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Method for the compensation of process-immanent form deviation in hot embossing of glass

Methode zur Kompensation der prozessimmanenten Gestaltabweichung bei der Heißformgebung von Glas
: Schubert, A.; Edelmann, J.

Fulltext urn:nbn:de:0011-n-741554 (61 KByte PDF)
MD5 Fingerprint: 261db5f29fdf1505d4273f4641b944f4
Created on: 30.3.2011

European Society for Precision Engineering and Nanotechnology -EUSPEN-:
European Society for Precision Engineering and Nanotechnology, EUSPEN 2008. Vol.2 : 10th Anniversary International Conference, Kongresshaus Zürich, 18th-22nd May 08
Bedford: Euspen, 2008
ISBN: 978-0-9553082-5-3
European Society for Precision Engineering and Nanotechnology (EUSPEN International Conference) <10, 2008, Zürich>
Conference Paper, Electronic Publication
Fraunhofer IWU ()
glass; glass forming; hot embossing; glass pressing; precision; glass moulding; microforming; replication; Pyrex; borofloat; microfluidic; micro optic; MEMS; Glas; Glasformgebung; Heißprägen; Blankpressen; Präzisionsblankpressen; Mikroumformung; Replikation; Mikrofluidik; Mikrooptik; Mikrosystemtechnik

During the hot pressing of glass (e.g. precision glass molding, hot embossing) form deviations between the tool geometry and the manufactured glass formed part arise. Reasons for it are different thermal expansion behavior of the materials and technological parameters. The form deviation resulting from these measured variables gains more and more significance with a rising scale of miniaturization. For the hot embossing of flat glass substrates with several cavities (e.g. micro lens arrays, microfluidic components) at the Fraunhofer IWU a method was developed, in order to determine the total form deviation with the help of uncomplex shaped dies experimentally. The obtained accuracy is sufficient in order to correct ordinary optical geometries, like spherical cavities, or the pitch of V-grooves and channel structures respectively. For different tool materials and inorganic glasses according to this method correction factors were determined to compensate the process-immanent form deviation. In this way complex iteration steps in the manufacturing of the tool molds can be minimized.