Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Digital Manufacturing Technologies for the Development of Smart Sensors and Electronics for Agro-Industrial systems
Fritsch, Marco; Kabla, Ayala; Kapadia, Sunil; Zichner, Ralf; Wissmeier, Lena; Shaly, Neil; Samotaev, Nikolay
Report
2021Low-power emerging memristive designs towards secure hardware systems for applications in internet of things
Du, Nan; Schmidt, Heidemarie; Polian, Ilia
Journal Article
2021Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride
Meinel, K.; Stoeckel, C.; Melzer, M.; Zimmermann, S.; Forke, R.; Hiller, K.; Otto, T.
Journal Article
2021Prospects for application of ferroelectric manganites with controlled vortex density
Schmidt, H.
Journal Article
2021Reactive Bonding
Vogel, Klaus; Braun, Silvia; Hofmann, Christian; Weiser, Mathias; Wiemer, Maik; Otto, Thomas; Kuhn, Harald
Book Article
2021Smart sensor systems for extremely harsh environments
Kappert, Holger; Schopferer, Sebastian; Döring, Ralf; Ziesche, Steffen; Olowinsky, Alexander; Naumann, Falk; Jaegle, Martin; Ostmann, Andreas
Conference Paper
2021Special issue: International conference on applied system innovation (ICASI 2018)
Young, S.-J.; Meen, T.-H.; Khosla, A.; Michel, B.
Journal Article, Conference Paper
20202D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride
Meinel, K.; Melzer, M.; Stoeckel, C.; Shaporin, A.; Forke, R.; Zimmermann, S.; Hiller, K.; Otto, T.; Kuhn, H.
Journal Article
2020Advanced Packaging Cost Reduction by Selective Copper Metallization
Mavliev, R.; Gottfried, K.; Rhoades, R.
Conference Paper
2020Analysen der Lotermüdung an montierten Testbaugruppen unter Thermowechselbeanspruchungen
Dudek, R.; Hildebrandt, M.; Rzepka, S.; Doering, R.; Scheiter, L.; Tegehall, P.-E.; Zhang, M.; Ortmann, R.W.
Conference Paper
2020Analysis of Solder Fatigue on Mounted Test Assemblies under Thermal Cycling Loads
Dudek, R.; Hildebrandt, M.; Kreyßig, K.; Rzepka, S.; Döring, R.; Scheiter, L.; Zhang, M.; Ortmann, R.W.
Conference Paper
2020Calculation technique of diffuse reflectance spectra using an ensemble of damped harmonic oscillators model for substances identification
Anfimov, D.R.; Fufurin, I.L.; Golyak, I.S.; Tabalina, A.S.; Kurth, S.
Conference Paper
2020Characteristics of the Results of a Theoretical Analysis of Energy and Electron Transfer Processes in Multimolecular Nanoassemblies
Zenkevich, E.I.; Kilin, D.; Borczyskowski, C. von; Zahn, D.R.T.
Conference Paper, Journal Article
2020Charged domains in ferroelectric, polycrystalline yttrium manganite thin films resolved with scanning electron microscopy
Rayapati, V.R.; Bürger, D.; Du, N.; Kowol, C.; Blaschke, D.; Stöcker, H.; Matthes, P.; Patra, R.; Skorupa, I.; Schulz, S.E.; Schmidt, H.
Journal Article
2020Co-sputtering of Al1−xScxN thin films on Pt(111): a characterization by Raman and IR spectroscopies
Solonenko, D.; Lan, C.; Schmidt, C.; Stoeckel, C.; Hiller, K.; Zahn, D.R.T.
Journal Article
2020Control of magneto-optical properties of cobalt-layers by adsorption of α-helical polyalanine self-assembled monolayers
Sharma, A.; Matthes, P.; Soldatov, I.; Arekapudi, S.S.P.K.; Böhm, B.; Lindner, M.; Selyshchev, O.; Thi Ngoc Ha, N.; Mehring, M.; Tegenkamp, C.; Schulz, S.E.; Zahn, D.R.T.; Paltiel, Y.; Hellwig, O.; Salvan, G.
Journal Article
2020Cover Feature: Ferrocenyl‐Pyrenes, Ferrocenyl‐9,10‐Phenanthrenediones, and Ferrocenyl‐9,10‐Dimethoxyphenanthrenes
Preuß, A.; Notz, S.; Kovalski, E.; Korb, M.; Blaudeck, T.; Hu, X.; Schuster, J.; Miesel, D.; Rüffer, T.; Hildebrandt, A.; Schreiter, K.; Spange, S.; Schulz, S.E.; Lang, H.
Journal Article
2020Crystallization of optically thick films of CoxFe 80-xB20
Sharma, A.; Hoffmann, M.A.; Matthes, P.; Hellwig, O.; Kowol, C.; Schulz, S.E.; Zahn, D.R.T.; Salvan, G.
Journal Article
2020Design of a synthetic jet actuator for flow separation control
Weigel, P.; Schüller, M.; Gratias, A.; Lipowski, M.; Meer, T. ter; Bardet, M.
Journal Article
2020A detailed ellipsometric porosimetry and positron annihilation spectroscopy study of porous organosilicate-glass films with various ratios of methyl terminal and ethylene bridging groups
Rasadujjaman, M.; Wang, Y.; Zhang, L.; Naumov, S.; Attallah, A.G.; Liedke, M.O.; Koehler, N.; Redzheb, M.; Vishnevskiy, A.S.; Seregin, D.S.; Wu, Y.; Zhang, J.; Leu, J.; Wagner, A.; Vorotilov, K.A.; Schulz, S.E.; Baklanov, M.R.
Journal Article
2020Determining adhesion of critical interfaces in microelectronics - A reverse Finite Element Modelling approach based on nanoindentation. Part I
Reuther, G.M.; Albrecht, J.; Pufall, R.; Dudek, R.; Rzepka, S.
Conference Paper
2020Disturbing-free determination of yeast concentration in DI water and in glucose using impedance biochips
Kiani, M.; Du, N.; Vogel, M.; Raff, J.; Hübner, U.; Skorupa, I.; Bürger, D.; Schulz, S.E.; Schmidt, O.G.; Blaschke, D.; Schmidt, H.
Journal Article
2020Far-field prediction combining simulations with near-field measurements for EMI assessment of PCBs
Schroeder, D.; Lange, S.; Hangmann, C.; Hedayat, C.
Book Article
2020Ferrocenyl-Pyrenes, Ferrocenyl-9,10-Phenanthrenediones, and Ferrocenyl-9,10-Dimethoxyphenanthrenes: Charge-Transfer Studies and SWCNT Functionalization
Preuß, A.; Notz, S.; Kovalski, E.; Korb, M.; Blaudeck, T.; Hu, X.; Schuster, J.; Miesel, D.; Rüffer, T.; Hildebrandt, A.; Schreiter, K.; Spange, S.; Schulz, S.E.; Lang, H.
Journal Article
2020Finite Element Simulations and Raman measurements to investigate thermomechanical stress in GaN-LEDs
Conti, F.; Liu, E.; Bhogaraju, S.K.; Wunderle, B.; Elger, G.
Conference Paper
2020Formation and crystallographic orientation of NiSi2-Si interfaces
Fuchs, Florian; Bilal Khan, Muhammad; Deb, Dipjyoti; Pohl, Darius; Schuster, Jörg; Weber, Walter M.; Mühle, Uwe; Löffler, Markus; Georgiev, Yordan M.; Erbe, Artur; Gemming, Sibylle
Journal Article
2020Fraunhofer-Institut für Elektronische Nanosysteme. Jahresbericht 2019
 
Annual Report
2020Gate Spacer Investigation for Improving the Speed of High-Frequency Carbon Nanotube-Based Field-Effect Transistors
Hartmann, M.; Tittmann-Otto, J.; Böttger, S.; Heldt, G.; Claus, M.; Schulz, S.E.; Schröter, M.; Hermann, S.
Journal Article
2020The Impact of Wettability and Surface Roughness on Fluid Displacement and Capillary Trapping in 2‐D and 3‐D Porous Media. 2. Combined Effect of Wettability, Surface Roughness, and Pore Space Structure on Trapping Efficiency in Sand Packs and Micromodels
Zulfiqar, B.; Vogel, H.; Ding, Y.; Golmohammadi, S.; Kuechler, M.; Reuter, D.; Geistlinger, H.
Journal Article
2020Increased static dielectric constant in ZnMnO and ZnCoO thin films with bound magnetic polarons
Vegesna, S.V.; Bhat, V.J.; Bürger, D.; Dellith, J.; Skorupa, I.; Schmidt, O.G.; Schmidt, H.
Journal Article
2020Induktives Bonden in der Mikrosystemtechnik
Fröhlich, A.; Hofmann, C.
Journal Article
2020Induktives Fügen in der Mikrosystemtechnik
Hofmann, C.; Fröhlich, A.; Kroll, M.
Journal Article
2020Inkjet Printing of Bioresorbable Materials for Manufacturing Transient Microelectronic Devices
Mitra, K.Y.; Willert, A.; Chandru, R.; Baumann, R.R.; Zichner, R.
Journal Article
2020Investigation of the Surface Equivalence Principle on a Metal Surface for a Near-Field to Far-Field Transformation by the NFS3000
Lange, S.; Schroeder, D.; Hedayat, C.; Hangmann, C.; Otto, T.; Hilleringmann, U.
Conference Paper
2020The Limits of the Post‐Growth Optimization of AlN Thin Films Grown on Si(111) via Magnetron Sputtering
Solonenko, D.; Schmidt, C.; Stoeckel, C.; Hiller, K.; Zahn, D.R.T.
Journal Article
2020Macroheterocyclic Compounds - a Key Building Block in New Functional Materials and Molecular Devices
Koifman, O.I.; Ageeva, T.A.; Beletskaya, I.P.; Averin, A.D.; Yakushev, A.A.; Tomilova, L.G.; Dubinina, T.V.; Tsivadze, A.Y.; Gorbunova, Y.G.; Martynov, A.G.; Konarev, D.V.; Khasanov, S.S.; Lyubovskaya, R.N.; Lomova, T.N.; Korolev, V.V.; Zenkevich, E.I.; Blaudeck, T.; Borczyskowski, C. von; Zahn, D.R.T.; Mironov, A.F.; Bragina, N.A.; Ezhov, A.V.; Zhdanova, K.A.; Stuzhin, P.A.; Pakhomov, G.L.; Rusakova, N.V.; Semenishyn, N.N.; Smola, S.S.; Parfenyuk, V.I.; Vashurin, A.S.; Makarov, S.V.; Dereven’kov, I.A.; Mamardashvili, N.Z.; Kurtikyan, T.S.; Martirosyan, G.G.; Burmistrov, V.A.; Aleksandriiskii, V.V.; Novikov, I.V.; Pritmov, D.A.; Grin, M.A.; Suvorov, N.V.; Tsygankov, A.A.; Fedorov, A.Y.; Kuzmina, N.S.; Nyuchev, A.V.; Otvagin, V.F.; Kustov, A.V.; Belykh, D.V.; Berezin, D.B.; Solovieva, A.B.; Timashev, P.S.; Milaeva, E.R.; Gracheva, Y.A.; Dodokhova, M.A.; Safronenko, A.V.; Shpakovsky, D.B.; Syrbu, S.A.; Gubarev, Y.A.; Kiselev, A.N.; Koifman, M.O.; Lebedeva, N.S.; Yurina, E.S.
Journal Article
2020Microbial Community Distribution and Core Microbiome in Successive Wound Grades of Individuals with Diabetic Foot Ulcers
Jnana, Apoorva; Muthuraman, Vigneshwaran; Varghese, Vinay Koshy; Chakrabarty, Sanjiban; Murali, Thokur Sreepathy; Ramachandra, Lingadakai; Shenoy, Kallya Rajgopal; Rodrigues, Gabriel Sunil; Prasad, Seetharam Shiva; Dendukuri, Dhananjaya; Morschhauser, A.; Nestler, Joerg; Peter, Harald; Bier, Frank F.; Satyamoorthy, Kapaettu
Journal Article
2020Nanoindentation as part of material characterization of thin metal films
Jöhrmann, N.; Ecke, R.; Wunderle, B.
Conference Paper
2020On the feasibility of fan-out wafer-level packaging of capacitive micromachined ultrasound transducers (CMUT) by using inkjet-printed redistribution layers
Roshanghias, A.; Dreissigacker, M.; Scherf, C.; Bretthauer, C.; Rauter, L.; Zikulnig, J.; Braun, T.; Becker, K.-F.; Rzepka, S.; Schneider-Ramelow, M.
Journal Article
2020On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes
Haase, M.; Melzer, M.; Lang, N.; Ecke, R.; Zimmermann, S.; Helden, J.-P.H. van; Schulz, S.E.
Journal Article
2020Parylene C Based Adhesive Bonding on 6" and 8" Wafer Level for the Realization of Highly Reliable and Fully Biocompatible Microsystems
Selbmann, F.; Baum, M.; Meinecke, C.; Wiemer, M.; Otto, T.; Joseph, Y.
Abstract
2020Parylene C Based Adhesive Bonding on 6" and 8" Wafer Level for the Realization of Highly Reliable and Fully Biocompatible Microsystems
Selbmann, F.; Baum, M.; Meinecke, C.; Wiemer, M.; Otto, T.; Joseph, Y.
Conference Paper
2020PHM features for large circuit boards to be implemented into electric drivetrain applications
Otto, A.; Kaulfersch, E.; Singh, P.; Romano, C.; Hildebrandt, M.; Rzepka, S.
Conference Paper
2020A Platform for Fostering Industry-Academia Collaboration
Otto, T.
Journal Article
2020Power Cycling of SiC-MOSFET Single-Chip Modules with Additional Measurement Cycles for Life End Determination
Wagner, F.; Reber, G.; Rittner, M.; Guyenot, M.; Nitzsche, M.; Wunderle, B.
Conference Paper
2020Process monitoring and impulse detection in face milling using capacitive acceleration sensors based on MEMS
Clauß, B.; Meinecke, C.; Günther, W.; Akthari, S.; Albers, J.; Forke, R.; Streit, P.; Reuter, D.; Schubert, A.
Journal Article, Conference Paper
2020Quantifying the influence of graphene film nanostructure on the macroscopic electrical conductivity
Rizzi, L.; Wijaya, A.F.; Palanisamy, L.V.; Schuster, J.; Koehne, M.; Schulz, S.E.
Journal Article
2020Reliability Assessment of Ag Sintered Joints Using a SiC Semiconductor and Determination of Failure Mechanism in the Field of Power Electronics
Schaal, M.; Klingler, M.; Metais, B.; Grueninger, R.; Hoffmann, S.; Wunderle, B.
Conference Paper
2020Reliability Modelling for Different Wire Bonding Technologies based on FEA and Nano-Indentation
Dudek, R.; Anu, M.; Albrecht, J.; Scherf, C.; Rzepka, S.; Subbiah, N.; Wilde, J.
Conference Paper
2020Ruthenium(II) MOCVD Precursors for Phosphorus‐Doped Ruthenium Layer Formation
Preuß, A.; Tamuliene, J.; Madajska, K.; Szymanska, I.B.; Korb, M.; Rüffer, T.; Jeschke, J.; Melzer, M.; Bankwitz, J.; Schulz, S.E.; Lang, H.
Journal Article
2020Selective Heat Input for Low Temperature Metallic Wafer Level Bonding
Wiemer, M.; Hofmann, C.; Vogel, K.
Journal Article, Conference Paper
2020Selective induction heating of metallic microstructures for wafer-level MEMS packaging
Fröhlich, A.; Hofmann, C.; Rochala, P.; Kimme, J.; Kroll, M.; Kräusel, V.
Journal Article, Conference Paper
2020Selective Metal Deposition to Increase Productivity
Rhoades, R.L.; Mavliev, R.; Gottfried, K.
Conference Paper
2020Stress Prognostics for Encapsulated Standard Packages by Neural Networks Using Data from in-situ Condition Monitoring during Thermal Shock Tests
Majd, M.; Meszmer, P.; Priscaru, A.; Gromala, P.J.; Wunderle, B.
Conference Paper
2020Synthesis of β-Ketoiminato Copper(II) Complexes and their Use in Copper Deposition
Preuß, A.; Korb, M.; Rüffer, T.; Bankwitz, J.; Georgi, C.; Jakob, A.; Schulz, S.E.; Lang, H.
Journal Article
2020System integration and analysis of SiC-based high power inverter with up to 250 kW and switching slopes of up to 50 kV/μs for novel powertrain
Doncker, R.W.de; Fuchs, L.; Hepp, M.; Luedecke, C.; Meyne, C.; Nisch, A.; Otto, A.; Reum, T.; Rzepka, S.; Strenger, C.; Uhlemann, A.; Vanegas, O.; Wondrak, W.
Conference Paper
2020The Systematic Study of Fan-Out Wafer Warpage Using Analytical, Numerical and Experimental Methods
Gadhiya, G.; Rzepka, S.; Otto, T.; Kersjes, S.; Fernandes, F.
Conference Paper
2020Theoretical Analysis of Energy and Electron Transfer Processes in Multimolecular Nanoassemblies
Zenkevich, E.I.; Kilin, D.; Borczyskowski, C. von; Zahn, D.R.T.
Journal Article, Conference Paper
2020Thermal kinetics of free volume in porous spin-on dielectrics: Exploring the network- and pore-properties
Attallah, A.G.; Koehler, N.; Liedke, M.O.; Butterling, M.; Hirschmann, E.; Ecke, R.; Schulz, S.E.; Wagner, A.
Journal Article
2020Thermomechanical stress in GaN-LEDs soldered onto Cu substrates studied using Finite Element Method and Raman spectroscopy
Liu, E.; Conti, F.; Bhogaraju, S.K.; Signorini, R.; Pedron, D.; Wunderle, B.; Elger, G.
Journal Article, Conference Paper
2020Towards Bacteria Counting in DI Water of Several Microliters or Growing Suspension Using Impedance Biochips
Kiani, M.; Tannert, A.; Du, N.; Hübner, U.; Skorupa, I.; Bürger, D.; Zhao, X.; Blaschke, D.; Rebohle, L.; Cherkouk, C.; Neugebauer, U.; Schmidt, O.G.; Schmidt, H.
Journal Article
2020Tunable Magnetic Vortex Dynamics in Ion-Implanted Permalloy Disks
Ramasubramanian, L.; Kákay, A.; Fowley, C.; Yildirim, O.; Matthes, P.; Sorokin, S.; Titova, A.; Hilliard, D.; Böttger, R.; Hübner, R.; Gemming, S.; Schulz, S.E.; Kronast, F.; Makarov, D.; Fassbender, J.; Deac, A.
Journal Article
2020Verbesserte Prozessüberwachung durch hochsensitive CNT-Kraftaufnehmer
Bonitz, Jens; Hamm, Lucas; Müller, Peter; Hermann, Sascha
Journal Article
2020Virtual Prototyping, Design for Reliability, and Qualification for a Full SiP Product Portfolio of a FOWLP Line
Gadhiya, G.; Kuisma, H.; Cardoso, A.; Brämer, B.; Rzepka, S.; Otto, T.
Conference Paper
2020Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir
Franz, M.; Junghans, R.; Schmitt, P.; Szeghalmi, A.; Schulz, S.E.
Journal Article
2020Wafer-level vacuum-packaged translatory MEMS actuator with large stroke for NIR-FT spectrometers
Sandner, Thilo; Gaumont, Eric; Graßhoff, Thomas; Rieck, Andreas; Seifert, T.; Auböck, Gerald; Grahmann, Jan
Journal Article
2020Water-Based Primary Cell for Powering of Wireless Sensors
Petrov, D.; Hilleringmann, U.
Conference Paper
2020Zuverlässigkeitsstudien an silbergesinterten leistungselektronischen Modulen ohne Nutzung von DCB-Substraten
Subbiah, N.; Hamza, A.; Wilde, J.; Mathew, A.; Dudek, R.
Conference Paper
2019Accelerated Pump Out Testing for Thermal Greases
Wunderle, B.; May, D.; Heilmann, J.; Arnold, J.; Hirscheider, J.; Li, Y.; Bauer, J.; Schacht, R.; Abo Ras, M.
Conference Paper
2019Advanced Characterization Methods for Electrical and Sensoric Components and Devices at the Micro and Nano Scales
Sheremet, E.; Meszmer, P.; Blaudeck, T.; Hartmann, S.; Wagner, C.; Ma, B.; Hermann, S.; Wunderle, B.; Schulz, S.E.; Hietschold, M.; Rodriguez, R.D.; Zahn, D.R.T.
Journal Article
2019Affordable and safe high performance vehicle computers with ultra-fast on-board ethernet for automated driving
Hager, M.; Gromala, P.; Wunderle, B.; Rzepka, S.
Conference Paper
2019Ar+ ions irradiation induced memristive behavior and neuromorphic computing in monolithic LiNbO3 thin films
Pan, X.; Shuai, Y.; Wu, C.; Zhang, L.; Guo, H.; Cheng, H.; Peng, Y.; Qiao, S.; Luo, W.; Wang, T.; Sun, X.; Zeng, H.; Zhang, J.; Zhang, W.; Ou, X.; Du, N.; Schmidt, H.
Journal Article
2019Assessment of FOWLP process dependent wafer warpage using parametric FE study
Gadhiya, Ghanshyam; Brämer, Birgit; Rzepka, Sven; Otto, Thomas
Conference Paper
2019A β-ketoiminato palladium(II) complex for palladium deposition
Preuß, A.; Korb, M.; Rüffer, T.; Bankwitz, J.; Georgi, C.; Jakob, A.; Schulz, S.E.; Lang, H.
Journal Article
2019BEoL Cracking Risks due to Manufacturing Introduced Residual Stresses
Auersperg, J.; Auerswald, E.; Vogel, D.; Rzepka, S.
Conference Paper
2019Beschleunigungssensoren mit großer Bandbreite und geringer Leistungsaufnahme für industrielle Anwendungen
Forke, R.; Hiller, K.; Küchler, M.; Hahn, S.; Weidlich, S.; Konietzka, S.; Motl, T.; Praedicow, A.; Otto, T.
Conference Paper
2019Carbon Nanotubes for Mechanical Sensor Applications
Wagner, C.; Blaudeck, T.; Meszmer, P.; Böttger, S.; Fuchs, F.; Hermann, S.; Schuster, J.; Wunderle, B.; Schulz, S.E.
Journal Article
2019Characterisation of MOS transistors as an electromechanical transducer for stress
Hafez, M.; Haas, S.; Loebel, K.-U.; Reuter, D.; Ramsbeck, M.; Schramm, M.; Horstmann, J.-T.; Otto, T.
Journal Article
2019A Combined Methodology to Include System Effects in Board-Level Stress Simulations
Dudek, R.; Hildebrandt, M.; Rzepka, S.; Döring, R.; Scheiter, L.; Tröger, B.; Zhang, M.J.; Ortmann, R.W.
Conference Paper
2019Comparisons of Solder Joints Fatigue Life Predictions and Several Long-Term Testing Results
Dudek, R.; Kreyssig, K.; Rzepka, S.; Novak, M.; Grübl, W.; Frühauf, P.; Weigert, A.
Conference Paper
2019Compliance-current-modulated resistive switching with multi-level resistance states in single-crystalline LiNbO3 thin film
Pan, X.; Shuai, Y.; Wu, C.; Luo, W.; Sun, X.; Zeng, H.; Guo, H.; Yuan, Y.; Zhou, S.; Böttger, R.; Cheng, H.; Zhang, J.; Zhang, W.; Schmidt, H.
Journal Article
2019A Compound Control System for FR4-Based Electromagnetic Scanning Micrograting
Yu, F.; Wen, Q.; Lei, H.; Huang, L.; Wen, Z.
Journal Article
2019Computationally efficient simulation method for conductivity modeling of 2D-based conductors
Rizzi, L.; Zienert, A.; Schuster, J.; Köhne, M.; Schulz, S.E.
Journal Article
2019Concept of the 3rd Generation of Reliability for Electronic Smart Systems
Gromala, P.; Dietz, F.; Rzepka, S.; Han, B.
Conference Paper
2019The Creation of a Validated Scheme for the Automated Optimization of Systems in Package Designs
Gadhiya, Ghanshyam; Brämer, Birgit; Rzepka, Sven; Otto, Thomas; Kuisma, Heikki
Conference Paper
2019Design, Modeling, Fabrication, and Verification of New Multifunctional MEMS/NEMS Components
Freitag, M.; Sauppe, M.; Auerswald, C.; Kriebel, D.; Schmidt, H.; Voigt, S.; Arnold, B.; Markert, E.; Hahn, S.; Hiller, K.; Heinkel, U.; Mehner, J.
Journal Article
2019Developing a process to remove single silicon layers by atomic layer etching
Dittmar, N.; Kuechler, M.; Meinecke, C.; Reuter, D.; Otto, T.
Conference Paper
2019Development of a multi-sensor system for condition monitoring and crash detection of machine tools with rotating spindles
Meinecke, C.; Clauss, B.; Albers, J.; Hoeller, H.; Streit, P.; Forke, R.; Weidlich, S.; Dittrich, C.; Stritzke, B.; Schubert, A.; Hiller, K.; Reuter, D.
Conference Paper
2019Development of synthetic jet actuator array for vortex-flow generation
Lipowski, M.; Bäcker, D.
Conference Paper
2019DNA digestion using immobilized dnase type I in a microfluidic cartridge
Graunitz, J.; Kuhn, S.; Stiehl, C.; Schneemann, M.; Morschhauser, A.; Peter, H.; Bier, F.; Nestler, J.
Conference Paper
2019Doctor blade system for the deposition of thin semiconducting films
Petrov, D.; Meyers, T.; Reker, J.; Hilleringmann, U.
Conference Paper
2019Electrically Controlled Actuation of Strained Nanomembranes
Enderlein, T.; Nestler, J.; Stiehl, C.; Morschhauser, A.; Otto, T.
Journal Article
2019Electroforming-free BiFeO3 switches for neuromorphic computing: Spike-timing dependent plasticity (STDP) and cycle-number dependent plasticity (CNDP)
Kiani, M.; Du, N.; Bürger, D.; Skorupa, I.; Ecke, R.; Schulz, S.E.; Schmidt, H.
Conference Paper
2019Electroforming-free Memristors for Hardware Security Primitives
Du, N.; Kiani, M.; Zhao, X.; Bürger, D.; Schmidt, O.G.; Ecke, R.; Schulz, S.E.; Schmidt, H.
Conference Paper
2019Electroforming-free resistive switching in yttrium manganite thin films by cationic substitution
Rayapai, V.R.; Bürger, D.; Du, N.; Patra, R.; Skorupa, I.; Blaschke, D.; Stöcker, H.; Matthes, P.; Schulz, S.E.; Schmidt, H.
Journal Article
2019Electron transport through NiSi2–Si contacts and their role in reconfigurable field-effect transistors
Fuchs, F.; Gemming, S.; Schuster, J.
Journal Article
2019Evaporation study based on micromodel experiments: Comparison of theory and experiment
Geistlinger, H.; Ding, Y.; Apelt, B.; Schlüter, S.; Küchler, M.; Reuter, D.; Vorhauer, N.; Vogel, H.‐J.
Journal Article
2019Exchange bias and diffusion processes in laser annealed CoFeB/IrMn thin films
Sharma, A.; Hoffmann, M.A.; Matthes, P.; Busse, S.; Selyshchev, O.; Mack, P.; Exner, H.; Horn, A.; Schulz, S.E.; Zahn, D.R.T.; Salvan, G.
Journal Article
2019A flutter-based electromagnetic wind energy harvester: Theory and experiments
Lu, Z.; Wen, Q.; He, X.; Wen, Z.
Journal Article
2019FR4-based electromagnetic scanning micro-grating integrated with an angle sensor for a low-cost NIR micro-spectrometer
Wen, Q.; Lei, H.; Huang, J.; Yu, F.; Huang, L.; Zhang, J.; Li, D.; Peng, Y.; Wen, Z.
Journal Article
2019Fraunhofer-Institut für Elektronische Nanosysteme. Jahresbericht 2018
 
Annual Report
2019Functional carbon nanotubes for MEMS applications: Miniaturized strain sensor and black coating for infrared devices
Böttger, S.; Bonitz, J.; Al-Falahi, F.; Schulz, S.E.; Hermann, S.
Conference Paper
2019Herstellung von neuartigen Reflektorsystemen und Erarbeitung einer systembezogenen Integrationstechnologie für VIS und IR Fabry-Pérot Interferometer (Dissertation)
Helke, C.
: Hiller, K.; Sinzinger, S.
Dissertation
2019Highly Miniaturized MEMS‐Based Test Platforms for Thermo‐Mechanical and Reliability Characterization of Nano‐Functional Elements - Technology and Functional Test Results
Meszmer, P.; Hahn, S.; Hiller, K.; Wunderle, B.
Journal Article
2019Identification of critical stress location on PCBs taking into account the influence of fixations and housing
Pantou, R.; Hildebrandt, M.; Dudek, R.; Rzepka, S.
Conference Paper
2019The Implementation of Semiconductor Based Biosensors Into Point of Need Systems for the Automatized Analysis of Complex Samples
Geidel, S.; Morschhauser, A.; Otto, T.
Conference Paper
2019An improved Green's function algorithm applied to quantum transport in carbon nanotubes
Teichert, F.; Zienert, A.; Schuster, J.; Schreiber, M.
Journal Article
2019Improved organic thin-film transistor performance by dielectric layer patterning
Meyers, T.; Reker, J.; Temme, J.; Vidor, F.F.; Vollbrecht, J.; Kitzerow, H.; Paradies, J.; Hilleringmann, U.
Conference Paper
2019Inductive Locating Method to Locate Miniaturized Wireless Sensors within Inhomogeneous Dielectrics
Lange, S.; Schröder, D.; Hedayat, C.; Otto, T.; Hilleringmann, U.
Conference Paper
2019Induktionserwärmung für das Cu-Sn SLID-Waferbonden zum Packaging in der Mikrosystemtechnik
Hofmann, C.; Froehlich, A.; Kroll, M.; Wiemer, M.
Conference Paper
2019Inkjet Printing of Self‐Supporting and Self‐Contained Structured Objects Onto Liquid Surfaces
Goedel, W.A.; Gläser, K.; Mitra, D.; Thalheim, R.; Ueberfuhr, P.; Hammerschmidt, J.; Baumann, R.R.
Journal Article
2019Inorganic p-channel thin-film transistors using CuO nanoparticles
Reker, J.; Meyers, T.; Vidor, F.F.; Hilleringmann, U.
Conference Paper
2019Integration of plasmonic nanostructures for micro-opto-electromechanical-systems
Heldt, G.; Weiss, A.; Helke, C.; Erben, J.; Kurth, S.; Meinig, M.; Martin, J.; Hiller, K.; Reuter, D.; Otto, T.
Conference Paper
2019Intelligent workpiece carrier with inertial sensors for monitoring and optimizing manufacturing processesIntelligenter Werkstückträger mit Inertialsensorik zum Überwachen und Optimieren von Fertigungsprozessen
Forke, Roman; Forke, Erik; Alalus, Mohaned Khaled; Weidlich, Sebastian; Bülz, Daniel
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2019Investigation of Active Power Cycling Combined With Passive Thermal Cycles on Discrete Power Electronic Devices
Otto, A.; Rzepka, S.; Wunderle, B.
Journal Article
2019Iron(III) β-diketonates: CVD precursors for iron oxide film formation
Pousaneh, E.; Korb, M.; Assim, K.; Rüffer, T.; Dzhagan, V.; Noll, J.; Zahn, D.R.T.; Schulz, S.E.; Lang, H.
Journal Article
2019Joining two worlds - hybrid integration of silicon based electronics and printed functionalities
Roscher, F.; Thalheim, R.; Seifert, T.; Paul, S.-D.; Zichner, R.; Wiemer, M.; Otto, T.
Conference Paper
2019Low Power High Bandwidth Acceleration Sensor for Industrial Applications
Forke, R.; Hiller, K.; Hahn, S.; Weidlich, S.; Konietzka, S.; Motl, T.; Praedicow, A.; Otto, T.
Conference Paper
2019Magnetic tunnel junctions: Laser annealing versus oven annealing
Sharma, A.; Hoffmann, M.A.; Matthes, P.; Koehler, N.; Busse, S.; Mueller, M.; Exner, H.; Schulz, S.E.; Zahn, D.R.T.; Salvan, G.
Journal Article
2019Manufacturing of bio-compatible & degradable devices using inkjet technology for transient electronics
Mitra, K.Y.; Willert, A.; Sossalla, A.; Hoffmann, M.; Zichner, R.
Conference Paper
2019Measurements and Simulations of the Creep Strain in Flip Chip Solder Balls
Schindler-Saefkow, F.; Rost, F.; Rzepka, S.
Conference Paper
2019Measurements on the fly: Introducing mobile micro-sensors for biotechnological applications
Lauterbach, T.; Lüke, T.; Büker, M.-J.; Hedayat, C.; Gernandt, T.; Moll, R.; Grösel, M.; Lenk, S.; Seidel, F.; Brunner, D.; Bley, T.; Walther, T.; Lenk, F.
Journal Article
2019Mechanical deformation on nanoparticle-based thin-film transistors
Vidor, F.F.; Meyers, T.; Reker, J.; Mueller, K.; Wirth, G.I.; Hilleringmann, U.
Conference Paper
2019A MEMS IR optical chopper based on subwavelength structures
Kurth, S.; Meinig, M.; Wecker, J.; Seifert, M.; Hiller, K.; Otto, T.
Conference Paper
2019Micro Bending Test on Double Cantilever Beams: A specimen-centred approach to accurate determination of the visco-plastic properties of Sintered Silver for Power Electronics applications
Zschenderlein, U.; Klingler, M.; Arnold, J.; Baum, M.; Weißbach, M.; Schaal, M.; Wunderle, B.
Conference Paper
2019Micromachined phase-shifted array-type Mirau interferometer for swept-source OCT imaging
Gorecki, C.; Lullin, J.; Perrin, S.; Bargiel, S.; Albero, J.; Gaiffe, O.; Rutkovvski, J.; Cote, J.M.; Krauter, J.; Osten, W.; Wang, W.-S.; Weimer, M.; Froemel, J.
Journal Article
2019Microwave Radiation Detection with an Ultrathin Free-Standing Superconducting Niobium Nanohelix
Loesch, S.; Alfonsov, A.; Dobrovolskiy, O.V.; Keil, R.; Engemaier, V.; Baunack, S.; Li, G.; Schmidt, O.G.; Buerger, D.
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2019Mikro- und Nanotechnologien zur Herstellung steuerbarer optischer Filter
Hiller, K.; Helke, C.; Seifert, M.; Seiler, J.; Kurth, S.; Meinig, M.; Otto, T.
Conference Paper
2019Miniaturized multi sensor implant for monitoring of hemodynamic parameters
Dogan, Özgü; Schierbaum, Nicolas; Weidenmüller, Jens; Baum, Mario; Schröder, Thomas; Wünsch, Dirk; Görtz, Michael; Seidl, Karsten
Conference Paper
2019Multisensor-Implantat zur Überwachung der Hämodynamik
Dogan, Özgü; Schierbaum, Nicolas; Weidenmüller, Jens; Baum, Mario; Görtz, Michael; Seidl, Karsten
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2019Nanoparticles and Organic Semiconductors for Flexible Electronics
Hilleringmann, U.; Reker, J.; Meyers, T.; Vidor, F.F.; Bezuidenhout, P.H.; Joubert, T.-H.
Conference Paper
2019Nanostructured al SWG Reflectors on thin LP-Si3N4 membranes as (TiO2/SiO2)³ Bragg reflector alternative for VIS Fabry-Pérot Interferometers
Helke, C.; Hiller, K.; Seiler, J.; Erben, J.; Werner, T.; Reuter, D.; Meinig, M.; Kurth, S.; Otto, T.
Conference Paper
2019Next Generation of highly miniaturized Bulk-MEMS Fabry-Pérot Filters for infrared Microspectrometers
Ebermann, M.; Neumann, N.; Hoppe, S.; Hiller, K.; Seiler, J.; Helke, C.; Meinig, M.; Kurth, S.
Conference Paper
2019A Nonlinear Broadband Electromagnetic Vibration Energy Harvester Based on Double-Clamped Beam
Lu, Z.; Wen, Q.; He, X.; Wen, Z.
Journal Article
2019A Novel Indirect Quasi-Static Actuation Concept for 2D MEMS Micromirrors
Kaupmann, P.; Pinter, S.; Franz, J.; Streiter, R.; Otto, T.
Journal Article
2019A Novel Method for MEMS Wafer-Level Packaging. Selective and Rapid Induction Heating for Copper-Tin SLID Bonding
Hofmann, C.; Fröhlich, A.; Kimme, J.; Wiemer, M.; Otto, T.
Conference Paper
2019Optical dipole nano-antennas on glass substrates
Haugwitz, T.; Erben, J.-W.; Neuman, N.; Reuter, D.; Plettemeier, D.
Conference Paper
2019Optimization of Platinum dioxide properties by plasma oxidation of sputtered PtOx
Basu, Nivedita; Sterin, N.S.; Saketh, Ram Mamidala; Shenoy, Apoorva; Bhat, Navakanta
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2019Oxygen detection with zinc oxide nanoparticle structures
Schwabe, T.; Balke, A.; Bezuidenhout, P.H.; Reker, J.; Meyers, T.; Joubert, T.-H.; Hilleringmann, U.
Conference Paper
2019P-N Junction-Based Si Biochips with Ring Electrodes for Novel Biosensing Applications
Kiani, M.; Du, N.; Vogel, M.; Raff, J.; Hübner, U.; Skorupa, I.; Bürger, D.; Schulz, S.E.; Schmidt, O.G.; Schmidt, H.
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2019Parameter dependency of DNA origami immobilization at micro- and nano structured CF polymer surfaces on SiO2
Hann, J.; Helke, C.; Lakatos, M.; Heerwig, A.; Nestler, J.; Erben, J.; Reuter, D.; Mertig, M.; Otto, T.
Journal Article, Conference Paper
2019Parylene based technologies for smart coatings and wearables
Selbmann, F.; Roscher, F.
Journal Article
2019Paving the way for the replacement of solder interconnections in power electronics by silver-sinter using pulsed infrared thermography
Wargulski, D.R.; Rabay, B.; Stelzer, A.; Rudzki, J.; Hindel, A.; Bast, M.; Busse, D.; Auerswald, E.; Ras, M.A.
Conference Paper
2019Photosensitive Field‐Effect Transistors Made from Semiconducting Carbon Nanotubes and Non‐Covalently Attached Gold Nanoparticles
Blaudeck, T.; Preuß, A.; Scharf, S.; Notz, S.; Kossmann, A.; Hartmann, S.; Kasper, L.; Mendes, R.G.; Gemming, T.; Hermann, S.; Lang, H.; Schulz, S.E.
Journal Article
2019Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride
Meinel, K.; Stoeckel, C.; Melzer, M.; Zimmermann, S.; Forke, R.; Hiller, K.; Otto, T.
Conference Paper
2019Piezoelektrischer Mikrospiegel mit großem Scanwinkel, basierend auf Dünnschicht-Aluminiumnitrid
Meinel, K.; Stoeckel, C.; Melzer, M.; Zimmermann, S.; Forke, R.; Hiller, K.; Otto, T.
Conference Paper
2019Plattformkonzept zum Aufbau von hochintegrierten Multisensorknoten
Becker, Karl-Friedrich; Böttcher, Mathias; Schiffer, Michael; Pötter, Harald; Brockmann, Carsten; Freimund, Damian; Tschoban, Christian; Windrich, Frank; Braun, Tanja; Hopsch, Fabian; Heinig, Andy; Voigt, Sven; Baum, Mario; Hofmann, Lutz; Lang, Klaus-Dieter
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2019Printed functional applications: Batteries, communication elements, antennas and conductive paths on technical textiles
Meuser, C.; Willert, A.; Zichner, R.
Conference Paper
2019Printing Reinforcing Structures onto Microsieves that are Floating on a Water Surface
Goedel, W.A.; Gläser, K.; Mitra, D.; Hammerschmidt, J.; Thalheim, R.; Ueberfuhr, P.; Baumann, R.R.
Journal Article
2019Radially resolved electronic structure and charge carrier transport in silicon nanowires
Fuchs, F.; Gemming, S.; Schuster, J.
Journal Article
2019Regeneration of Assembled, Molecular-Motor-Based Bionanodevices
Rahman, M.A.; Reuther, C.; Lindberg, F.W.; Mengoni, M.; Salhotra, A.; Heldt, G.; Linke, H.; Diez, S.; Mansson, A.
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2019Role of contacts in carbon nanotube giant piezoresistive sensors
Böttger, S.; Wagner, C.; Lorkowski, F.; Hartmann, M.; Heldt, G.; Reuter, D.; Schuster, J.; Hermann, S.
Conference Paper
2019Sealing of glass with titanium by glass pressing at the softening point
Winkler, Sebastian; Edelmann, Jan; Günther, Daniel; Wieland, Sebastian; Selbmann, Franz; Baum, Mario; Schubert, Andreas
Journal Article
2019Selective Induction Heating of Metallic Microstructures for Wafer-Level MEMS Packaging
Froehlich, A.; Hofmann, C.; Rochala, P.; Kimme, J.; Kroll, M.; Kraeusel, V.
Conference Paper
2019Self-aligned organic thin-film transistors for flexible electronics
Meyers, T.; Reker, J.; Temme, J.; Vidor, F.F.; Hilleringmann, U.
Conference Paper
2019Self-contained diagnostic platform for pathogen and antibiotic resistance detection for diabetic foot ulcers
Nestler, J.; Stiehl, C.; Graunitz, J.; Geidel, S.; Morschhauser, A.; Otto, T.; Schneemann, M.; Jnana, A.; Murali, T.S.; Satyamoorthy, K.; Maheswari, S.U.; Ramakrishnan, S.; Halder, P.; Dendukuri, D.; Bier, F.F.; Peter, H.
Conference Paper
2019Sensitivity control of carbon nanotube-based piezoresistive sensors by drain-induced barrier thinning
Böttger, S.; Wagner, C.; Lorkowski, F.; Hartmann, M.; Schuster, J.; Hermann, S.
Journal Article
2019Sensoric Micro and Nano Systems. Editorial
Zahn, D.R.T.; Schulz, S.E.; Hiller, K.; Wagner, C.; Reuter, D.; Otto, T.
Journal Article
2019Simulation der Eigenerwärmung gedruckter Leiterbahnen für die thermische Auslegung
Bülz, D.; Streit, P.; Forke, R.; Otto, T.
Conference Paper
2019Simulation of Self-Heating of Printed Interconnects for Thermal Design
Bülz, D.; Streit, P.; Forke, R.; Otto, T.
Conference Paper
2019Spectroscopic ellipsometry and magneto-optical Kerr effect spectroscopy study of thermally treated Co60Fe20B20 thin films
Hoffmann, M.A.; Sharma, A.; Matthes, P.; Okano, S.; Hellwig, O.; Ecke, R.; Zahn, D.R.T.; Salvan, G.; Schulz, S.E.
Journal Article
2019Strain and screening: Optical properties of a small-diameter carbon nanotube from first principles
Wagner, C.; Schuster, J.; Schleife, A.
Journal Article
2019Surface effects and photoinduced relaxation processes in nanocomposites based on semiconductor quantum dots CdSe/ZnS and organic dye molecules
Zenkevich, E.I.; Stupak, A.P.; Kowerko, D.; Blaudeck, T.; Borczyskowski, C. von
Conference Paper
2019Synthesis of Mg and Zn diolates and their use in metal oxide deposition
Frenzel, P.; Preuß, A.; Bankwitz, J.; Georgi, C.; Ganss, F.; Mertens, L.; Schulz, S.E.; Hellwig, O.; Mehring, M.; Lang, H.
Journal Article
2019Technological Platform for Vertical Multi-Wafer Integration of Microscanners and Micro-Optical Components
Bargiel, S.; Baranski, M.; Wiemer, M.; Frömel, J.; Wang, W.-S.; Gorecki, C.
Journal Article
2019Technology variation measured with a stress chip for more reliable packages
Schindler-Saefkow, F.; Wich-Glasen, P.; Albrecht, J.; Rzepka, S.
Conference Paper
2019Thin film adhesion measurement by nanoindentation: Review of methodologies and validation by means of finite element simulations
Albrecht, J.; Weissbach, M.; Auersperg, J.; Dudek, R.; Kaulfersch, E.; Rzepka, S.
Conference Paper
2019Toward 3D-Printed Electronics: Inkjet-Printed Vertical Metal Wire Interconnects and Screen-Printed Batteries
Sowade, E.; Polomoshnov, M.; Willert, A.; Baumann, R.R.
Journal Article
2019Transport Properties in Co-doped ZnO/YMnO3 n-p Heterojunctions
Torres, M.L.; Skorupa, I.; Schmidt, H.; Schmidt, O.G.; Gomez, M.E.
Conference Paper, Journal Article
2019VIS Fabry-Pérot Interferometer with structured (TiO2/PE-SiO2)3 Bragg-reflectors on 5mm large LP-Si3N4 membranes
Helke, C.; Hiller, K.; Seiler, J.; Werner, T.; Meinig, M.; Kurth, S.; Otto, T.
Conference Paper
2019Wafer- und Chipintegration mittels reaktiver CuO/Al Multilagensysteme
Vogel, K.; Hertel, S.; Bender, H.; Roscher, F.; Zimmermann, S.; Wiemer, M.
Conference Paper