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Multiwavelength digital holography: Height measurements on linearly moving and rotating objects

: Schiller, Annelie; Beckmann, Tobias; Fratz, Markus; Bertz, Alexander; Carl, Daniel; Buse, Karsten

Volltext urn:nbn:de:0011-n-5100632 (9.4 MByte PDF)
MD5 Fingerprint: 228b2a4cb9c2aaf8894853796f95a6a2
Copyright Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Erstellt am: 19.10.2018

Jaroszewicz, Leszek R. (Hrsg.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Speckle 2018, VII International Conference on Speckle Metrology : 9-12 September 2018, Janów Podlaski, Poland
Bellingham, WA: SPIE, 2018 (Proceedings of SPIE 10834)
ISBN: 978-1-5106-2298-2
ISBN: 978-1-5106-2297-5
Paper 108342E, 7 S.
International Conference on Speckle Metrology (SPECKLE) <7, 2018, Janow Podlaski>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IPM ()
multiwavelength holography; digital holography; surface inspection; 3D hight measurement

Multiwavelength digital holography enables precise and fast 3D height measurements of rough surfaces. To inspect objects during motion would enlarge the range of applications enormously. In this work the limits of this technique with respect to velocity and inclination angles are studied for linearly moving as well as for rotating objects. We demonstrate measurements on surfaces with inclination angles of up to 40° , moving linearly with a velocity of 2 mm/s, providing 2 μm accuracy, and on a rotating cylinder with circumferential speed of 10 mm/s, we achieve 1.1 μm precision. All measurements are conducted with less than 1 mW of continuous-wave laser light, so the object moves several micrometers during exposure time.