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Miniaturized multiwavelength digital holography sensor for extensive in-machine tool measurement

: Seyler, Tobias; Fratz, Markus; Beckmann, Tobias; Bertz, Alexander; Carl, Daniel

Volltext urn:nbn:de:0011-n-4613496 (31 MByte PDF)
MD5 Fingerprint: 0ae99762238c69b22313eab31afa3049
Erstellt am: 9.8.2017

Lehmann, Peter H. (Editor) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical Measurement Systems for Industrial Inspection X : Munich, Germany; 25 June 2017
Bellingham, WA: SPIE, 2017 (Proceedings of SPIE 10329)
ISBN: 978-1-5106-1103-0
Paper 103290F, 12 S.
Conference "Optical Measurement Systems for Industrial Inspection" <10, 2017, Munich>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IPM ()
multi-wavelength holography; inline measurement; quality control

In this paper we present a miniaturized digital holographic sensor (HoloCut) for operation inside a machine tool. With state-of-the-art 3D measurement systems, short-range structures such as tool marks cannot be resolved inside a machine tool chamber. Up to now, measurements had to be conducted outside the machine tool and thus processing data are generated offline. The sensor presented here uses digital multiwavelength holography to get 3D-shape-information of the machined sample. By using three wavelengths, we get a large artificial wavelength with a large unambiguous measurement range of 0.5mm and achieve micron repeatability even in the presence of laser speckles on rough surfaces. In addition, a digital refocusing algorithm based on phase noise is implemented to extend the measurement range beyond the limits of the artificial wavelength and geometrical depth-of-focus. With complex wave field propagation, the focus plane can be shifted after the camera images have been taken and a sharp image with extended depth of focus is constructed consequently. With 20mm x 20mm field of view the sensor enables measurement of both macro- and micro-structure (such as tool marks) with an axial resolution of 1 µm, lateral resolution of 7 µm and consequently allows processing data to be generated online which in turn qualifies it as a machine tool control. To make HoloCut compact enough for operation inside a machining center, the beams are arranged in two planes: The beams are split into reference beam and object beam in the bottom plane and combined onto the camera in the top plane later on. Using a mechanical standard interface according to DIN 69893 and having a very compact size of 235mm x 140mm x 215mm (WxHxD) and a weight of 7.5 kg, HoloCut can be easily integrated into different machine tools and extends no more in height than a typical processing tool.