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Laser-doped silicon solar cells by laser chemical processing (LCP) exceeding 20% efficiency

: Kray, D.; Aleman, M.; Fell, A.; Hopman, S.; Mayer, K.; Mesec, M.; Müller, R.; Willeke, G.P.; Glunz, S.W.; Bitnar, B.; Neuhaus, D.-H.; Lüdemann, R.; Schlenker, T.; Manz, D.; Bentzen, A.; Sauar, E.; Pauchard, A.; Richerzhaben, B.

Postprint urn:nbn:de:0011-n-898255 (109 KByte PDF)
MD5 Fingerprint: 4666b5f43675c9c8426407e81a25cec6
Created on: 5.9.2012

IEEE Electron Devices Society:
33rd IEEE Photovolatic Specialists Conference, PVSC 2008. Proceedings. Vol.4 : San Diego, CA, May 11 - 16, 2008
Piscataway, NJ: IEEE, 2008
ISBN: 978-1-4244-1640-0
ISBN: 978-1-4244-1641-7
ISBN: 1-4244-1640-X
Photovoltaic Specialists Conference (PVSC) <33, 2008, San Diego/Calif.>
Conference Paper, Electronic Publication
Fraunhofer ISE ()

The introduction of selective emitters underneath the front contacts of solar cells can considerably increase the cell efficiency. Thus, cost-effective fabrication methods for this process step would help to reduce the cost per Wp of silicon solar cells. Laser Chemical Processing (LCP) is based on the waterjet-guided laser (LaserMicroJet®) developed and commercialized by Synova S.A., but uses a chemical jet. This technology is able to perform local diffusions at high speed and accuracy without the need of masking or any high-temperature step of the entire wafer.
We present experimental investigations on simple device structures to choose optimal laser parameters for selective emitter formation. These parameters are used to fabricate high-efficiency oxide-passivated LFC solar cells that exceed 20% efficiency.