y.; Wunder, B.; März, M.; Weiss, R.
Conference Paper
2017Implementation of 4H-SiC PiN-diodes as nearly linear temperature sensors up to 800 K towards SiC multi-sensor integration
Matthus, C.D.; Erlbacher, T.; Schöfer, B.; Bauer, A.J.; Frey, L.
Conference Paper
2017Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC
Erlekampf, Jürgen; Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar
Poster
2017Influence of Al doping concentration and annealing parameters on TiAl based ohmic contacts on 4H-SiC
Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Poster
2017Influence of different nucleation layers on the initial grain structure of multicrystalline silicon ingots
Kupka, I.; Lehmann, T.; Trempa, M.; Kranert, C.; Reimann, C.; Friedrich, J.
Journal Article
2017Influence of modulation and voltage balancing on spectral emission of modular multilevel converters
Coumont, M.; Hanson, J.; Hermanns, K.; Griepentrog, G.; Lukaschik, A.
Conference Paper
2017Influence of triangular defects on the electrical characteristics of 4H-SiC devices
Schöck, Johannes; Schlichting, Holger; Kallinger, Birgit; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Poster
2017Introduction and application of formation methods based on serial-connected lithium-ion battery cells
Müller, V.; Kaiser, R.; Poller, S.; Sauerteig, D.; Schwarz, R.; Wenger, M.; Lorentz, V.R.H.; März, M.
Journal Article
2017Investigation of dislocation cluster evolution during directional solidification of multicrystalline silicon
Oriwol, D.; Trempa, M.; Sylla, L.; Leipner, H.S.
Journal Article
2017Investigation of high-k dielectric stacks by C-AFM: Advantages, limitations, and possible applications
Rommel, Mathias; Paskaleva, Albena
Book Article
2017Kühlelement für mindestens einen mit elektronischen und/oder elektrischen Bauelementen bestückten Träger
Schletz, Andreas; Schimanek, Ernst
Patent
2017Large area manufacturing of plasmonic colour filters using substrate conformal imprint lithography
Rumler, Maximilian; Foerthner, M.; Baier, L.; Evanschitzky, P.; Becker, M.; Rommel, M.; Frey, L.
Journal Article
2017Layout and Setup for a Conversion System of Hydrogen Exhaust Gas Streams into Electricity using a PEM Fuel Cell
Steinberger, Michael; Müller, Michael; Hoffmann, Patrick; Geiling, Johannes; Öchsner, Richard
Conference Paper
2017Levet-set-based inverse lithography under random field shape uncertainty in a vector Hopkins imaging model
Wu, X.; Fühner, T.; Erdmann, A.; Lam, E.Y.
Conference Paper
2017Mechatronic design of 2 kW SiC DC/AC converter with 200 W/inch
Menrath, T.; Endres, S.; Zeltner, S.; Matlok, S.; Eckardt, B.
Conference Paper
2017Mission profile analysis and calorimetric loss measurement of a SiC hybrid module for main inverter application of electric vehicles
Poonjal Pai, A.; Reiter, T.; Maerz, M.
Conference Paper
2017Monolithically integrated solid-state-circuit-breaker for high power applications
Huerner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2017Nanoimprinted surface relief Bragg gratings for sensor applications
Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar
Poster
2017New methods to evaluate cleaning processes by detecting the particle load on surfaces of diamond wire sawn silicon wafers
Lottspeich, L.; Herold, I.; Richter, H.; Kaden, T.
Conference Paper, Journal Article
2017Novel advanced analytical design tool for 4H-SiC VDMOSFET devices
Benedetto, L. di; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Rubino, A.
Conference Paper
2017One-step fabrication of hierarchical structures
Rumler, Maximilian; Förthner, Michael; Kollmuss, Manuel; Baier, Leander; Stumpf, Florian; Becker, Marco; Rommel, Mathias; Frey, Lothar
Poster
2017One-step fabrication of hierarchical structures by direct laser writing through PDMS molds
Rumler, Maximilian; Förthner, Michael; Baier, Leander; Marhenke, Julius; Kollmuss, Manuel; Michel, Felix; Becker, Marco; Rommel, Mathias
Presentation
2017Optical stressing of 4H-SiC material and devices
Kallinger, Birgit; Kaminzky, Daniel; Berwian, Patrick; Friedrich, Jochen; Oppel, Steffen
Poster
2017Optimization of 4H-SiC photodiodes as selective UV sensors
Matthus, C.D.; Burenkov, A.; Erlbacher, T.
Conference Paper
2017Parasitic inductance analysis of a fast switching 100 kW full SiC inverter
Kegeleers, M.; Koerner, J.; Matlok, S.; Hofmann, M.; Maerz, M.
Conference Paper
2017Particle engulfment dynamics under oscillating crystal growth conditions
Tao, Y.; Sorgenfrei, T.; Jauß, T.; Cröll, A.; Reimann, C.; Friedrich, J.; Derby, J.J.
Journal Article
2017A passively cooled 15 kW, 800 V DCDC converter with a peak efficiency of 99.7 %
Kreutzer, O.; Billmann, M.; Maerz, M.
Conference Paper
2017A physical model for innovative laser direct write lithography
Onanuga, T.; Rumler, M.; Erdmann, A.
Conference Paper
2017Platinum diffusion for advanced silicon power devices
Badr, Elie
: Pichler, Peter; Wellmann, Peter
Dissertation
2017Point contact current voltage measurements of 4H-SiC samples with different doping profiles
Kocher, Matthias; Niebauer, Michael; Rommel, Mathias; Haeublein, Volker; Bauer, Anton
Conference Paper
2017Polymerization related deformations in multilayer soft stamps for nanoimprint
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Scheer, Hella-Christin; Frey, Lothar
Journal Article
2017A practical example of GaN-LED failure cause analysis by application of combined electron microscopy techniques
Meissner, E.; Haeckel, M.; Friedrich, J.
Journal Article
2017A quantitative model with new scaling for silicon carbide particle engulfment during silicon crystal growth
Derby, J.J.; Tao, Y.; Reimann, C.; Friedrich, J.; Jauß, T.; Sorgenfrei, T.; Cröll, A.
Journal Article
2017Raman micro-spectroscopy as a non-destructive key analysis tool in current power semiconductor manufacturing
Biasio, M. de; Kraft, M.; Geier, E.; Goller, B.; Bergmann, C.; Esteve, R.; Cerezuela-Barreto, M.; Lewke, D.; Schellenberger, M.; Roesner, M.
Conference Paper
2017Reducing EUV mask 3D effects by alternative metal absorbers
Philipsen, V.; Luong, K.V.; Souriau, L.; Hendrickx, E.; Erdmann, A.; Xu, D.; Evanschitzky, P.; Kruijs, R.W.E. van de; Edrisi, A.; Scholze, F.; Laubis, C.; Irmscher, M.; Naasz, S.; Reuter, C.
Conference Paper
2017Reducing extreme ultraviolet mask three-dimensional effects by alternative metal absorbers
Philipsen, V.; Luong, K.V.; Souriau, L.; Erdmann, A.; Xu, D.; Evanschitzky, P.; Kruijs, R.W.E. van de; Edrisi, A.; Scholze, F.; Laubis, C.; Irmscher, M.; Naasz, S.; Reuter, C.; Hendrickx, E.
Journal Article
2017Resistless Ga+ beam lithography for flexible prototyping of nanostructures in different materials by reactive ion etching
Rommel, Mathias; Rumler, Maximilian; Haas, Anke; Beuer, Susanne
Presentation
2017Resonant electric arcs in DC microgrids with low system impedance in the VLF-band
Strobl, C.; Ott, L.; Kaiser, J.; Streck, M.; Nothnagel, F.; Berger, F.; Schäfer, M.; Rabenstein, R.
Conference Paper
2017Safety considerations for the operation of bipolar DC-grids
Kaiser, J.; Gosses, K.; Ott, L.; Han, Y.; Wunder, B.; März, M.; Schork, F.; Bühler, K.; Böhm, T.
Conference Paper
2017SiC power module loss reduction by PWM gate drive patterns and impedance-optimized gate drive voltages
Gerstner, H.; Heckel, T.; Endruschat, A.; Roßkopf, A.; Eckardt, B.; März, M.
Conference Paper
2017Silicon self-interstitial properties deduced from platinum profiles after annealing with controlled cooling
Johnsson, Anna; Pichler, Peter; Schmidt, Gerhard
Journal Article
2017Simulation flow and model verification for laser direct-write lithography
Onanuga, T.; Rumler, M.; Erdmann, A.
Journal Article
2017Special issue on ptychography
Erdmann, A.; Situ, G.
Journal Article
2017Stress reduction in high voltage MIS capacitor fabrication
Banzhaf, S.; Kenntner, J.; Grieb, M.; Schwaiger, S.; Erlbacher, T.; Bauer, A.J.; Frey, L.; Frey, L.
Conference Paper
2017Switching SiC devices faster and more efficient using a DBC mounted terminal decoupling Si-RC element
Matlok, S.; Erlbacher, T.; Krach, F.; Eckardt, B.
Conference Paper
2017System integration of printed biosensors for sweat electrolytes with data acquisition via Bluetooth to App
Oertel, S.; Jank, M.; Zörner, A.; Schmitz, B.; Lang, N.
Conference Paper
2017Tiegel zur Herstellung von Silicium-Ingots, Verfahren zu dessen Herstellung sowie Silicium-Ingot
Schneider, Veronika; Reimann, Christian; Friedrich, Jochen; Sans, Jürgen; Kuczynski, Maciej
Patent
2017Verfahren zu Ausbildung elektrisch leitender Durchkontaktierungen in keramischen Schaltungsträgern
Schletz, Andreas; Tham, Nils; Hutzler, Aaron
Patent
2017Verfahren zur Überprüfung eines Trennschrittes bei der Zerteilung eines flachen Werkstückes in Teilstücke
Tobisch, Alexander; Schellenberger, Martin; Lewke, Dirk
Patent
2017Waste heat energy harvesting by use of BaTiO3 for pyroelectric hydrogen generation
Belitz, R.; Meisner, P.; Coeler, Matthias; Wunderwald, U.; Friedrich, Jochen; Zosel, J.; Schelter, Matthias; Jachalke, Sven; Mehner, Erik
Journal Article
2017Waveguide bragg gratings in Ormocer®s for temperature sensing
Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Journal Article
20163D simulation of light exposure and resist effects in laser direct write lithography
Onanuga, Temitope; Erdmann, Andreas
Conference Paper
20164.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density
Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Poster
2016Advanced detection method for polymer residues on semiconductor substrates
Richter, H.; Pfitzner, L.; Pfeffer, M.; Bauer, A.; Siegert, J.; Bodner, T.
Conference Paper
2016Analytical Model and Design of 4H-SiC Planar and Trenched JBS Diodes
Di Benedetto, L.; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Bellone, S.
Journal Article
2016ATHENIS-3D: Automotive tested high-voltage and embedded non-volatile integrated SoC platform with 3D technology
Wachmann, Ewald; Saponara, Sergio; Zambelli, C.; Tisserand, Pierre; Charbonnier, Jean; Erlbacher, Tobias; Grünler, Saeideh; Hartler, C.; Siegert, J.; Chassard P.; Ton D.M.; Ferrari, L.; Fanucci, L.
Conference Paper
2016Automated source/mask/directed self-assembly optimization using a self-adaptive hierarchical modeling approach
Fühner, T.; Michalak, P.; Wu, X.; Erdmann, A.
Conference Paper
2016Aviation battery monitoring electronics in lithium-ion based battery systems for electrified sailplanes and aircrafts
Schwarz, R.; Waller, R.; Wenger, M.; Akdere, M.; Neureuther, J.; Gepp, M.; Koffel, S.; Lorentz, V.R.H.; März, M.; Holtsmark, A.; Gribov, V.; Lange, A.
Conference Paper
2016Bipolar degradation of 6.5 kV SiC pn-Diodes: Result prediction by photoluminescence
Wehrhahn-Kilian, L.; Dohnke, K.O.; Kaminzky, D.; Kallinger, B.; Oppel, S.
Conference Paper
2016Calculation of power losses in litz wire systems by coupling FEM and PEEC method
Roßkopf, Andreas; Bär, Eberhard; Joffe, Christopher; Bonse, Clemens
Journal Article
2016Challenges and simulation solutions for advanced lithography for nanometer interconnect patterning
Evanschitzky, Peter
Presentation
2016Challenges for predictive EUV mask modeling
Evanschitzky, Peter; Erdmann, Andreas
Presentation
2016Clarification of the relation between the grain structure of industrial grown mc-Si and the area fraction of electrical active defects by means of statistical grain structure evaluation
Lehmann, T.; Reimann, C.; Meissner, E.; Friedrich, J.
Journal Article
2016Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication
Rumler, Maximilian; Kollmuss, M.; Baier, L.; Michel, F.; Förthner, M.; Becker, M.; Rommel, M.; Frey, L.
Conference Paper
2016Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication
Rumler, Maximilian; Kollmuss, Manuel; Baier, Leander; Michel, Felix; Förthner, Michael; Becker, Marco; Rommel, Mathias; Frey, Lothar
Poster
2016Comparative spatially resolved characterization of a Czochralski-grown silicon crystal by different laser-based imaging techniques
Herms, Martin; Wagner, Matthias; Molchanov, Alexander; Rommel, Mathias; Zschorsch, Markus; Würzner, Sindy
Conference Paper
2016Conduction loss reduction for bipolar injection field-effect-transistors (BIFET)
Hürner, Andreas; Mitlehner, Heinz; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Contamination control for wafer container used within 300 mm manufacturing for power microelectronics
Schneider, G.; Nguyen, T.Q.; Taubert, M.; Bounouar, J.; Le-Guet, C.; Leibold, A.; Richter, H.; Pfeffer, M.
Conference Paper
2016Correlation of carbon doping variations with the vertical breakdown of GaN-on-Si for power electronics
Knetzger, M.; Meissner, E.; Derluyn, J.; Germain, M.; Friedrich, J.
Journal Article
2016Correlation of film morphology and defect content with the charge-carrier transport in thin-film transistors based on ZnO nanoparticles
Polster, S.; Jank, M.P.M.; Frey, L.
Journal Article
2016COSIVU - Compact, smart and reliable drive unit for fully electric vehicles
Andersson, D.R.; Brinkfeldt, K.; Nord, S.; Ottosson, J.; Lampic, G.; Gotovac, G.; Zschieschang, O.; Baumgartel, H.; Brusius, M.; Kaulfersch, E.; Hilpert, F.; Otto, A.; Frankeser, S.
Conference Paper
2016Design and optimization of a multi-coil system for inductive charging with small air gap
Joffe, C.; Rosskopf, A.; Ehrlich, S.; Dobmeier, C.; März, M.
Conference Paper
2016Determination of Fowler-Nordheim tunneling parameters in Metal-Oxide-Semiconductor structure including oxide field correction using a vertical optimization method
Toumi, S.; Ouennoughi, Z.; Strenger, K.C.; Frey, L.
Journal Article
2016Dimensioning of a novel design concept for MMC submodules
Waltrich, U.; Russius, B.; Malipaard, D.; Schletz, A.; März, M.
Conference Paper
2016Direct optical stress sensing in semiconductor manufacturing using raman micro-spectrometry
Biasio, M. de; Kraft, M.; Roesner, M.; Bergmann, C.; Cerezuela-Barreto, M.; Lewke, D.; Schellenberger, M.
Conference Paper
2016Dislocation formation in seed crystals induced by feedstock indentation during growth of quasimono crystalline silicon ingots
Trempa, M.; Beier, M.; Reimann, C.; Roßhirth, K.; Friedrich, J.; Löbel, C.; Sylla, L.; Richter, T.
Journal Article
2016Drill-down analysis with equipment health monitoring
Krauel, Christopher; Weishäupl, Laura; Pfeffer, Markus
Presentation
2016The efficiency of hydrogen-doping as a function of implantation temperature
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2016Efficient simulation of EUV pellicles
Evanschitzky, Peter; Erdmann, Andreas
Presentation
2016Effizienter Einsatz von Kältespeichern zur Reduktion der Kältegestehungskosten
Puls, Philipp
Presentation
2016Einsatz von Kältespeichern zur Steigerung der Effizienz von Kälteversorgungssystemen
Puls, Philipp; Linhardt, Simon; Lange, C.; Öchsner, Richard
Poster
2016Electrical properties of solution processed layers based on Ge-Si alloy nanoparticles
Meric, Z.; Mehringer, C.; Jank, M.P.M.; Peukert, W.; Frey, L.
Journal Article
2016Electrically inactive dopants in heavily doped as-grown czochralski silicon
Stockmeier, L.; Elsayed, M.; Krause-Rehberg, R.; Zschorsch, M.; Lehmann, L.; Friedrich, J.
Conference Paper
2016Empirical cluster modeling revisited
Pichler, Peter
Conference Paper
2016Enhancement of the partial discharge inception voltage of ceramic substrates for power modules by trench coating
Waltrich, U.; Bayer, C.F.; Reger, M.; Meyer, A.; Tang, X.; Schletz, A.
Conference Paper
2016Enhancement of the partial discharge inception voltage of DBCs by adjusting the permittivity of the encapsulation
Bayer, Christoph Friedrich; Waltrich, Uwe; Soueidan, Amal; Schneider, Richard; Bär, Eberhard; Schletz, Andreas
Conference Paper
2016Enhancing partial discharge inception voltage of DBCs by geometrical variations based on simulations of the electric field strength
Bayer, Christoph Friedrich; Waltrich, Uwe; Schneider, Richard; Soueidan, Amal; Bär, Eberhard; Schletz, Andreas
Conference Paper
2016Equipment simulation for studying the growth rate and its uniformity of oxide layers deposited by plasma-enhanced oxidation
Baer, Eberhard; Niess, Juergen
Conference Paper
2016Erweiterte Messsystemanalyse mittels statistischer Versuchsplanung. Anwendungsbeispiel anhand eines Lebensdauertests für Leistungselektronik
Hutzler, Aaron; Schletz, Andreas
Presentation
2016Estimation of the excitation current and the rotor resistance of an externally excited synchronous machine with an inductively supplied excitation coil
Köhler, S.; Wagner, B.; Endres, S.
Conference Paper
2016Extending VLSI and alternative technology with optical and complementary lithography
Lai, K.; Erdmann, A.
Journal Article
2016Extreme ultraviolet multilayer defect analysis and geometry reconstruction
Xu, D.; Evanschitzky, P.; Erdmann, A.
Journal Article
2016Flexographic printing of nanoparticulate tin-doped indium oxide inks on PET foils and glass substrates
Wegener, M.; Spiehl, D.; Sauer, H.M.; Mikschl, F.; Liu, X.; Kölpin, N.; Schmidt, M.; Jank, M.P.M.; Dörsam, E.; Roosen, A.
Journal Article
2016Fraunhofer Institute for Integrated Systems and Device Technology. Achievements and Results. Annual Report 2015
 
Annual Report
2016Fraunhofer topics of the future "SUPERGRID". Supergrid - Approach for the integration of renewable energy in Europe and North Africa
Platzer, Werner; Boie, Inga; Ragwitz, Mario; Kost, Christoph; Thoma, Jürgen; Vogel, Axel; Fluri, Thomas; Pfeiffer, Wulf; Burmeister, Frank; Tham, Nils; Pudlik, Martin; Bohn, Sven; Agsten, Michael; Bretschneider, Peter; Westermann, Dirk; Kranzer, Dirk; Schlegl, Thomas
Report
2016Fraunhofer Zukunftsthemen "SUPERGRID". Supergrid - Ansatz für die Integration von Erneuerbaren Energien in Europa und Nordafrika
Platzer, Werner; Boie, Inga; Ragwitz, Mario; Kost, Christoph; Thoma, Jürgen; Vogel, Axel; Fluri, Thomas; Pfeiffer, Wulf; Burmeister, Frank; Tham, Nils; Pudlik, Martin; Bohn, Sven; Agsten, Michael; Bretschneider, Peter; Westermann, Dirk; Kranzer, Dirk; Schlegl, Thomas
Report
2016Fundamental efficiency limits in power electronic systems
Heckel, T.; Rettner, C.; Marz, M.
Conference Paper
2016Gettering and defect engineering in semiconductor technology XVI
: Pichler, Peter (Hrsg.)
Conference Proceedings
2016Hardware and software framework for an open battery management system in safety-critical applications
Akdere, M.; Giegerich, M.; Wenger, M.; Schwarz, R.; Koffel, S.; Fühner, T.; Waldhör, S.; Wachtler, J.; Lorentz, V.R.H.; März, M.
Conference Paper
2016Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings
Förthner, Michael; Rumler, Maximillian; Stumpf, Florian; Fader, Robert; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Journal Article
2016Imaging defect luminescence of 4H-SiC by ultraviolet-photoluminescence
Berwian, Patrick; Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Friedrich, Jochen; Oppel, Steffen; Schneider, Adrian; Schütz, Michael
Conference Paper
2016Implementation of simultaneous energy and data transfer in a contactless connector
Trautmann, M.; Joffe, C.; Pflaum, F.; Sanftl, B.; Weigel, R.; Heckel, T.; Koelpin, A.
Conference Paper
2016Incorporating photomask shape uncertainty in computational lithography
Wu, X.; Liu, S.; Erdmann, A.; Lam, E.Y.
Conference Paper
2016Inductive power transfer system with a rotary transformer for contactless energy transfer on rotating applications
Ditze, S.; Endruschat, A.; Schriefer, T.; Rosskopf, A.; Heckel, T.
Conference Paper
2016Influence of different seed materials on multi-crystalline silicon ingot properties
Reimann, C.; Trempa, M.; Lehmann, T.; Rosshirt, K.; Stenzenberger, J.; Friedrich, J.; Hesse, K.; Dornberger, E.
Journal Article
2016Influence of the junction capacitance of the secondary rectifier diodes on output characteristics in multi-resonant converters
Ditze, S.; Heckel, T.; März, M.
Conference Paper
2016Influence of varying bundle structures on power electronic systems simulated by a coupled approach of FEM and PEEC
Rosskopf, A.; Schuster, S.; Endruschat, A.; Bär, E.
Conference Paper
2016An integrated source/mask/DSA optimization approach
Fühner, T.; Michalak, P.; Welling, U.; Orozco-Rey, J.C.; Müller, M.
Conference Paper
2016Interaction of SiC particles with moving solid-liquid interface during directional solidification of silicon
Friedrich, J.; Reimann, C.; Jauss, T.; Cröll, A.; Sorgenfrei, T.
Journal Article
2016Inverse image modeling for defect detection and optical system characterization
Xu, Dongbo
: Erdmann, Andreas
Dissertation
2016Investigations of critical structural defects in active layers of GaN-on-Si for power electronic devices
Knetzger, M.; Meissner, E.; Derluyn, J.; Germain, M.; Friedrich, J.
Conference Paper
2016Ion implantation of polypropylene films for the manufacture of thin film capacitors
Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Djupmyr, M.
Conference Paper
2016Ion implanted 4H-SiC UV pin-diodes for solar radiation detection - simulation and characterization
Matthus, Christian D.; Erlbacher, Tobias; Burenkov, Alexander; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Lifetime and manufacturability of integrated power electronics
Randoll, R.; Wondrak, W.; Schletz, A.
Journal Article
2016Mask-induced best-focus shifts in deep ultraviolet and extreme ultraviolet lithography
Erdmann, A.; Evanschitzky, P.; Neumann, J.T.; Gräupner, P.
Journal Article
2016Materials integration for printed zinc oxide thin-film transistors: Engineering of a fully-printed semiconductor/contact scheme
Liu, X.; Wegener, M.; Polster, S.; Jank, M.P.M.; Roosen, A.; Frey, L.
Journal Article
2016Mechanical properties of silver-sintering bond lines
Letz, Sebastian; Hutzler, Aaron; Schletz, Andreas; Waltrich, Uwe
Conference Paper
2016Metastable defects in proton implanted and annealed silicon
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Job, Reinhart; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2016Methodologie und Prüfverfahren zur EMV Qualifizierung von Leistungsmodulen
Kochetov, S.; Smazinka, T.
Conference Paper
2016A model of electric field distribution in gate oxide and JFET-region of 4H-SiC DMOSFETs
Benedetto, Luigi di; Licciardo, Gian D.; Erlbacher, Tobias; Bauer, Anton J.; Liguori, R.; Rubino, Alfredo
Journal Article
2016Model-based fault current estimation for low fault-energy 380VDC distribution systems
Ott, L.; Kaiser, J.; Gosses, K.; Han, Y.; Wunder, B.; März, M.; Strobl, C.
Conference Paper
2016Modeling the post-implantation annealing of platinum
Badr, Elie; Pichler, Peter; Schmidt, Gerhard
Conference Paper
2016Modelling of effective minority carrier lifetime in 4H-SiC n-type epilayers
Kaminzky, Daniel; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
Conference Paper
2016Monitoring of biomarkers in sweat with printed sensors combined with sport wearables
Oertel, S.; Jank, M.; Schmitz, B.; Lang, N.
Conference Paper
2016Monolithic 3D TSV-based high-voltage, high-temperature capacitors
Gruenler, S.; Rattmann, G.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Journal Article, Conference Paper
2016Multivariate approach for equipment health monitoring
Krauel, C.; Weishäupl, L.
Journal Article, Conference Paper
2016A new behavioral model for accurate loss calculations in power semiconductors
Pai, A.P.; Reiter, T.; Maerz, M.
Conference Paper
2016Nitride bonded silicon nitride as a reusable crucible material for directional solidification of silicon
Schneider, V.; Reimann, C.; Friedrich, J.; Müller, G.
Journal Article
2016Non-isolated three-port DC/DC converter for ±380V DC microgrids
Han, Y.; Kaiser, J.; Ott, L.; Schulz, M.; Fersterra, F.; Wunder, B.; Maerz, M.
Conference Paper
2016Non-isolating DC/DC converter for a fuel cell powered aircraft
Kreutzer, O.; Billmann, M.; Maerz, M.; Lange, A.
Conference Paper
2016A novel submodule concept for modular multilevel converters
Ruccius, B.; Burani, N.; Galek, M.; Malipaard, D.
Conference Paper
2016Open, flexible and extensible battery management system for lithium-ion batteries in mobile and stationary applications
Giegerich, M.; Akdere, M.; Freund, C.; Fühner, T.; Grosch, J.L.; Koffel, S.; Schwarz, R.; Waldhör, S.; Wenger, M.; Lorentz, V.R.H.; März, M.
Conference Paper
2016Optimization of 4H-SiC UV photodiode performance using numerical process and device simulation
Burenkov, Alex; Matthus, Christian David; Erlbacher, Tobias
Journal Article
2016Optimized design for 4H-SiC power DMOSFETs
Benedetto, Luigi di; Licciardo, Gian D.; Erlbacher, Tobias; Bauer, Anton J.; Rubino, Alfredo
Journal Article
2016Partial discharges in ceramic substrates - correlation of electric field strength simulations with phase resolved partial discharge measurements
Bayer, Christoph Friedrich; Waltrich, Uwe; Soueidan, Amal; Baer, Eberhard; Schletz, Andreas
Conference Paper
2016Partial discharges in ceramic substrates - correlation of electric field strength simulations with phase resolved partial discharge measurements
Bayer, Christoph Friedrich; Waltrich, Uwe; Soueidan, Amal; Bär, Eberhard; Schletz, Andreas
Journal Article
2016Particle free handling of substrates
Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.
Journal Article
2016Phase-field simulations of particle capture during the directional solidification of silicon
Aufgebauer, H.; Kundin, J.; Emmerich, H.; Azizi, M.; Reimann, C.; Friedrich, J.; Jauß, T.; Sorgenfrei, T.; Cröll, A.
Journal Article
2016A possible explanation of the record electrical performance of silicon nanowire tunnel FETs with silicided source contact
Burenkov, Alex; Lorenz, Juergen
Conference Paper
2016Post-trench processing of silicon deep trench capacitors for power electronic applications
Banzhaf, Stefanie; Schwaiger, Stefan; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Potential energy savings via use of free cooling and cold energy storage
Puls, Philipp
Presentation
2016Potential of 4H-SiC CMOS for high temperature applications using advanced lateral p-MOSFETs
Albrecht, Matthäus; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Process informed accurate compact modelling of 14-nm FinFET variability and application to statistical 6T-SRAM simulations
Wang, Xingsheng; Reid, Dave; Wang, Liping; Millar, Campbell; Burenkov, Alex; Evanschitzky, Peter; Baer, Eberhard; Lorenz, Juergen; Asenov, Asen
Conference Paper
2016Prospects and issues of nanomaterials use in microelectronics
Jank, Michael; Bauer, Anton; Frey, Lothar
Poster
2016Quantification and reduction of deformations in multilayer soft-NIL stamps
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar
Poster
2016Quantification and reduction of deformations in multilayer soft-NIL stamps
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar
Poster
2016Reliabe data link for power transfer control in an inductive charging system for electric vehicles
Sanftl, B.; Joffe, C.; Trautmann, M.; Weigel, R.; Koelpin, A.
Conference Paper
2016Reliability assessment of a smart and compact inverter developed for electrically powered construction vehicles
Otto, A.; Gadhiya, G.; Rzepka, S.; Kaulfersch, E.; Hilpert, F.; Brabandt, I.
Conference Paper
2016Resolution enhancements for semiconductor lithography: A computational perspective
Erdmann, A.
Conference Paper
2016Scalable insulated DC/DC converters for safe and efficient coupling of fuel cells, electrolyzers and DC grids
Seliger, B.; Matlok, S.; Zeltner, S.
Conference Paper
2016Semiconductor equipment assessment - An enabler for production ready equipment
Pfeffer, M.; Pfitzner, L.; Bauer, A.
Conference Paper
2016Silicon integrated RC snubbers for applications up to 900V with reduced mechanical stress and high manufacturability
Krach, Florian; Thielen, Nils; Heckel, Thomas; Bauer, Anton J.; Erlbacher, Tobias; Frey, Lothar
Conference Paper
2016Simulating wafer bow for integrated capacitors using a multiscale approach
Wright, Alan; Krach, Florian; Thielen, Nils; Grünler, Saeideh; Erlbacher, Tobias; Pichler, Peter
Conference Paper
2016Simulation of process variations in FinFET transistor patterning
Baer, Eberhard; Burenkov, Alex; Evanschitzky, Peter; Lorenz, Juergen
Conference Paper
2016Simulation of silicon-dot-based single-electron memory devices
Klüpfel, Fabian Johannes; Burenkov, Alexander; Lorenz, Jürgen
Conference Paper
2016Simulation of thermo-mechanical effect in bulk-silicon FinFETs
Burenkov, Alex; Lorenz, Jürgen
Journal Article, Conference Paper
2016Slew rate control of a 600 V 55 mΩ GaN cascode
Endruschat, A.; Heckel, T.; Reiner, R.; Waltereit, P.; Quay, R.; Ambacher, O.; März, M.; Eckardt, B.; Frey, L.
Conference Paper
2016Stacking of insulating substrates and a field plate to increase the PDIV for high voltage power modules
Bayer, Christoph Friedrich; Waltrich, Uwe; Soueidan, Amal; Baer, Eberhard; Schletz, Andreas
Conference Paper
2016Stamps for nanoimprint lithography - R&D at Fraunhofer IISB
Rommel, Mathias; Rumler, Maximilian; Förthner, Michael; Scharin, Marina; Fader, R.; Schmidt, H.
Presentation
2016Synthesis of metastable Co4N, Co3N, Co2N, and CoO0.74N0.24 from a single azide precursor and intermediates in CoBr2 ammonolysis
Widenmeyer, M.; Shlyk, L.; Becker, N.; Dronskowski, R.; Meissner, E.; Niewa, R.
Journal Article
2016Systematic characterization of doping profiles in 4H-SiC by point contact current voltage measurements
Kocher, Matthias; Niebauer, Michael; Rommel, Mathias; Haeublein, Volker; Bauer, Anton
Poster
2016Temperature gradient reduction in high-power battery systems using prismatic cells combined with Phase-Change Sheets and Graphite foils
Gepp, M.; Reisenweber, H.; Lorentz, V.R.H.; März, M.
Conference Paper
2016TiO2 nanotubes: Nitrogen-ion implantation at low dose provides noble-metal-free photocatalytic H2-evolution activity
Zhou, X.; Häublein, V.; Liu, N.; Nguyen, N.T.; Zolnhofer, E.M.; Tsuchiya, H.; Killian, M.S.; Meyer, K.; Frey, L.; Schmuki, P.
Journal Article
2016A trade-off between nominal forward current density and surge current capability for 4.5kV SiC MPS diodes
Huang, Yaren; Erlbacher, Tobias; Buettner, Jonas; Wachutka, Gerhard
Conference Paper
2016Using SiC MOSFET's full potential - Swichting faster than 200 kV/µs
Kreutzer, O.; Heckel, T.; März, M.
Conference Paper
2016Verfahren zum Herstellen eines Metall-Keramik-Substrates und zugehöriges Metall-Keramik-Substrat
Bayer, Christoph; Waltrich, Uwe; Schletz, Andreas; Bär, Eberhard; Meyer, Andreas
Patent
2016Waveguide Bragg gratings in Ormocer hybrid polymers
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Journal Article
2016Wetting and infiltration of nitride bonded silicon nitride by liquid silicon
Schneider, V.; Reimann, C.; Friedrich, J.
Journal Article