Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC
Weiße, J.; Hauck, M.; Krieger, M.; Bauer, A.J.; Erlbacher, T.
Journal Article
2019Analysis of the geometry of the growth ridges and correlation to the thermal gradient during growth of silicon crystals by the Czochralski-method
Stockmeier, Ludwig; Kranert, Christian; Fischer, Peter; Epelbaum, Boris; Reimann, Christian; Friedrich, Jochen; Raming, Georg; Miller, Alfred
Journal Article
2019Attenuated phase shift mask for extreme ultraviolet: Can they mitigate three-dimensional mask effects?
Erdmann, A.; Evanschitzky, P.; Mesilhy, H.; Philipsen, V.; Hendrickx, E.; Bauer, M.
Journal Article
2019Bewertung von Bondverbindungen - Möglichkeiten, Normen und Herausforderungen
Dirksen, Daniel
Presentation
2019Channeling in 4H-SiC from an Application Point of View
Pichler, Peter; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton J.; Erlbacher, Tobias
Conference Paper
2019A Compact Model Based on Bardeens Transfer Hamiltonian Formalism for Silicon Single Electron Transistors
Klüpfel, Fabian J.
Journal Article
2019Comparison between Ni-SALICIDE and Self-Aligned Lift-Off Used in Fabrication of Ohmic Contacts for SiC Power MOSFET
Sledziewski, Tomasz; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar; Chen, Ximing; Zhao, Yanli; Li, Chengzhan; Dai, Xiaoping
Conference Paper
2019Considerations on the limitations of the growth rate during pulling of silicon crystals by the Czochralski technique for PV applications
Friedrich, J.; Jung, T.; Trempa, M.; Reimann, C.; Denisov, A.; Muehe, A.
Journal Article
2019Corrigendum to "Particle engulfment dynamics under oscillating crystal growth conditions" [J. Crystal Growth 468 (2017) 24-27]
Tao, Y.; Sorgenfrei, T.; Jauß, T.; Cröll, A.; Reimann, C.; Friedrich, J.; Derby, J.J.
Journal Article
2019Corrosion in PE Systems - Environmental Testing, Corrosion Detection and Protection
Zimmermann, Victoria; Diepgen, Antonia; Bayer, Christoph Friedrich
Presentation
2019Decoration of Al Implantation Profiles in 4H-SiC by Bevel Grinding and Dry Oxidation
Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Conference Paper
2019Deeper insight into lifetime-engineering in 4H-SiC by ion implantation
Erlekampf, J.; Kallinger, B.; Weiße, J.; Rommel, M.; Berwian, P.; Friedrich, J.; Erlbacher, T.
Journal Article
2019Design Considerations for Robust Manufacturing and High Yield of 1.2 kV 4H-SiC VDMOS Transistors
Schlichting, H.; Sledziewski, T.; Bauer, A.J.; Erlbacher, T.
Conference Paper
2019Design of a 4H-SiC RESURF n-LDMOS Transistor for High Voltage Integrated Circuits
Weisse, Julietta; Mitlehner, Heinz; Frey, Lothar; Erlbacher, Tobias
Conference Paper
2019Determination of Compensation Ratios of Al-Implanted 4H-SiC by TCAD Modelling of TLM Measurements
Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zong Wei; Erlbacher, Tobias; Bauer, Anton J.
Conference Paper
2019Diffusion of phosphorus and boron from Atomic Layer Deposition oxides into silicon
Beljakova, Svetlana; Pichler, Peter; Kalkofen, Bodo; Hübner, René
Journal Article
2019Evaluation of improvement strategies of grain structure properties in high performance multi-crystalline silicon ingots
Trempa, M.; Kranert, C.; Kupka, I.; Reimann, C.; Friedrich, J.
Journal Article
2019Feasibility of 4H-SiC p-i-n diode for sensitive temperature measurements between 20.5 K and 802 K
Matthus, C.D.; Benedetto, L. di; Kocher, M.; Bauer, A.J.; Licciardo, G.D.; Rubino, A.; Erlbacher, T.
Journal Article
2019First Experimental Test on Bipolar Mode Field Effect Transistor Prototype in 4H-SiC. A Proof of Concept
Benedetto, L. di; Licciardo, G.D.; Huerner, A.; Erlbacher, T.; Bauer, A.J.; Rubino, A.
Conference Paper
2019Fraunhofer IISB erforscht Korrosion
Bayer, Christoph
Journal Article
2019Future Packaging Technologies in Power Electronic Modules
Bayer, Christoph Friedrich
Presentation
2019Heteroepitaxial growth of GaN on sapphire substrates by high temperature vapor phase epitaxy
Lukin, G.; Schneider, T.; Förste, M.; Barchuk, M.; Schimpf, C.; Röder, C.; Zimmermann, F.; Niederschlag, E.; Pätzold, O.; Beyer, F.C.; Rafaja, D.; Stelter, M.
Journal Article
2019Hybrid Cooling Towers in a Free-Cooling Application: Modeling and Field Measurement Verification
Puls, P.; Lange, C.; Öchsner, R.
Journal Article, Conference Paper
2019A hybrid frequency-time-domain approach to determine the vibration fatigue life of electronic devices
Schriefer, T.; Hofmann, M.
Journal Article
2019Improving 5V Digital 4H-SiC CMOS ICs for Operating at 400°C Using PMOS Channel Implantation
Albrecht, M.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2019Influence of Sacrificial Layer Germanium Content on Stacked-Nanowire FET Performance
Klüpfel, Fabian J.
Journal Article
2019Influence of Trench Design on the Electrical Properties of 650V 4H-SiC JBS Diodes
Rusch, Oleg; Moult, Jonathan; Erlbacher, Tobias
Conference Paper
2019Innovative Technologien für intelligente dezentrale Energiesysteme
: März, Martin; Öchsner, Richard
Book
2019Integrated Passive Devices and Switching Circuit Design for a 3D DC/DC Converter up to 60 V
Saponara, S.; Ciarpi, G.; Erlbacher, Tobias; Rattmann, Gudrun
Journal Article
2019Large-Area Layer Counting of Two-Dimensional Materials Evaluating the Wavelength Shift in Visible-Reflectance Spectroscopy
Hutzler, Andreas; Matthus, Christian D.; Dolle, Christian; Rommel, Mathias; Jank, Michael P.M.; Spiecker, Erdmann; Frey, Lothar
Journal Article
2019Laser Writing of Scalable Single Color Centers in Silicon Carbide
Chen, Y.-C.; Salter, P.S.; Niethammer, M.; Widmann, M.; Kaiser, F.; Nagy, R.; Morioka, N.; Babin, C.; Erlekampf, J.; Berwian, P.; Booth, M.J.; Wrachtrup, J.
Journal Article
2019Luminescent properties of Ce3+ doped LiLuP4O12 tetraphosphate under synchrotron radiation excitation
Zorenko, T.; Paprocki, K.; Levchuk, I.; Batentschuk, M.; Epelbaum, B.; Fedorov, A.; Zorenko, Y.
Journal Article
2019Methodology for the investigation of threading dislocations as a source of vertical leakage in AlGaN/GaN-HEMT heterostructures for power devices
Besendörfer, S.; Meissner, E.; Lesnik, A.; Friedrich, J.; Dadgar, A.; Erlbacher, T.
Journal Article
2019NanoElectronics roadmap for Europe: From nanodevices and innovative materials to system integration
Ahopelto, J.; Ardila, G.; Baldi, L.; Balestra, F.; Belot, D.; Fagas, G.; Gendt, S. de; Demarchi, D.; Fernandez-Bolaños, M.; Holden, D.; Ionescu, A.M.; Meneghesso, G.; Mocuta, A.; Pfeffer, M.; Popp, R.M.; Sangiorgi, E.; Sotomayor Torres, C.M.
Journal Article
2019On a Novel Source Technology for Deep Aluminum Diffusion for Silicon Power Electronics
Rattmann, Gudrun; Pichler, Peter; Erlbacher, Tobias
Journal Article
2019On the Origin of Charge Compensation in Aluminum-Implanted n-Type 4H-SiC by Analysis of Hall Effect Measurements
Weisse, Julietta; Hauck, Martin; Sledziewski, Tomasz; Krieger, Michael; Bauer, Anton J.; Mitlehner, Heinz; Frey, Lothar; Erlbacher, Tobias
Conference Paper
2019Optimierung und Qualifizierung eines Bondprozesses. Tests und Analyseverfahren
Dirksen, Daniel
Presentation
2019Performance of 4H-SiC Bipolar Diodes as Temperature Sensor at Low Temperatures
Benedetto, L. di; Matthus, C.D.; Erlbacher, T.; Bauer, A.J.; Licciardo, G.D.; Rubino, A.; Frey, L.
Conference Paper
2019Preparation of graphene-supported microwell liquid cells for in situ transmission electron microscopy
Hutzler, A.; Fritsch, B.; Jank, M.P.M.; Branscheid, R.; Spiecker, E.; März, M.
Journal Article
2019Process and design optimization of SiC MOSFET for low on-state resistance
Sledziewski, Tomasz; Erlbacher, Tobias; Bauer, Anton
Presentation
2019Process variability - technological challenge and design issue for nanoscale devices
Lorenz, Jürgen; Bär, Eberhard; Barraud, Sylvain; Brown, Andrew R.; Evanschitzky, Peter; Klüpfel, Fabian; Wang, Liping
Journal Article
2019Production of high performance multi-crystalline silicon ingots for PV application by using contamination-free SixNy seed particles
Schwanke, S.; Trempa, M.; Reimann, C.; Kuczynski, M.; Schroll, G.; Sans, J.; Friedrich, J.
Journal Article
2019Raman Spectroscopy Characterization of Ion Implanted 4H-SiC and its Annealing Effects
Xu, Zongwei; Song, Ying; Rommel, Mathias; Liu, T.; Kocher, Matthias; He, Z.D.; Wang, H.; Yao, B.T.; Liu, L.; Fang, Fengzhou
Conference Paper
2019Research Platform: Decentralized Energy System for Sector Coupling
Öchsner, R.; Nuß, A.; Lange, C.; Rueß, A.
Journal Article
2019Robuste und zuverlässige Leistungselektronik: Umwelt- und Lebensdauertests
Schletz, Andreas
Presentation
2019Second use or recycling of hydrogen waste gas from the semiconductor industry - Economic analysis and technical demonstration of possible pathways
Rochlitz, L.; Steinberger, M.; Oechsner, R.; Weber, A.; Schmitz, S.; Schillinger, K.; Wolff, M.; Bayler, A.
Journal Article
2019SIC device manufacturing using ion implantation. Opportunities and challenges
Erlbacher, Tobias
Presentation
2019Simulationsgestützte Effizienzoptimierung von industriellen Kaltwassersystemen mit thermischen Speichern
Puls, Philipp
: Pichler, Peter; Müller, Karsten
Dissertation
2019Spatial and Temporal Temperature Homogenization in an Automotive Lithium-Ion Pouch Cell Battery Module
Gepp, Markus; Lorentz, V.R.H.; März, M.; Geffray, F.; Guyon, E.; Chopard, F.
Conference Paper
2019A Spectroscopic Investigation of Eu3+ Incorporation in LnPO4 (Ln = Tb, Gd1-xLux, X = 0.3, 0.5, 0.7, 1) Ceramics
Lösch, H.; Hirsch, A.; Holthausen, J.; Peters, L.; Xiao, B.; Neumeier, S.; Schmidt, M.; Huittinen, N.
Journal Article
2019Sr4N[CN2][C2N]: The First Carbodiimide Acetonitriletriide
Jach, F.; Höhn, P.; Prots, Y.; Ruck, M.
Journal Article
2019Stackable SiC Embedded Ceramic Packages for High Voltage and High Temperature Power Electronics Applications
Bach, Linh; Dirksen, D.; Blechinger, C.; Endres, T.M.; Bayer, C.F.; Schletz, A.; März, M.
Conference Paper
2019State of the Art Packaging
Schletz, Andreas; Endruschat, Achim; Heckel, Thomas
Presentation
2019Surface Characterization of Ion Implanted 4H-SiC Epitaxial Layers with Ion Energy and Concentration Variations
Kim, Hong-Ki; Kim, Seongjun; Buettner, Jonas; Lim, Minwho; Erlbacher, Tobias; Bauer, Anton J.; Koo, Sang-Mo; Lee, Nam-Suk; Shin, Hoon-Kyu
Conference Paper
2019Surface-enhanced Raman scattering on nanodiamond-derived carbon onions
Song, Ying; Xu, Zongwei; Rosenkranz, Andreas; Rommel, Mathias; Shi, Changkun; Fang, Fengzhou
Journal Article
2019Technological advances towards 4H-SiC JBS diodes for wind power applications
Buettner, Jonas; Erlbacher, Tobias; Bauer, Anton
Conference Paper
2019Technologische Justierung der spektralen Empfindlichkeit von 4H-SiC-UV-Sensoren
Matthus, Christian David
: Lerch, Reinhard; Erlbacher, Tobias; Schmauß, Bernhard
Dissertation
2019Temperature Challenges for Integrated Systems due to High Power Density
Schletz, Andreas; Bayer, Christoph; Hutzler, Aaron
Presentation
2019Testing Wide Band-Gap Devices II (Focus on Packaging)
Schletz, Andreas
Presentation
2019Theoretical aspects and microstructural investigations on V-pit defects in HVPE grown GaN
Knetzger, M.; Meissner, E.; Schröter, C.; Friedrich, J.
Journal Article
2019Thermoelectric properties of silicon and recycled silicon sawing waste
He, R.; Heyn, W.; Thiel, F.; Pérez, N.; Damm, C.; Pohl, D.; Rellinghaus, B.; Reimann, C.; Beier, M.; Friedrich, J.; Zhu, H.; Ren, Z.; Nielsch, K.; Schierning, G.
Journal Article
2019TSV-based passive networks for monolithic integration in smartpower ICS for automotive applications
Erlbacher, Tobias; Rattmann, Gudrun
Presentation
2019A Universal SPICE Field-Effect Transistor Model Applied on SiC and GaN Transistors
Endruschat, A.; Novak, C.; Gerstner, H.; Heckel, T.; Joffe, C.; März, M.
Journal Article
2019Wavelength-selective 4H-SiC UV-sensor array
Matthus, C.D.; Bauer, A.J.; Frey, L.; Erlbacher, T.
Journal Article
2018The 2018 GaN power electronics roadmap
Amano, H.; Baines, Y.; Beam, E.; Borga, M.; Bouchet, T.; Chalker, P.R.; Charles, M.; Chen, K.J.; Chowdhury, N.; Chu, R.; Santi, C. de; Souza, M.M. de; Decoutere, S.; Cioccio, L. di; Eckardt, B.; Egawa, T.; Fay, P.; Freedsman, J.J.; Guido, L.; Häberlen, O.; Haynes, G.; Heckel, T.; Hemakumara, D.; Houston, P.; Hu, J.; Hua, M.; Huang, Q.; Huang, A.; Jiang, S.; Kawai, H.; Kinzer, D.; Kuball, M.; Kumar, A.; Lee, K.B.; Li, X.; Marcon, D.; März, M.; McCarthy, R.; Meneghesso, G.; Meneghini, M.; Morvan, E.; Nakajima, A.; Narayanan, E.M.S.; Oliver, S.; Palacios, T.; Piedra, D.; Plissonnier, M.; Reddy, R.; Sun, M.; Thayne, I.; Torres, A.; Trivellin, N.; Unni, V.; Uren, M.J.; Hove, M. van; Wallis, D.J.; Wang, J.; Xie, J.; Yagi, S.; Yang, S.; Youtsey, C.; Yu, R.; Zanoni, E.; Zeltner, S.; Zhang, Y.
Journal Article
2018A 3.6 kV full SiC fuel cell boost converter for high power electric aircraft
Kreutzer, O.; Gerner, M.; Billmann, M.; Maerz, M.
Conference Paper
2018Accurate determination of 3D PSF and resist effects in grayscale laser lithography
Onanuga, T.; Kaspar, C.; Sailer, H.; Erdmann, A.
Conference Paper
2018An advanced control concept for modular multilevel converter using capacitor voltage estimation
Ruccius, B.; Preller, B.; März, M.; Wagner, B.
Conference Paper
2018Analysis of compensation effects in aluminum-implanted 4H-SiC devices
Weisse, J.; Hauck, M.; Sledziewski, T.; Tschiesche, M.; Krieger, M.; Bauer, A.; Mitlehner, H.; Frey, L.; Erlbacher, T.
Conference Paper
2018Analytical model for the influence of the gate-voltage on the forward conduction properties of the body-diode in SiC-MOSFETs
Huerner, A.; Heckel, T.; Enduschat, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2018Anode recirculation and purge strategies for PEM fuel cell operation with diluted hydrogen feed gas
Steinberger, Michael; Geiling, Johannes; Öchsner, Richard; Frey, Lothar
Journal Article
2018Application of deep learning algorithms for Lithographic mask characterization
Woldeamanual, D.S.; Erdmann, A.; Maier, A.
Conference Paper
2018Assessing the vibrational response and robustness of electronic systems by dissolving time and length scale
Schriefer, T.; Hofmann, M.
Conference Paper
2018Attenuated PSM for EUV
Erdmann, A.; Evanschitzky, P.; Mesilhy, H.; Philipsen, V.; Hendrickx, E.; Bauer, M.
Conference Paper
2018Aufbau für mindestens einen mit elektronischen und/oder elektrischen Bauelementen bestückten Träger
Bayer, Christoph; Schletz, Andreas; Waltrich, Uwe
Patent
2018Autonomous circuit design of a resonant converter (LLC) for on-board chargers using genetic algorithms
Rosskopf, A.; Volmering, S.; Ditze, S.; Joffe, C.; Bär, E.
Conference Paper
2018Calculation of frequency dependent power losses in inductive systems with litz wire conductors by a coupled numeric approach
Rosskopf, Andreas
: Frey, Lothar
Dissertation
2018The correlation between sintered silver joint reliability and pressure assisted sintering parameters
Ng, W.C.W.; Sweatman, K.; Kumagai, K.; Takamura, K.; Nishimura, T.; Letz, S.; Schletz, A.
Conference Paper
2018Decoration of Al implantation profiles in 4H-SiC by bevel grinding and dry oxidation
Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton
Poster
2018Defect functional structures of 4H-SiC and diamond induced by ion implantation: MD simulation and spectral characterization
Xu, Zongwei; Zhao, Junlei; Djurabekova, Flyura; Rommel, Mathias; Nordlund, Kai
Presentation
2018Defects and carrier lifetime in 4H-Silicon Carbide
Kallinger, Birgit; Erlekampf, Jürgen; Rommel, Mathias; Berwian, Patrick; Friedrich, J.; Matthus, Christian D.
Presentation
2018Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy
Stumpf, Florian; Abu Quba, A.A.; Singer, Philip; Rumler, Maximilian; Cherkashin, Nikolay; Schamm-Chardon, Sylvie; Cours, Robin; Rommel, Mathias
Journal Article
2018Determination of compensation ratios of Al-implanted 4H-SiC by TCAD modelling of TLM measurements
Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zongwei; Erlbacher, Tobias; Bauer, Anton
Poster
2018Dose dependent profile deviation of implanted aluminum in 4H-SiC during high temperature annealing
Kocher, Matthias; Rommel, Mathias; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton
Poster
2018Dose Dependent Profile Deviation of Implanted Aluminum in 4H-SiC During High Temperature Annealing
Kocher, Matthias; Rommel, Mathias; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton J.
Conference Paper
2018Dynamic Mechanical Analysis of a Power Electronic Gate Driver Board
Schriefer, T.; Hofmann, M.
Conference Paper
2018Edge facet dynamics during the growth of heavily doped n-type silicon by the Czochralski-method
Stockmeier, Ludwig; Kranert, Christian; Raming, Georg; Miller, Alfred; Reimann, Christian; Rudolph, Peter; Friedrich, Jochen
Journal Article
2018The effect of etching and deposition processes on the width of spacers created during self-aligned double patterning
Baer, Eberhard; Lorenz, Juergen
Conference Paper
2018Electrical properties of schottky-diodes based on B doped diamond
Erlbacher, T.; Huerner, A.; Zhu, Y.; Bach, L.; Schletz, A.; Zürbig, Verena; Pinti, Lucas; Kirste, Lutz; Giese, Christian; Nebel, Christoph E.; Bauer, A.J.; Frey, L.
Conference Paper
2018Electrochemical corrosion on ceramic substrates for power electronics causes, phenomenological description and outlook
Bayer, Christoph Friedrich; Diepgen, Antonia; Filippi, Thomas; Fuchs, Carmen; Wüstefeld, Sophie; Kellner, Simon; Waltrich, Uwe; Schletz, Andreas
Conference Paper
2018Elektrochemische Korrosion auf keramischen Substraten für leistungselektronische Module
Bayer, C.F.
Journal Article
2018Elektronik
Bauer, Anton; Bär, Eberhard; Erlbacher, Tobias; Friedrich, Jochen; Lorenz, Jürgen; Rommel, Mathias; Schellenberger, Martin
Book Article
2018Entwicklung und Charakterisierung eines doppelseitig gekühlten leistungselektronischen Moduls
Kraft, Silke
Presentation
2018Environmental testing, corrosion, failure analysis. Power electronics in harsh environments
Bayer, Christoph Friedrich; Kokot, Alexandra; Filippi, Thomas; Hutzler, Aaron; Fuchs, Carmen; Wüstefeld, Sophie; Kellner, Simon; Diepgen, Antonia; Zimmernmann, Victoria
Presentation
2018Evidence of low injection efficiency for implanted p-emitters in bipolar 4H-SiC high-voltage diodes
Matthus, C.D.; Huerner, A.; Erlbacher, T.; Bauer, A.; Frey, L.
Journal Article
2018Fault Considerations of Non-Isolated Electric Vehicle Chargers with a Mutual DC Supply
Gosses, K.; Kaiser, J.; Ott, L.; Schulz, M.; Fersterra, F.; Wunder, B.; Han, Y.; Lavery, M.; März, M.
Conference Paper
2018Flexible thin film bending sensor based on Bragg gratings in hybrid polymers
Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Conference Paper
2018Fourier ptychography for lithography high NA systems
Dejkameh, A.; Erdmann, A.; Evanschitzky, P.; Ekinci, Y.
Conference Paper
2018Fraunhofer Institute for Integrated Systems and Device Technology. Achievements and Results. Annual Report 2017
 
Annual Report
2018Free cooling reduces energy consumption of cold water systems
Puls, Philipp
Presentation
2018Future technology trends
Lorenz, Leo; Erlbacher, Tobias; Hilt, Oliver
Book Article
2018The GaN trench gate MOSFET with floating islands
Shen, L.; Müller, S.; Cheng, X.; Zhang, D.; Zheng, L.; Xu, D.; Yu, Y.; Meissner, E.; Erlbacher, T.
Journal Article
2018Heavily n-type doped silicon and the dislocation formation during its growth by the Czochralski method
Stockmeier, Ludwig
: Lerch, R.; Frey, L.; Danilewsky, A.N.
Dissertation
2018Heterogeneous integration of vertical GaN power transistor on Si capacitor for DC-DC converters
Yu, Zechun; Zeltner, Stefan; Boettcher, Norman; Rattmann, Gudrun; Leib, Jürgen; Bayer, Christoph Friedrich; Schletz, Andreas; Erlbacher, Tobias; Frey, Lothar
Presentation
2018Highly reliable power modules by pressureless sintering
Waltrich, U.; Bayer, C.F.; Zötl, S.; Tokarski, A.; Zischler, S.; Schletz, A.; März, M.
Conference Paper
2018Hochvolt-Kraftfahrzeugbordnetz
Billmann, Markus; Lausser, Christof; Reifert, Eugen; Sutter, Ulrich; Tchobanov, Dimitar
Patent
2018Human Sweat Analysis Using a Portable Device Based on a Screen‐printed Electrolyte Sensor
Zoerner, A.; Oertel, S.; Jank, M.P.M.; Frey, L.; Langenstein, B.; Bertsch, T.
Journal Article
2018Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC
Erlekampf, Jürgen; Kaminzky, Daniel; Rosshirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar
Conference Paper
2018Influence of Al doping concentration and annealing parameters on TiAl based Ohmic contacts on 4H-SiC
Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton J.
Conference Paper
2018Influence of substrate properties on the defectivity and minority carrier lifetime in 4H-SiC homoepitaxial layers
Kallinger, Birgit; Erlekampf, Jürgen; Roßhirt, Katharina; Berwian, Patrick; Stockmeier, Matthias; Vogel, Michael; Hens, Philip; Wischmeyer, Frank
Presentation
2018Influence of the pulse length and temperature swing on the relative lifetime estimation for sintered/soldered chip-on-substrate samples. Numerical investigation
Simon, Flaviu-Bogdan
Poster
2018Influence of triangular defects on the electrical characteristics of 4H-SiC devices
Schoeck, J.; Schlichting, H.; Kallinger, B.; Erlbacher, T.; Rommel, M.; Bauer, A.J.
Conference Paper
2018Investigation of Ga ion implantation-induced damage in single-crystal 6H-SiC
He, Zhongdu; Xu, Zongwei; Rommel, Mathias; Yao, Boteng; Liu, Tao; Song, Ying; Fang, Fengzhou
Journal Article
2018Korrosion in leistungselektronischen Modulen
Bayer, Christoph Friedrich; Kokot, Alexandra; Filippi, Thomas; Hutzler, Aaron; Fuchs, Carmen; Wüstefeld, Sophie; Kellner, Simon; Diepgen, Antonia; Zimmermann, Victoria
Presentation
2018Large-area layer counting of 2D materials via visible reflection spectroscopy
Hutzler, Andreas; Matthus, C.D.; Dolle, C.; Rommel, M.; Jank, M.P.M.; Spiecker, E.; Frey, L.
Poster
2018Laser Surface Microstructuring of a Bio-Resorbable Polymer to Anchor Stem Cells, Control Adipocyte Morphology, and Promote Osteogenesis
Ortiz, Rocio; Aurrekoetxea-Rodríguez, Iskander; Rommel, Mathias; Quintana, Iban; Vivanco, Maria; Toca-Herrera, Jose Luis
Journal Article
2018Lifetime testing method for ceramic capacitors for power electronics applications
Dresel, Fabian; Tham, Nils; Erlbacher, Tobias; Schletz, Andreas
Conference Paper
2018Minimum Volume Design of a Forced-Air Cooled Three-Phase Power Factor Correction Stage for Electric Vehicle Chargers
Schultheiß, F.; Nguyen-Xuan, T.; Endruschat, A.; März, M.
Conference Paper
2018Modeling of block copolymer dry etching for directed self-assembly lithography
Belete, Zelalem; Bär, Eberhard; Erdmann, Andreas
Conference Paper
2018Modeling the rate-dependent inelastic deformation behavior of porous polycrystalline silver films
Letz, S.A.; Farooghian, A.; Simon, F.B.; Schletz, A.
Journal Article
2018Modeling the rate-dependent inelastic deformation of porous polycrystalline silver films
Letz, Sebastian; Farooghian, Azin; Simon, Flaviu-Bogdan; Schletz, Andreas
Presentation
2018Nano- and micro-patterned S-, H- and X-PDMS for cell-based applications: Comparison of wettability, roughness and cell-derived parameters
Scharin-Mehlmann, Marina; Häring, Aaron; Rommel, Mathias; Dirnecker, Tobias; Friedrich, Oliver; Frey, Lothar; Gilbert, Daniel F.
Journal Article
2018Normalized differential conductance to study current conduction mechanisms in MOS structures
Nouibat, T.H.; Messai, Z.; Chikouch, D.; Ouennoughi, Z.; Rouag, N.; Rommel, Mathias; Frey, Lothar
Journal Article
2018Novel approach based on continuous trench modelling to predict focused ion beam prepared freeform surfaces
Bilbao-Guillerna, A.; Eachambadi, R.T.; Cadot, G.B.J.; Axinte, D.A.; Billingham, J.; Stumpf, F.; Beuer, S.; Rommel, M.
Journal Article
2018On the limits of scalpel AFM for the 3D electrical characterization of nanomaterials
Chen, Shaochuan; Jiang, Lanlan; Buckwell, Mark; Jing, Xu; Ji, Yanfeng; Grustan-Gutierrez, Enric; Hui, Fei; Shi, Yuanyuan; Rommel, Mathias; Paskaleva, Albena; Benstetter, Günther; Ng, Wing. H.; Mehonic, Adnan; Kenyon, Anthony J.; Lanza, Mario
Journal Article
2018One-step nanoimprinted Bragg grating sensor based on hybrid polymers
Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Stumpf, Florian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar
Journal Article
2018Optical stressing of 4H-SiC material and devices
Kallinger, B.; Kaminzky, D.; Berwian, P.; Friedrich, J.; Oppel, S.
Conference Paper
2018Optimized 2D positioning of windings in inductive components by genetic algorithm
Rosskopf, Andreas; Knoerzer, Karsten; Baer, Eberhard; Ehrlich, Stefan
Conference Paper
2018Platinum in Silicon after Post-Implantation Annealing: From Experiments to Process and Device Simulations
Hauf, Moritz; Schmidt, Gerhard; Niedernostheide, Franz-Josef; Johnsson, Anna; Pichler, Peter
Conference Paper
2018Power antifuse device to bypass or turn-off battery cells in safety-critical and fail-operational systems
Lorentz, V.R.H.; Waller, R.; Waldhör, S.; Wenger, M.; Gepp, M.; Schwarz, R.; Koffel, S.; Wacker, S.; Akdere, M.; Giegerich, M.; März, M.
Conference Paper
2018Power electronics packaging at Fraunhofer IISB
Bayer, Christoph F.
Presentation
2018Power Interconnect Trends - Cost Savings for PCB Power Electronics by Enabling Wear Out
Schletz, Andreas
Presentation
2018Principle of lifetime-engineering in 4H-SiC by ion implantation
Erlekampf, Jürgen; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen; Frey, Lothar; Erlbacher, Tobias
Poster
2018Process variability for devices at and beyond the 7 nm node
Lorenz, Jürgen; Asenov, Asen; Bär, Eberhard; Barraud, Sylvain; Millar, Campbell; Nedjalkov, Mihail
Conference Paper
2018Process variability for devices at and beyond the 7 nm node
Lorenz, Juergen; Asenov, Asen; Baer, Eberhard; Barraud, Sylvain; Kluepfel, Fabian; Millar, Campbell; Nedjalkov, Mihail
Journal Article
2018Raman spectroscopy characterization of ion implanted 4H-SiC and its annealing effects
Xu, Zongwei; Song, Y.; Rommel, Mathias; Liu, T.; Kocher, Matthias; He, Z.D.; Wang, H.; Yao, B.T.; Liu, L.; Fang, F.Z.
Poster
2018Selective silver sintering of semiconductor dies on PCB
Dresel, Fabian; Letz, Sebastian; Zischler, Sigrid; Schletz, Andreas; Novak, Michael
Conference Paper
2018Simulation in power electronics design. Simulation, possibilities, and issues
Bayer, Christoph Friedrich
Presentation
2018Simulation study of illumination effects in high-NA EUV lithography
Ismail, M.; Evanschitzky, P.; Erdmann, A.; Bottiglieri, G.; Setten, E. van; Fliervoet, T.F.
Conference Paper
2018Strukturierungsverfahren
Fader, Robert; Lorenz, Jürgen; Rommel, Mathias; Baum, Mario; Danylyuk, Serhiy; Gillner, Arnold; Stollenwerk, Jochen; Bläsi, Benedikt
Book Article
2018Symmetry and structure of carbon-nitrogen complexes in gallium arsenide from infrared spectroscopy and first-principles calculations
Künneth, C.; Kölbl, S.; Wagner, H.E.; Häublein, V.; Kersch, A.; Alt, H.C.
Journal Article
2018TiO2 surface functionalization of COC based planar waveguide Bragg gratings for refractive index sensing
Rosenberger, Manuel; Girschikofsky, Maiko; Förthner, Michael; Belle, Stefan; Rommel, Mathias; Frey, Lothar; Schmauß, Bernhard; Hellmann, Ralf
Journal Article
2018TLS-dicing for SiC - Latest assessment results
Lewke, D.; Cerezuela Barreto, M.; Dohnke, K.; Zühlke, H.-U.; Belgardt, C.; Schellenberger, M.
Conference Paper
2018Topic review: Application of raman spectroscopy characterization in micro/nano-machining
Xu, Zongwei; He, Zhongdu; Song, Ying; Fu, Xiu; Rommel, Mathias; Luo, Xichun; Hartmaier, Alexander; Zhang, Junjie; Fang, Fengzhou
Journal Article
2018Untersuchung der elektrischen Feldstärke und des Teilentladungsverhaltens an keramischen Schaltungsträgern
Bayer, Christoph Friedrich
: Frey, Lothar
Dissertation
2018Vias in DBC substrates for embedded power modules
Bach, Hoang Linh; Yu, Zechun; Letz, Sebastian; Bayer, Christoph Friedrich; Waltrich, Uwe; Schletz, Andreas; März, Martin
Conference Paper
20173.3 kV SiC JBS diode configurable rectifier module
Mouawad, B.; Wang, Z.; Buettner, J.; Castellazzi, A.
Conference Paper
20173D simulation of silicon-based single-electron transistors
Klüpfel, Fabian J.; Pichler, Peter
Conference Paper
20174.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density
Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Conference Paper
20176 kW bidirectional, insulated on-board charger with normally-off GaN gate injection transistors
Endres, S.; Sessler, C.; Zeltner, S.; Eckardt, B.; Morita, T.
Conference Paper
2017Advanced 4H-SiC p-i-n Diode as Highly Sensitive High-Temperature Sensor Up To 460 degrees C
Matthus, C.D.; Erlbacher, T.; Hess, A.; Bauer, A.J.; Frey, L.
Journal Article
2017Anordnung mit multifuntionalem Anschluss für Energiespeicherzellen oder Energieverbraucher
Lorentz, Vincent; März, Martin; Wenger, Martin
Patent
2017Application-related characterization and theoretical potential of wide-bandgap devices
Endruschat, A.; Heckel, T.; Gerstner, H.; Joffe, C.; Eckardt, B.; März, M.
Conference Paper
2017A bidirectional approach for segregated DC microgrids
Fersterra, F.; Gosses, K.; Schulz, M.; Wunder, B.; März, M.
Conference Paper
2017Bulk lifetime characterization of corona charged silicon wafers with high resistivity by means of microwave detected photoconductivity
Engst, Christian R.; Rommel, Mathias; Bscheid, Christian; Eisele, Ignaz; Kutter, Christoph
Journal Article
2017A calorimetric method for measuring power losses in power semiconductor modules
Pai, A.P.; Reiter, T.; Vodyakho, O.; Yoo, I.; Maerz, M.
Conference Paper
2017Characterization and mitigation of 3D mask effects in extreme ultraviolet lithography
Erdmann, A.; Xu, D.; Evanschitzky, P.; Philipsen, V.; Luong, V.; Hendrickx, E.
Journal Article
2017Characterizing the conducted EMI performance of a power module through passive measurement
Liu, Y.; Kochetov, S.; Smazinka, T.; Lindemann, A.
Conference Paper
2017Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques
Steinberg, Christian; Rumler, Maximilian; Runkel, Manuel; Papenheim, Marc; Wang, Si; Mayer, Andre; Becker, Marco; Rommel, Mathias; Scheer, Hella-Christin
Journal Article
2017Determination of the selectivity of printed wearable sweat sensors
Zörner, A.; Oertel, S.; Schmitz, B.; Lang, N.; Jank, M.P.M.; Frey, L.
Conference Paper
2017Digital control of hard switched converters by phase modulated pulse width modulation PMPWM
Matlok, S.; Eckardt, B.; Seliger, B.; März, M.
Conference Paper
2017Dislocation formation in heavily As-doped Czochralski grown silicon
Stockmeier, Ludwig; Lehmann, Lothar; Miller, Alfred; Reimann, Christian; Friedrich, Jochen
Journal Article, Conference Paper
2017Droop controlled cognitive power electronics for DC microgrids
Wunder, B.; Ott, L.; Kaiser, J.; Gosses, K.; Schulz, M.; Fersterra, F.; März, M.; Lavery, M.; Han, Y.
Conference Paper
2017Dynamic Modeling of Critical Velocities for the Pushing/Engulfment Transition in the Si-SiC System Under Gravity Conditions
Kundin, J.; Aufgebauer, H.; Reimann, C.; Seebeck, J.; Friedrich, J.; Jauss, T.; Sorgenfrei, T.; Croell, A.
Journal Article
2017Efficient simulation of EUV pellicles
Evanschitzky, P.; Erdmann, A.
Conference Paper
2017Elektrische Energiespeicherzelle mit integrierter Überbrückungseinrichtung
Lorentz, Vincent; März, Martin; Waller, Reinhold
Patent
2017Elektrische Überbrückungseinrichtung zum Überbrücken einer elektrischen Energiequelle oder eines Energieverbrauchers
Lorentz, Vincent; März, Martin; Waller, Reinhold
Patent
2017Elektrische Überbrückungseinrichtung zum Überbrücken elektrischer Bauelemente, insbesondere einer Energiequelle oder eines Energieverbrauchs
Waller, Reinhold; Lorentz, Vincent; März, Martin
Patent
2017Elektrischer Spannungswandler mit mehreren Speicherdrosseln
Matlok, Stefan
Patent
2017Engulfment and pushing of Si3N4 and SiC particles during directional solidification of silicon under microgravity conditions
Friedrich, J.; Reimann, C.; Jauss, T.; Cröll, A.; Sorgenfrei, T.; Tao, Y.; Derby, J.J.
Journal Article
2017Enhanced contamination control methods in advanced wafer processing
Pfeffer, M.; Richter, H.; Altmann, R.; Leibold, A.; Bauer, A.
Conference Paper
2017Enhancing chiller efficiencies via use of cold energy storage
Puls, Philipp; Linhardt, Simon; Öchsner, Richard
Conference Paper
2017Entwicklungsperspektiven für Zellformate von Lithium-Ionen-Batterien in der Elektromobilität
Hettesheimer, Tim; Thielmann, Axel; Neef, Christoph; Möller, Kai-Christian; Wolter, Mareike; Lorentz, Vincent; Gepp, Markus; Wenger, Martin; Prill, Torben; Zausch, Jochen; Kitzler, Peter; Montnacher, Joachim; Miller, Martin; Hagen, Markus; Fanz, Patrik; Tübke, Jens
Study
2017Evaluation of a novel reactor concept for the process intensification and intelligent heat management in the hydrogenation and dehydrogenation of Liquid Organic Hydrogen Carriers
Preuster, P.; Wagner, L.; Nuß, A.; Geiling, J.; Steinberger, M.; Bösmann, A.; Wasserscheid, P.
Conference Paper
2017Evolution of grain structure and recombination active dislocations in extraordinary tall conventional and high performance multi-crystalline silicon ingots
Trempa, M.; Kupka, I.; Kranert, C.; Lehmann, T.; Reimann, C.; Friedrich, J.
Journal Article
2017Experimental verification of a self-triggered solid-state circuit breaker based on a SiC BIFET
Albrecht, M.; Hürner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2017Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Presentation
2017Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Conference Paper
2017Fraunhofer uses semiconductor process exhaust in fuel cell
Steinberger, Michael; Barrett, Steve
Journal Article
2017Generalized approach to design multi-layer stacks for enhanced optical detectability of ultrathin layers
Hutzler, Andreas; Matthus, Christian D.; Rommel, Mathias; Frey, Lothar
Journal Article
2017Grid behavior under fault situations in ±380 VDC distribution systems
Kaiser, J.; Gosses, K.; Ott, L.; Han, Y.; Wunder, B.; März, M.; Weiss, R.
Conference Paper
2017Implementation of 4H-SiC PiN-diodes as nearly linear temperature sensors up to 800 K towards SiC multi-sensor integration
Matthus, C.D.; Erlbacher, T.; Schöfer, B.; Bauer, A.J.; Frey, L.
Conference Paper
2017Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC
Erlekampf, Jürgen; Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar
Poster
2017Influence of Al doping concentration and annealing parameters on TiAl based ohmic contacts on 4H-SiC
Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Poster
2017Influence of different nucleation layers on the initial grain structure of multicrystalline silicon ingots
Kupka, I.; Lehmann, T.; Trempa, M.; Kranert, C.; Reimann, C.; Friedrich, J.
Journal Article
2017Influence of modulation and voltage balancing on spectral emission of modular multilevel converters
Coumont, M.; Hanson, J.; Hermanns, K.; Griepentrog, G.; Lukaschik, A.
Conference Paper
2017Influence of triangular defects on the electrical characteristics of 4H-SiC devices
Schöck, Johannes; Schlichting, Holger; Kallinger, Birgit; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Poster
2017Introduction and application of formation methods based on serial-connected lithium-ion battery cells
Müller, V.; Kaiser, R.; Poller, S.; Sauerteig, D.; Schwarz, R.; Wenger, M.; Lorentz, V.R.H.; März, M.
Journal Article
2017Investigation of dislocation cluster evolution during directional solidification of multicrystalline silicon
Oriwol, D.; Trempa, M.; Sylla, L.; Leipner, H.S.
Journal Article
2017Investigation of high-k dielectric stacks by C-AFM: Advantages, limitations, and possible applications
Rommel, Mathias; Paskaleva, Albena
Book Article
2017Kühlelement für mindestens einen mit elektronischen und/oder elektrischen Bauelementen bestückten Träger
Schletz, Andreas; Schimanek, Ernst
Patent
2017Large area manufacturing of plasmonic colour filters using substrate conformal imprint lithography
Rumler, Maximilian; Foerthner, M.; Baier, L.; Evanschitzky, P.; Becker, M.; Rommel, M.; Frey, L.
Journal Article
2017Layout and Setup for a Conversion System of Hydrogen Exhaust Gas Streams into Electricity using a PEM Fuel Cell
Steinberger, Michael; Müller, Michael; Hoffmann, Patrick; Geiling, Johannes; Öchsner, Richard
Conference Paper
2017Levet-set-based inverse lithography under random field shape uncertainty in a vector Hopkins imaging model
Wu, X.; Fühner, T.; Erdmann, A.; Lam, E.Y.
Conference Paper
2017Mechatronic design of 2 kW SiC DC/AC converter with 200 W/inch
Menrath, T.; Endres, S.; Zeltner, S.; Matlok, S.; Eckardt, B.
Conference Paper
2017Mission profile analysis and calorimetric loss measurement of a SiC hybrid module for main inverter application of electric vehicles
Poonjal Pai, A.; Reiter, T.; Maerz, M.
Conference Paper
2017Monolithically integrated solid-state-circuit-breaker for high power applications
Huerner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2017Nanoimprinted surface relief Bragg gratings for sensor applications
Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar
Poster
2017New methods to evaluate cleaning processes by detecting the particle load on surfaces of diamond wire sawn silicon wafers
Lottspeich, L.; Herold, I.; Richter, H.; Kaden, T.
Conference Paper, Journal Article
2017Novel advanced analytical design tool for 4H-SiC VDMOSFET devices
Benedetto, L. di; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Rubino, A.
Conference Paper
2017One-step fabrication of hierarchical structures
Rumler, Maximilian; Förthner, Michael; Kollmuss, Manuel; Baier, Leander; Stumpf, Florian; Becker, Marco; Rommel, Mathias; Frey, Lothar
Poster
2017One-step fabrication of hierarchical structures by direct laser writing through PDMS molds
Rumler, Maximilian; Förthner, Michael; Baier, Leander; Marhenke, Julius; Kollmuss, Manuel; Michel, Felix; Becker, Marco; Rommel, Mathias
Presentation
2017Optical stressing of 4H-SiC material and devices
Kallinger, Birgit; Kaminzky, Daniel; Berwian, Patrick; Friedrich, Jochen; Oppel, Steffen
Poster
2017Optimization of 4H-SiC photodiodes as selective UV sensors
Matthus, C.D.; Burenkov, A.; Erlbacher, T.
Conference Paper
2017Parasitic inductance analysis of a fast switching 100 kW full SiC inverter
Kegeleers, M.; Koerner, J.; Matlok, S.; Hofmann, M.; Maerz, M.
Conference Paper
2017Particle engulfment dynamics under oscillating crystal growth conditions
Tao, Y.; Sorgenfrei, T.; Jauß, T.; Cröll, A.; Reimann, C.; Friedrich, J.; Derby, J.J.
Journal Article
2017A passively cooled 15 kW, 800 V DCDC converter with a peak efficiency of 99.7 %
Kreutzer, O.; Billmann, M.; Maerz, M.
Conference Paper
2017A physical model for innovative laser direct write lithography
Onanuga, T.; Rumler, M.; Erdmann, A.
Conference Paper
2017Platinum diffusion for advanced silicon power devices
Badr, Elie
: Pichler, Peter; Wellmann, Peter
Dissertation
2017Point contact current voltage measurements of 4H-SiC samples with different doping profiles
Kocher, Matthias; Niebauer, Michael; Rommel, Mathias; Haeublein, Volker; Bauer, Anton
Conference Paper
2017Polymerization related deformations in multilayer soft stamps for nanoimprint
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Scheer, Hella-Christin; Frey, Lothar
Journal Article
2017A practical example of GaN-LED failure cause analysis by application of combined electron microscopy techniques
Meissner, E.; Haeckel, M.; Friedrich, J.
Journal Article
2017A quantitative model with new scaling for silicon carbide particle engulfment during silicon crystal growth
Derby, J.J.; Tao, Y.; Reimann, C.; Friedrich, J.; Jauß, T.; Sorgenfrei, T.; Cröll, A.
Journal Article
2017Raman micro-spectroscopy as a non-destructive key analysis tool in current power semiconductor manufacturing
Biasio, M. de; Kraft, M.; Geier, E.; Goller, B.; Bergmann, C.; Esteve, R.; Cerezuela-Barreto, M.; Lewke, D.; Schellenberger, M.; Roesner, M.
Conference Paper
2017Reducing EUV mask 3D effects by alternative metal absorbers
Philipsen, V.; Luong, K.V.; Souriau, L.; Hendrickx, E.; Erdmann, A.; Xu, D.; Evanschitzky, P.; Kruijs, R.W.E. van de; Edrisi, A.; Scholze, F.; Laubis, C.; Irmscher, M.; Naasz, S.; Reuter, C.
Conference Paper
2017Reducing extreme ultraviolet mask three-dimensional effects by alternative metal absorbers
Philipsen, V.; Luong, K.V.; Souriau, L.; Erdmann, A.; Xu, D.; Evanschitzky, P.; Kruijs, R.W.E. van de; Edrisi, A.; Scholze, F.; Laubis, C.; Irmscher, M.; Naasz, S.; Reuter, C.; Hendrickx, E.
Journal Article
2017Resistless Ga+ beam lithography for flexible prototyping of nanostructures in different materials by reactive ion etching
Rommel, Mathias; Rumler, Maximilian; Haas, Anke; Beuer, Susanne
Presentation
2017Resonant electric arcs in DC microgrids with low system impedance in the VLF-band
Strobl, C.; Ott, L.; Kaiser, J.; Streck, M.; Nothnagel, F.; Berger, F.; Schäfer, M.; Rabenstein, R.
Conference Paper
2017Safety considerations for the operation of bipolar DC-grids
Kaiser, J.; Gosses, K.; Ott, L.; Han, Y.; Wunder, B.; März, M.; Schork, F.; Bühler, K.; Böhm, T.
Conference Paper
2017SiC power module loss reduction by PWM gate drive patterns and impedance-optimized gate drive voltages
Gerstner, H.; Heckel, T.; Endruschat, A.; Roßkopf, A.; Eckardt, B.; März, M.
Conference Paper
2017Silicon self-interstitial properties deduced from platinum profiles after annealing with controlled cooling
Johnsson, Anna; Pichler, Peter; Schmidt, Gerhard
Journal Article
2017Simulation flow and model verification for laser direct-write lithography
Onanuga, T.; Rumler, M.; Erdmann, A.
Journal Article
2017Special issue on ptychography
Erdmann, A.; Situ, G.
Journal Article
2017Stress reduction in high voltage MIS capacitor fabrication
Banzhaf, S.; Kenntner, J.; Grieb, M.; Schwaiger, S.; Erlbacher, T.; Bauer, A.J.; Frey, L.; Frey, L.
Conference Paper
2017Switching SiC devices faster and more efficient using a DBC mounted terminal decoupling Si-RC element
Matlok, S.; Erlbacher, T.; Krach, F.; Eckardt, B.
Conference Paper
2017System integration of printed biosensors for sweat electrolytes with data acquisition via Bluetooth to App
Oertel, S.; Jank, M.; Zörner, A.; Schmitz, B.; Lang, N.
Conference Paper
2017Tiegel zur Herstellung von Silicium-Ingots, Verfahren zu dessen Herstellung sowie Silicium-Ingot
Schneider, Veronika; Reimann, Christian; Friedrich, Jochen; Sans, Jürgen; Kuczynski, Maciej
Patent
2017Verfahren zu Ausbildung elektrisch leitender Durchkontaktierungen in keramischen Schaltungsträgern
Schletz, Andreas; Tham, Nils; Hutzler, Aaron
Patent
2017Verfahren zur Überprüfung eines Trennschrittes bei der Zerteilung eines flachen Werkstückes in Teilstücke
Tobisch, Alexander; Schellenberger, Martin; Lewke, Dirk
Patent
2017Waste heat energy harvesting by use of BaTiO3 for pyroelectric hydrogen generation
Belitz, R.; Meisner, P.; Coeler, Matthias; Wunderwald, U.; Friedrich, Jochen; Zosel, J.; Schelter, Matthias; Jachalke, Sven; Mehner, Erik
Journal Article
2017Waveguide bragg gratings in Ormocer®s for temperature sensing
Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Journal Article
20163D simulation of light exposure and resist effects in laser direct write lithography
Onanuga, Temitope; Erdmann, Andreas
Conference Paper
20164.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density
Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Poster
2016Advanced detection method for polymer residues on semiconductor substrates
Richter, H.; Pfitzner, L.; Pfeffer, M.; Bauer, A.; Siegert, J.; Bodner, T.
Conference Paper
2016Analytical Model and Design of 4H-SiC Planar and Trenched JBS Diodes
Di Benedetto, L.; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Bellone, S.
Journal Article
2016ATHENIS-3D: Automotive tested high-voltage and embedded non-volatile integrated SoC platform with 3D technology
Wachmann, Ewald; Saponara, Sergio; Zambelli, C.; Tisserand, Pierre; Charbonnier, Jean; Erlbacher, Tobias; Grünler, Saeideh; Hartler, C.; Siegert, J.; Chassard P.; Ton D.M.; Ferrari, L.; Fanucci, L.
Conference Paper
2016Automated source/mask/directed self-assembly optimization using a self-adaptive hierarchical modeling approach
Fühner, T.; Michalak, P.; Wu, X.; Erdmann, A.
Conference Paper
2016Aviation battery monitoring electronics in lithium-ion based battery systems for electrified sailplanes and aircrafts
Schwarz, R.; Waller, R.; Wenger, M.; Akdere, M.; Neureuther, J.; Gepp, M.; Koffel, S.; Lorentz, V.R.H.; März, M.; Holtsmark, A.; Gribov, V.; Lange, A.
Conference Paper
2016Bipolar degradation of 6.5 kV SiC pn-Diodes: Result prediction by photoluminescence
Wehrhahn-Kilian, L.; Dohnke, K.O.; Kaminzky, D.; Kallinger, B.; Oppel, S.
Conference Paper
2016Calculation of power losses in litz wire systems by coupling FEM and PEEC method
Roßkopf, Andreas; Bär, Eberhard; Joffe, Christopher; Bonse, Clemens
Journal Article
2016Challenges and simulation solutions for advanced lithography for nanometer interconnect patterning
Evanschitzky, Peter
Presentation
2016Challenges for predictive EUV mask modeling
Evanschitzky, Peter; Erdmann, Andreas
Presentation
2016Clarification of the relation between the grain structure of industrial grown mc-Si and the area fraction of electrical active defects by means of statistical grain structure evaluation
Lehmann, T.; Reimann, C.; Meissner, E.; Friedrich, J.
Journal Article
2016Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication
Rumler, Maximilian; Kollmuss, M.; Baier, L.; Michel, F.; Förthner, M.; Becker, M.; Rommel, M.; Frey, L.
Conference Paper
2016Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication
Rumler, Maximilian; Kollmuss, Manuel; Baier, Leander; Michel, Felix; Förthner, Michael; Becker, Marco; Rommel, Mathias; Frey, Lothar
Poster
2016Comparative spatially resolved characterization of a Czochralski-grown silicon crystal by different laser-based imaging techniques
Herms, Martin; Wagner, Matthias; Molchanov, Alexander; Rommel, Mathias; Zschorsch, Markus; Würzner, Sindy
Conference Paper
2016Conduction loss reduction for bipolar injection field-effect-transistors (BIFET)
Hürner, Andreas; Mitlehner, Heinz; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Contamination control for wafer container used within 300 mm manufacturing for power microelectronics
Schneider, G.; Nguyen, T.Q.; Taubert, M.; Bounouar, J.; Le-Guet, C.; Leibold, A.; Richter, H.; Pfeffer, M.
Conference Paper
2016Correlation of carbon doping variations with the vertical breakdown of GaN-on-Si for power electronics
Knetzger, M.; Meissner, E.; Derluyn, J.; Germain, M.; Friedrich, J.
Journal Article
2016Correlation of film morphology and defect content with the charge-carrier transport in thin-film transistors based on ZnO nanoparticles
Polster, S.; Jank, M.P.M.; Frey, L.
Journal Article
2016COSIVU - Compact, smart and reliable drive unit for fully electric vehicles
Andersson, D.R.; Brinkfeldt, K.; Nord, S.; Ottosson, J.; Lampic, G.; Gotovac, G.; Zschieschang, O.; Baumgartel, H.; Brusius, M.; Kaulfersch, E.; Hilpert, F.; Otto, A.; Frankeser, S.
Conference Paper
2016Design and optimization of a multi-coil system for inductive charging with small air gap
Joffe, C.; Rosskopf, A.; Ehrlich, S.; Dobmeier, C.; März, M.
Conference Paper
2016Determination of Fowler-Nordheim tunneling parameters in Metal-Oxide-Semiconductor structure including oxide field correction using a vertical optimization method
Toumi, S.; Ouennoughi, Z.; Strenger, K.C.; Frey, L.
Journal Article
2016Dimensioning of a novel design concept for MMC submodules
Waltrich, U.; Russius, B.; Malipaard, D.; Schletz, A.; März, M.
Conference Paper
2016Direct optical stress sensing in semiconductor manufacturing using raman micro-spectrometry
Biasio, M. de; Kraft, M.; Roesner, M.; Bergmann, C.; Cerezuela-Barreto, M.; Lewke, D.; Schellenberger, M.
Conference Paper
2016Dislocation formation in seed crystals induced by feedstock indentation during growth of quasimono crystalline silicon ingots
Trempa, M.; Beier, M.; Reimann, C.; Roßhirth, K.; Friedrich, J.; Löbel, C.; Sylla, L.; Richter, T.
Journal Article
2016Drill-down analysis with equipment health monitoring
Krauel, Christopher; Weishäupl, Laura; Pfeffer, Markus
Presentation
2016The efficiency of hydrogen-doping as a function of implantation temperature
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2016Efficient simulation of EUV pellicles
Evanschitzky, Peter; Erdmann, Andreas
Presentation
2016Effizienter Einsatz von Kältespeichern zur Reduktion der Kältegestehungskosten
Puls, Philipp
Presentation
2016Einsatz von Kältespeichern zur Steigerung der Effizienz von Kälteversorgungssystemen
Puls, Philipp; Linhardt, Simon; Lange, C.; Öchsner, Richard
Poster
2016Electrical properties of solution processed layers based on Ge-Si alloy nanoparticles
Meric, Z.; Mehringer, C.; Jank, M.P.M.; Peukert, W.; Frey, L.
Journal Article
2016Electrically inactive dopants in heavily doped as-grown czochralski silicon
Stockmeier, L.; Elsayed, M.; Krause-Rehberg, R.; Zschorsch, M.; Lehmann, L.; Friedrich, J.
Conference Paper
2016Empirical cluster modeling revisited
Pichler, Peter
Conference Paper
2016Enhancement of the partial discharge inception voltage of ceramic substrates for power modules by trench coating
Waltrich, U.; Bayer, C.F.; Reger, M.; Meyer, A.; Tang, X.; Schletz, A.
Conference Paper
2016Enhancement of the partial discharge inception voltage of DBCs by adjusting the permittivity of the encapsulation
Bayer, Christoph Friedrich; Waltrich, Uwe; Soueidan, Amal; Schneider, Richard; Bär, Eberhard; Schletz, Andreas
Conference Paper
2016Enhancing partial discharge inception voltage of DBCs by geometrical variations based on simulations of the electric field strength
Bayer, Christoph Friedrich; Waltrich, Uwe; Schneider, Richard; Soueidan, Amal; Bär, Eberhard; Schletz, Andreas
Conference Paper
2016Equipment simulation for studying the growth rate and its uniformity of oxide layers deposited by plasma-enhanced oxidation
Baer, Eberhard; Niess, Juergen
Conference Paper
2016Erweiterte Messsystemanalyse mittels statistischer Versuchsplanung. Anwendungsbeispiel anhand eines Lebensdauertests für Leistungselektronik
Hutzler, Aaron; Schletz, Andreas
Presentation
2016Estimation of the excitation current and the rotor resistance of an externally excited synchronous machine with an inductively supplied excitation coil
Köhler, S.; Wagner, B.; Endres, S.
Conference Paper
2016Extending VLSI and alternative technology with optical and complementary lithography
Lai, K.; Erdmann, A.
Journal Article
2016Extreme ultraviolet multilayer defect analysis and geometry reconstruction
Xu, D.; Evanschitzky, P.; Erdmann, A.
Journal Article
2016Flexographic printing of nanoparticulate tin-doped indium oxide inks on PET foils and glass substrates
Wegener, M.; Spiehl, D.; Sauer, H.M.; Mikschl, F.; Liu, X.; Kölpin, N.; Schmidt, M.; Jank, M.P.M.; Dörsam, E.; Roosen, A.
Journal Article
2016Fraunhofer Institute for Integrated Systems and Device Technology. Achievements and Results. Annual Report 2015
 
Annual Report
2016Fraunhofer topics of the future "SUPERGRID". Supergrid - Approach for the integration of renewable energy in Europe and North Africa
Platzer, Werner; Boie, Inga; Ragwitz, Mario; Kost, Christoph; Thoma, Jürgen; Vogel, Axel; Fluri, Thomas; Pfeiffer, Wulf; Burmeister, Frank; Tham, Nils; Pudlik, Martin; Bohn, Sven; Agsten, Michael; Bretschneider, Peter; Westermann, Dirk; Kranzer, Dirk; Schlegl, Thomas
Report
2016Fraunhofer Zukunftsthemen "SUPERGRID". Supergrid - Ansatz für die Integration von Erneuerbaren Energien in Europa und Nordafrika
Platzer, Werner; Boie, Inga; Ragwitz, Mario; Kost, Christoph; Thoma, Jürgen; Vogel, Axel; Fluri, Thomas; Pfeiffer, Wulf; Burmeister, Frank; Tham, Nils; Pudlik, Martin; Bohn, Sven; Agsten, Michael; Bretschneider, Peter; Westermann, Dirk; Kranzer, Dirk; Schlegl, Thomas
Report
2016Fundamental efficiency limits in power electronic systems
Heckel, T.; Rettner, C.; Marz, M.
Conference Paper
2016Gettering and defect engineering in semiconductor technology XVI
: Pichler, Peter (Hrsg.)
Conference Proceedings
2016Hardware and software framework for an open battery management system in safety-critical applications
Akdere, M.; Giegerich, M.; Wenger, M.; Schwarz, R.; Koffel, S.; Fühner, T.; Waldhör, S.; Wachtler, J.; Lorentz, V.R.H.; März, M.
Conference Paper
2016Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings
Förthner, Michael; Rumler, Maximilian; Stumpf, Florian; Fader, Robert; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Journal Article
2016Imaging defect luminescence of 4H-SiC by ultraviolet-photoluminescence
Berwian, Patrick; Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Friedrich, Jochen; Oppel, Steffen; Schneider, Adrian; Schütz, Michael
Conference Paper
2016Implementation of simultaneous energy and data transfer in a contactless connector
Trautmann, M.; Joffe, C.; Pflaum, F.; Sanftl, B.; Weigel, R.; Heckel, T.; Koelpin, A.
Conference Paper
2016Incorporating photomask shape uncertainty in computational lithography
Wu, X.; Liu, S.; Erdmann, A.; Lam, E.Y.
Conference Paper
2016Inductive power transfer system with a rotary transformer for contactless energy transfer on rotating applications
Ditze, S.; Endruschat, A.; Schriefer, T.; Rosskopf, A.; Heckel, T.
Conference Paper
2016Influence of different seed materials on multi-crystalline silicon ingot properties
Reimann, C.; Trempa, M.; Lehmann, T.; Rosshirt, K.; Stenzenberger, J.; Friedrich, J.; Hesse, K.; Dornberger, E.
Journal Article
2016Influence of the junction capacitance of the secondary rectifier diodes on output characteristics in multi-resonant converters
Ditze, S.; Heckel, T.; März, M.
Conference Paper
2016Influence of varying bundle structures on power electronic systems simulated by a coupled approach of FEM and PEEC
Rosskopf, A.; Schuster, S.; Endruschat, A.; Bär, E.
Conference Paper
2016An integrated source/mask/DSA optimization approach
Fühner, T.; Michalak, P.; Welling, U.; Orozco-Rey, J.C.; Müller, M.
Conference Paper
2016Interaction of SiC particles with moving solid-liquid interface during directional solidification of silicon
Friedrich, J.; Reimann, C.; Jauss, T.; Cröll, A.; Sorgenfrei, T.
Journal Article
2016Inverse image modeling for defect detection and optical system characterization
Xu, Dongbo
: Erdmann, Andreas
Dissertation
2016Investigations of critical structural defects in active layers of GaN-on-Si for power electronic devices
Knetzger, M.; Meissner, E.; Derluyn, J.; Germain, M.; Friedrich, J.
Conference Paper
2016Ion implantation of polypropylene films for the manufacture of thin film capacitors
Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Djupmyr, M.
Conference Paper
2016Ion implanted 4H-SiC UV pin-diodes for solar radiation detection - simulation and characterization
Matthus, Christian D.; Erlbacher, Tobias; Burenkov, Alexander; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Lifetime and manufacturability of integrated power electronics
Randoll, R.; Wondrak, W.; Schletz, A.
Journal Article
2016Mask-induced best-focus shifts in deep ultraviolet and extreme ultraviolet lithography
Erdmann, A.; Evanschitzky, P.; Neumann, J.T.; Gräupner, P.
Journal Article
2016Materials integration for printed zinc oxide thin-film transistors: Engineering of a fully-printed semiconductor/contact scheme
Liu, X.; Wegener, M.; Polster, S.; Jank, M.P.M.; Roosen, A.; Frey, L.
Journal Article
2016Mechanical properties of silver-sintering bond lines
Letz, Sebastian; Hutzler, Aaron; Schletz, Andreas; Waltrich, Uwe
Conference Paper
2016Metastable defects in proton implanted and annealed silicon
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Job, Reinhart; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2016Methodologie und Prüfverfahren zur EMV Qualifizierung von Leistungsmodulen
Kochetov, S.; Smazinka, T.
Conference Paper
2016A model of electric field distribution in gate oxide and JFET-region of 4H-SiC DMOSFETs
Benedetto, Luigi di; Licciardo, Gian D.; Erlbacher, Tobias; Bauer, Anton J.; Liguori, R.; Rubino, Alfredo
Journal Article
2016Model-based fault current estimation for low fault-energy 380VDC distribution systems
Ott, L.; Kaiser, J.; Gosses, K.; Han, Y.; Wunder, B.; März, M.; Strobl, C.
Conference Paper
2016Modeling the post-implantation annealing of platinum
Badr, Elie; Pichler, Peter; Schmidt, Gerhard
Conference Paper
2016Modelling of effective minority carrier lifetime in 4H-SiC n-type epilayers
Kaminzky, Daniel; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
Conference Paper
2016Monitoring of biomarkers in sweat with printed sensors combined with sport wearables
Oertel, S.; Jank, M.; Schmitz, B.; Lang, N.
Conference Paper
2016Monolithic 3D TSV-based high-voltage, high-temperature capacitors
Gruenler, S.; Rattmann, G.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Journal Article, Conference Paper
2016Multivariate approach for equipment health monitoring
Krauel, C.; Weishäupl, L.
Journal Article, Conference Paper
2016A new behavioral model for accurate loss calculations in power semiconductors
Pai, A.P.; Reiter, T.; Maerz, M.
Conference Paper
2016Nitride bonded silicon nitride as a reusable crucible material for directional solidification of silicon
Schneider, V.; Reimann, C.; Friedrich, J.; Müller, G.
Journal Article
2016Non-isolated three-port DC/DC converter for ±380V DC microgrids
Han, Y.; Kaiser, J.; Ott, L.; Schulz, M.; Fersterra, F.; Wunder, B.; Maerz, M.
Conference Paper
2016Non-isolating DC/DC converter for a fuel cell powered aircraft
Kreutzer, O.; Billmann, M.; Maerz, M.; Lange, A.
Conference Paper
2016A novel submodule concept for modular multilevel converters
Ruccius, B.; Burani, N.; Galek, M.; Malipaard, D.
Conference Paper
2016Open, flexible and extensible battery management system for lithium-ion batteries in mobile and stationary applications
Giegerich, M.; Akdere, M.; Freund, C.; Fühner, T.; Grosch, J.L.; Koffel, S.; Schwarz, R.; Waldhör, S.; Wenger, M.; Lorentz, V.R.H.; März, M.
Conference Paper
2016Optimization of 4H-SiC UV photodiode performance using numerical process and device simulation
Burenkov, Alex; Matthus, Christian David; Erlbacher, Tobias
Journal Article
2016Optimized design for 4H-SiC power DMOSFETs
Benedetto, Luigi di; Licciardo, Gian D.; Erlbacher, Tobias; Bauer, Anton J.; Rubino, Alfredo
Journal Article
2016Partial discharges in ceramic substrates - correlation of electric field strength simulations with phase resolved partial discharge measurements
Bayer, Christoph Friedrich; Waltrich, Uwe; Soueidan, Amal; Baer, Eberhard; Schletz, Andreas
Conference Paper
2016Partial discharges in ceramic substrates - correlation of electric field strength simulations with phase resolved partial discharge measurements
Bayer, Christoph Friedrich; Waltrich, Uwe; Soueidan, Amal; Bär, Eberhard; Schletz, Andreas
Journal Article
2016Particle free handling of substrates
Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.
Journal Article
2016Phase-field simulations of particle capture during the directional solidification of silicon
Aufgebauer, H.; Kundin, J.; Emmerich, H.; Azizi, M.; Reimann, C.; Friedrich, J.; Jauß, T.; Sorgenfrei, T.; Cröll, A.
Journal Article
2016A possible explanation of the record electrical performance of silicon nanowire tunnel FETs with silicided source contact
Burenkov, Alex; Lorenz, Juergen
Conference Paper
2016Post-trench processing of silicon deep trench capacitors for power electronic applications
Banzhaf, Stefanie; Schwaiger, Stefan; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Potential energy savings via use of free cooling and cold energy storage
Puls, Philipp
Presentation
2016Potential of 4H-SiC CMOS for high temperature applications using advanced lateral p-MOSFETs
Albrecht, Matthäus; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Process informed accurate compact modelling of 14-nm FinFET variability and application to statistical 6T-SRAM simulations
Wang, Xingsheng; Reid, Dave; Wang, Liping; Millar, Campbell; Burenkov, Alex; Evanschitzky, Peter; Baer, Eberhard; Lorenz, Juergen; Asenov, Asen
Conference Paper
2016Prospects and issues of nanomaterials use in microelectronics
Jank, Michael; Bauer, Anton; Frey, Lothar
Poster
2016Quantification and reduction of deformations in multilayer soft-NIL stamps
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar
Poster
2016Quantification and reduction of deformations in multilayer soft-NIL stamps
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar
Poster
2016Reliabe data link for power transfer control in an inductive charging system for electric vehicles
Sanftl, B.; Joffe, C.; Trautmann, M.; Weigel, R.; Koelpin, A.
Conference Paper
2016Reliability assessment of a smart and compact inverter developed for electrically powered construction vehicles
Otto, A.; Gadhiya, G.; Rzepka, S.; Kaulfersch, E.; Hilpert, F.; Brabandt, I.
Conference Paper
2016Resolution enhancements for semiconductor lithography: A computational perspective
Erdmann, A.
Conference Paper
2016Scalable insulated DC/DC converters for safe and efficient coupling of fuel cells, electrolyzers and DC grids
Seliger, B.; Matlok, S.; Zeltner, S.
Conference Paper
2016Semiconductor equipment assessment - An enabler for production ready equipment
Pfeffer, M.; Pfitzner, L.; Bauer, A.
Conference Paper
2016Silicon integrated RC snubbers for applications up to 900V with reduced mechanical stress and high manufacturability
Krach, Florian; Thielen, Nils; Heckel, Thomas; Bauer, Anton J.; Erlbacher, Tobias; Frey, Lothar
Conference Paper
2016Simulating wafer bow for integrated capacitors using a multiscale approach
Wright, Alan; Krach, Florian; Thielen, Nils; Grünler, Saeideh; Erlbacher, Tobias; Pichler, Peter
Conference Paper
2016Simulation of process variations in FinFET transistor patterning
Baer, Eberhard; Burenkov, Alex; Evanschitzky, Peter; Lorenz, Juergen
Conference Paper
2016Simulation of silicon-dot-based single-electron memory devices
Klüpfel, Fabian Johannes; Burenkov, Alexander; Lorenz, Jürgen
Conference Paper
2016Simulation of thermo-mechanical effect in bulk-silicon FinFETs
Burenkov, Alex; Lorenz, Jürgen
Journal Article, Conference Paper
2016Slew rate control of a 600 V 55 mΩ GaN cascode
Endruschat, A.; Heckel, T.; Reiner, R.; Waltereit, P.; Quay, R.; Ambacher, O.; März, M.; Eckardt, B.; Frey, L.
Conference Paper
2016Stacking of insulating substrates and a field plate to increase the PDIV for high voltage power modules
Bayer, Christoph Friedrich; Waltrich, Uwe; Soueidan, Amal; Baer, Eberhard; Schletz, Andreas
Conference Paper
2016Stamps for nanoimprint lithography - R&D at Fraunhofer IISB
Rommel, Mathias; Rumler, Maximilian; Förthner, Michael; Scharin, Marina; Fader, R.; Schmidt, H.
Presentation
2016Synthesis of metastable Co4N, Co3N, Co2N, and CoO0.74N0.24 from a single azide precursor and intermediates in CoBr2 ammonolysis
Widenmeyer, M.; Shlyk, L.; Becker, N.; Dronskowski, R.; Meissner, E.; Niewa, R.
Journal Article
2016Systematic characterization of doping profiles in 4H-SiC by point contact current voltage measurements
Kocher, Matthias; Niebauer, Michael; Rommel, Mathias; Haeublein, Volker; Bauer, Anton
Poster
2016Temperature gradient reduction in high-power battery systems using prismatic cells combined with Phase-Change Sheets and Graphite foils
Gepp, M.; Reisenweber, H.; Lorentz, V.R.H.; März, M.
Conference Paper
2016TiO2 nanotubes: Nitrogen-ion implantation at low dose provides noble-metal-free photocatalytic H2-evolution activity
Zhou, X.; Häublein, V.; Liu, N.; Nguyen, N.T.; Zolnhofer, E.M.; Tsuchiya, H.; Killian, M.S.; Meyer, K.; Frey, L.; Schmuki, P.
Journal Article
2016A trade-off between nominal forward current density and surge current capability for 4.5kV SiC MPS diodes
Huang, Yaren; Erlbacher, Tobias; Buettner, Jonas; Wachutka, Gerhard
Conference Paper
2016Using SiC MOSFET's full potential - Swichting faster than 200 kV/µs
Kreutzer, O.; Heckel, T.; März, M.
Conference Paper
2016Verfahren zum Herstellen eines Metall-Keramik-Substrates und zugehöriges Metall-Keramik-Substrat
Bayer, Christoph; Waltrich, Uwe; Schletz, Andreas; Bär, Eberhard; Meyer, Andreas
Patent
2016Waveguide Bragg gratings in Ormocer hybrid polymers
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Journal Article
2016Wetting and infiltration of nitride bonded silicon nitride by liquid silicon
Schneider, V.; Reimann, C.; Friedrich, J.
Journal Article
2015"Black" TiO2 nanotubes formed by high-energy proton implantation show noble-metal-co-catalyst free photocatalytic H-2-evolution
Liu, N.; Haublein, V.; Zhou, X.M.; Venkatesan, U.; Hartmann, M.; Mackovic, M.; Nakajima, T.; Spiecker, E.; Osvet, A.; Frey, L.; Schmuki, P.
Journal Article
2015A 3.7 kW on-board charger based on modular circuit design
Schmenger, J.; Zeltner, S.; Kramer, R.; Endres, S.; März, M.
Conference Paper
2015Active hybrid common mode filter for a highly integrated on-board charger for automotive applications
Schmenger, J.; Kramer, R.; März, M.
Conference Paper
2015Advanced contamination control methods for yield enhancement. YE: Yield Enhancement/Learning
Richter, H.; Leibold, A.; Altmann, R.; Doffek, B.; Koebl, J.; Pfeffer, M.; Bauer, A.; Schneider, G.; Cheung, D.
Conference Paper
2015Advanced thermal management for temperature homogenization in high-power lithium-ion battery systems based on prismatic cells
Gepp, M.; Filimon, R.; Koffel, S.; Lorentz, V.R.H.; März, M.
Conference Paper
2015An advanced voltage droop control concept for grid-tied and autonomous DC microgrids
Ott, L.; Han, Y.; Wunder, B.; Kaiser, J.; Fersterra, F.; Schulz, M.; März, M.
Conference Paper
2015Anordnung zur Speicherung von Energie sowie Vorrichtung und Verfahren zur Bereitstellung elektrischer Energie
Leisegang, Tilmann
Patent
2015Application of principal component analysis to EUV multilayer defect printing
Xu, D.; Evanschitzky, P.; Erdmann, A.
Conference Paper
2015Application of the transport of intensity equation to EUV multilayer defect analysis
Xu, D.; Evanschitzky, P.; Erdmann, A.
Conference Paper
2015Assessment of dicing induced damage and residual stress on the mechanical and electrical behavior of chips
Fuegl, M.; Mackh, G.; Meissner, E.; Frey, L.
Conference Paper
2015Atomic scale characterization of SiO2/4H-SiC interfaces in MOSFETs devices
Beltran, A.M.; Duguay, S.; Strenger, C.; Bauer, A.J.; Cristiano, F.; Schamm-Chardon, S.
Journal Article
2015Bioactivation and functionalization of PDMS surfaces to control cellular adhesion behaviour by micro- or nanopatterning and plasma treatment
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Zipfel, J.; Marhenke, J.; Friedrich, O.; Gilbert, D.F.; Herrmann, M.; Frey, Lothar
Poster
2015Characteristics and aging of PCB embedded power electronics
Randoll, R.; Asef, M.; Wondrak, W.; Böttcher, L.; Schletz, A.
Journal Article, Conference Paper
2015Characterization and application of nano- and microstructured PDMS surfaces for manipulation of cells
Scharin, Marina; Gilbert, D.; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Haering, A.; Friedrich, O.; Frey, Lothar
Presentation
2015Characterization and application of nano- and microstructured silicon-polymer-based surfaces for manipulation of cells
Scharin, Marina; Haering, Aaron; Gilbert, D.; Dirnecker, Tobias; Stumpf, Florian; Rommel, Mathias; Friedrich, Oliver; Frey, Lothar
Poster
2015Charge pumping measurements on differently passivated lateral 4H-SiC MOSFETs
Salinaro, A.; Pobegen, G.; Aichinger, T.; Zippelius, B.; Peters, D.; Friedrichs, P.; Frey, L.
Journal Article
2015Classification and key feature extraction for equipment health monitoring
Krauel, Christopher; Weishäupl, Laura; Petzold, Lisa; Pfeffer, Markus; Bauer, Anton
Presentation
2015Comparison of different novel chip separation methods for 4H-SiC
Dohnke, K.O.; Kaspar, K.; Lewke, D.
Conference Paper
2015Comparison of silicon and 4H silicon carbide patterning using focused ion beams
Veerapandian, Savita Kaliya Perumal; Beuer, Susanne; Rumler, Maximilian; Stumpf, Florian; Thomas, Keith; Pillatsch, Lex; Michler, Johannes; Frey, Lothar; Rommel, Mathias
Journal Article, Conference Paper
2015Comparison of surface relief Bragg gratings fabricated by UV-SCIL and volume index Bragg gratings based on hybrid polymers
Förthner, Michael; Rumler, Maximilian; Michel, Felix; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Poster
2015Comparison of surface relief Bragg gratings fabricated by UV-SCIL and volume index Bragg gratings based on hybrid polymers
Förthner, Michael; Rumler, Maximilian; Michel, Felix; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Poster
2015Comprehensive study of the electron scattering mechanisms in 4H-SiC MOSFETs
Uhnevionak, Viktroyia; Burenkov, Alexander; Strenger, Christian; Ortiz, Guillermo; Bedel-Pereira, Elena; Mortet, Vincent; Cristiano, Fuccio; Bauer, Anton J.; Pichler, Peter
Journal Article
2015Continuation of scaling with optical and complementary lithography. Editorial
Lai, K.F.; Erdmann, A.
Journal Article
2015Controlling cellular adhesion through micro- or nanopatterning of silicone-based surfaces to improve biomedical devices for in vitro based applications
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Zipfel, J.; Marhenke, J.; Friedrich, O.; Glibert, D.F.; Herrmann, M.; Frey, Lothar
Poster
2015Coupled simulation to determine the impact of across wafer variations in oxide PECVD on electrical and reliability parameters of through-silicon vias
Bär, Eberhard; Evanschitzky, Peter; Lorenz, Jürgen; Roger, Frederic; Minixhofer, Rainer; Filipovic, Lado; Orio, Roberto de; Selberherr, Siegfried
Journal Article, Conference Paper
2015Current conduction mechanism of MIS devices using multidimensional minimization system program
Rouag, N.; Ouennoughi, Zahir; Rommel, Mathias; Murakami, Katsuhisa; Frey, Lothar
Journal Article
2015Czochralski growth of silicon crystals
Friedrich, J.; Ammon, W. von; Müller, G.
Book Article
2015DC micro grid control system based on intelligent power units
Endres, S.; Zeltner, S.; Schmenger, J.
Conference Paper
2015Defect Luminescence Scanner (DLS): Scientific and industrial-scale defect analysis
Oppel, Steffen; Schneider, Adrian; Schütz, Michael; Kaminzky, Daniel; Kallinger, Birgit; Weber, Jonas; Krieger, Michael
Presentation
2015Defined area polymer working stamp manufacture for S&R UV-NIL by direct laser writing
Rumler, Maximilian; Michel, Felix; Becker, Marco; Baier, Leander; Förthner, Michael; Rommel, Matthias; Schleunitz, Arne; Klein, Jan Jasper
Poster
2015Determination of the impact of the wire velocity on the surface damage of diamond wire sawn silicon wafers
Würzner, S.; Falke, A.; Buchwald, R.; Möller, H.J.
Journal Article, Conference Paper
2015Device optimization and application study of low cost printed temperature sensor for mobile and stationary battery based Energy Storage Systems
Grosch, J.; Teuber, E.; Jank, M.; Lorentz, V.; März, M.; Frey, L.
Conference Paper
2015Dielectric to pyroelectric phase transition induced by defect migration
Hanzig, J.; Mehner, E.; Jachalke, S.; Hanzig, F.; Zschornak, M.; Richter, C.; Leisegang, T.; Stöcker, H.; Meyer, D.C.
Journal Article
2015Diffusion and segregation model for the annealing of silicon solar cells implanted with phosphorus
Wolf, F. Alexander; Martinez-Limia, Alberto; Grote, Daniela; Stichtenoth, Daniel; Pichler, Peter
Journal Article
2015A DLTS study of hydrogen doped czochralski-grown silicon
Jelinek, Moriz; Laven, Johannes G.; Kirnstoetter, Stefan; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Journal Article, Conference Paper
2015Effect of bulk potential engineering on the transport properties of SiC MOSFETs: Characterization and interpretation
Uhnevionak, Viktroyia
Conference Paper
2015Effiziente Prozesssteuerung mit Kennzahlensystemen
Krauel, Christopher; Tamas, Andrei; Lee, Jung-Hwa
Journal Article
2015Energieeffiziente Klimatisierungssysteme für Elektrofahrzeuge mit integrierten Antriebskomponenten
Rauh, H.
Dissertation
2015Energy distribution with DC microgrids in commercial buildings with power electronics
Wunder, B.; Kaiser, J.; Fersterra, F.; Ott, L.; Han, Y.; März, M.
Conference Paper
2015Energy efficient low-voltage DC-grids for commercial buildings
Weiss, R.; Ott, L.; Boeke, U.
Conference Paper
2015Entwicklung und Herstellung von neuartigen Sonden für die elektrische und optische Rastersondenmikroskopie
Jambreck, J.D.
Dissertation
2015Entwicklung von Betriebsstrategien zur Verbesserung der Effizienz von Kälteversorgungssystemen mit thermischen Speichern
Puls, Philipp; Öchsner, Richard; Linhardt, Simon
Conference Paper
2015Experimental characterisation of FIB induced lateral damage on silicon carbide samples
Stumpf, Florian; Rumler, Maximilian; Abu Quba, Abd Alaziz; Singer, Philipp; Rommel, Mathias
Poster
2015Flexible test and demonstration vehicle platform for electric drivetrain power electronics
Sültrop, C.; Hilpert, H.; Giegerich, M.; Wenger, M.; März, M.
Conference Paper
2015Full SiC DCDC-converter with a power density of more than 100kW/dm3
Kreutzer, O.; März, M.; Nakata, H.
Conference Paper
2015Functionalization of PDMS surfaces through micro- or nano-patterning to control the cellular adhesion
Scharin, Marina; Häring, Aron; Dirnecker, Tobias; Rommel, Mathias; Marhenke, Julius; Friedrich, O.; Gilbert, D.F.; Herrmann, Martin; Frey, Lothar
Presentation
2015Guest Editors' Preface
Klimm, D.; Friedrich, J.
Journal Article
2015Hierarchical variability-aware compact models of 20nm bulk CMOS
Wang, Xingsheng; Reid, D.; Wang, Liping; Burenkov, A.; Millar, C.; Lorenz, J.; Asenov, A.
Conference Paper
2015High temperature die-attach materials for aerospace power electronics: Lifetime tests and modeling
Hutzler, Aaron; Tokarski, Adam; Schletz, Andreas
Conference Paper
2015High-voltage monolithic 3D capacitors based on through-silicon-via technology
Grünler, Saeideh; Rattmann, Gudrun; Erlbacher, Tobias; Bauer, Anton; Frey, Lothar
Poster
2015Imaging defect luminescence measurements of 4H-SiC by UV-PL
Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Oppel, Steffen; Schneider, Adrian; Schütz, Michael
Presentation
2015Imaging defect luminescence of 4H-SiC by UV-photoluminescence
Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Oppel, Steffen; Schneider, Adrian; Schütz, Michael
Presentation
2015Impact of acceptor concentration on electrical properties and density of interface states of 4H-SiC n-metal-oxide-semiconductor field effect transistors studied by Hall effect
Ortiz, Guillermo; Strenger, Christian; Uhnevionak, Viktoryia; Burenkov, Alexander; Bauer, Anton J.; Pichler, Peter; Cristiano, Fuccio; Bedel-Pereira, Elena; Mortet, Vincent
Journal Article
2015Impact of post-trench processing on the electrical characteristics of 4H-SiC trench-MOS structures with thick top and bottom oxides
Banzhaf, C.T.; Grieb, M.; Rambach, M.; Bauer, A.J.; Frey, L.
Conference Paper
2015Improved electrical behavior of ZrO2-based MIM structures by optimizing the O3 oxidation pulse time
Paskaleva, A.; Weinreich, W.; Bauer, A.J.; Lemberger, M.; Frey, L.
Journal Article
2015Improvement of 4H-SiC material quality
Kallinger, Birgit; Kaminzky, Daniel; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen
Presentation
2015Improvement of feature-scale profile evolution in a silicon dioxide plasma etching simulator using the level set method
Montoliu, C.; Baer, Eberhard; Cerda, J.; Colom, R.J.
Journal Article
2015In situ formation of tantalum oxide - PMMA hybrid dielectric thin films for transparent electronic application
Valcu, E.E.; Musat, V.; Oertel, S.; Jank, M.P.M.; Leedham, T.
Journal Article
2015Influence of annealing, oxidation and doping on conduction-band near interface traps in 4H-SiC characterized by low temperature conductance measurements
Noll, S.; Rambach, M.; Grieb, M.; Scholten, D.; Bauer, A.; Frey, L.
Conference Paper
2015Influence of grain boundaries intentionally induced between seed plates on the defect generation in quasi-mono-crystalline silicon ingots
Trempa, M.; Reimann, C.; Friedrich, J.; Müller, G.; Krause, A.; Sylla, L.; Richter, T.
Journal Article
2015Influence of growth temperature on the defect density for 4H-SiC homoepitaxy
Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen
Poster
2015Integrated galvanically isolated MOSFET and IGBT gate-driver circuit with switching speed control
Lorentz, V.R.H.; Schwarz, R.; Heckel, T.; März, M.; Frey, L.
Conference Paper
2015Integrierte E-Antriebsstränge durch intelligente Einzelzähne
Rauh, Hubert; Hutzler, Aaron; Bayer, Christoph; Hofmann, Maximilian
Book Article
2015Introduction to the special issue on optical lithography
Erdmann, A.; Shibuya, M.
Journal Article
2015Investigation of iron contamination of seed crystals and its impact on lifetime distribution in Quasimono silicon ingots
Trempa, M.; Reimann, C.; Friedrich, J.; Müller, G.; Sylla, L.; Krause, A.; Richter, T.
Journal Article
2015Isotopic study of mid-infrared vibrational modes in GaAs related to carbon and nitrogen impurities
Alt, H.C.; Wagner, H.E.; Glacki, A.; Frank-Rotsch, C.; Häublein, V.
Journal Article
2015Junction formation and current transport mechanisms in hybrid n-Si/PEDOT:PSS solar cells
Jäckle, Sara; Mattiza, Matthias; Liebhaber, Martin; Brönstrup, Gerald; Rommel, Mathias; Lips, Klaus; Christiansen, Silke
Journal Article
2015Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL)
Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, M.; Belle, S.; Hellmann, R.; Klein, Jan Jasper
Poster
2015Long-term and annealing stable, solderable PVD metallization with optimized Al diffusion barrier
Kumm, J.; Chacko, R.V.; Samadi, H.; Hartmann, P.; Eberlein, D.; Jäger, U.; Wolf, A.
Journal Article, Conference Paper
2015Mask-induced best-focus-shifts in DUV and EUV lithography
Erdmann, A.; Evanschitzky, P.; Neumann, J.T.; Gräupner, P.
Conference Paper
2015Metastable defects in proton implanted and annealed silicon
Jelinek, Moriz; Laven, Johannes G.; Ganagona, N.; Job, R.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Poster
2015Modeling of ion drift in 4H-SiC-based chemical MOSFET sensors
Erlbacher, T.; Schwarzmann, H.; Bauer, A.J.; Döhler, G.H.; Schreivogel, M.; Lutz, T.; Guillén, F.H.; Graf, J.; Fix, R.; Frey, L.
Journal Article
2015Modeling of the electrochemical etch stop with high reverse bias across pn-junctions
Szwarc, Robert; Frey, Lothar; Weber, Hans; Moder, Iris; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Presentation
2015Modelling and measuring complex impedances of power electronic converters for stability assessment of low-voltage DC-grids
Ott, L.; Han, Y.; Stephani, O.; Kaiser, J.; Wunder, B.; März, M.
Conference Paper
2015Modelling of effective minority carrier lifetimes in 4H-SiC n-type epilayers
Kaminzky, Daniel; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
Poster
2015Modelling of the electrochemical etch stop with high reverse bias across pn-junctions
Szwarc, R.; Frey, L.; Weber, H.; Moder, I.; Erlbacher, T.; Rommel, M.; Bauer, A.J.
Conference Paper
2015Nachbearbeitung von teilgetrennten Bauelementen in der Halbleitertechnik
Lewke, Dirk; Schellenberger, Martin
Study
2015Nano- and micrometer scale surface topography modification of Si (100) by Ga focused ion beam irradiation
Rai, Deepa; Stumpf, Florian; Frey, Lothar; Rommel, Mathias
Poster
2015Nanoelectronics research gaps and recommendations. Editorial
Galatsis, K.; Gargini, P.; Hiramoto, T.; Beernaert, D.; DeKeersmaecker, R.; Pelka, J.; Pfitzner, L.
Journal Article
2015Nitridgebundenes Siliziumnitrid: Wiederverwendbare Tiegel für die gerichtete Erstarrung von Silizium
Schneider, Veronika
Dissertation
2015A novel charge based SPICE model for nonlinear device capacitances
Heckel, T.; Frey, L.
Conference Paper
2015Numerical evaluation of the ITRS transistor scaling
Nagy, R.; Burenkov, A.; Lorenz, J.
Journal Article
2015Optical and EUV projection lithography: A computational view
Erdmann, A.; Fühner, T.; Evanschitzky, P.; Agudelo, V.; Freund, C.; Michalak, P.; Xu, D.B.
Journal Article
2015Optical bragg gratings in inorganic-organic hybrid polymers for highly sensitive temperature measurements
Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Förthner, Michael; Frey, Lothar; Rommel, Mathias; Fader, Robert
Conference Paper
2015Optical in-situ monitoring system for simultaneous measurement of thickness and curvature of thick layer stacks during hydride vapor phase epitaxy growth of GaN
Semmelroth, K.; Berwian, P.; Schroter, C.; Leibiger, G.; Schonleber, M.; Friedrich, J.
Journal Article
2015Optimum gate driver design to reach SiC-MOSFET's full potential - speeding up to 200 kV/µs
Kreutzer, O.; Eckardt, B.; März, M.
Conference Paper
2015Overview of different topologies and control strategies for DC micro grids
Wunder, B.; Ott, L.; Kaiser, J.; Han, Y.; Fersterra, F.; März, M.
Conference Paper
2015Particle free handling of substrates
Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.
Conference Paper
2015Power loss prognosis from thermographic images of PID affected silicon solar modules
Kaden, T.; Lammers, K.; Möller, H.J.
Journal Article, Conference Paper
2015Quality control of SiC materials by optical detection of defects
Kallinger, Birgit; Kaminzky, Daniel; Roßhirt, Katharina; Berwian, Patrick; Friedrich, Jochen; Oppel, Steffen
Presentation
2015Response of as grown dislocation structure to temperature and stress treatment in multi-crystalline silicon
Reimann, C.; Friedrich, J.; Meissner, E.; Oriwol, D.; Sylla, L.
Journal Article
2015Robust double-ring junction termination extension design for high voltage power semiconductor devices based on 4H-SiC
Hürner, A.; Benedetto, L. di; Erlbacher, T.; Mitlehner, H.; Bauer, A.J.; Frey, L.
Conference Paper
2015Role of defects in the dopant diffusion in Si
Pichler, Peter
Book Article
2015Semiconductor equipment assessment - an enabler for production ready equipment
Pfeffer, M.; Pfitzner, L.; Bauer, A.
Conference Paper
2015Sensorless battery cell temperature estimation circuit for enhanced safety in battery systems
Schwarz, R.; Semmler, K.; Wenger, M.; Lorentz, V.R.H.; März, M.
Conference Paper
2015Setup and state based energy control of a grid-connected multipurpose hybrid hydrogen system
Steinberger, Michael; Geiling, Johannes; Öchsner, Richard
Conference Paper
2015SiC MOSFETs in hard-switching bidirectional DC/DC converters
Heckel, T.; Eckardt, B.; März, M.; Frey, L.
Conference Paper
2015Silicon nitride, a high potential dielectric for 600 V integrated RC-snubber applications
Krach, F.; Schwarzmann, H.; Bauer, A.J.; Erlbacher, T.; Frey, L.
Journal Article
2015A simple, reliable, cost and volume saving DC-link discharge device for electric vehicles
Kreutzer, O.; Eckardt, B.; März, M.
Conference Paper
2015Simulation and modeling of silicon carbide devices
Uhnevionak, Viktroyia
: Pichler, Peter; Weigel, Robert
Dissertation
2015Simulation of plasma immersion ion implantation into silicon
Burenkov, A.; Lorenz, J.; Spiegel, Y.; Torregrosa, F.
Conference Paper
2015Simulation of the electric field strength in the vicinity of metallization edges on dielectric substrates
Bayer, Christoph; Bär, Eberhard; Waltrich, Uwe; Malipaard, Dirk; Schletz, Andreas
Journal Article
2015Smart stator tooth design with novel control and safety functions in electric vehicle drivetrains
Brockerhoff, P.; Burkhardt, Y.; Egger, K.; Rauh, H.
Conference Paper
2015Species transport by natural convection of supercritical ammonia
Seebeck, J.; Savva, P.; Erlekampf, J.; Meissner, E.; Friedrich, J.; Frey, L.
Conference Paper
2015Structural and optical properties of AlN grown by solid source solution growth method
Kangawa, Y.; Suetsugu, H.; Knetzger, M.; Meissner, E.; Hazu, K.; Chichibu, S.F.; Kajiwara, T.; Tanaka, S.; Iwasaki, Y.; Kakimoto, K.
Journal Article
2015Structure and dislocation development in mono-like silicon
Ekstrøm, K.E.; Stokkan, G.; Søndenå, R.; Dalaker, H.; Lehmann, T.; Arnberg, L.; Sabatino, M. di
Journal Article
2015Tailoring the electrical properties of HfO2 MOS-devices by aluminum doping
Paskaleva, Albena; Rommel, Mathias; Hutzler, Andreas; Spassov, Dencho; Bauer, Anton J.
Journal Article
2015Temperature dependent characterization of bipolar injection field-effect-transistors (BiFET) for determining the short-circuit-capability
Hürner, A.; Erlbacher, T.; Mitlehner, H.; Bauer, A.J.; Frey, L.
Conference Paper
2015Thermal laser separation - a novel dicing technology fulfilling the demands of volume manufacturing of 4H-SiC devices
Lewke, D.; Dohnke, K.O.; Zühlke, H.U.; Cerezuela Barret, M.; Schellenberger, M.; Bauer, A.; Ryssel, H.
Conference Paper
2015Thermal simulation of paralleled SiC PiN diodes in a module designed for 6.5 kV/1 kA
Bayer, Christoph Friedrich; Bär, Eberhard; Kallinger, Birgit; Berwian, Patrick
Conference Paper
2015Thermische Impedanzmessungen zur Lebensdaueranalyse von Leistungselektronik
Hutzler, Aaron; Schletz, Andreas; Tokarski, Adam; Zeyss, Felix
Presentation
2015Thermo-mechanical ball bonding simulation with elasto-plastic parameters obtained from nanoindentation and atomic force measurements
Wright, Alan; Koffel, Stephane; Kraft, Silke; Pichler, Peter; Cambieri, Juri; Minixhofer, Rainer; Wachmann, Ewald
Conference Paper
2015Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays
Scharin, Marina; Newcomer, Kate; Al-Naimi, Abd; Dirnecker, Tobias; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar
Poster
2015Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays
Scharin, Marina; Newcomer, Kate; Dirnecker, Tobias; Al-Naimi, A.; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar
Poster
2015Tunable conduction type of solution-processed germanium nanoparticle based field effect transistors and their inverter integration
Meric, Z.; Mehringer, C.; Karpstein, N.; Jank, M.P.M.; Peukert, W.; Frey, L.
Journal Article
2015UV-NIL R&D at Fraunhofer IISB. Past examples and future challenges
Rommel, Mathias; Rumler, Maximilian; Förthner, Michael; Scharin, Marina; Fader, Robert; Schmitt, Holger
Presentation
2015Vehicle control unit for drivetrains exclusively from power electronics technology demonstrators
Sültrop, C.
Conference Paper
2015Verfahren und Vorrichtung zur Trennung einews flachen Werkstücks in mehrere Teilstücke
Zühlke, Hans-Ulrich; Koitzsch, Matthias; Lewke, Dirk; Tobisch, Alexander
Patent
2015Verwertung von wasserstoffreichen Gasgemischen in PEM-Brennstoffzellensystemen
Steinberger, Michael; Öchsner, Richard
Conference Paper
2015Voltage control and stabilization of distributed and centralized DC micro grids
Wunder, B.; Ott, L.; Han, Y.; Kaiser, J.; März, M.
Conference Paper
2015Vorrichtung und Verfahren zur Enegie- und Stoffwandlung mittels pyroelektrischer Materialien zur Herstellung von Spaltkprodukten,
Leisegang, Tilmann; Forman, Clemens; Gootz, Matthias; Herrmann, Marco; Mehner, Erik
Patent
2015Vorrichtung und Verfahren zur Energiewandlung von thermischer Energie in elektrische Energie
Meutzner, Falk; Münchgesang, Wolfram; Schmid, Robert; Nentwich, Melanie; Nestler, Tina; Chercouk, Charaf; Hanzig, Juliane; Ureña de Vivanco, Mateo; Meyer, Dirk C.; Störr, Bianca; Zschornak, Matthias; Leisegang, Tilmann
Patent
2015Vorrichtung und Verfahren zur Überbrückung eines elektrischen Energiespeichers
Erlbacher, Tobias; Lorentz, Vincent; Waller, Reinhold; Rattmann, Gudrun
Patent
2015Wafering of silicon
Möller, H.J.
Book Article
2014A 22 kW on-board charger for automotive applications based on a modular design
Schmenger, J.; Endres, S.; Zeltner, S.; März, M.
Conference Paper
2014Aberration measurement based on principal component analysis of aerial images of optimized marks
Yan, G.; Wang, X.; Li, S.; Yang, J.; Xu, D.
Journal Article
2014Aberration measurement technique based on an analytical linear model of a through-focus aerial image
Yan, G.; Wang, X.; Li, S.; Yang, J.; Xu, D.; Erdmann, A.
Journal Article
2014Advanced extra functionality CMOS-based devices
Cristiano, F.; Pichler, P.; Tavernier, C.; Windl, W.
Journal Article, Conference Paper
2014Advances in lithography: Introduction to the feature. Editorial
Erdmann, A.; Liang, R.G.; Sezginer, A.; Smith, B.
Journal Article
2014Advances in lithography: Introduction to the feature. Editorial
Erdmann, A.; Liang, R.G.; Sezginer, A.; Smith, B.
Journal Article
2014Analytical stress characterization after different chip separation methods
Fuegl, M.; Mackh, G.; Meissner, E.; Frey, L.
Journal Article
2014Application of artificial neural networks to compact mask models in optical lithography simulation
Agudelo, V.; Fühner, T.; Erdmann, A.; Evanschitzky, P.
Journal Article
2014Approaches to calculate the dielectric function of ZnO around the band gap
Agocs, E.; Fodor, B.; Pollakowski, B.; Beckhoff, B.; Nutsch, A.; Jank, M.; Petrik, P.
Journal Article, Conference Paper
2014Artificial evolution for the optimization of lithographic process conditions
Fühner, Tim
: Erdmann, Andreas
Dissertation
2014Auslegungs- und Absicherungsprozess im Fokus der Elektromobilität - Herausforderungen der Betriebsfestigkeit
Hirtz, Eva-Maria; Käsgen, Johannes; Krause, Ivo; Pleteit, H.; Eckardt, B.; Möller, R.
Conference Paper
2014Auslegungs- und Absicherungsprozess im Fokus der Elektromobilität – Herausforderungen der Betriebsfestigkeit
Hirtz, E.-M.; Käsgen, J.; Krause, I.; Pleteit, Hermann; Eckardt, B.; Möller, R.
Conference Paper
2014Automated tool for measuring nanotopography of 300 mm wafers at early stages of wafer production
Tröger, B.; Mühlig, A.; Fries, T.; Bauer, S.; Wihr, H.; Riedel, F.; Lewke, D.; Schellenberger, M.
Conference Paper
2014Bioactivation of plane and patterned PDMS thin films by wettability engineering
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Marhenke, Julius; Herrmann, Benjamin; Rumler, Maximilian; Fader, Robert; Frey, Lothar; Herrmann, Martin
Journal Article
2014Calculation of ohmic losses in litz wires by coupling analytical and numerical methods
Roßkopf, Andreas; Joffe, Christopher; Bär, Eberhard
Conference Paper
2014Challenges and opportunities for process modeling in the nanotechnology era
Lorenz, J.K.; Baer, E.; Burenkov, A.; Erdmann, A.; Evanschitzky, P.; Pichler, P.
Journal Article
2014Characterization and application of 600 V normally-off GaN transistors in hard switching DC/DC converters
Heckel, T.; Frey, L.; Zeltner, S.
Conference Paper
2014Compact mask models for optical projection lithography
Agudelo Moreno, Viviana
: Erdmann, Andreas
Dissertation
2014Comparison of carrier lifetime measurements and mapping in 4H SiC using time resolved photoluminescence and μ-PCD
Kallinger, Birgit; Rommel, Mathias; Lilja, Louise; Hassan, Jawad ul; Booker, Ian; Janzen, Erik; Bergman, Peder
Conference Paper
2014Comparison of patterning silicon and silicon carbide using focused ion beam
Veerapandian, S.K.P.; Beuer, Susanne; Rumler, Maximilian; Stumpf, Florian; Thomas, Keith; Pillatsch, L.; Michler, Johannes; Frey, Lothar; Rommel, Mathias
Poster
2014Converter impedance characterization for stability analysis of low-voltage DC-grids
Rykov, K.; Duarte, J.L.; Szpek, M.; Olsson, J.; Zeltner, S.; Ott, L.
Conference Paper
2014Deep energy levels of platinum-hydrogen complexes in silicon
Badr, Elie; Pichler, Peter; Schmidt, Gerhard
Conference Paper
2014Deep-level defects in high-dose proton implanted and high-temperature annealed silicon
Jelinek, Moriz; Laven, Johannes G.; Rommel, Mathias; Schustereder, Werner; Schulze, Hans-Joachim; Frey, Lothar; Job, R.
Conference Paper
2014Defect formation induced by seed-joints during directional solidification of quasi-mono-crystalline silicon ingots
Trempa, M.; Reimann, C.; Friedrich, J.; Müller, G.; Krause, A.; Sylla, L.; Richter, T.
Journal Article
2014Defektlumineszenz in 4H-SiC
Kaminzky, Daniel; Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Oppel, Steffen; Schütz, Michael
Presentation
2014A defocus measurement method for an in situ aberration measurement method using a phase-shift ring mask
Li, S.; Wang, X.; Yang, J.; Tang, F.; Yan, G.; Erdmann, A.
Conference Paper
2014Dielectric strength and thermal performance of PCB-embedded power electronics
Randoll, R.; Wondrak, W.; Schletz, A.
Journal Article
2014DLTS characterization of proton-implanted silicon under varying annealing conditions
Laven, J.G.; Jelinek, M.; Job, R.; Schustereder, W.; Schulze, H.-J.; Rommel, M.; Frey, L.
Journal Article
2014A DLTS study of hydrogen doped Czochralski-grown silicon
Jelinek, Moriz; Laven, Johannes G.; Kirnstoetter, S.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Poster
2014Effect of shallow n-doping on field effect mobility in p-doped channels of 4H-SiC MOS field effect transistors
Noll, S.; Rambach, M.; Grieb, M.; Scholten, D.; Bauer, A.J.; Frey, L.
Conference Paper
2014Eisenverunreinigungen in multikristallinem Silizium: Gerichtete Erstarrung und Analyse der strukturellen und elektrischen Eigenschaften
Azizi, Maral
Dissertation
2014Enabling large area and high throughput roll-to-roll NIL by novel inkjetable and photo-curable NIL-resists
Thesen, Manuel; Rumler, Maximilian; Schlachter, Florian; Grützner, Susanne; Moormann, Christian; Rommel, Mathias; Nees, Dieter; Ruttloff, Stephan; Pfirrmann, Stefan; Vogler, Marko; Schleunitz, Arne; Grützner, Gabi
Conference Paper
2014Energy efficient DC-grids for commercial buildings
Wunder, B.; Ott, L.; Szpek, M.; Boeke, U.; Weiß, R.
Conference Paper
2014Experimental analysis of bipolar SiC-devices for future energy distribution systems
Huerner, A.; Mitlehner, H.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Conference Paper
2014The Factory Integration Roadmap in Semiconductor manufacturing
Moyne, J.; Schellenberger, M.; Pfitzner, L.
Conference Paper
2014Fast model for mask spectrum simulation and analysis of mask shadowing effects in extreme ultraviolet lithography
Liu, Xiaolei; Wang, Xiangzhao; Li, Sikun; Yan, Guanyong; Erdmann, A.
Journal Article
2014Fast rigorous model for mask spectrum simulation and analysis of mask shadowing effects in EUV lithography
Liu, X.; Wang, X.; Li, S.; Yan, G.; Erdmann, A.
Conference Paper
2014Feasibility evaluation of virtual metrology for the example of a trench etch process
Roeder, G.; Winzer, S.; Schellenberger, M.; Jank, S.; Pfitzner, L.
Journal Article
2014Formation and decomposition of iron nitrides observed by in situ powder neutron diffraction and thermal analysis
Widenmeyer, M.; Hansen, T.C.; Meissner, E.; Niewa, R.
Journal Article
2014Galvanic isolated auxiliary power supply with high power density and efficiency
Seliger, B.; Popov, J.; Eckardt, B.; März, M.
Conference Paper
2014Galvanically isolated differential data transmission using capacitive coupling and a modified Manchester algorithm for smart power converters
Niedermeier, M.T.; Wenger, M.M.; Filimon, R.; Sedlacek, V.O.; Lorentz, V.R.H.; Fort, C.; März, M.; Ferrieux, J.P.; Frey, L.
Conference Paper
2014Gerichtete Erstarrung von einkristallinen Siliciumkristallen nach dem VGF-Verfahren für die Anwendung in der Photovoltaik
Trempa, Matthias
Dissertation
2014Hall factor calculation for the characterization of transport properties in n-channel 4H-SiC MOSFETs
Uhnevionak, U.; Burenkov, A.; Strenger, C.; Mortet, V.; Bedel-Peireira, E.; Cristiano, F.; Bauer, A.J.; Pichler, Peter
Conference Paper
2014HCl assisted growth of thick 4H-SiC epilayers for bipolar devices
Kallinger, Birgit; Ehlers, Christian; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
Conference Paper
2014High quality and high speed cutting of 4H-SiC JFET wafers including PCM structures by using thermal laser separation
Lewke, D.; Koitzsch, M.; Dohnke, K.O.; Schellenberger, M.; Zuehlke, H.-U.; Rupp, R.; Pfitzner, L.; Ryssel, H.
Conference Paper
2014High-mobility metal-oxide thin-film transistors by spray deposition of environmentally friendly precursors
Oertel, S.; Jank, M.P.M.; Teuber, E.; Bauer, A.J.; Frey, L.
Conference Paper, Journal Article
2014Highly integrated drivetrain solution: Integration of motor, inverter and gearing
Brockerhoff, P.; Burkhardt, Y.; Egger, K.; Rauh, H.
Conference Paper
2014Hohe Lebensdauer durch hohe Temperatur
Hutzler, Aaron; Schletz, Andreas
Presentation
2014Impact of fabrication process on electrical properties and on interfacial density of states in 4H-SiC n-MOSFETs studied by hall effect
Ortiz, Guillermo; Mortet, Vincent; Strenger, Christian; Uhnevionak, Viktoryia; Burenkov, Alexander; Bauer, Anton J.; Pichler, Peter; Cristiano, Fuccio; Bedel-Pereira, Elena
Conference Paper
2014In situ aberration measurement method using a phase-shift ring mask
Wang, X.; Li, S.; Yang, J.; Tang, F.; Yan, G.; Erdmann, A.
Conference Paper
2014Increasing the lifetime of electronic packaging by higher temperatures: Solders vs. silver sintering
Hutzler, Aaron; Tokarski, Adam; Kraft, Silke; Zischler, Sigrid; Schletz, Andreas
Conference Paper
2014Increasing the lifetime of power modules by smaller bond wire diameters
Hutzler, Aaron; Wright, Alan; Schletz, Andreas
Presentation
2014Influence of diverse post-trench processes on the electrical performance of 4H-SiC MOS structures
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Conference Paper
2014Influence of inner skin- and proximity effects on conduction in litz wires
Roßkopf, Andreas; Bär, Eberhard; Joffe, Christopher
Journal Article
2014Inkjetable and photo-curable resists for large-area and high-throughput roll-to-roll nanoimprint lithography
Thesen, M.W.; Nees, D.; Ruttloff, S.; Rumler, Maximilian; Rommel, Mathias; Schlachter, F.; Grützner, S.; Vogler, M.; Schleunitz, A.; Grützner, G.
Journal Article
2014Investigation of gas sensing in large lithium-ion battery systems for early fault detection and safety improvement
Wenger, M.; Waller, R.; Lorentz, V.R.H.; März, M.; Herold, M.
Conference Paper
2014Investigation of trenched and high temperature annealed 4H-SiC
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Conference Paper
2014Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL)
Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Poster
2014Large area fabrication of plasmonic color filters using UV-SCIL
Rumler, Maximilian; Fader, R.; Förthner, M.; Haas, A.; Rommel, M.; Bauer, A.J.; Frey, L.
Presentation
2014Large area fabrication of plasmonic color filters using UV-SCIL
Rumler, Maximilian; Fader, Robert; Förthner, Michael; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar
Presentation
2014Large boron-interstitial cluster modelling in BF3 plasma implanted silicon
Essa, Z.; Cristiano, F.; Spiegel, Y.; Qiu, Y.; Boulenc, P.; Quillec, M.; Taleb, N.; Zographos, N.; Bedel-Pereira, E.; Mortet, V.; Burenkov, A.; Hackenberg, M.; Torregrosa, F.; Tavernier, C.
Journal Article, Conference Paper
2014Large- and small-angle grain boundaries in multi-crystalline silicon and implications for the evolution of grain boundaries during crystal growth
Carl, E.R.; Danilewsky, A.; Meissner, E.; Geiger, T.
Journal Article
2014Lateral Power Transistors in Integrated Circuits
Erlbacher, T.
Book
2014Laue scanner: A new method for determination of grain orientations and grain boundary types of multicrystalline silicon on a full wafer scale
Lehmann, T.; Trempa, M.; Meissner, E.; Zschorsch, M.; Reimann, C.; Friedrich, J.
Journal Article
2014Leistungselektronische Schaltung und System mit derselben
Zeltner, Stefan; Endres, Stefan
Patent
2014Lithographic process window optimization for mask aligner proximity lithography
Voelkel, R.; Vogler, U.; Bramati, A.; Erdmann, A.; Ünal, N.; Hofmann, U.; Hennemeyer, M.; Zoberbier, R.; Nguyen, D.; Brugger, J.
Conference Paper
2014MeV-proton channeling in crystalline silicon
Jelinek, Moriz; Schustereder, Werner; Kirnstoetter, S.; Laven, Johannes G.; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2014Modeling platinum diffusion in silicon
Badr, Elie; Pichler, Peter; Schmidt, Gerhard
Journal Article
2014Modeling the annealing of dislocation loops in implanted c-Si solar cells
Wolf, F. Alexander; Martinez-Limia, Alberto; Stichtenoth, Daniel; Pichler, Peter
Journal Article
2014Modellierung von Ermüdungsausfällen durch aktive Lastwechseltests
Hutzler, Aaron; Tokarski, Adam; Schletz, Andreas
Conference Paper
2014Modellierung von Ermüdungsausfällen durch aktive Lastwechseltests
Hutzler, Aaron; Tokarski, Adam; Schletz, Andreas
Book Article
2014Modelling of aggregated operation of power modules in low-voltage DC-grids
Rykov, K.; Ott, L.; Duarte, J.L.; Lomonova, E.A.
Conference Paper
2014Modification of polypropylene films for thin film capacitors by ion implantation
Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Grimm, W.
Conference Paper
2014Modular integration of a 1200 V SiC inverter in a commercial vehicle wheel-hub drivetrain
Hilpert, F.; Brinkfeldt, K.; Arenz, S.
Conference Paper
2014Nanoscale characterization of high-k dielectrics by electrical SPM methods
Rommel, Mathias
Presentation
2014Nanoscale characterization of TiO2 films grown by atomic layer deposition on RuO2 electrodes
Murakami, Katsuhisa; Rommel, Mathias; Hudec, Boris; Rosová, Alica; Hušeková, Krístina; Dobročka, Edmund; Rammula, Raul; Kasikov, Arne; Han, Jeong Hwan; Lee, Woongkyu; Song, Seul Ji; Paskaleva, Albena; Bauer, Anton J.; Frey, Lothar; Fröhlich, Karol; Aarik, Jaan; Hwang, Cheol Seong
Journal Article
2014NanoSPV - SPM Technique for Measuring Minority Charge Carrier Diffusion Lengths with High Spatial Resolution
Stumpf, Florian; Rommel, M.; Bauer, A.J.; Frey, L.; Hitzel, F.; Stadelmann, A.
Presentation
2014NanoSPV - SPM Technique for the Quantitative Measurement of Minority Charge Carrier Diffusion Lengths with High Spatial Resolution
Stumpf, Florian; Rommel, Mathias; Bauer, Anton; Frey, Lothar; Hitzel, Frank; Stadelmann, Anja; Bartel, Til
Presentation
2014New Defect Luminescence Scanner for Inline Control of Material Quality
Kallinger, Birgit; Kaminzky, Daniel; Berwian, Patrick; Oppel, Steffen; Schütz, Michael; Schneider, Adrian; Krieger, Michael; Weber, Jonas; Friedrich, Jochen
Poster
2014A new method to increase the doping efficiency of proton implantation in a high-dose regime
Jelinek, Moriz; Laven, Johannes G.; Job, R.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2014Novel design concept for modular multilevel converter power modules
Waltrich, U.; Malipaard, D.; Schletz, A.
Conference Paper
2014Numerical time-dependent 3D simulation of flow pattern and heat distribution in an ammonothermal system with various baffle shapes
Erlekampf, J.; Seebeck, J.; Savva, P.; Meissner, E.; Friedrich, J.; Alt, N.S.A.; Schlücker, E.; Frey, L.
Conference Paper, Journal Article
2014On an improved boron segregation calibration from a particularly sensitive power MOS process
Koffel, S.; Burenkov, A.; Sekowski, M.; Pichler, P.; Giubertoni, D.; Bersani, M.; Knaipp, M.; Wachmann, E.; Schrems, M.; Yamamoto, Y.; Bolze, D.
Journal Article, Conference Paper
2014On the formation mechanism of chromium nitrides: An in situ study
Widenmeyer, M.; Meissner, E.; Senyshyn, A.; Niewa, R.
Journal Article
2014Optical characterization of patterned thin films
Rosu, D.; Petrik, P.; Rattmann, G.; Schellenberger, M.; Beck, U.; Hertwig, A.
Conference Paper, Journal Article
2014Optical polymers with tunable refractive index for nanoimprint technologies
Landwehr, Johannes; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdmann
Journal Article
2014Optical polymers with tunable refractive index for nanoimprint technologies
Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Förthner, Michael; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Winter, Benjamin; Spiecker, Erdmann
Poster
2014Optical polymers with tunable refractive index for nanoimprint technologies
Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdman
Poster
2014Out-diffusion of cesium and rubidium from amorphized silicon during solid-phase epitaxial regrowth
Maier, R.; Häublein, V.; Ryssel, H.
Conference Paper
2014Pixel-based defect detection from high-NA optical projection images
Xu, D.B.; Fühner, T.; Erdmann, A.
Journal Article
2014Power cycling community 1995-2014 - an overview of test results over the last 20 years
Hutzler, Aaron; Zeyss, Felix; Vater, Stephan; Tokarski, Adam; Schletz, Andreas; März, Martin
Journal Article
2014Power electronics for smart micro and nano grids controlled by a novel two-wire interface with integrated power and signal transfer
Zeltner, S.; Endres, S.
Conference Paper
2014Preface. 8th International Workshop on Bulk Nitrides Semiconductors, IWBNS 2013
Freitas, J.A.; Meissner, E.; Paskova, T.; Miyake, H.
Conference Paper, Journal Article
2014Preferred grain orientations in silicon ribbons grown by the string ribbon and the edge-defined film-fed growth methods
Stockmeier, L.; Müller, G.; Seidl, A.; Lehmann, T.; Reimann, C.; Friedrich, J.
Journal Article
2014Process development for nanoimprint at Fraunhofer IISB
Fader, Robert; Rumler, Maximilian; Scharin, Marina; Förthner, Michael; Rommel, Mathias
Presentation
2014Proportional driver for SiC BJT's in electric vehicle inverter application
Frankeser, S.; Hiller, S.; Lutz, J.; Domes, K.
Conference Paper
2014Pulsed direct flame deposition and thermal annealing of transparent amorphous indium zinc oxide films as active layers in field effect transistors
Kilian, D.; Polster, S.; Vogeler, I.; Jank, M.P.M.; Frey, L.; Peukert, W.
Journal Article
2014Relaxation of vacancy depth profiles in silicon wafers: A low apparent diffusivity of vacancy species
Voronkov, Vladimir V.; Falster, Robert; Pichler, Peter
Journal Article
2014Reliability of monolithic RC-snubbers in MOS-based power modules
Erlbacher, T.; Schwarzmann, H.; Krach, F.; Bauer, A.J.; Berberich, S.E.; Kasko, I.; Frey, L.
Conference Paper
2014Rigorous simulation and optimization of the lithography/directed self-assembly co-process
Fühner, T.; Welling, U.; Müller, M.; Erdmann, A.
Conference Paper
2014 A robust contactless capacitive communication link for high power battery systems
Wenger, M.M.; Filimon, R.; Lorentz, V.R.H.; März, M.
Conference Paper
2014Silicon carbide in power electronics: Overcoming the obstacle of bipolar degradation
Kallinger, Birgit; Ehlers, Christian; Berwian, Patrick; Friedrich, Jochen; Rommel, Mathias
Presentation
2014Silicon carbide in power electronics: Overcoming the obstacle of bipolar degradation
Friedrich, J.; Kallinger, B.; Ehlers, C.; Berwian, P.
Presentation
2014Simulation for statistical variability in realistic 20nm MOSFET
Wang, L.; Brown, A.R.; Millar, C.; Burenkov, A.; Wang, X.; Asenov, A.; Lorenz, J.
Conference Paper
2014Simulation of AsH3 plasma immersion ion implantation into silicon
Burenkov, Alex; Lorenz, Jürgen; Spiegel, Yohann; Torregrosa, Frank
Conference Paper
2014Simulation of the boron build-up formation during melting laser thermal annealing
Hackenberg, M.; Huet, K.; Negru, R.; Fisicaro, G.; La Magna, A.; Taleb, N.; Quillec, M.; Pichler, P.
Journal Article, Conference Paper
2014Simultaneous simulation of systematic and stochastic process variations
Lorenz, Jürgen; Bär, Eberhard; Burenkov, Alex; Evanschitzky, Peter; Asenov, Asen; Wang, Liping; Wang, Xingsheng; Brown, Andrew; Millar, Campbell; Reid, David
Conference Paper
2014Sol-gel preparation of ZrO2-PMMA for thin films transistors
Valcu, E.E.; Musat, V.; Jank, M.; Oertel, S.
Journal Article
2014Steady-state analysis of the bidirectional CLLLC resonant converter in time domain
Ditze, S.
Conference Paper
2014Strahlungsquelle und Verfahren zu deren Betrieb
Burenkov, Alexander
Patent
2014Strontium titanate: An all-in-one rechargeable energy storage material
Hanzig, Juliane; Zschornak, Matthias; Nentwich, Melanie; Hanzig, Florian; Gemming, Sibylle; Leisegang, Tilmann; Meyer, Dirk C.
Journal Article
2014Structure placement accuracy of wafer level stamps for substrate conformal imprint lithography
Fader, Robert; Förthner, Michael; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Verschuuren, Marc; Butschke, Jörg; Irmscher, Mathias; Storace, Eleonora; Ji, Ran; Schömbs, Ulrike
Poster
2014Synchrotron radiation x-ray topography and defect selective etching analysis of threading dislocations in GaN
Sintonen, S.; Rudziński, M.; Suihkonen, S.; Jussila, H.; Knetzger, M.; Meissner, E.; Danilewsky, A.; Tuomi, T.O.; Lipsanen, H.
Journal Article
2014Synthesis of nanostructured chitin-hematite composites under extreme biomimetic conditions
Wysokowski, M.; Motylenko, M.; Walter, J.; Lota, G.; Wojciechowski, J.; Stocker, H.; Galli, R.; Stelling, A.L.; Himcinschi, C.; Niederschlag, E.; Langer, E.; Bazhenov, V.V.; Szatkowski, T.; Zdarta, J.; Pertenko, I.; Kljajic, Z.; Leisegang, T.; Molodtsov, S.L.; Meyer, D.C.; Jesionowski, T.; Ehrlich, H.
Journal Article
2014Systematic analysis of the high- and low-field channel mobility in lateral 4H-SiC MOSFETs
Strenger, C.; Uhnevionak, V.; Mortet, V.; Ortiz, G.; Erlbacher, T.; Burenkov, A.; Bauer, A.J.; Cristiano, F.; Bedel-Pereira, E.; Pichler, P.; Ryssel, H.; Frey, L.
Conference Paper
2014Temperature and electrical field dependence of the ambipolar mobility in n-doped 4H-SiC
Hürner, A.; Bonse, C.; Clemmer, G.; Kallinger, B.; Heckel, T.; Erlbacher, T.; Mitlehner, H.; Häublein, V.; Bauer, A.J.; Frey, L.
Conference Paper
2014Thermal properties of interconnects in power MOSFETs
Burenkov, Alex; Bär, Eberhard; Boianceanu, Cristian
Conference Paper
2014Thermo-mechanical simulation of plastic deformation during temperature cycling of bond wires for power electronic modules
Wright, Alan; Hutzler, Aaron; Schletz, Andreas; Pichler, Peter
Conference Paper
2014Thickness mapping of high-k dielectrics at the nanoscale
Trapnauskas, Justinas; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar
Journal Article
2014Three-dimensional simulation for the reliability and electrical performance of through-silicon vias
Filipovic, Lado; Rudolf, Florian; Bär, Eberhard; Evanschitzky, Peter; Lorenz, Jürgen; Roger, Frederic; Singulani, Anderson; Minixhofer, Rainer; Selberherr, Siegfried
Conference Paper
2014Unidirectional fast switching non-isolated 100 kW fuel cell boost converter
Kreutzer, O.; Eckardt, B.; März, M.
Conference Paper
2014Variability-aware compact model strategy for 20-nm bulk MOSFETs
Wang, Xingsheng; Reid, Dave; Wang, Liping; Burenkov, Alex; Millar, Campbell; Cheng, Binjie; Lange, Andre; Lorenz, Jürgen; Bär, Eberhard; Asenov, Asen
Conference Paper
2014Verfahren und Vorrichtung zur Bestimmung der Schmelzhöhe und zur Regulation der Erstarrung und Schmelzung in einem Tiegel
Friedrich, Jochen; Reimann, Christian; Wunderwald, Ulrike
Patent
2014Verfahren zur Behandlung und/oder Recycling von Säge-Slurries
Azizi, Maral; Reimann, Christian; Friedrich, Jochen; Blankenburg, Hans-Joachim; Colditz, Rainer
Patent
2014Verfahren zur Herstellung einer diffusionshemmenden Beschichtung, Tiegel zum Schmelzen und/oder Kristallisieren von Nicht-Eisen Metallen sowie Verwendungszwecke
Reimann, Christian; Obermeier, Sebastian; Trempa, Matthias; Schneider, Veronika; Friedrich, Jochen
Patent
2013Accuracy of wafer level alignment with substrate conformal imprint lithography
Fader, Robert; Rommel, Mathias; Bauer, Anton J.; Rumler, Maximilian; Frey, Lothar; Verschuuren, Marcus Antonius; Laar, Robert van de; Ji, Ran; Schömbs, Ulrike
Journal Article, Conference Paper
2013Accuracy of wafer level alignment with substrate conformal imprint lithography
Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Verschuuren, M.A.; Laar, R. van de; Ji, R.; Schömbs, U.
Presentation
2013Adaptive denoising method to improve aberration measurement performance
Yang, J.; Wang, X.; Li, S.; Duan, L.; Bourov, A.Y.; Erdmann, A.
Journal Article
2013Advanced Vacuum Wafer Drying for Thermal Laser Separation Dicing Assessment. Results from European collaborative SEAL project
Le Barillec, Olivier; Davenet, Magali; Bellet, B.; Koitzsch, Matthias; Lewke, Dirk; Schellenberger, Martin; Zühlke, Hans-Ulrich
Conference Paper
2013Alignment accuracy in a MA/BA8 GEN3 using substrate conformal imprint lithography (SCIL)
Fader, R.; Schömbs, U.; Verschuuren, M.
Journal Article
2013Alignment accuracy in a mask aligner using substrate conformal imprint lithography (SCIL)
Schömbs, Ulrike; Fader, Robert; Verschuuren, Marc
Poster
2013Alloying of ohmic contacts to n-type 4H-SiC via laser irradiation
Hürner, A.; Schlegl, T.; Adelmann, B.; Mitlehner, H.; Hellmann, R.; Bauer, A.J.; Frey, L.
Conference Paper
2013Analysis of the sub-surface damage of mc- and Cz-Si wafers sawn with diamond-plated wire
Buchwald, R.; Fröhlich, K.; Würzner, S.; Lehmann, T.; Sunder, K.; Möller, H.J.
Conference Paper
2013Anomalous impurity segregation and local bonding fluctuation in l-Si
Fisicaro, G.; Huet, K.; Negru, R.; Hackenberg, M.; Pichler, P.; Taleb, N.; La Magna, A.
Journal Article
2013Apertureless SNOM imaging of the surface phonon polariton waves. What do we measure?
Kazantsev, D.V.; Ryssel, H.
Journal Article
2013Application of artificial neural networks to compact mask models in optical lithography simulation
Agudelo, V.; Fühner, T.; Erdmann, A.; Evanschitzky, P.
Conference Paper
2013Ausbaustrategien für erneuerbare Energien in Nordafrika
Boie, Inga; Kost, Christoph; Pudlik, Martin; Ragwitz, Mario; Schlegl, Thomas; Sensfuß, Frank; Mende, Florian
Book
2013Bimodal CAFM TDDB distributions in polycrystalline HfO2 gate stacks: The role of the interfacial layer and grain boundaries
Iglesias, V.; Martin-Martinez, J.; Porti, M.; Rodriguez, R.; Nafria, M.; Aymerich, X.; Erlbacher, T.; Rommel, M.; Murakami, K.; Bauer, A.J.; Frey, L.; Bersuker, G.
Journal Article
2013Characterization of diverse gate oxides on 4H-SiC 3D trench-MOS structures
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Conference Paper
2013Characterization of n-channel 4H-SiC MOSFETs: Electrical measurements and simulation analysis
Uhnevionak, Viktoryia; Strenger, Christian; Burenkov, Alexander; Mortet, Vincent; Bedel-Pereira, Elena; Lorenz, Jürgen; Pichler, Peter
Conference Paper
2013Characterization of thin ZnO films by vacuum ultra-violet reflectometry
Gumprecht, T.; Petrik, P.; Roeder, G.; Schellenberger, M.; Pfitzner, L.; Pollakowski, B.; Beckhoff, B.
Conference Paper
2013Characterization of ZnO structures by optical and X-ray methods
Petrik, P.; Pollakowski, B.; Zakel, S.; Gumprecht, T.; Beckhoff, B.; Lemberger, M.; Labadi, Z.; Baji, Z.; Jank, M.; Nutsch, A.
Journal Article, Conference Paper
2013Combined global 2D-local 3D modeling of the industrial Czochralski silicon crystal growth process
Jung, T.; Seebeck, J.; Friedrich, J.
Journal Article
2013Comparative measurements on atomic layer deposited Al2O3 thin films using ex situ table top and mapping ellipsometry, as well as X-ray and VUV reflectometry
Petrik, P.; Gumprecht, T.; Nutsch, A.; Roeder, G.; Lemberger, M.; Juhasz, G.; Polgar, O.; Major, C.; Kozma, P.; Janosov, M.; Fodor, B.; Agocs, E.; Fried, M.
Journal Article, Conference Paper
2013Comparative study of n-LIGBT and n-LDMOS structures on 4H-SiC
Häublein, V.; Temmel, G.; Mitlehner, H.; Rattmann, G.; Strenger, C.; Hürner, A.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper
2013Comparative study of the luminescence of Al2O3:C and Al2O3 crystals under synchrotron radiation excitation
Zorenko, Y.; Fabisiak, K.; Zorenko, T.; Mandowski, A.; Xia, Q.; Batentschuk, M.; Friedrich, J.; Zhusupkalieva, G.
Journal Article
2013Comparison of carrier lifetime measurements and mapping using time resolved photoluminescence and µ-PCD
Kallinger, Birgit; Rommel, Mathias; Lilja, L.; Hassan, J.; Booker, Ian; Janzen, Erik; Bergman, J.P.
Poster
2013Complementary methodologies for thin film characterization in one tool - A novel instrument for 450 mm wafers
Holfelder, I.; Beckhoff, B.; Fliegauf, R.; Honicke, P.; Nutsch, A.; Petrik, P.; Roeder, G.; Weser, J.
Journal Article
2013A comprehensive model for the diffusion of boron in silicon in presence of fluorine
Wolf, F. Alexander; Martinez-Limia, Alberto; Pichler, Peter
Journal Article
2013Conceptional design of nano-particulate ITO inks for inkjet printing of electron devices
Kölpin, Nadja; Wegener, Moritz; Teuber, Erik; Polster, Sebastian; Frey, Lothar; Roosen, Andreas
Journal Article
2013Conduction mechanisms in thermal nitride and dry gate oxides grown on 4H-SiC
Ouennoughi, Z.; Strenger, C.; Bourouba, F.; Haeublein, V.; Ryssel, H.; Frey, L.
Journal Article
2013Constitutional supercooling in Czochralski growth of heavily doped silicon crystals
Friedrich, J.; Stockmeier, L.; Müller, G.
Journal Article
2013Correlation of interface characteristics to electron mobility in channel-implanted 4H-SiC MOSFETs
Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Krieger, M.; Ryssel, H.
Conference Paper
2013Defect inspection and detection using optical image projection
Xu, D.; Li, S.; Wang, X.; Erdmann, A.
Presentation
2013Defect parameters retrieval based on optical projection images
Xu, D.; Li, S.; Wang, X.; Fühner, T.; Erdmann, A.
Conference Paper
2013Dependence of phosphorus gettering and hydrogen passivation efficacy on grain boundary type in multicrystalline silicon
Karzel, P.; Ackermann, M.; Gröner, L.; Reimann, C.; Zschorsch, M.; Meyer, S.; Kiessling, F.; Riepe, S.; Hahn, G.
Journal Article
2013Detailed leakage current analysis of metal-insulator-metal capacitors with ZrO2, ZrO2/SiO2/ZrO2, and ZrO2/Al2O3/ZrO2 as dielectric and TiN electrodes
Weinreich, W.; Shariq, A.; Seidel, K.; Sundqvist, J.; Paskaleva, A.; Lemberger, M.; Bauer, A.J.
Journal Article, Conference Paper
2013The distribution of interstitial iron at dislocation clusters at elevated temperature
Zierer, R.; Kaden, T.; Würzner, S.; Möller, H.J.
Conference Paper
2013Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach
Fisicaro, G.; Pelaz, L.; Aboy, M.; Lopez, P.; Italia, M.; Huet, K.; Cristiano, F.; Essa, Z.; Yang, Q.; Bedel-Pereira, E.; Hackenberg, M.; Pichler, P.; Quillec, M.; Taleb, N.; La Magna, A.
Conference Paper
2013Double patterning: Simulating a variability challenge for advanced transistors
Evanschitzky, Peter; Burenkov, Alex; Lorenz, Jürgen
Conference Paper
2013Efficient simulation of extreme ultraviolet multilayer defects with rigorous data base approach
Evanschitzky, Peter; Shao, Feng; Erdmann, Andreas
Journal Article
2013Electrical impact of the aluminum p-implant annealing on lateral MOSFET transistors on 4H-SiC n-epi
Noll, S.; Scholten, D.; Grieb, M.; Bauer, A.J.; Frey, L.
Conference Paper
2013Electrothermal modeling and characterization of high capacity lithium-ion battery systems for mobile and stationary applications
Giegerich, M.; Koffel, S.; Filimon, R.; Grosch, J.L.; Fühner, T.; Wenger, M.M.; Gepp, M.; Lorentz, V.R.H.
Conference Paper
2013Evaluation of resistless Ga+ beam lithography for UV NIL stamp fabrication
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar
Journal Article
2013Evaluation of UV-SCIL resists for structure transfer using plasma etching
Rumler, Maximilian; Rusch, O.; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Brehm, Markus; Kraft, Andreas
Poster
2013Experimental verification of the model by Klapper for 4H-SiC homoepitaxy on vicinal substrates
Kallinger, Birgit; Polster, Sebastian; Berwian, Patrick; Friedrich, Jochen; Danilewsky, A.N.
Journal Article
2013Extended model for platinum diffusion in silicon
Badr, E.; Pichler, P.; Schmidt, G.
Conference Paper
2013Extending the lifetime of power electronic assemblies by increased cooling temperatures
Hutzler, Aaron; Tokarski, Adam; Schletz, Andreas
Journal Article, Conference Paper
2013Extending the power cycling lifetime of SiC diodes (by increased cooling temperatures)
Hutzler, Aaron; Schletz, Andreas; Tokarski, Adam
Presentation
2013Fehlpassung bei der Homo- und Heteroepitaxie
Kallinger, Birgit
Presentation
2013Full wafer nanotopography analysis on rough surfaces using stitched white light interferometry images
Lewke, D.; Schellenberger, M.; Pfitzner, L.; Fries, T.; Tröger, B.; Muehlig, A.; Riedel, F.; Bauer, S.; Wihr, H.
Conference Paper
2013Functional epoxy polymer for direct nano-imprinting of micro-optical elements
Fader, R.; Landwehr, J.; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Völkel, R.; Brehm, M.; Kraft, A.
Journal Article
2013Hall effect characterization of 4H-SiC MOSFETs: Influence of nitrogen channel implantation
Mortet, V.; Bedel-Pereira, E.; Bobo, J.F.; Cristiano, F.; Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.
Conference Paper
2013HCl assisted growth of thick 4H-SiC epilayers for bipolar devices
Kallinger, Birgit; Ehlers, Christian; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
Poster
2013High-order aberration measurement technique based on quadratic Zernike model with optimized source
Yang, J.; Wang, X.; Li, S.; Duan, L.; Yan, G.; Xu, D.; Bourov, A.Y.; Erdmann, A.
Journal Article
2013Hydrogen passivation and phosphorous gettering at different grain boundary types in multicrystalline silicon
Karzel, P.; Ackermann, M.; Gröner, L.; Reimann, C.; Zschorsch, M.; Meyer, S.; Hahn, G.
Conference Paper
2013Improving electric behavior and simplifying production of Si-based diodes by using thermal laser separation
Koitzsch, M.; Lewke, D.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.; Kolb, R.; Zühlke, H.-U.
Conference Paper
2013In situ aberration measurement technique based on an aerial image with an optimized source
Yan, G.; Wang, X.; Li, S.; Yang, J.; Xu, D.; Duan, L.; Bourov, A.Y.; Erdmann, A.
Journal Article
2013In situ ATR monitoring of cross-link and diffusion behavior of thin-film epoxy and sol-gel based imprint resists
Verschuuren, Marc; Fader, Robert; Brakel, Remco van; Hurxkens, Gert-Jan
Poster
2013Influence of epilayer thickness and structural defects on the minority carrier lifetime in 4H-SiC
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Azizi, Maral; Rommel, Mathias; Hecht, Christian; Friedrichs, Peter
Conference Paper
2013Influence of ion implantation in SiC on the channel mobility in lateral n-channel MOSFETs
Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.; Pichler, P.; Erlbacher, T.; Ryssel, H.; Frey, L.
Conference Paper
2013Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction
Rommel, Mathias; Jambreck, Joachim D.; Lemberger, Martin; Bauer, Anton J.; Frey, Lothar; Murakami, Katsuhisa; Richter, Christoph; Weinzierl, Philipp
Journal Article
2013Influence of La on the electrical properties of HfSiON: From diffusion to Vth shifts
Hackenberg, M.; Pichler, P.; Baudot, S.; Essa, Z.; Gro-Jean, M.; Tavernier, C.; Schamm-Chardon, S.
Journal Article, Conference Paper
2013Innovative balancing, heating and temperature sensing element for automotive batteries
Filimon, R.; Grosch, J.; Teuber, E.; Jank, M.; Lorentz, V.; Wenger, M.; Giegerich, M.; März, M.; Frey, L.
Conference Paper
2013Isolated high voltage DC/DC converter for auxiliary power supply in commercial vehicles
Seliger, B.; Popov, J.; Eckardt, B.; März, M.
Conference Paper
2013Laser alloying nickel on 4H-silicon carbide substrate to generate ohmic contacts
Adelmann, B.; Hürner, A.; Schlegel, T.; Bauer, A.J.; Frey, L.; Hellmann, R.
Journal Article
2013Laser melting of nanoparticulate transparent conductive oxide thin films
Baum, M.; Polster, S.; Jank, M.P.M.; Alexeev, I.; Frey, L.; Schmidt, M.
Journal Article
2013Leistungselektronik und elektrische Antriebstechnik
März, Martin; Eilers, Dirk; Gillner, Arnold; Schliwinski, Hans-Jürgen; Schneider-Ramelow, Martin; Schubert, Thomas; Partsch, Uwe; Paschen, Uwe; Wilken, Ralph
Book Article
2013Life time of flexible PDMS stamps for UV-enhanced substrate conformal imprint lithography (SCIL)
Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.; Reboud, V.; Landis, S.
Presentation
2013Melt depth and time variations during pulsed laser thermal annealing with one and more pulses
Hackenberg, Moritz; Rommel, Mathias; Rumler, M; Lorenz, Jürgen; Pichler, Peter; Huet, Karim; Negru, Razvan; Fisicaro, Giuseppe; Magna, Antonino la; Taleb, Nadjib; Quillec, M.
Conference Paper
2013Micromolding of micropatterned PDMS surfaces to define the adhesive behavior of human cells in vitro
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Marhenke, J.; Rumler, Maximilian; Herrmann, Benjamin; Fader, Robert; Frey, Lothar; Herrmann, Martin
Poster
2013Modeling strategies for EUV mask multilayer defect dispositioning and repair
Erdmann, A.; Evanschitzky, P.; Bret, T.; Jonckheere, R.
Conference Paper
2013Modeling studies on alternative EUV mask concepts for higher NA
Erdmann, A.; Fühner, T.; Evanschitzky, P.; Neumann, J.T.; Ruoff, J.; Gräupner, P.
Conference Paper
2013Non-isothermal model experiments and numerical simulations for directional solidification of multicrystalline silicon in a traveling magnetic field
Dadzis, K.; Niemietz, K.; Pätzold, O.; Wunderwald, U.; Friedrich, J.
Journal Article
2013A novel positioning tolerant inductive power transfer system
Joffe, Christopher; Ditze, Stefan; Roßkopf, Andreas
Conference Paper
2013Numerical parameter studies of 3D melt flow and interface shape for directional solidification of silicon in a traveling magnetic field
Vizman, D.; Dadzis, K.; Friedrich, J.
Journal Article
2013On the calculation of hall factors for the characterization of electronic devices
Uhnevionak, V.; Burenkov, A.; Pichler, P.
Conference Paper
2013On the strain induced by arsenic into silicon
Koffel, Stéphane; Pichler, Peter; Lorenz, Jürgen; Bisognin, Gabriele; Napolitani, Enrico; Salvador, Davide de
Conference Paper
2013On the temperature dependence of the hall factor in n-channel 4H-SiC MOSFETs
Uhnevionak, V.; Burenkov, A.; Strenger, C.; Bauer, A.J.; Pichler, P.
Conference Paper
2013On the thermo-mechanical modelling of a ball bonding process with ultrasonic softening
Wright, A.; Koffel, S.; Pichler, P.; Enichlmair, H.; Minixhofer, R.; Wachmann, E.
Conference Paper
2013Optimization of copper top-side metallization for high performance SiC-devices
Behrens, T.; Suenner, T.; Geinitz, E.; Schletz, A.; Frey, L.
Conference Paper
2013Passive time-multiplexing super-resolved technique for axially moving targets
Zalevsky, Z.; Gaffling, S.; Hutter, J.; Chen, L.; Iff, W.; Tobisch, A.; Garcia, J.; Mico, V.
Journal Article
2013Patterning flat and tilted 4H-SiC by Ga+ resistless lithography and subsequent reactive ion etching
Beuer, Susanne; Rommel, Mathias; Rumler, Maximilian; Haas, Anke; Bauer, Anton J.; Frey, Lothar
Poster
2013Practical aspects of virtual metrology and predictive maintenance model development and optimization
Schöpka, U.; Roeder, G.; Mattes, A.; Schellenberger, M.; Pfeffer, M.; Pfitzner, L.; Scheibelhofer, P.
Conference Paper
2013Preface. Applied Surface Science
Petrik, P.
Journal Article, Conference Paper
2013Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching
Rommel, M.; Rumler, M.; Haas, A.; Bauer, A.J.; Frey, L.
Journal Article
2013Scanning head for the apertureless near field optical microscope
Kazantsev, D.V.; Ryssel, H.
Journal Article
2013Self-Heating Effects in Nano-Scaled MOSFETs and Thermal-Aware Compact Models for the SOI CMOS Generation of 2015
Burenkov, Alex; Lorenz, Jürgen
Conference Paper
2013Self-heating of Nano-Scale SOI MOSFETs: TCAD and Molecular Dynamics Simulations
Burenkov, Alex; Belko, Viktor; Lorenz, Jürgen
Conference Paper
2013Simulation and design optimization of transparent heaters for spectroscopic micro cells
Völlm, H.; Herrmann, J.; Maier, R.; Feili, D.; Häublein, V.; Ryssel, H.; Seidel, H.
Conference Paper
2013Simulation model validation of two common i-line photoresists
Partel, S.; Urban, G.A.; Motzek, K.
Journal Article
2013Source mask optimization using real-coded genetic algorithms
Yang, C.; Wang, X.; Li, S.; Erdmann, A.
Conference Paper
2013Statistical analysis of power cycling data
Hutzler, Aaron; Schletz, Andreas
Conference Paper
2013Step-controlled homoepitaxial growth of 4H-SiC on vicinal substrates
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Thomas, Bernd
Journal Article
2013Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and doping
Weinreich, W.; Wilde, L.; Müller, J.; Sundqvist, J.; Erben, E.; Heitmann, J.; Lemberger, M.; Bauer, A.J.
Journal Article
2013Surface modification of flexible plain and microstructured hard and soft PDMS-thin films by plasma treatment and layer deposition for improved usability for biomedical applications
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Rumler, Maximilian; Fader, Robert; Bauer, Anton J.; Frey, Lothar; Hermman, Martin
Poster
2013SXRT investigations on electrically stressed 4H-SiC PiN diodes for 6.5 kV
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Hecht, Christian; Peters, Dethard; Friedrichs, Peter; Thomas, Bernd
Conference Paper
2013Technology computer aided design
Lorenz, J.
Book Article
2013Test data for die attach lifetime modeling
Kraft, Silke
Conference Paper
2013Tunnel field-effect transistors with graphene channels
Svintsov, D.A.; Vyurkov, V.V.; Lukichev, V.F.; Orlikovsky, A.A.; Burenkov, A.; Oechsner, R.
Journal Article
2013Unsteady coupled 3D calculations of melt flow, interface shape, and species transport for directional solidification of silicon in a traveling magnetic field
Dadzis, K.; Vizman, D.; Friedrich, J.
Journal Article
2013Verfahren und Vorrichtung zum parallelen Trennen eines Werkstücks in mehrere Teilstücke
Lorenz, Jürgen; Koitzsch, Matthias; Schellenberger, Martin; Lewke, Dirk; Gumprecht, Thomas
Patent
2013Verfahren und Vorrichtung zur Messung der Ablenkung von Lichtstrahlen durch eine Objektstruktur oder ein Medium
 
Study
2013Verification of near-interface traps models by electrical measurements on 4H-SiC n-channel MOSFETs
Uhnevionak, V.; Strenger, C.; Burenkov, A.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Bauer, A.; Pichler, P.
Conference Paper
2013Virtual metrology for prediction of etch depth in a trench etch process
Roeder, G.; Schellenberger, M.; Pfitzner, L.; Winzer, S.; Jank, S.
Conference Paper
2012Der "Zauberspiegel" als Messprinzip
Tobisch, Alexander; Schellenberger, Martin; Pfitzner, Lothar
Journal Article
20124H-SiC MOSFETs with a stable protective coating for harsh environment applications
Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Conference Paper
2012Ablation Free Dicing of 4H-SiC Wafers with Feed Rates up to 200 mm/s by Using Thermal Laser Separation
Lewke, Dirk; Koitzsch, Matthias; Schellenberger, Martin; Pfitzner, Lothar; Ryssel, Heiner; Zühlke Hans-Ulrich
Conference Paper
2012Advanced mask aligner lithography (AMALITH)
Völkel, R.; Vogler, U.; Bramati, A.; Weichelt, T.; Stürzebecher, L.; Zeitner, U.D.; Motzek, K.; Erdmann, A.; Hornung, M.; Zoberbier, R.
Conference Paper
2012Aktive Temperaturwechsel - Test und Interpretation
Schletz, Andreas
Presentation
2012All electrochemical layer deposition for crystalline silicon solar cell manufacturing: Experiments and interpretation
Kröner, Friedrich; Kröner, Z.; Reichmann, Klaus; Rommel, Mathias
Journal Article
2012Amplitude modulated resonant push-pull driver for piezoelectric transformers in switching power applications
Schwarzmann, Holger; Erlbacher, Tobias; Bauer, Anton J.; Ryssel, Heiner; Frey, Lothar
Conference Paper
2012Analysis of EUV mask multilayer defect printing characteristics
Erdmann, A.; Evanschitzky, P.; Bret, T.; Jonckheerec, R.
Conference Paper
2012Analysis of risks and related damages due to the implementation of virtual metrology algorithms into semiconductor fabrication lines
Koitzsch, Matthias; Honold, Alfred; Noll, Humbert; Nemecek, Alexander
Presentation
2012Analysis of the growth conditions of long single crystalline basal-plane-faceted sapphire ribbons by the Stepanov/EFG technique
Denisov, A.V.; Molchanov, A.; Punin, Y.O.; Krymov, V.M.; Müller, G.; Friedrich, J.
Journal Article
2012Analysis of threading dislocations in 4H-SiC by defect selective etching and X-ray topography
Kallinger, Birgit; Berwian, P.; Friedrich, J.; Danilewsky, A.; Wehrhahn, A.; Weber, A.-D.
Presentation
2012Analytical solution of thermal spreading resistance in power electronics
Guan, D.; Marz, M.; Liang, J.
Journal Article
2012Angular distributions of sputtered silicon at grazing gallium ion beam incidence
Burenkov, Alex; Sekowski, Matthias; Belko, Viktor; Ryssel, Heiner
Journal Article, Conference Paper
2012Approaches for the reduction of the influence of parasitic capacitances on local IV characteristics for conductive AFM
Rommel, Mathias; Jambreck, Joachim D.; Murakami, Katsuhisa; Lemberger, Martin; Richter, Christoph; Weinzierl, Philip; Bauer, Anton J.; Frey, Lothar
Presentation
2012Assessment of a FOUP conditioning equipment for advanced semiconductor application
Otto, M.; Rioufrays, S.; Favre, A.; Leibold, A.; Altmann, R.; Gennaro, S.; Dell'Anna, R.; Canteri, R.; Pfitzner, L.
Conference Paper
2012Aufreinigung eines Tiegels für eine Halbleiterverarbeitung
Schneider, Veronika; Reimann, Christian; Friedrich, J.
Patent
2012Batteries and battery management systems for electric vehicles
Brandl, M.; Gall, H.; Wenger, M.; Lorentz, V.; Giegerich, M.; Baronti, F.; Fantechi, G.; Fanucci, L.; Roncella, R.; Saletti, R.; Saponara, S.; Thaler, A.; Cifrain, M.; Prochazka, W.
Conference Paper
2012BF3 PIII modeling: Implantation, amorphisation and diffusion
Essa, Z.; Cristiano, F.; Spiegel, Y.; Boulenc, P.; Qiu, Y.; Quillec, M.; Taleb, N.; Burenkov, A.; Hackenberg, M.; Bedel-Pereira, E.; Mortet, V.; Torregrosa, F.; Tavernier, C.
Conference Paper
2012A calculation model for the economic effects of implementing predictive maintenance algorithms into semiconductor fabrication lines
Koitzsch, Matthias; Honold, Alfred; Noll, Humbert; Nemecek, Alexander
Presentation
2012Cathodoluminescence imaging for the determination of dislocation density in differently doped HVPE GaN
Meissner, E.; Schweigard, S.; Friedrich, J.; Paskova, T.; Udwary, K.; Leibiger, G.; Habel, F.
Journal Article
2012Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy
Rumler, Maximilian; Rommel, Mathias; Erlekampf, Jürgen; Azizi, Maral; Geiger, Tobias; Bauer, Anton J.; Meißner, Elke; Frey, Lothar
Journal Article
2012Comparative investigation on installation space requirements for input filters of DC-link- and matrix converters based on amplitude pseudo-spectra
Schramm, A.; Lanfer, H.; Petzoldt, J.; Rädel, U.; Schwarzmann, H.; Erlbacher, T.
Conference Paper
2012Comparative study of electrical and microstructural properties of 4H-SiC MOSFETs
Strenger, C.; Häublein, V.; Erlbacher, T.; Bauer, A.J.; Ryssel, H.; Beltran, A.M.; Schamm-Chardon, S.; Mortet, V.; Bedel-Pereira, E.; Lefebvre, M.; Cristiano, F.
Conference Paper
2012Considerations on the effect of interstitial and precipitated Fe in intentionally Fe-doped mc-silicon
Azizi, M.; Meissner, E.; Friedrich, J.
Conference Paper
2012Correlation-aware analysis of the impact of process variations on circuit behavior
Burenkov, Alex; Baer, Eberhard; Lorenz, Juergen; Kampen, Christian
Conference Paper
2012Development of a novel in situ monitoring technology for ammonothermal reactors
Alt, N.S.A.; Meissner, E.; Schluecker, E.
Journal Article
2012Doping induced lattice misfit in 4H-SiC homoepitaxy
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Müller, Georg; Weber, Arnd-Dietrich; Volz, Eduard; Trachta, Gerd; Spiecker, Erdmann; Thomas, Bernd
Journal Article
2012Dreikäsehoch an Bord
Hutzler, Aaron
Journal Article
2012Effect of HfO2 polycrystallinity on distribution of the CAFM-induced TDDB in high-k gate stacks
Iglesias, V.; Erlbacher, T.; Rommel, M.; Murakami, K.; Bauer, A.J.; Frey, L.; Porti, M.; Martin-Martinez, J.; Rodriguez, R.; Nafria, M.; Aymerich, X.; Bersuker, G.
Poster
2012Efficient laser induced consolidation of nanoparticulate ZnO thin films with reduced thermal budget
Baum, M.; Polster, S.; Jank, M.P.M.; Alexeev, I.; Frey, L.; Schmidt, M.
Journal Article
2012Efficient simulation of EUV multilayer defects with rigorous data base approach
Evanschitzky, Peter; Shao, Feng; Erdmann, Andreas
Conference Paper
2012Electrical characterization of nanostructured p-silicon electrodes for bioimpedance measurements on single cell level
Pliquett, Uwe; Westenthanner, Maximilian; Rommel, Mathias; Bauer, Anton J.; Beckmann, Dieter
Conference Paper
2012Eletrisches Überbrückungselement, insbesondere für Speicherzellen eines Energiespeichers
Dorp, Joachim vom; Erlbacher, Tobias; Frey, L.
Patent
2012Enhancements in resizing single crystalline silicon wafers up to 450 mm by using thermal laser separation
Koitzsch, M.; Lewke, D.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.; Zühlke, H.U.
Conference Paper
2012Enthalpy based modeling of pulsed excimer laser annealing for process simulation
Hackenberg, M.; Pichler, P.; Huet, K.; Negru, R.; Venturini, J.; Pakfar, A.; Tavernier, C.; La Magna, A.
Conference Paper, Journal Article
2012Evaluation of resistless Ga+ beam lithography for UV-NIL stamp fabrication
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Matthias; Bauer, Anton J.; Frey, Lothar
Poster
2012Evaluation of various compact mask and imaging models for the efficient simulation of mask topography effects in immersion lithography
Agudelo, V.; Evanschitzky, P.; Erdmann, A.; Fühner, T.
Conference Paper
2012Evaluation of X-ray imaging properties of structured aluminum oxide matrices filled with different scintillator materials
Muhlbauer, J.; Semmelroth, K.; Kruger, P.; Schreiber, J.; Mukhurov, N.I.; Uhlmann, N.
Conference Paper
2012Fabrication and application of shielded probes for conductive AFM measurements
Jambreck, Joachim D.; Rommel, Mathias; Richter, Christoph; Weinzierl, Philip; Bauer, Anton J.; Frey, Lothar
Poster
2012Fabrication process development for a high sensitive electrochemical IDA sensor
Partel, S.; Mayer, M.; Hudek, P.; Dinçer, C.; Kieninger, J.; Urban, G.A.; Motzek, K.; Matay, L.
Journal Article, Conference Paper
2012Factory integration
Oechsner, Richard
Journal Article
2012Feasibility and limitations of anti-fuses based on bistable non-volatile switches for power electronic applications
Erlbacher, T.; Huerner, A.; Bauer, A.J.; Frey, L.
Journal Article
2012Feasiblity and limitations of anti-fuses based on bistable non-volatile switches for power electronic applications
Erlbacher, Tobias; Hürner A.; Bauer, Anton J.; Frey, Lothar
Journal Article
2012Framework for integration of virtual metrology and predictive maintenance
Roeder, G.; Mattes, A.; Pfeffer, M.; Schellenberger, M.; Pfitzner, L.; Knapp, A.; Mühlberger, H.; Kyek, A.; Lenz, B.; Frisch, M.; Bichlmeier, J.; Leditzky, G.; Lind, E.; Zoia, S.; Fazio, G.
Conference Paper
2012Functional epoxy polymer for direct nano-imprinting of micro optical elements
Fader, Robert; Landwehr Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Völkel, Reinhard; Brehm, Markus; Kraft, Andreas
Poster
2012A generic approach for comparing input filter efforts of voltage- and current source converters
Schramm, A.; Lanfer, H.; Petzoldt, J.; Rädel, U.; Schwarzmann, H.; Erlbacher, T.
Conference Paper
2012Gezielt maximieren, minimieren und optimieren
Hutzler, Aaron; Engelmann, Stefanie
Journal Article
2012Hall effect characterizations of 4H-SiC MOSFETs: Influence of nitrogen channel implantation
Mortet, V.; Bedel-Pereira, E.; Bobo, J.; Strenger, C.; Uhnevionak, V.; Burenkov, A.; Cristiano, F.; Bauer, A.
Poster
2012Imaging characteristics of binary and phase shift masks for EUV projection lithography
Erdmann, A.; Evanschitzky, P.
Conference Paper
2012Implantation-induced structural defects in highly activated USJs: Boron precipitation and trapping in pre-amorphised silicon
Cristiano, F.; Essa, Z.; Qiu, Y.; Spiegel, Y.; Torregrosa, F.; Duchaine, J.; Boulenc, P.; Tavernier, C.; Cojocaru, O.; Blavette, D.; Mangelinck, D.; Fazzini, P.F.; Quillec, M.; Bazizi, M.; Hackenberg, M.; Boninelli, S.
Conference Paper
2012IMPROVE - a joint European effort to boost efficiency in semiconductor manufacturing
Schellenberger, Martin; Koitzsch, Matthias; Roeder, Georg; Pfeffer, Markus; Schöpka, Ulrich; Mattes, Andreas; Pfitzner, Lothar
Presentation
2012Improving module performance and reliability in power electronic applications by monolithic integration of RC-snubbers
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Berberich, Sven E.; Dorp, Joachim vom; Frey, Lothar
Conference Paper
2012In situ aberration measurement technique based on quadratic Zernike model
Yang, J.; Wang, X.; Li, S.; Duan, L.; Yan, G.; Xu, D.; Bourov, A.Y.; Erdmann, A.
Conference Paper
2012In situ monitoring technologies for ammonthermal reactors
Alt, N.; Meissner, E.; Schlücker, E.; Frey, L.
Journal Article
2012In-situ aberration measurement technique based on aerial image with optimized source
Yan, G.; Wang, X.; Li, S.; Yang, J.; Xu, D.; Duan, L.; Bourov, A.Y.; Erdmann, A.
Conference Paper
2012Influence of epilayer thickness and structural defects on the minority carrier lifetime in 4H-SiC
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Azizi, Maral; Rommel, Mathias; Hecht, Christian; Friedrichs, Peter
Poster
2012Influence of the excitation energy on absorption effects in Total Reflection X-ray Fluorescence analysis
Horntrich, C.; Kregsamer, P.; Smolek, S.; Maderitsch, A.; Wobrauschek, P.; Simon, R.; Nutsch, A.; Knoerr, M.; Streli, C.
Journal Article
2012Influence of two typical defects on the near-field optical properties of multilayer dielectric compression gratings
Jin, Y.X.; Guan, H.Y.; Kong, F.Y.; Wang, J.P.; Erdmann, A.; Liu, S.J.; Du, Y.; Shao, J.D.; He, H.B.; Yi, K.
Journal Article
2012Intrinsic MOSFET leakage of high-k peripheral DRAM devices: Measurement and simulation
Roll, G.; Jakschik, S.; Goldbach, M.; Wachowiak, A.; Mikolajick, T.; Frey, L.
Conference Paper
2012Kristalle - Wunderwerkstoffe für die Industrie
Friedrich, J.; Müller, G.
Book Article
2012Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography
Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.
Journal Article, Conference Paper
2012Mask aligner lithography simulation - From lithography simulation to process validation
Motzek, K.; Partel, S.; Bramati, A.; Hofmann, U.; Unal, N.; Hennemeyer, M.; Hornung, M.; Heindl, A.; Ruhland, M.; Erdmann, A.; Hudek, P.
Journal Article
2012Measurement strategy for dielectric ultra-thin film characterization by vacuum ultra-violet reflectometry
Gumprecht, T.; Roeder, G.; Schellenberger, M.; Pfitzner, L.
Conference Paper
2012Messplatz für aktive Temperaturwechsel (Power Cycling Test) - Test und Interpretation
Schletz, Andreas
Presentation
2012Modeling boron profiles in silicon after pulsed excimer laser annealing
Hackenberg, M.; Huet, K.; Negru, R.; Venturini, J.; Fisicaro, G.; La Magna, A.; Pichler, P.
Conference Paper
2012Modular inverter power electronic for intelligent e-drives
Hofmann, M.; Schletz, A.; Domes, K.; Marz, M.; Frey, L.
Conference Paper
2012Mono-crystalline growth in directional solidification of silicon with different orientation and splitting of seed crystals
Trempa, M.; Reimann, C.; Friedrich, J.; Müller, G.; Oriwol, D.
Journal Article
2012Mutual source, mask and projector pupil optimization
Fühner, T.; Evanschitzky, P.; Erdmann, A.
Conference Paper
2012Nano-analytical and electrical characterization of 4H-SiC MOSFETs
Beltran, A.M.; Schamm-Chardon, S.; Mortet, V.; Lefebvre, M.; Bedel-Pereira, E.; Cristiano, F.; Strenger, C.; Häublein, V.; Bauer, A.J.
Conference Paper
2012Nanoscale characterization of TiO2 films grown by atomic layer deposition
Murakami, Katsuhisa; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Hudec, Boris; Rosova, A.; Hueková, K.; Fröhlich, Karol; Kasikov, A.; Ramula, R.; Aarik, J.; Han, J.H.; Han, S.; Lee, W.; Song, S.J.; Hwang, C.S.
Poster
2012A new feedback gain designing of speed adaptive full order observer for high speed operation of induction motor
Yi, O.; Maerz, M.
Conference Paper
2012Novel cost-efficient contactless distributed monitoring concept for smart battery cells
Lorentz, V.R.H.; Wenger, M.M.; Grosch, J.L.; Giegerich, M.; Jank, M.P.M.; März, M.; Frey, L.
Conference Paper
2012Novel organic polymer for UV-enhanced substrate conformal imprint lithography
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Vogler, M.
Journal Article, Conference Paper
2012Ohmic and rectifying contacts on bulk AlN for radiation detector applications
Erlbacher, Tobias; Bickermann, Matthias; Kallinger, Birgit; Meissner, Elke; Bauer, Anton J.; Frey, Lothar
Journal Article, Conference Paper
2012Optical thin film metrology for optoelectronics
Petrik, P.
Journal Article, Conference Paper
2012Piezoelektrische Transformatoren zur Ansteuerung von Leistungsschaltern
Schwarzmann, H.
Dissertation
2012Plasma-assisted atomic layer deposition of alumina at room temperature
Lemberger, Martin; Fromm, Timo; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar
Poster
2012Precipitation of antimony implanted into silicon
Koffel, S.; Pichler, P.; Reading, M.A.; Berg, J. van den; Kheyrandish, H.; Hamm, S.; Lerch, W.; Pakfar, A.; Tavernier, C.
Journal Article, Conference Paper
2012Predictive sampling approach to dynamically optimize defect density control operations
Pfeffer, M.; Oechsner, R.; Pfitzner, L.; Eckert, S.; Hartmann, A.; Gold, H.; Biebl, G.; Kaspar, J.
Conference Paper
2012Preface
Freitas Jr., J.A.; Sitar, Z.; Kumagai, Y.; Meissener, E.
Journal Article
2012Probenpositioniereinrichtung und Verfahren zu ihrem Betrieb
Nutsch, Andreas; Holfelder, I.; Fliegauf, Rolf; Weser, J.; Beckhoff, B.
Patent
2012Purity of ion beams: Analysis and simulation of mass spectra and mass interferences in ion implantation
Häublein, V.; Ryssel, H.; Frey, L.
Journal Article
2012Realize YOUR Visions... With Power Electronics
Zeltner, Stefan
Presentation
2012Reference samples for ultra trace analysis of organic compounds on substrate surfaces
Nutsch, A.; Beckhoff, B.; Borionetti, G.; Codegoni, D.; Grasso, S.; Hoenicke, P.; Leibold, A.; Müller, M.; Otto, M.; Pfitzner, L.; Polignano, M.-L.
Conference Paper
2012Reliability characterization of dielectrics in 200V trench capacitors
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Dorp, Joachim vom; Frey, Lothar
Poster
2012Reliability of silver sintering on DBC and DBA substrates for power electronic applications
Kraft, S.; Schletz, A.; Maerz, M.
Conference Paper
2012Reliable quantification of inorganic contamination by TXRF
Müller, M.; Nutsch, A.; Altmann, R.; Borionetti, G.; Holz, T.; Mantler, C.; Hönicke, P.; Kolbe, M.; Beckhoff, B.
Conference Paper
2012Resist properties required for 6.67 nm extreme ultraviolet lithography
Kozawa, T.; Erdmann, A.
Journal Article
2012Resistive circuit, circuit layout and driver
Berberich, Sven E.; Wintrich, Arendt; Erlbacher, Tobias
Patent
2012Resonant metamaterials for contrast enhancement in optical lithography
Dobmann, S.; Shyroki, D.; Banzer, P.; Erdmann, A.; Peschel, U.
Journal Article
2012Rigorous electromagnetic field simulation of the impact of photomask line-edge and line-width roughness on lithographic processes
Rudolph, O.; Evanschitzky, P.; Erdmann, A.; Bär, E.; Lorenz, J.
Journal Article
2012Significant on-resistance reduction of LDMOS devices by intermitted trench gates integration
Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Journal Article
2012Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures
Rommel, M.; Bauer, A.J.; Frey, L.
Journal Article, Conference Paper
2012Simulation of 3D inclined/rotated UV lithography and its application to microneedles
Liu, S.; Roeder, G.; Aygun, G.; Motzek, K.; Evanschitzky, P.; Erdmann, A.
Journal Article
2012Simulation of BF3 plasma immersion ion implantation into silicon
Burenkov, A.; Hahn, A.; Spiegel, Y.; Etienne, H.; Torregrosa, F.
Conference Paper
2012Simulationsgestützte Untersuchung von logistischen Optimierungsstrategien bei Halbleiterfertigungsprozessen
Pfeffer, M.
Dissertation
2012Smart battery cell monitoring with contactless data transmission
Lorentz, V.; Wenger, M.; Giegerich, M.; Zeltner, S.; März, M.; Frey, L.
Conference Paper
2012Solid-phase epitaxy of silicon amorphized by implantation of the alkali elements rubidium and cesium
Maier, R.; Häublein, V.; Ryssel, H.; Völlm, H.; Feili, D.; Seidel, H.; Frey, L.
Conference Paper
2012Stable analysis on speed-adaptive observer in regenerating mode
Ouyang, Y.; Maerz, M.
Journal Article
2012Stationsanordnung zur Bearbeitung und/oder Vermessen von Halbleiterscheiben sowie Bearbeitungsverfahren
Schellenberger, Martin; Lewke, Dirk
Patent
2012Structural and reliability analysis of ohmic contacts to SiC with a stable protective coating for harsh environment applications
Daves, W.; Kraus, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Journal Article
2012SXRT investigations on electrically stressed 4H-SiC PiN diodes for 6.5 kV
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Hecht, Christian; Peters, Dethard; Friedrichs, Peter; Thomas, Bernd
Poster
2012Systematic characterization of multi-crystalline silicon String Ribbon wafer
Reimann, C.; Müller, G.; Friedrich, J.; Lauer, K.; Simonis, A.; Wätzig, H.; Krehan, S.; Hartmann, R.; Kruse, A.
Journal Article
2012The thermal budget of hydrogen-related donor profiles: Diffusion-limited activation and thermal dissociation
Laven, J.G.; Job, R.; Schulze, H.-J.; Niedernostheide, F.-J.; Schustereder, W.; Frey, L.
Conference Paper
2012Thermal laser separation - damage-free and Kerfless cutting of wafers and solar cells
Koitzsch, Matthias; Lewke, Dirk; Kaule, Felix; Oswald, Marcus; Schoenfelder, Stephan; Turek, Marko; Büchel, Andreas; Zühlke, Hans-Ulrich
Conference Paper
2012Thermal laser separation and its applications
Lewke, Dirk; Koitzsch, Matthias; Schellenberger, Martin; Pfitzner, Lothar; Ryssel, Heiner; Zühlke, Hans-Ulrich
Journal Article
2012TiO2-based metal-insulator-metal structures for future DRAM storage capacitors
Fröhlich, K.; Hudec, B.; Tapajna, M.; Hueková, K.; Rosova, A.; Eliá, P.; Aarik, J.; Rammula, R.; Kasikov, A.; Arroval, T.; Aarik, L.; Murakami, Katsuhisa; Rommel, Mathias; Bauer, Anton J.
Conference Paper
2012Verfahren zur gezielten Einstellung einer Tropfenkondensation auf einer Oberfläche eines Substrats mittels Ionenimplantation
Burenkov, Alexander; Pichler, Peter; Fröba, Andreas; Rausch, Michael Heinrich; Leipertz, Alfred
Patent
2012Verification of near-interface traps by electrical measurements on 4H-SiC n-channel MOSFETs
Uhnevionak, V.; Strenger, C.; Burenkov, A.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Bauer, A.; Pichler, P.
Presentation
2012Virtual Equipment for benchmarking Predictive Maintenance algorithms
Mattes, A.; Schöpka, U.; Schellenberger, M.; Scheibelhofer, P.; Leditzky, G.
Conference Paper
2012Wiederverwendbarer Tiegel aus einer Siliziumnitrid-Keramik sowie dessen Verwendung bei der Herstellung eines mono- oder multikristallinen Halbmetallkörpers aus einer Schmelze
Mono, T.; Schneider, Veronika; Martin, R.; Reimann, Christian; Friedrich, J.
Patent