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2020 | 78‐1: Invited Paper: Application of OLED Area Light in Textiles. Approaches, Challenges, Limitations, and Perspectives Hesse, Jan; Keibler-Willner, Claudia; Philipp, André | Journal Article, Conference Paper |
2020 | 8‐3: Invited Paper: OLED Lighting Design and Roll‐to‐Roll Manufacturing May, Christian; Törker, Michael; Hesse, Jan; Hauptmann, Jacqueline; Keibler-Willner, Claudia; Philipp, André; Wieczorek, Martin | Journal Article, Conference Paper |
2020 | Automated application of low energy electron irradiation enables inactivation of pathogen- and cell-containing liquids in biomedical research and production facilities Fertey, Jasmin; Thoma, Martin; Beckmann, Jana; Bayer, Lea; Finkensieper, Julia; Reißhauer, Susann; Berneck, Beatrice S.; Issmail, Leila; Schönfelder, Jessy; Portillo Casado, Javier; Poremba, Andre; Rögner, Frank-Holm; Standfest, Bastian; Makert, Gustavo R.; Walcher, Lia; Kistenmacher, Ann-Katrin; Fricke, Stephan; Grunwald, Thomas; Ulbert, Sebastian | Journal Article |
2020 | CMOS-integrierte Lichtemitter für optische Sensorik und Mikrodisplays Fehse, Karsten; Richter, Bernd; Schedwill, Ines | Journal Article |
2020 | Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik. Jahresbericht 2019/2020 | Annual Report |
2020 | From the zoo to the wild: The appeal of structured OLED lighting May, Christian; Graf, Annett | Journal Article |
2020 | High-rate deposition of thick aluminum coatings on plastic parts for electromagnetic shielding Heinß, Jens-Peter; Fietzke, Fred | Journal Article |
2020 | Korrosions- und Gefüge-Untersuchungen an vergoldeten Silberfäden von Prunktextilien aus der Zeit August des Starken Zywitzki, Olaf; Modes, Thomas; Schäfer, Katherina | Journal Article |
2020 | Der letzte Schritt ist der wichtigste Gotzmann, Gaby; König, Ulla | Journal Article |
2020 | Low-energy electron irradiation efficiently inactivates the gram-negative pathogen rodentibacter pneumotropicus Fertey, Jasmin; Bayer, Lea; Kähl, Sophie; Haji, Rukiya M.; Burger-Kentischer, Anke; Thoma, Martin; Standfest, Bastian; Schönfelder, Jessi; Casado, Javier Portillo; Rögner, Frank-Holm; Baums, Christoph Georg; Grunwald, Thomas; Ulbert, Sebastian | Journal Article |
2020 | Material Selection for Biodegradable Organic Thin Film Transistors May, Christian; Schreiber, Stephanie; Hoffmann, Michael | Conference Paper |
2020 | Moderne Verfahren zur Beschichtung metallischer Platten und Bänder Kopte, Torsten; Metzner, Christoph | Journal Article |
2020 | Optically Transparent Antenna Integrated inside a Headlamp for Automotive Radar Application Hamid, Sofian; Heberling, Dirk; Junghähnel, Manuela; Preußner, Thomas; Gretzki, Patrick; Pongratz, Ludwig; Hördemann, Christian; Gillner, Arnold | Conference Paper |
2020 | Preface - Selected Papers of the "Society of Vacuum Coaters Annual Technical Conference" 2018 Bandorf, Ralf; Walton, Scott G.; Junghähnel, Manuela; Stoessel, Chris H. | Journal Article, Conference Paper |
2020 | Publisher Correction: Automated application of low energy electron irradiation enables inactivation of pathogen- and cell-containing liquids in biomedical research and production facilities Fertey, Jasmin; Thoma, Martin; Beckmann, Jana; Bayer, Lea; Finkensieper, Julia; Reißhauer, Susann; Berneck, Beatrice Sarah; Issmail, Leila; Schönfelder, Jessi; Casado, Javier Portillo; Poremba, Andre; Rögner, Frank-Holm; Standfest, Bastian; Makert, Gustavo R.; Walcher, Lia; Kistenmacher, Ann-Kathrin; Fricke, Stephan; Grunwald, Thomas; Ulbert, Sebastian | Journal Article |
2020 | Pulsed Magnetron Sputtering of Strongly Thermochromic VO2-Based Coatings with a Transition Temperature of 22 °C onto Ultrathin Flexible Glass Barta, Tomas; Vlcek, Jaroslav; Houska, Jiri; Cerstvy, Radomir; Haviar, Stanislav; Szelwicka, Jolanta; Fahland, Matthias; Fahlteich, John | Journal Article |
2020 | Put strong limits on all proposed theories so far assessing electrostatic propulsion: Does a charged high-voltage capacitor produce thrust? Tajmar, M.; Schreiber, T. | Journal Article |
2020 | Rate and Composition Control for Plasma-assisted EB-PVD Processes by Optical Emission Spectroscopy Zimmermann, Burkhard; Mattausch, Gösta; Metzner, Christoph | Journal Article |
2020 | Roll to Roll Deposition of Transparent Electrodes on Permeation Barrier Coatings Fahland, Matthias; Vogt, Tobias; Meyer, Uwe; Prager, Nicole; Fahlteich, John | Journal Article |
2020 | Self-Heating in Light-Emitting Electrochemical Cells Ràfols-Ribé, J.; Robinson, N.D.; Larson, C.; Tang, S.; Top, M.; Sandström, A.; Erdmann, L. | Journal Article |
2020 | Smarte selbstreinigende Oberflächen Gotzmann, G.; Vogel, U.; Glöß, D.; Wartenberg, P.; König, U. | Journal Article |
2020 | Sterilization and Cross-Linking Combined with Ultraviolet Irradiation and Low-Energy Electron Irradiation Procedure. New Perspectives for Bovine Pericardial Implants in Cardiac Surgery Walker, Simona; Dittfeld, Claudia; Jakob, Aline; Schönfelder, Jessy; König, Ulla; Tugtekin, Sems-Malte | Journal Article |
2020 | Verfahren zum Aktivieren einer auf einem Verbund abgeschiedenen photokatalytisch wirksamen Deckschicht Gotzmann, Gaby; Vogel, Uwe; Glöß, Daniel; Schönfelder, Jessy; Wartenberg, Philipp | Patent |
2020 | Verfahren zum Glätten eines Bauteiloberflächenbereichs Graffel, Benjamin; Winckler, Falk; Fritzsche, Sven; Kieback, Bernd; Klöden, Burghardt; Weißgärber, Thomas | Patent |
2019 | Combined ‘moth-eye’ structured and graded index-layer anti-reflecting coating for high index glasses Kraus, Matthias; Diao, Zhaolu; Weishaupt, Klaus; Spatz, P. Joachim; Täschner, Kerstin; Bartzsch, Hagen; Schmittgens, Ralph; Brunner, Robert | Journal Article |
2019 | Displays von ultra-low power bis HD Richter, Bernd; Wartenberg, Philipp; Vogel, Uwe | Journal Article |
2019 | Eimeria tenella oocysts attenuated by low energy electron irradiation (LEEI) induce protection against challenge infection in chickens Thabet, Ahmed; Schmäschke, Ronald; Fertey, Jasmin; Bangoura, Berit; Schönfelder, Jessy; Lendner, Matthias; Ulbert, Sebastian; Daugschies, Arwid | Journal Article |
2019 | Elektrisch isolierende und piezoelektrisch aktive Schichten Barth, Stephan; Hildisch, Jan; Bartzsch, Hagen | Journal Article |
2019 | EMC Shielding on Plastic Components by Electron Beam Evaporation Heinß, Jens-Peter; Fietzke, Fred | Conference Paper |
2019 | Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik. Jahresbericht 2018/2019 | Annual Report |
2019 | Freeform and Laser Optical Coatings by Inline Magnetron Sputtering Glöß, Daniel; Hartung, Ullrich; Drescher, Andy; Frach, Peter; Bartzsch, Hagen | Conference Paper |
2019 | Full speed ahead for SmartEEs May, Christian; Hausdorf, Annett | Journal Article |
2019 | High-Rate Deposition of High-Pure Silicon Thin Films for PV-Absorber Layers by Crucible-free Electron Beam Physical Vapor Deposition Saager, Stefan; Scheffel, Bert; Heinß, Jens-Peter | Conference Paper |
2019 | High-rate deposition of high-pure silicon thin films for PV-Absorber layers by crucible-free electron beam physical vapor deposition Saager, Stefan; Scheffel, Bert; Heinß, Jens-Peter | Journal Article |
2019 | Influence of growth conditions and film thickness on the anodization behavior of sputtered aluminum films and the fabrication of nanorod arrays Barth, Stephan; Derenko, Susan; Bartzsch, Hagen; Zywitzki, Olaf; Modes, Thomas; Patrovsky, Fabian; Fiehler, Vera; Uhlig, Tino; Frach, P.; Eng, L.M. | Journal Article |
2019 | Integration organischer Leuchtdioden auf einem Sensorchip zur Messung der Sauerstoffkonzentration in Gasen und Flüssigkeiten Fehse, Karsten; Schlebusch, Dirk; Wartenberg, Philipp; Ulbricht, Steffen; Bunk, Gerd; Brenner, Stephan; Schober, Matthias; Schmidt, Christian; Richter, B.; Vogel, U.; Lau, M.; Czihal, S.; Morjan, M. | Conference Paper |
2019 | Investigation of ScAlN for piezoelectric and ferroelectric applications Petrich, R.; Bartsch, H.; Tonisch, K.; Jaekel, K.; Barth, S.; Bartzsch, H.; Glöß, D.; Delan, A.; Krischok, S.; Strehle, S.; Hoffmann, M.; Müller, J. | Conference Paper |
2019 | Invited Paper: A New 0.64″ 720p OLED Microdisplay for Application in Industrial See‐Through AR HMD Wartenberg, Philipp; Richter, Bernd; Brenner, Stephan; Rolle, Martin; Bunk, Gerd; Ulbricht, Steffen; Baumgarten, Judith; Schmidt, Christian | Journal Article |
2019 | OLED Manufacturing on Flexible Substrates Towards Roll-to-Roll Wang, Dongxiang; Hauptmann, Jacqueline; May, Christian | Journal Article |
2019 | OLED Modules for Textile Integration Hesse, Jan | Journal Article |
2019 | Piezoelectric and Electrically Insulating Coatings Barth, Stephan; Hildisch, Jan; Bartzsch, Hagen | Journal Article |
2019 | Porous silicon thin films as anodes for lithium ion batteries deposited by co-evaporation of silicon and zinc Saager, Stefan; Scheffel, Bert; Zywitzki, Olaf; Modes, Thomas; Piwko, Markus; Dörfler, Susanne; Althues, Holger; Metzner, Christoph | Journal Article |
2019 | Quantifying Performance of Permeation Barrier - Encapsulation Systems for Flexible and Glass-Based Electronics and their Application to Perovskite Solar Cells Castro-Hermosa, Sergio; Top, Michiel; Dagar, Janardan; Fahlteich, John; Brown, Thomas M. | Journal Article |
2019 | Rate and Composition Control for Plasma-assisted EB-PVD Processes by Optical Emission Spectroscopy Zimmermann, Burkhard; Mattausch, Gösta; Metzner, Christoph | Conference Paper |
2019 | Roll-to-Roll deposition of silicon-plasma polymers Top, Michiel | Journal Article |
2019 | Roll-to-Roll Sputter Deposition of Low Resistance Electrodes on Ultrathin Glass Fahland, Matthias; Garner, Sean; Pollack, Gerd | Conference Paper |
2019 | Roll-to-roll sputtering of indium tin oxide layers onto ultrathin flexible glass Fahland, Matthias; Zywitzki, Olaf; Modes, Thomas; Vondkar, Komal; Werner, Torsten; Ottermann, Clemens; Berendt, Markus; Pollak, Gerd | Journal Article |
2019 | Slot-die processing and encapsulation of non-fullerene based ITO-free organic solar cells and modules Destouesse, E.; Top, Michiel; Lamminaho, J.; Rubahn, H.-G.; Fahlteich, John; Madsen, M. | Journal Article |
2019 | Sputter deposition of undoped and doped SiO2 films for temperature compensated SAW components Bartzsch, Hagen; Hildisch, Jan; Täschner, Kerstin; Barth, Stephan; Rückriem, Robert; Nestler, Matthias | Conference Paper |
2019 | Steigerung der Effizienz und Leuchtdichtehomogenität von organischen Leuchtdioden mittels Druck- und Laserprozessen Philipp, André | Dissertation |
2019 | Synthesis of Porous Thin Films as Silicon Anodes for Lithium-Ion Batteries Saager, Stefan; Scheffel, Bert; Zywitzki, Olaf; Modes, Thomas; Piwko, Markus; Doerfler, Susanne; Althues, Holger; Metzner, Christoph | Journal Article |
2019 | Tailor-made nanostructures bridging chaosand order for highly efficient white organiclight-emitting diodes Li, Yungui; Kovačič, Milan; Westphalen, Jasper; Oswald, Steffen; Hänisch, Christian; Will, Paul-Anton; Jiang, Lihui; Junghähnel, Manuela; Scholz, Reinhard; Lenk, Simone; Reinecke, Sebastian | Journal Article |
2019 | Untersuchung von ScAlN für piezoelektrische und ferroelektrische Anwendungen Petrich, Rebecca; Bartsch, Heike; Tonisch, Katja; Jaekel, Konrad; Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Delan, Annekatrin; Krischok, S.; Strehle, S.; Hoffmann, Martin; Müller, Jens | Conference Paper |
2019 | Untersuchungen zur Elektronenstrahlstrukturierung von dünnen Schichten in Systemen der organischen Elektronik Bodenstein, Elisabeth | Dissertation |
2019 | Vorrichtung zum Beschichten eines bandförmigen Substrates Fahland, Matthias; Fahlteich, John; Prager, Nicole; Meyer, Uwe; Vogt, Tobias | Patent |
2019 | Vorrichtung zum Erzeugen beschleunigter Elektronen Weidauer, André; Blüthner, Ralf; Kirchhoff, Volker; Kubusch, Jörg; Mattausch, Gösta; Vicente Gabas, Ignacio Gabriel; Rögner, Frank-Holm | Patent |
2018 | 40‐5: Invited Paper: High Frame‐Rate 1” WUXGA OLED Microdisplay and Advanced Free‐Form Optics for Ultra‐Compact VR Headsets Wartenberg, Philipp; Buljan, Marina; Richter, Bernd; Haas, Gunther; Brenner, Stephan; Thieme, Mike; Vogel, Uwe; Benitez, Pablo | Journal Article |
2018 | Antimicrobial effects and dissolution properties of silver copper mixed layers Gotzmann, G.; Jorsch, C.; Wetzel, C.; Funk, H.W.R. | Journal Article |
2018 | Assessment of horizontal velocity fields in square thermal convection cells with large aspect ratio Kästner, Christian; Resagk, Christian; Westphalen, Jasper; Junghähnel, Manuela; Cierpka, Christian; Schumacher, Jörg | Journal Article |
2018 | Beschichtung von Verbindungselementen mittels Hochrate-Vakuumbeschichtung von Schüttgut Klostermann, Heidrun | Journal Article |
2018 | Coating technology for locally varying optical function on 2d and 3d elements Glöß, Daniel; Bartzsch, Hagen; Goschurny, Thomas; Drescher, Andy; Hartung, Ullrich; Frach, Peter | Conference Paper |
2018 | The development of a new approach toward lanthanide-based OLED fabrication: New host materials for Tb-based emitters Aslandukov, Andrey; Utochnikova, Valentina V.; Goriachiy, Dmitry; Vashchenko, Andrey A.; Tsymbarenko, Dmitry; Hoffmann, Michael; Pietraszkiewicz, Marek; Kuzmina, Natalia | Journal Article |
2018 | DLC for medical-technical applications modified by electron beam Gotzmann, Gaby; Beckmann, Jana; Schönfelder, Jessy; Wetzel, Christiane; Scholz, Burkhard; Herrmann, Ulrich | Conference Paper |
2018 | The effect of flash lamp annealing on the performance of MOTFTs Junghaehnel, M.; Preussner, T.; Westphalen, J. | Conference Paper |
2018 | Effect of humidity on the residual stress in silicon-containing plasma polymeric coatings Top, Michiel; Mulder, Guus; Prager, Nicole; Fahlteich, John; Hosson, Jeff de | Journal Article |
2018 | Effect of low-energy e-beam irradiation on presterilized COC packaging Kleinmann, Stefan; Haag, Werner; Weidauer, André | Journal Article |
2018 | Electrolyte decomposition and electrode thickness changes in Li-S cells with lithium metal anodes, prelithiated silicon anodes and hard carbon anodes Hancock, K.; Becherer, J.; Hagen, M.; Joos, M.; Abert, M.; Müller, D.; Franz, P.; Straach, S.; Tübke, J. | Journal Article |
2018 | Electron beam patterning for high-resolution full-color OLED displays Bodenstein, Elisabeth; Vogel, Uwe | Journal Article |
2018 | Elektronenstrahlen für die Sterilisation Schönfelder, Jessy | Journal Article |
2018 | Elektronenstrahlmodifizierung von diamantähnlichen Kohlenstoffschichten zur biofunktionalen Beschichtung von Implantatmaterialien Gotzmann, Gaby | Dissertation |
2018 | Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik. Jahresbericht 2017/2018 | Annual Report |
2018 | Functional properties of plasma polymer coatings deposited using a hollow cathode arc discharge based PECVD process Top, Michiel | Dissertation |
2018 | Gas barrier coatings for packaging and flexible electronics Fahlteich, John; Schiller, Nicolas; Günther, Steffen; Straach, Steffen | Journal Article |
2018 | Homogeneous deposition of high purity silicon thin films with highest rates above 30 µm/min Saager, Stefan; Scheffel, Bert | Conference Paper |
2018 | Influence of rf substrate bias on density and mechanical properties of sputtered SiO2 thin films for SAW applications Täschner, Kerstin; Hildisch, Jahn; Bartzsch, Hagen; Modes, Thomas; Zywitzki, Olaf | Conference Paper |
2018 | Lanthanide pyrazolecarboxylates for OLEDs and bioimaging Utochnikova, Valentina V.; Latipov, Egor; Dalinger, Alexander; Nelyubina, Yulia; Vashchenko, Andrey A.; Hoffmann, Michael; Kalyakina, Alena S.; Vatsadze, Sergey; Schepers, U.; Bräse, S.; Kuzmina, Natalia P. | Journal Article |
2018 | Lithium-Ionen-Batterien - Potenzial von Vakuumdünnschichtprozessen in der Herstellung Luber, Claus; Scheffel, Bert; Saager, Stefan; Straach, Steffen; Schiller, Nicolas | Journal Article |
2018 | Low energy electron beam irradiation of liquids for medical applications Schönfelder, J.; Portillo, J.; Gotzmann, G.; Rögner, F.-H.; Fertey, J.; Ulbert, S.; Grundwald, T.; Bayer, L. | Conference Paper |
2018 | Low-energy electron beam sterilization for medical technical applications Portillo, J.; Gotzmann, G.; Schönfelder, J.; Rögner, F.-H.; Wronski, S.; Müller, M.; Kohl, Y; Gorjup, E. | Conference Paper |
2018 | Low-energy electron-beam modification of DLC coatings reduces cell count while maintaining biocompatibility Gotzmann, G.; Beckmann, J.; Scholz, B.; Herrmann, U.; Wetzel, C. | Journal Article |
2018 | Low-energy electron-beam treatment as alternative for on-site sterilization of highly functionalized medical products - a feasibility study Gotzmann, G.; Portillo, J.; Wronski, S.; Kohl, Y; Gorjup, E.; Schuck, H.; Rögner, F.-H.; Müller, M.; Chaberny, I.F.; Schönfelder, J.; Wetzel, C. | Journal Article |
2018 | Microdisplays for Smart Eyewear Richter, Bernd; Wartenberg, Philipp; Vogel, Uwe | Journal Article |
2018 | Mikrostrukturiertes organisches Sensorbauelement und Verfahren zu dessen Herstellung Fehse, Karsten; Jahnel, Matthias; Richter, Bernd; Wartenberg, Philipp | Patent |
2018 | Modern coating and annealing technologies for advanced multifunctional layer stacks Preußner, Thomas; Junghähnel, Manuela; Westphalen, Jasper; Täschner, Kerstin | Conference Paper |
2018 | Nanostructuring of polymer surfaces by magnetron plasma treatment Steiner, Cindy; Fichtner, Juliane; Fahlteich, John | Journal Article, Conference Paper |
2018 | Nanostructuring of polymer surfaces by magnetron plasma treatment Steiner, Cindy; Fichtner, Juliane; Fahlteich, John | Conference Paper |
2018 | OLED-on-silicon microdisplays: Technology, devices, applications Vogel, Uwe; Wartenberg, Philipp; Richter, Bernd; Brenner, Stephan; Fehse, Karsten; Schober, Matthias | Conference Paper |
2018 | Piezoelektrische AlN- und AlScN-Schichten für die energieautarke Sensorik Bartzsch, Hagen; Barth, Stephan; Glöß, Daniel; Frach, Peter; Suchaneck, Gunnar; Gerlach, Gerald | Conference Paper |
2018 | Pilot production as a bridge between R&D and contract coating Schiller, Nicolas; Günther, Steffen | Journal Article |
2018 | Plasmagestützte Nanostrukturierung von ETFE-Folie Steiner, Cindy | Dissertation |
2018 | Plasmaunterstützte CSS-Abscheidung von CdS-Fensterschichten für CdTe-Solarzellen Hirsch, Daniel | Dissertation |
2018 | Porous silicon thin films as anodes for lithium ion batteries deposited by co-evaporation of silicon and zinc Saager, Stefan; Scheffel, Bert; Zywitzki, Olaf; Modes, Thomas; Piwko, Markus; Doerfler, Susanne; Althues, Holger; Metzner, Christoph | Conference Paper |
2018 | Preface: Society of Vacuum Coaters Annual Technical Conference 2017 Walton, S.G.; Bandorf, R.; Junghähnel, M.; Stoessel, C.H. | Journal Article |
2018 | R2R fabrication of thin-film coatings on ultra-thin glass for flexible devices Junghaehnel, M.; Fahland, M.; Preussner, T. | Conference Paper |
2018 | Realization of RGB colors from top‐emitting white OLED by electron beam patterning Bodenstein, Elisabeth; Schober, Matthias; Hoffmann, Marie; Metzner, Christoph; Vogel, Uwe | Journal Article |
2018 | Roll to roll deposition of transparent electrodes on permeation barrier coatings Fahland, Matthias; Vogt, Tobias; Meyer, Uwe; Prager, Nicole; Fahlteich, John | Conference Paper |
2018 | Roll-to-roll deposition of permeation barrier layers using a rotatable dual magnetron sputtering system Himmler, Anika; Fahland, Matthias; Linß, Volker | Conference Paper |
2018 | Roll-to-roll deposition of silicon oxynitride layers on polymer films using a rotatable dual magnetron system Himmler, Anika; Fahland, Matthias; Linß, Volker | Journal Article |
2018 | Roll-to-roll processing of functional films for flexible electronics Fahlteich, John; Fahland, Matthias; Kudlacek, Pavel; Manders, Wiel; Junghähnel, Manuela; Mogck, Stefan; Keibler, Claudia | Conference Paper |
2018 | Roll-to-roll sputtering of oxide layers into ultrathin flexible glass Fahland, Matthias; Dietsch, Tina; Ottermann, Clemens; Zywitzki, Olaf; Linß, Volker | Conference Paper |
2018 | Samariumsulfidschichten für Sensoranwendungen Delan, A.; Ngoumeni, R.; Vondkar, K.; Glöß, D.; Gerlach, G. | Conference Paper |
2018 | Segmented transparent OLED devices on ultra-thin glass Wang, Dongxiang; Stanel, Michael; Saini, Paritosh; Keibler-Willner, Claudia; Hauptmann, Jacqueline; Täschner, Kerstin; Junghähnel, Manuela; Mogck, Stefan | Conference Paper |
2018 | Silver/copper-mixed layers as antimicrobial surface coating Gotzmann, Gaby; Jorsch, Carola; Schönfelder, Jessy; Wetzel, Christiane; Funk, Richard H.W. | Conference Paper |
2018 | Sputtered coatings on ultra-thin glass for flexible display application Täschner, Kerstin; Junghähnel, Manuela; Stanel, Michael; Wang, Dongxiang; Mogck, Stefan | Conference Paper |
2018 | Stabilization and sterilization of pericardial scaffolds by ultraviolet and low-energy electron irradiation Walker, Simona; Schönfelder, Jessy; Tugtekin, Sems-Malte; Wetzel, Christiane; Hacker, Michael C.; Schulz-Siegmund, Michaela | Journal Article |
2018 | Vacuum coating on polymer films for outdoor applications Steiner, Cindy; Fahlteich, John; Fahland, Matthias | Conference Paper |
2018 | Verfahren zum Abscheiden einer Schicht mittels einer Magnetronsputtereinrichtung Bartzsch, Hagen; Frach, Peter; Hildisch, Jan | Patent |
2018 | Verfahren zum Bestimmen der spezifischen Oberfläche eines Substratoberflächenbereiches Fahlteich, John; Günther, Steffen; Holst, Emmy; Steiner, Cindy | Patent |
2018 | Verfahren zum Dotieren einer Graphen-Schicht Beyer, Beatrice; Dijon, Jean; Le Poche, Helene; Pesquera, Amaia; Wynands, David | Patent |
2018 | Verfahren zum Fixieren pflanzlicher Wirkstoffe an einem nichtmetallischen Substrat Dietze, Marleen; Kemper, Benjamin; Kubusch, Jörg | Patent |
2018 | Verfahren zum Strukturieren einer Substratoberfläche Fichtner, Juliane; Günther, Steffen; Kirchhoff, Volker; Steiner, Cindy | Patent |
2018 | Vorrichtung zum Erzeugen beschleunigter Elektronen Weidauer, André; Blüthner, Ralf; Kubusch, Jörg; Mattausch, Gösta; Rögner, Frank-Holm; Vicente Gabas, Ignacio Gabriel | Patent |
2018 | Vorrichtung zum Erzeugen beschleunigter Elektronen Weidauer, André; Blüthner, Ralf; Kubusch, Jörg; Mattausch, Gösta; Rögner, Frank-Holm; Vicente Gabas, Ignacio Gabriel | Patent |
2017 | 77-1: Invited Paper. Ultra-low power OLED microdisplay for extended battery life in NTE displays Vogel, Uwe; Beyer, Beatrice; Schober, Matthias; Wartenberg, Philipp; Brenner, Stephan; Bunk, Gerd; Ulbricht, Stephan; König, P.; Richter, Bernd | Journal Article, Conference Paper |
2017 | Accelerators and Industry Chimielewski, Andrzei; Chiari, Massimo; Rögner, Frank-Holm | Book Article |
2017 | Anodization of sputtered substoichiometric aluminum oxide thin-films for improved nanorod array fabrication Patrovsky, Fabian; Fiehler, Vera; Derenko, Susan; Barth, Stephan; Bartzsch, Hagen; Ortstein, Katrin; Frach, Peter; Eng, L.M. | Journal Article |
2017 | Aperiodic metal-dielectric multilayers as highly efficient sunlight reflectors Jiménez-Solano, Alberto; Anaya, Miguel; Calvo, Mauricio E.; Alcon-Camas, Mercedes; Alcaniz, Carlos; Guillen, Elena; Martinez, Noelia; Gallas, Manuel; Preußner, Thomas; Escobar-Galindo, Ramón; Míguez, Hernán | Journal Article |
2017 | Close spaced sublimation deposition of CdTe layers with process gas oxygen for thin film solar cells Krishnakumar, V.; Späth, B.; Drost, C.; Kraft, C.; Siepchen, B.; Delahoy, A.; Tan, X.; Chin, K.; Peng, S.; Hirsch, D.; Zywitzki, O.; Modes, T.; Morgner, H. | Journal Article |
2017 | Comparison of gamma and electron beam irradiation in reducing populations of E. coli artificially inoculated on mung bean, clover and fenugreek seeds, and affecting germination and growth of seeds Fan, Xuetong; Sokorai, Kimberly; Weidauer, André; Gotzmann, Gaby; Rögner, Frank-Holm; Koch, Eckhard | Journal Article |
2017 | Conductor structures for biodegradable electronics Hoffmann, Michael | Journal Article |
2017 | E-beam sterilization of microstructures in titanium surfaces for medical implants Winkler, Sebastian; Dietze, Marleen; Edelmann, Jan | Conference Paper |
2017 | Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering Zywitzki, Olaf; Modes, Thomas; Barth, Stephan; Bartzsch, Hagen; Frach, Peter | Journal Article |
2017 | Eigenschaften von Samariumsulfidschichten für Sensoranwendungen Delan, A.; Ngoumeni, R; Vondkar, K; Glöß, D.; Gerlach, G. | Conference Paper |
2017 | An einem Textil anbringbare elektronische Vorrichtung Hesse, Jan; Kirchhof, Christian | Patent |
2017 | Electron beam curable varnishes - Rapid processing of planarization layers Fichtner, J.; Hagenkamp, M.; Noss, M.; Günther, S. | Conference Paper |
2017 | Electron-beam modification of DLC coatings for biomedical applications Gotzmann, G.; Beckmann, J.; Wetzel, C.; Scholz, B.; Herrmann, U.; Neunzehn, J. | Journal Article |
2017 | Energy harvesting based on piezoelectric AlN and AlScN thin films deposited by high rate sputtering Frach, Peter; Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel | Conference Paper |
2017 | Experimental evidence concerning the significant information depth of electron backscatter diffraction (EBSD) Wisniewski, Wolfgang; Saager, Stefan; Böbenroth, Andrea; Rüssel, Christian | Journal Article |
2017 | Flexible thin film pH sensor based on low-temperature atomic layer deposition Jakob, Markus H.; Gutsch, Sebastian; Chatelle, Claire; Krishnaraja, Abinaya; Fahlteich, John; Weber, Wilfried; Zacharias, Margit | Journal Article |
2017 | FMC5/FLX2-2 - Fabrication of thin-film coatings on large size ultra-thin glass for flexible devices Junghähnel, Manuela; Preußner, Thomas; Westphalen, Jasper; Mogck, Stefan | Conference Paper |
2017 | Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik. Jahresbericht 2016/2017 | Annual Report |
2017 | Giving films a smoother profile Fichtner, Juliane; Günther, Steffen; Butschkau, Benjamin | Journal Article, Conference Paper |
2017 | Hierarchical columnar silicon anode structures for high energy density lithium sulfur batteries Piwko, Markus; Kuntze, Thomas; Winkler, Sebastian; Straach, Steffen; Härtel, Paul; Althues, Holger; Kaskel, Stefan | Journal Article |
2017 | Highly stable transparent conductive coatings on ultra-thin glass for flexible devices Junqhaehnel, M.; Weller, S.; Gebel, T.; Skorupa, W.; Schumann, T. | Conference Paper |
2017 | Highly stable transparent conductive coatings on ultra-thin glass for flexible devices Junghaehnel, M.; Weller, S.; Gebel, T.; Skorupa, W.; Schumann, T. | Conference Paper |
2017 | Hollow-cathode activated PECVD for the high-rate deposition of permeation barrier films Top, Michiel; Schönfeld, Steffen; Fahlteich, John; Bunk, Sebastian; Kühnel, Thomas; Straach, Steffen; Hosson, Jeff T. de | Journal Article |
2017 | Influence of the applied power on the barrier performance of silicon-containing plasma polymer coatings using a hollow cathode-activated PECVD process Top, Michiel; Fahlteich, John; Hosson, Jeff T.M. de | Journal Article |
2017 | An investigation of slot-die coated layers in evaporated small molecule organic light-emitting diodes targeting large area and flexible applications Mühl, S. | Dissertation |
2017 | Kreatives Wärmepumpen-Konzept heizt und kühlt gleichzeitig Obenaus, Gerd | Journal Article |
2017 | Large area precision coatings by pulse magnetron sputtering Frach, Peter; Glöß, Daniel; Goschurny, Thomas; Drescher, Andy; Hartung, Ullrich; Bartzsch, Hagen; Heisig, Andreas; Grune, Harald; Leischnig, L.; Leischnig, S.; Bundesmann, C. | Conference Paper |
2017 | Long-term stable surface modification of DLC coatings Gotzmann, Gaby | Journal Article |
2017 | Mechanical properties of ZTO, ITO, and a-Si:H multilayer films for flexible thin film solar cells Hengst, Claudia; Menzel, Siegfried; Rane, K. Gayatri; Smirnov, Vladimir; Wilken, Karen; Leszczynska, Barbara; Fischer, Dustin; Prager, Nicole | Journal Article |
2017 | Next steps in OLED lighting May, Christian | Journal Article |
2017 | OLED microdisplays in near-to-eye applications: Challenges and solutions Vogel, Uwe; Richter, Bernd; Wartenberg, Philipp; König, Peter; Hild, Olaf R.; Fehse, Karsten; Schober, Matthias; Bodenstein, Elisabeth; Beyer, B. | Conference Paper |
2017 | Organische Photosensoren mit spektraler Anpassung Jahnel, M.S. | Dissertation |
2017 | P-175: Direct electron beam micropatterning and thermal annealing of organic light emitting devices Bodenstein, Elisabeth; Saager, Stefan; Metzner, Mario; Hoffmann, Marie; Hild, Olaf-Rüdiger; Metzner, Christoph; Vogel, Uwe | Journal Article |
2017 | Plasma-assisted reactive high-rate vapor deposition of yttria-stabilized zirconia using electron beam evaporation and spotless vacuum arc Scheffel, Bert; Zywitzki, Olaf; Metzner, Christoph | Journal Article |
2017 | Processing on flexible glass - challenges and opportunities Junghähnel, Manuela; Westphalen, Jasper | Journal Article, Conference Paper |
2017 | Roll-to-roll thin film coating on fluoropolymer webs - Status, challenges and applications Fahlteich, John; Steiner, Cindy; Schiller, Nicolas; Miesbauer, Oliver; Noller, Klaus; Deichmann, Karl-Joachim; Mirza, Mark; Amberg-Schwab, Sabine | Journal Article |
2017 | Roll-to-roll thin film coating on fluoropolymer webs - status, challenges and applications Fahlteich, John; Steiner, Cindy; Schiller, Nicolas; Miesbauer, Oliver; Noller, Klaus; Deichmann, Karl-Joachim; Mirza, Mark; Amberg-Schwab, Sabine | Conference Paper |
2017 | Structure and properties of magnetron-sputtered manganese ferrite films Fietzke, Fred; Zywitzki, Olaf | Journal Article, Conference Paper |
2017 | Thin film organic photodiodes on complementary metal-oxide-semiconductor (CMOS) materials Structured via orthogonal photolithography for sensor applications Jahnel, M.; Schober, M.; Fehse, K.; Hild, O.; Vogel, U. | Conference Paper |
2017 | Thin-Film Deposition on Flexible Glass by Plasma Processes Junghähnel, Manuela; Fahlteich, John | Book Article |
2017 | Time-sequential working wavelength-selective filter for flat autostereoscopic displays Barré, René de la; Bartmann, Roland; Jurk, Silvio; Kuhlmey, Mathias; Duckstein, Bernd; Seeboth, Arno; Lötzsch, Detlef; Rabe, Christian; Frach, Peter; Bartzsch, Hagen; Gittner, Matthias; Bruns, Stefan; Schottner, Gerhard; Fischer, Johanna | Journal Article |
2017 | Die Trocknung - Kostentreiber und Stiefkind der Reinigung? Rögner, Frank-Holm | Journal Article |
2017 | Untersuchungen zum Einsatz des Elektronenstrahls bei der Herstellung passivierter Solarzellen-Rückseitenkontakte Graffel, B. | Dissertation |
2017 | Vacuum based roll-to-roll oled coating for pilot level Mogck, S.; Hauptmann, J.; Keibler, C.; May, C. | Conference Paper |
2017 | Verfahren zum Abscheiden einer CdTe-Schicht auf einem Substrat Morgner, Henry; Metzner, Christoph; Hirsch, Daniel; Zywitzki, Olaf; Decker, Ludwig | Patent |
2017 | Verfahren zum Ausbilden einer Schicht mit hoher Lichttransmission und/oder niedriger Lichtreflexion Junghähnel, Manuela; Preußner, Thomas; Hartung, Ullrich | Patent |
2017 | Verfahren zum Beaufschlagen einer Flüssigkeit mit beschleunigten Elektronen Kubusch, Jörg; Portillo Casado, Javier; Rögner, Frank-Holm; Schönfelder, Jessy | Patent |
2017 | Verfahren zum Einstellen der Emission einer OLED Bodenstein, Elisabeth; Metzner, Christoph; Saager, Stefan; Schober, Matthias; Vogel, Uwe | Patent |
2017 | Verfahren zum Herstellen eines Schichtverbundes bestehend aus einer Kunststofffolie und einer darauf abgeschiedenen Schicht Drese, Hendrik; Fahlteich, John; Schwarz, Wolfgang; Rögner, Frank-Holm; Schiller, Nicolas | Patent |
2017 | Verfahren zur Herstellung einer feldförmigen, homogenen Rod-Anordnung und deren Verwendung Bartzsch, Hagen; Frach, Peter; Barth, Stephan; Eng, Lukas; Derenko, Susan | Patent |
2017 | Verfahren zur Herstellung einer flexiblen Rod-Array-Anordnung und Rod-Array-Anordnung Bartzsch, Hagen; Frach, Peter; Barth, Stephan; Eng, Lukas; Derenko, Susan | Patent |
2017 | Vorrichtung zum Unterstützen des Sprach- und/oder Hörtrainings nach einer Cochlear Implantation Vogel, Uwe; Zahnert, Thomas | Patent |
2016 | Adjustment of plasma properties in magnetron sputtering by pulsed powering in unipolar/bipolar hybrid pulse mode Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Gittner, Mathias; Labitzke, Rainer | Journal Article, Conference Paper |
2016 | Band structure engineering in organic semiconductors Schwarze, Martin; Tress, Wolfgang; Beyer, Beatrice; Gao, Feng; Scholz, Reinhard; Poelking, Karl; Ortstein, Katrin; Leo, Karl | Journal Article |
2016 | Bauteil zum Detektieren elektromagnetischer Strahlung Richter, Bernd; Wartenberg, Philipp; Fehse, Karsten; Jahnel, Matthias | Patent |
2016 | Characterization of stochastic nanostructures on ethylene tetrafluoroethylene films Steiner, Cindy; Fahlteich, John | Conference Paper |
2016 | Coatings with a High Surface Roughness Prepared by a Co-sputtering Method Using Dual Rotatable Magnetrons Preußner, Thomas; Junghähnel, Manuela; Hartung, Ullrich; Kopte, Torsten | Conference Paper |
2016 | Composition and mechanical properties of B-C-W and B-C-Ti thin films prepared by pulse magnetron sputtering Friedemann, Martin; Klostermann, Heidrun | Journal Article, Conference Paper |
2016 | Correlation of PVD deposition parameters with electrical and mechanical properties of coated thin-glass compounds Lorenz, G.; Naumann, F.; Westphalen, J.; Weller, S.; Junghähnel, M. | Conference Paper |
2016 | Deposition of rutile TiO2 films by pulsed and high power pulsed magnetron sputtering Schönberger, W.; Bartzsch, H.; Schippel, S.; Bachmann, T. | Journal Article, Conference Paper |
2016 | Electron beam crystallization of amorphous silicon thin films in the solid phase regime and assisted simulations by finite element method Saager, Stefan | Conference Paper |
2016 | Electron Beam Induced High-Resolution Modification of OLED Emission Bodenstein, Elisabeth; Saager, Stefan; Schober, Matthias; Metzner, Christoph; Vogel, Uwe | Conference Paper, Journal Article |
2016 | Elektronenstrahlsterilisation elektronischer Bauteile Schönfelder, Jessy; Rögner, Frank-Holm | Journal Article |
2016 | Encapsulation of organic electronics Fahlteich, John; Glawe, Andrea; Vacca, Paolo | Book Article |
2016 | Energy Harvesting auf der Basis piezoelektrischer AlN- und AlScN -Dünnschichten Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Suchaneck, Gunnar; Gerlach, Gerald | Conference Paper |
2016 | Entwicklung und Charakterisierung einer Elektron-Zyklotron-Resonanz-Ionenquelle mit integriertem Sputtermagnetron für die Erzeugung intensiver Ströme einfach geladener Aluminiumionen Weichsel, T. | Dissertation |
2016 | Exploiting the potential of additive technologies for advanced micro-cultivation solutions for microalgae and plant cells Krujatz, F.; Lode, A.; Gelinsky, M.; Fehse, K.; Jahnel, M.; Bley, T.; Steingroewer, J. | Abstract |
2016 | Exploiting the potential of OLED-based photo-organic sensors for biotechnological applications Krujatz, F.; Hild, O.; Fehse, K.; Jahnel, M.; Werner, A.; Bley, T. | Journal Article |
2016 | Extended intermolecular interactions governing photocurrent-voltage relations in ternary organic solar cells Tress, Wolfgang; Beyer, Beatrice; Astani, Negar Ashari; Gao, Feng; Meloni, Simone; Rothlisberger, Ursula | Journal Article |
2016 | Fabrication technologies for flexible OLED lighting modules May, C. | Conference Paper |
2016 | Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik. Jahresbericht 2015/2016 | Annual Report |
2016 | Heat transfer model of dropwise condensation and experimental validation for surface with coating and groove at low pressure Lu, Chie-Hung; Beckmann, Michael; Unz, Simon; Glöß, Daniel; Frach, Peter; Holst, E.; Lasagni, Andrés-Fabián; Bieda, Matthias | Journal Article |
2016 | High-productive aluminum deposition of back contacts for hetero-junction solar cells by electron beam evaporation Heinß, Jens-Peter; Schlemm, Hermann; Wünsch, Frank | Conference Paper |
2016 | The impact of oxygen inlet during close-spaced sublimation process on the as-deposited and chlorine treated microstructure of CdTe layers Hirsch, D.; Zywitzki, O.; Modes, T.; Morgner, H.; Späth, B.; Siepchen, B.; Drost, C.; Kraft, C.; Krishnakumar, V.; Metzner, C. | Conference Paper |
2016 | Importance of interface diffusion and climate in defect dominated moisture ultrabarrier applications Nehm, Frederik; Dollinger, Felix; Fahlteich, John; Klumbies, Hannes; Leo, Karl; Müller-Meskamp, Lars | Journal Article |
2016 | Influence of thin-film properties on the reliability of flexible glass Westphalen, J.; Junghähnel, M.; Weller, S.; Lorenz, G.; Naumann, F. | Conference Paper |
2016 | Light management in flexible thin-film solar cells on transparent plastic substrates Wilken, Karen; Paetzold, Ulrich W.; Meier, Matthias; Ablayev, Gani M.; Terukov, Evgeny I.; Prager, Nicole; Fahland, Matthias; Finger, Friedhelm; Smirnov, Vladimir | Journal Article |
2016 | Magnetron sputtering of piezoelectric AlN and AlScN thin films and their use in energy harvesting applications Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Modes, Thomas; Zywitzki, Olaf; Suchaneck, Gunnar; Gerlach, Gerald | Journal Article |
2016 | MicrOLED-photobioreactor: Design and characterization of a milliliter-scale Flat-Panel-Airlift-photobioreactor with optical process monitoring Krujatz, Felix; Fehse, Karsten; Jahnel, Matthias; Gommel, Christoph; Schurig, Carsten; Lindner, Frank; Bley, Thomas; Weber, Jost; Steingroewer, Juliane | Journal Article |
2016 | New vacuum coating technologies for metal strips and foils Metzner, Christoph; Heinß, Jens-Peter; Scheffel, Bert; Morgner, Henry | Conference Paper |
2016 | OLED microdisplays – enabling advanced near-to-eye displays, sensors, and beyond Vogel, Uwe; Richter, Bernd; Hild, Olaf-Rüdiger; Wartenberg, Philipp; Fehse, Karsten; Schober, Matthias; Brenner, Stephan; Baumgarten, Judith | Conference Paper, Journal Article |
2016 | OLED microdisplays: Advancing virtual and augmented reality smart glasses of today and tomorrow Vogel, U. | Journal Article |
2016 | OLED thin film fabrication from poorly soluble terbium o-phenoxybenzoate through soluble mixed-ligand complexes Kalyakina, Alena S.; Utochnikova, Valentina V.; Sokolova, Elena Y.; Vashchenko, Andrey A.; Lepnev, Leonid S.; Deun, Rik Van; Trigub, Alexander L.; Zubavichus, Yan V.; Hoffmann, Michael; Mühl, Susan; Kuzmina, Natalia P. | Journal Article |
2016 | On/off-ratio dependence of bulk hetero junction photodiodes and its impact on electro-optical properties Jahnel, Matthias; Thomschke, Michael; Ullbrich, Sascha; Fehse, Karsten; Deok An, Jong; Park, Hoon; Leo, Karl; Im, Chan; Kirchhoff, Volker | Journal Article |
2016 | Pathogens inactivated by low-energy-electron irradiation maintain antigenic properties and induce protective immune responses Fertey, Jasmin; Bayer, Lea; Grunwald, Thomas; Pohl, Alexandra; Beckmann, Jana; Gotzmann, Gaby; Portillo Casado, Javier; Schönfelder, Jessy; Rögner, Frank-Holm; Wetzel, Christiane; Thoma, Martin; Bailer, Susanne M.; Hiller, Ekkehard; Rupp, Steffen; Ulbert, Sebastian | Journal Article |
2016 | Precision optical coatings on large substrates by reactive magnetron sputtering Frach, P.; Glöß, D.; Bartzsch, H.; Goschurny, T.; Drescher, A.; Gottfried, C.; Liebig, J.-S. | Conference Paper |
2016 | Preparation of a gradient SiO2 antireflective coating by a co-sputtering method using a dual rotatable magnetron system Preußner, Thomas; Junghähnel, Manuela; Hartung, Ullrich; Kopte, Torsten; Fahlteich, John | Conference Paper |
2016 | Present status of Roll-to-Roll fabrication for OLED lighting Stanel, Michael; Wanski, Tomasz; Mogck, Stefan | Conference Paper |
2016 | Reactive high-rate deposition of titanium oxide coatings using electron beam evaporation, spotless arc and dual crucible Scheffel, Bert; Modes, Thomas; Metzner, Christoph | Journal Article |
2016 | The road from S2S to R2R - status, risks and visions for processing ultra-thin glass Junghähnel, Manuela | Conference Paper |
2016 | Roll to roll deposition of silicon nitride permeation barrier coatings using rotatable magnetrons Fahland, M.; Fahlteich, J.; Himmler, A.; Vogt, T.; Zywitzki, O.; Linss, V. | Conference Paper |
2016 | Roll-to-Roll Thin Film Coating on Fluoropolymer Webs - Status, Challenges and Applications Fahlteich, J.; Steiner, C.; Schiller, N.; Miesbauer, O.; Noller, K.; Deichmann, K.J.; Mirza, M.; Amberg-Schwab, S. | Conference Paper |
2016 | Surface modification of polyethylene terephthalate (PET) and oxide coated PET for adhesion improvement Fichtner, Juliane; Beck, Tobias; Simon, Frank | Conference Paper |
2016 | Surface modification of polyethylene terephthalate (PET) and oxide coated PET for adhesion improvement Fichtner, Juliane; Beck, Tobias; Günther, Steffen | Journal Article |
2016 | A systematic investigation of permeation barriers for flexible dye-sensitized solar cells Rossi, Francesca de; Mincuzzi, Girolamo; Giacomo, Francesco di; Fahlteich, John; Amberg-Schwab, Sabine; Noller, Klaus; Brown, Thomas M. | Journal Article |
2016 | Temperature control of metal strip during high-rate vacuum coating Heinß, Jens-Peter; Lang, Peter; Ruppelt, Patrick | Journal Article, Conference Paper |
2016 | Towards tuneable thin film filters with the use of liquid crystals Bartzsch, H.; Frach, P.; Gittner, M.; Bruns, S.; Vergöhl, M.; Seeboth, A.; Lötzsch, D.; Rabe, C. | Conference Paper |
2016 | Vacuum plasma treatment and coating of fluoropolymer webs - challenges and applications Steiner, Cindy; Fahlteich, John | Conference Paper |
2016 | Verfahren zum Abscheiden eines transparenten Mehrschichtsystems mit Kratzschutzeigenschaften Bartzsch, Hagen; Täschner, Kerstin; Frach, Peter | Patent |
2016 | Verfahren zum Reduzieren der Schmutzhaftung an einem Substrat Günther, Steffen; Steiner, Cindy; Kubusch, Jörg | Patent |
2016 | Vorrichtung zum Bedampfen eines Substrates innerhalb einer Vakuumammer Scheffel, Bert; Metzner, Christoph; Morgner, Henry; Händel, Frank; Finkenwirth, Bernd | Patent |
2016 | Vorrichtung zum Erzeugen eines Hohlkathodenbogenentladungsplasmas Morgner, Henry; Metzner, Christoph; Decker, Ludwig; Werner, Torsten; Flaske, Henrik | Patent |